JPH0428598B2 - - Google Patents

Info

Publication number
JPH0428598B2
JPH0428598B2 JP61112392A JP11239286A JPH0428598B2 JP H0428598 B2 JPH0428598 B2 JP H0428598B2 JP 61112392 A JP61112392 A JP 61112392A JP 11239286 A JP11239286 A JP 11239286A JP H0428598 B2 JPH0428598 B2 JP H0428598B2
Authority
JP
Japan
Prior art keywords
seal body
running surface
vacuum container
annular seal
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61112392A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62268784A (ja
Inventor
Kiichiro Tsuda
Katsuhiko Makishima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP61112392A priority Critical patent/JPS62268784A/ja
Publication of JPS62268784A publication Critical patent/JPS62268784A/ja
Publication of JPH0428598B2 publication Critical patent/JPH0428598B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Manipulator (AREA)
JP61112392A 1986-05-16 1986-05-16 真空吸着走行装置 Granted JPS62268784A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61112392A JPS62268784A (ja) 1986-05-16 1986-05-16 真空吸着走行装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61112392A JPS62268784A (ja) 1986-05-16 1986-05-16 真空吸着走行装置

Publications (2)

Publication Number Publication Date
JPS62268784A JPS62268784A (ja) 1987-11-21
JPH0428598B2 true JPH0428598B2 (OSRAM) 1992-05-14

Family

ID=14585520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61112392A Granted JPS62268784A (ja) 1986-05-16 1986-05-16 真空吸着走行装置

Country Status (1)

Country Link
JP (1) JPS62268784A (OSRAM)

Also Published As

Publication number Publication date
JPS62268784A (ja) 1987-11-21

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