JPS62268140A - 半導体ウエハ−の搬送機構における搬送部材の支持装置 - Google Patents
半導体ウエハ−の搬送機構における搬送部材の支持装置Info
- Publication number
- JPS62268140A JPS62268140A JP11187386A JP11187386A JPS62268140A JP S62268140 A JPS62268140 A JP S62268140A JP 11187386 A JP11187386 A JP 11187386A JP 11187386 A JP11187386 A JP 11187386A JP S62268140 A JPS62268140 A JP S62268140A
- Authority
- JP
- Japan
- Prior art keywords
- block
- support
- transport
- conveyance path
- conveyance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 15
- 230000007246 mechanism Effects 0.000 title claims description 4
- 239000012530 fluid Substances 0.000 claims description 16
- 239000007788 liquid Substances 0.000 claims description 6
- 230000007723 transport mechanism Effects 0.000 claims description 3
- 239000006163 transport media Substances 0.000 claims description 3
- 239000002609 medium Substances 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 11
- 238000000034 method Methods 0.000 description 4
- 238000003825 pressing Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005339 levitation Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000012840 feeding operation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11187386A JPS62268140A (ja) | 1986-05-16 | 1986-05-16 | 半導体ウエハ−の搬送機構における搬送部材の支持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11187386A JPS62268140A (ja) | 1986-05-16 | 1986-05-16 | 半導体ウエハ−の搬送機構における搬送部材の支持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62268140A true JPS62268140A (ja) | 1987-11-20 |
| JPH0150102B2 JPH0150102B2 (enrdf_load_stackoverflow) | 1989-10-27 |
Family
ID=14572297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11187386A Granted JPS62268140A (ja) | 1986-05-16 | 1986-05-16 | 半導体ウエハ−の搬送機構における搬送部材の支持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62268140A (enrdf_load_stackoverflow) |
-
1986
- 1986-05-16 JP JP11187386A patent/JPS62268140A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0150102B2 (enrdf_load_stackoverflow) | 1989-10-27 |
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