JPS6227779U - - Google Patents

Info

Publication number
JPS6227779U
JPS6227779U JP11901485U JP11901485U JPS6227779U JP S6227779 U JPS6227779 U JP S6227779U JP 11901485 U JP11901485 U JP 11901485U JP 11901485 U JP11901485 U JP 11901485U JP S6227779 U JPS6227779 U JP S6227779U
Authority
JP
Japan
Prior art keywords
stage
wafer
holds
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11901485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11901485U priority Critical patent/JPS6227779U/ja
Publication of JPS6227779U publication Critical patent/JPS6227779U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP11901485U 1985-08-02 1985-08-02 Pending JPS6227779U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11901485U JPS6227779U (US07534539-20090519-C00280.png) 1985-08-02 1985-08-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11901485U JPS6227779U (US07534539-20090519-C00280.png) 1985-08-02 1985-08-02

Publications (1)

Publication Number Publication Date
JPS6227779U true JPS6227779U (US07534539-20090519-C00280.png) 1987-02-19

Family

ID=31005998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11901485U Pending JPS6227779U (US07534539-20090519-C00280.png) 1985-08-02 1985-08-02

Country Status (1)

Country Link
JP (1) JPS6227779U (US07534539-20090519-C00280.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS549919A (en) * 1977-06-24 1979-01-25 Hitachi Ltd Photoresist coating device
JPS59121839A (ja) * 1982-12-20 1984-07-14 Fujitsu Ltd スピン塗布装置
JPS60119014A (ja) * 1983-11-14 1985-06-26 アンプ インコーポレーテッド ハーネス製造方法および装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS549919A (en) * 1977-06-24 1979-01-25 Hitachi Ltd Photoresist coating device
JPS59121839A (ja) * 1982-12-20 1984-07-14 Fujitsu Ltd スピン塗布装置
JPS60119014A (ja) * 1983-11-14 1985-06-26 アンプ インコーポレーテッド ハーネス製造方法および装置

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