JPS6228581B2 - - Google Patents
Info
- Publication number
- JPS6228581B2 JPS6228581B2 JP4979682A JP4979682A JPS6228581B2 JP S6228581 B2 JPS6228581 B2 JP S6228581B2 JP 4979682 A JP4979682 A JP 4979682A JP 4979682 A JP4979682 A JP 4979682A JP S6228581 B2 JPS6228581 B2 JP S6228581B2
- Authority
- JP
- Japan
- Prior art keywords
- opening
- layer
- semiconductor layer
- semiconductor
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 29
- 239000012535 impurity Substances 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 11
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000005275 alloying Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4979682A JPS5874054A (ja) | 1982-03-27 | 1982-03-27 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4979682A JPS5874054A (ja) | 1982-03-27 | 1982-03-27 | 半導体装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8629072A Division JPS4943574A (fr) | 1972-08-30 | 1972-08-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5874054A JPS5874054A (ja) | 1983-05-04 |
| JPS6228581B2 true JPS6228581B2 (fr) | 1987-06-22 |
Family
ID=12841108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4979682A Granted JPS5874054A (ja) | 1982-03-27 | 1982-03-27 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5874054A (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62183143A (ja) * | 1986-02-06 | 1987-08-11 | Nec Corp | 半導体装置 |
-
1982
- 1982-03-27 JP JP4979682A patent/JPS5874054A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5874054A (ja) | 1983-05-04 |
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