JPS62283871A - 炭化ケイ素焼結体の製造方法 - Google Patents
炭化ケイ素焼結体の製造方法Info
- Publication number
- JPS62283871A JPS62283871A JP61124499A JP12449986A JPS62283871A JP S62283871 A JPS62283871 A JP S62283871A JP 61124499 A JP61124499 A JP 61124499A JP 12449986 A JP12449986 A JP 12449986A JP S62283871 A JPS62283871 A JP S62283871A
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- less
- sintered body
- carbon
- content
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 77
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 61
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 34
- 229910052799 carbon Inorganic materials 0.000 claims description 31
- 239000013078 crystal Substances 0.000 claims description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- 229910052710 silicon Inorganic materials 0.000 claims description 17
- 239000010703 silicon Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 11
- 239000002131 composite material Substances 0.000 claims description 10
- 239000011148 porous material Substances 0.000 claims description 10
- 239000000377 silicon dioxide Substances 0.000 claims description 9
- 239000002245 particle Substances 0.000 claims description 8
- 239000003575 carbonaceous material Substances 0.000 claims description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000010304 firing Methods 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims description 3
- 238000011049 filling Methods 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 2
- 229910052783 alkali metal Inorganic materials 0.000 claims 2
- 150000001340 alkali metals Chemical class 0.000 claims 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims 2
- 150000001342 alkaline earth metals Chemical class 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000005470 impregnation Methods 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 238000003763 carbonization Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 229910021426 porous silicon Inorganic materials 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 238000002791 soaking Methods 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 239000011362 coarse particle Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000002296 pyrolytic carbon Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229920002261 Corn starch Polymers 0.000 description 1
- 239000006230 acetylene black Substances 0.000 description 1
- 229920000615 alginic acid Polymers 0.000 description 1
- 235000010443 alginic acid Nutrition 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000011294 coal tar pitch Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009770 conventional sintering Methods 0.000 description 1
- 239000008120 corn starch Substances 0.000 description 1
- 229940099112 cornstarch Drugs 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920005546 furfural resin Polymers 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 235000012907 honey Nutrition 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229920005610 lignin Polymers 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000004901 spalling Methods 0.000 description 1
- 125000000542 sulfonic acid group Chemical group 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61124499A JPS62283871A (ja) | 1986-05-29 | 1986-05-29 | 炭化ケイ素焼結体の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61124499A JPS62283871A (ja) | 1986-05-29 | 1986-05-29 | 炭化ケイ素焼結体の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62283871A true JPS62283871A (ja) | 1987-12-09 |
JPH0535105B2 JPH0535105B2 (enrdf_load_stackoverflow) | 1993-05-25 |
Family
ID=14887001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61124499A Granted JPS62283871A (ja) | 1986-05-29 | 1986-05-29 | 炭化ケイ素焼結体の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62283871A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1445243A4 (en) * | 2001-10-16 | 2006-05-17 | Bridgestone Corp | METHOD FOR PRODUCING A SILICON CARBIDE SUBSTANCE AND THEREFORE RECEIVED SILICON CARBIDE INDEPENDENT |
US7611764B2 (en) | 2003-06-23 | 2009-11-03 | Ibiden Co., Ltd. | Honeycomb structure |
-
1986
- 1986-05-29 JP JP61124499A patent/JPS62283871A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1445243A4 (en) * | 2001-10-16 | 2006-05-17 | Bridgestone Corp | METHOD FOR PRODUCING A SILICON CARBIDE SUBSTANCE AND THEREFORE RECEIVED SILICON CARBIDE INDEPENDENT |
US7335330B2 (en) | 2001-10-16 | 2008-02-26 | Bridgestone Corporation | Method of producing sintered carbide |
US7611764B2 (en) | 2003-06-23 | 2009-11-03 | Ibiden Co., Ltd. | Honeycomb structure |
Also Published As
Publication number | Publication date |
---|---|
JPH0535105B2 (enrdf_load_stackoverflow) | 1993-05-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |