JPS62268784A - 真空吸着走行装置 - Google Patents
真空吸着走行装置Info
- Publication number
- JPS62268784A JPS62268784A JP61112392A JP11239286A JPS62268784A JP S62268784 A JPS62268784 A JP S62268784A JP 61112392 A JP61112392 A JP 61112392A JP 11239286 A JP11239286 A JP 11239286A JP S62268784 A JPS62268784 A JP S62268784A
- Authority
- JP
- Japan
- Prior art keywords
- seal body
- running surface
- vacuum container
- annular seal
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Manipulator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61112392A JPS62268784A (ja) | 1986-05-16 | 1986-05-16 | 真空吸着走行装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61112392A JPS62268784A (ja) | 1986-05-16 | 1986-05-16 | 真空吸着走行装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62268784A true JPS62268784A (ja) | 1987-11-21 |
| JPH0428598B2 JPH0428598B2 (OSRAM) | 1992-05-14 |
Family
ID=14585520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61112392A Granted JPS62268784A (ja) | 1986-05-16 | 1986-05-16 | 真空吸着走行装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62268784A (OSRAM) |
-
1986
- 1986-05-16 JP JP61112392A patent/JPS62268784A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0428598B2 (OSRAM) | 1992-05-14 |
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