JPS62282294A - Positioning table - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed Description of the Invention 3. Detailed Description of the Invention Industrial Application Field The present invention is mainly used for precisely determining the position of a semiconductor substrate with respect to a pattern mask in the exposure step of the manufacturing process of semiconductors, etc. The present invention relates to a positioning table.

Conventional Technology Regarding a positioning table regarding orthogonal X and y directions and rotation θ within the X-7 plane, a one-stage table type positioning table is disclosed in Japanese Patent Application No. 60-247415, which aims to have a compact design and improve rigidity and accuracy. is proposed.

An example of the conventional positioning table mentioned above will be described below with reference to the drawings. FIG. 4 is a perspective view of a conventional positioning table. In FIG. 4, 21 is an upper table, 22 is a support means such as a group of balls for restricting the upper table 21 to move within a plane, 23 is three rotatable rollers, 24 is three guide blocks, and 25 is a support means such as a group of balls. 3 wedge blocks, 3 28id pulse motors - 127
U is a spring that presses each roller 23 against the wedge block 26. Here, the wedge angles of the three wedge blocks 25 are all the same α, and the three wedge blocks 25 pressed by the roller 23
Two of the contact surfaces are parallel and 1. The two abutment surfaces of other combinations are perpendicular.

Due to the upper IC configuration, the three wedge blocks 25 move on the guide block 24 by the rotation of the pulse motor 26, allowing arbitrary positioning of the upper table 21 within the X-7 plane.

Problems to be Solved by the Invention However, with the above configuration, the two wedge blocks 26 that sandwich the upper table 21 must be moved and their positions controlled when horizontally moving in the X direction, and in the y direction. Compared to the case where the parallel movement of the wedge block 26 is performed by moving one wedge block 26, the control is complicated and manual operation is impossible.

In view of the above problems, the present invention provides a positioning table in which the upper table 21 can be easily moved in parallel in both the X and seven directions.

Means for Solving the Problems In order to solve the above problems, the positioning table of the present invention includes an upper table, a regulating means for regulating the movement of the upper table within one plane, and a 3rd hand provided on the upper table. 3 rollers, and a vortex contact surface that contacts the rollers.
the wedge block, a spring for pressing the roller against the abutment surface, and three sets of guide drive means for guiding and driving the wedge block at a constant inclination angle with respect to the abutment surface; Another wedge block is placed on one of the blocks, and a guide drive means is provided for guiding and moving this wedge block.

With the above-described configuration, the present invention provides one wedge block for each movement in two perpendicular reference directions when performing parallel movement that does not include rotation during positioning of the upper table. It is possible to perform positioning with simple control and easy manual operation.

EXAMPLE Hereinafter, a positioning table according to an example of the present invention will be described with reference to the drawings.

1 and 2 are a perspective view and a plan view of a positioning table in a first embodiment of the present invention.

1 is a base plate, 2 is a lower table, 3 is an upper table, and 4 is three groups of equal size for regulating the upper table 3 to move linearly and rotationally in the X-y plane with respect to the lower table 2. Paul group (regulatory means). Here, as a reference coordinate system, a plane parallel to the table surface is the X-7 plane, and rotation within the X-7 plane is expressed by θ. The subscripts X, Y, and θ attached to the part numbers in FIGS. 1 and 2 indicate common parts of the three identical units described below. 5x, 5
y.

5θ is a rotatable roller attached to the upper table 3. 6x and 6y are guide blocks fixed to the base plate 1, and 7x and 7y are guide blocks 6x and ay.
This is a slide guide installed in the ax, 8y, 8θ
is a wedge block, and 7θ is a wedge block 8xK
It is a slide guide provided. 9x and 9y are pulse motors fixed to the guide blocks 6x and 6y, and 9θ is a pulse motor fixed to the wedge block 8xK. 10x, 107, and 10θ are thrust bearings, and 11x, 11y, and 11θ are ball screws that are driving means for the wedge blocks ax, 8y, and 8θ. The pulse motor-9x.

9y, 9θ axis and pole screw 11x, 117, 110
are connected by a coupling (not shown). 1
2x, 12y, 12θ are wedge blocks ax, 8y, 8
This is a pole nut provided at θ. 13x, 13y,
13θ is a compression spring installed between the upper table 3 and the base plate 1, and the rollers 5x, 5y, and 5θ are connected to wedge blocks Bx and 8y.

It is pressed to 8θ. 14x, 14y, and 14θ are planes on which the rollers 5x, 5y, and 5θ roll, and are contact surfaces on the wedge block.

The operation of the positioning table configured as described above will be explained.

The rotation of the pulse motor 9x rotates the ball screw 11x, and the wedge lock 8x moves in the axial direction of the ball screw 11x while being guided and regulated by a slide guide 7x provided on the guide block 6x. With a similar mechanical operation, the wedge block 8y moves in the axial direction of the ball screw 11y while being guided and regulated by the slide guide 7y provided on the guide bar 07 6y by the rotation of the pulse motor 9y. The wedge block 8θ is rotated by the pulse motor 9θ to rotate the ball screw 11θ.
rotates and is guided and regulated by a slide guide 7θ provided on the wedge block 8x that moves on the guide block 6x, so that it moves in the axial direction of the ball screw 11θ.

Now, contact surfaces 14x, 14y, 14θ and ball screw 11x
, 11y, and 11θ are all three angles α.

Further, the contact surface 14x and the contact surface 14θ are parallel, and the contact surface 14y and the contact surface X are perpendicular. Contact surfaces 14x and 14
The normal direction of y is the x+7 direction, and the rotation within the X-7 plane is expressed by θ as described above. Kusabipu 07
When the wedge block 8x moves, the wedge block 8y stops, and the wedge block 8θ remains stationary relative to the wedge block 8x, the contact surfaces 14X and 14θ move in the X direction without changing their relative positions. Therefore, the upper table 3 is translated in the X direction via the rollers 5x and 5θ. Similarly, wedge block 8y moves, and other wedge blocks 8x, 8
When θ is stopped, the upper table 3 moves in parallel in the X direction. Also, when the wedge block 8θ moves relative to the wedge block 8x, the contact surface 14x and the contact surface 14
As a result of the relative position of θ changing, upper table 3 becomes x
- Rotate θ in the y plane. Contact surface 14x.

Regarding the movement of the upper table caused by the movement of 14y and 14θ, details can be found in JP-A-59-72727.

As described above, according to this embodiment, the contact surfaces 1 parallel to each other
By moving the wedge block 8θ that contributes to the rotation of the upper table 3 on the slide guide 7θ provided on the wedge block 8x, the holder and the block 8θ can be changed to the wedge block 8x. By moving only the wedge block 8x while the wedge block 8x remains relatively stationary, it is now possible to move the upper table 3 in the A positioning table that is simple and can be easily manually moved by X7 can be obtained.

In this embodiment, the slide guides 7x and 7y.

Wedge block ax, 8y with 7θ, ball screw 11x+11y, 11θ, pulse motor-9x, 9y, 9θ, etc.
, constitutes a guide drive means for guiding and driving the 8θ.
It is not limited to this.

Next, a second embodiment of the present invention will be described with reference to the drawings. FIG. 3 is a partial plan view showing a second embodiment of the invention. 16 is an upper table, 16x, 16θ are rollers, 17 is a guide block, 18X, 18θ are wedge blocks, 19x.

19θ is a ball screw, 20! , 20θ is roller 16x
, 16θ is the plane on which the wedge block 18 rolls,
This is a contact surface on 18θ. The wedge block 18θ moves on a slide guide provided on the wedge block 18x. Here, the angle formed by the abutting surface 20x and the ball screw 19x is α, and the angle formed by the abutting surface 2oθ and the ball screw 19θ is β, so that the structure is such that α is larger than β.

With the above configuration, the rotatable range of the upper table 15 can be expanded compared to the configuration in which a=β in the first embodiment.

Generally, in alignment in semiconductor manufacturing, coarse alignment resolution is acceptable in the θ direction, but a large movable range is required. According to this embodiment, the adjustment range in the θ direction can be increased while maintaining fine motion resolution in the x and X directions.

Effects of the Invention As described above, the present invention provides a one-stage positioning table using wedge blocks, in which one of the wedge blocks is provided with a guide drive means for guiding and moving the wedge block, and the other wedge block is moved. By using a double wedge block mechanism that is placed and moved,
Parallel movement in two directions is possible by moving one wedge block in either direction, making it possible to obtain a positioning table that is easy to control and allows for easy X -7 parallel movement even when manually operated. .

Note that if the angle formed between the contact surfaces of the two wedge blocks and the drive direction, which are in a mutually dependent relationship, is made larger on the dependent side than on the dependent side, then the angle between the wedge blocks parallel to the X and y directions The movement is minute and the range of rotational movement in the θ direction can be increased.

[Brief explanation of the drawing]

1 is a perspective view of a positioning table in a first embodiment of the present invention, FIG. 2 is a plan view of FIG. 1, FIG. 3 is a partial plan view of a second embodiment of the present invention, and FIG. 4 is a perspective view of a conventional positioning table. 3...Top table, 4...Ball group (
regulating means), 5X, 57, 6θ...roller,
7x, 7y, 7θ...Slide guide, ax,
8y, 8θ...Wedge block, 9X, 97,
9θ...Pulse motor-111x, 11y
, 11θ...Ball screw, 13x, 13y,
13θ...Compression spring (spring). Name of agent: Patent attorney Toshio Nakao and 1 other person3-
-, Hitefu "Ru7su・7蓼・7θ--su, Kui V Sui p ZuzutJIy
, Ifθ-Ichikoku゛-Runeli! h, L3v-(3m-'J
E*'f Baki (Hennef Figure 2)

Claims (2)

[Claims] (1) An upper table, a regulating means for regulating the movement of the upper table within one plane, and a
3 rollers, and a contact surface that contacts the rollers.
Composed of three wedge blocks, a spring that presses the roller against the abutment surface, and three sets of guide drive means for guiding and moving the wedge block at a constant inclination angle with respect to the abutment surface. and one of the wedge blocks
1. A positioning table characterized in that a wedge block is placed on each wedge block and a guide drive means is provided for guiding and moving this wedge block. (2) The positioning table according to claim 1, wherein the angles formed between the abutment surfaces of each wedge block and the moving direction in the wedge block having a double structure are different.