JPH1128630A - X-y table - Google Patents

Abstract

PROBLEM TO BE SOLVED: To absorb the oscillation of a table caused by the whirling of the feed screw of the table by separating a nut engaged with the feed screw from the table, and providing the nut in such a way that it freely slides on a guide rail regulating the moving direction of the table. SOLUTION: When an X-direction feed screw 3 attached to a table 1 is rotated by a motor 4, whirling in Y-direction perpendicular to feed direction is caused as the result of rotation of the feed screw 3. However, since a nut 5 with a Y-direction slider slides over a Y-direction guide rail 7 to absorb the whirling, the table 1 does not oscillate in the Y-direction. When a Y-direction feed screw 9 is rotated by a motor 8, whirling in the X-direction perpendicular to the Y-direction is caused by the whirling of the feed screw 9. However, an X-direction-slider-equipped nut 10 which is engaged with the Y-direction feed screw 9 slides on an X-direction guide rail 2 fixed on the table, so that oscillation in the X-direction is not transmitted to the table 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a table for positioning or moving a workpiece, a tool or an object to be measured in two directions XY in a machine tool, an inspection apparatus or an industrial machine. The present invention relates to a table capable of positioning in two directions and excluding swinging of the table due to whirling of a feed screw, and realizing high-precision positioning or motion accuracy.

[0002]

2. Description of the Related Art A conventional XY table which can be moved in two directions which are substantially perpendicular to each other can be made thinner by using a cross slide as shown in FIG. 4 disclosed in Japanese Patent Application Laid-Open No. 2-116442. However, the nut associated with the feed screw is fixed to an intermediate table or table connected to the cross slide.

[0003]

In the conventional XY table, the nut of the feed screw is fixed to the table.
If the feed screw has whirling, the table will swing slightly with the rotation of the feed screw, and the positioning accuracy will be degraded. There was a problem. For this reason, in order to absorb the minute swing of the table due to the whirling of the feed screw, as a conventional technique, the support of the nut is elastically supported, or the nut is moved in two directions perpendicular to the feed direction as shown in FIG. Measures such as liberalization were taken. In this case, the nut support structure becomes complicated and expensive, and the size of the nut support portion increases,
For example, the conventional XY table has a problem in that the height from the base to the uppermost table is increased, the rigidity is reduced, and the positioning error is increased due to Abbe's principle.

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is intended to absorb the swing of the table due to the whirling of the feed screw and to make the table thinner. X using a cross slider
In the Y table, a nut associated with a feed screw of the table is separated from the table so that it can slide on a guide rail that regulates the moving direction of the table. That is, for example, a guide rail for guiding the table in the X direction is fixed to the lower surface of the table, a feed screw and a motor for driving the feed screw are mounted on the table, and a nut associated with the X direction feed screw is guided to the base for guiding in the Y axis direction. The system is slidable in the Y direction on the fixed Y-direction guide rail. Then, a nut associated with a Y-direction feed screw rotationally driven by a motor mounted on the base is combined with an X-direction guide rail fixed to the lower surface of the table so as to be slidable in the X direction.

[0005]

[Operation] Now, to move the table in the X-axis direction,
When the X-direction feed screw mounted on the table is rotated, the rotation of the feed screw causes a runout in the Y direction perpendicular to the feed direction, but the nut moves on the Y-direction guide rail to absorb the runout. , The table does not swing. In addition, when the feed screw in the Y direction is rotated to feed the table in the Y direction,
Deflection in the X direction perpendicular to the Y direction occurs, but the nut associated with the Y direction feed screw slides on the X direction guide rail fixed to the table to prevent the X direction swing from being transmitted to the table. Accurate positioning or a high quality finished surface can be obtained.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the illustrated embodiments. FIG. 1 shows a first embodiment of the present invention. Guide rails 2 and 2 'for guiding a table 1 in the X direction are fixed to the lower surface of the table, and an X direction feed screw 3 and a motor 4 for driving the same are mounted on the table 1. A nut 5 with a Y-direction slider, which is connected to the X-direction feed screw 3, is slidably connected to the Y-direction guide rails 7 and 7 ', which are fixed to the base 6, and guided in the Y-axis direction. Then, a nut 10 with an X-direction slider associated with a Y-direction feed screw 9 driven to rotate by a motor 8 mounted on a base 6 is fixed to the lower surface of the table 1.
It is slidably connected to the direction guide rail 2 in the X direction. X
Direction guide rails 2, 2 'and Y direction guide rail 7,
7 'is linked by four cross sliders.

Next, the operation of this embodiment will be described. Now, when the X-direction feed screw 3 mounted on the table 1 is rotated by the motor 4 in order to move the table 1 in the X-axis direction, the Y-axis perpendicular to the feed direction accompanying the rotation of the feed screw 3 is obtained.
The nut 5 with the Y-direction slider
The table 1 slides on the Y-direction guide rail 7 to absorb the run-out, so that the table 1 does not swing in the Y-direction. Since the nut 5 is restricted in the X direction, the table moves. When the Y-direction feed screw 9 is rotated by the motor 8 in order to feed the table 1 in the Y direction, the wobble of the feed screw 9 causes a deflection in the X direction perpendicular to the Y direction. The nut 10 with the X-direction slider associated with the X-direction guide rail 9 is fixed to the table.
Since the swing in the X direction is not transmitted to the table 1 by sliding on the upper side and the table 1 is restrained in the Y direction, accurate positioning of the table 1 or straight motion accuracy can be obtained.

FIG. 2 shows a nut support structure according to a second embodiment. In the above-described first embodiment, of the two directions perpendicular to the feed direction, the swing in the XY plane can be absorbed, but the height direction, that is, the Z direction is not a problem. If positioning accuracy is required only in the XY plane, this may be used. However, when precise positioning is required in a three-dimensional space, displacement of the table in a direction perpendicular to the XY plane, that is, an error in the Z direction is not allowed. X direction feed screw 3
An X nut 15 is connected to a nut holder 16 slidably on a Y-direction guide rail via leaf springs 12 and 13. The same applies to the support of the Y nut to be fed in the Y direction. In this case, the leaf springs 12 and 13 are rigid in the X and Y directions, but easily bend in the Z direction.
The swing in the Y direction due to the whirling of the X direction feed screw 3 is absorbed by the nut holder 16 moving on the guide rail in the Y direction, and the swing in the Z direction is absorbed by the leaf spring being bent.
There is no swing of the table 1 in the direction.

FIG. 3 shows a nut support structure according to a third embodiment. In the above-described second embodiment, the X is connected to the X-direction feed screw 3 to absorb the Z-direction swing.
The nut 25 is connected via a Z-direction guide 21 to a nut holder 26 slidably mounted on the Y-axis guide rail 7. The same applies to the support of the Y nut to be fed in the Y direction. In this case, the Z-direction guide 25 is rigid in the X and Y directions, but easily moves in the Z direction, and absorbs whirling in two directions perpendicular to the feed direction. Never do.

[0010]

According to the present invention, by using the cross slider, the guide rails in the X-axis direction and the Y-axis direction can be placed in the space between the base and the table. The nut which engages with the feed screw to be fed to the feed rail is slidably engaged on a guide rail in a direction substantially perpendicular to the feed direction, so that the swing caused by whirling of the feed screw can be absorbed. It is possible to realize a high-precision XY table that is thin and does not swing.

[Brief description of the drawings]

FIG. 1 is a perspective view of a first embodiment of the present invention.

FIG. 2 is a perspective view of a nut support according to a second embodiment of the present invention.

FIG. 3 is a perspective view of a nut support according to a second embodiment of the present invention.

FIG. 4 is a perspective view of a main part of a conventional XY table.

FIG. 5 is a diagram showing a conventional nut support structure.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Table 2, 7 Guide rail 3 X direction feed screw 4, 8 Motor 5, 10 Nut with slider 6 Base 9 Y direction feed screw 11 Cross slider 12, 13 Leaf spring 15, 25 Nut 16, 26 Nut holder 21 Z direction guide

Claims (1)

[Claims] 1. A table movable in two directions substantially perpendicular to XY using a cross slider, wherein the table is X
A nut connected to a feed screw to be moved in the axial direction is slidable on a guide rail that guides the table in the Y-axis direction.
An XY table, wherein a nut associated with a feed screw for feeding the table in the Y-axis direction can slide on a guide rail for guiding the table in the X-axis direction.