JPS62266439A - 分光偏光測定装置 - Google Patents

分光偏光測定装置

Info

Publication number
JPS62266439A
JPS62266439A JP5043087A JP5043087A JPS62266439A JP S62266439 A JPS62266439 A JP S62266439A JP 5043087 A JP5043087 A JP 5043087A JP 5043087 A JP5043087 A JP 5043087A JP S62266439 A JPS62266439 A JP S62266439A
Authority
JP
Japan
Prior art keywords
spectroscopic ellipsometer
optical fiber
light source
photodetector
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5043087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580981B2 (enExample
Inventor
フランク　ベルヌー
ジャン−ルイ　ステール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SOPURA
Original Assignee
SOPURA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9332836&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS62266439(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by SOPURA filed Critical SOPURA
Publication of JPS62266439A publication Critical patent/JPS62266439A/ja
Publication of JPH0580981B2 publication Critical patent/JPH0580981B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
JP5043087A 1986-03-06 1987-03-06 分光偏光測定装置 Granted JPS62266439A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8603188A FR2595471B1 (fr) 1986-03-06 1986-03-06 Dispositif d'ellipsometrie spectroscopique a fibres optiques
FR8603188 1986-03-06

Publications (2)

Publication Number Publication Date
JPS62266439A true JPS62266439A (ja) 1987-11-19
JPH0580981B2 JPH0580981B2 (enExample) 1993-11-11

Family

ID=9332836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5043087A Granted JPS62266439A (ja) 1986-03-06 1987-03-06 分光偏光測定装置

Country Status (4)

Country Link
EP (1) EP0237415B1 (enExample)
JP (1) JPS62266439A (enExample)
DE (1) DE3766727D1 (enExample)
FR (1) FR2595471B1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003536064A (ja) * 2000-06-09 2003-12-02 フランス テレコム 低雑音分光エリプソメータ
JP2004504590A (ja) * 2000-07-17 2004-02-12 ソシエテ・ドゥ・プロデュクシオン・エ・ドゥ・ルシェルシェ・アプリケ コンパクトな分光エリプソメータ

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0324311A3 (en) * 1988-01-07 1989-08-09 Metroptica, S.L. Instrument for the measurement of optical scattering matrices
DE4211741B4 (de) * 1991-04-05 2006-09-21 Hahn-Meitner-Institut Berlin Gmbh Spektroskopische Untersuchungsmethode für einen Stoff im Energiebereich geringer Absorption
DE4226884C1 (de) * 1992-08-13 1994-03-10 Meinrad Maechler Spektroskopisches System zur Durchführung der Mikroanalytik
US5680209A (en) * 1992-08-13 1997-10-21 Maechler; Meinrad Spectroscopic systems for the analysis of small and very small quantities of substances
GB2276938B (en) * 1993-04-05 1996-04-17 Univ Wales Optical apparatus
DE4343490A1 (de) * 1993-12-20 1995-06-22 Max Planck Gesellschaft Schnelles spektroskopisches Ellipsometer
FR2737779B1 (fr) * 1995-08-11 1997-09-12 Soc D Production Et De Rech Ap Dispositif ellipsometre a haute resolution spatiale
WO2002079760A2 (en) * 2001-03-30 2002-10-10 Therma-Wave, Inc. Polarimetric scatterometer for critical dimension measurements of periodic structures
JP4295712B2 (ja) 2003-11-14 2009-07-15 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置及び装置製造方法
EA038184B1 (ru) * 2019-01-14 2021-07-20 Общество С Ограниченной Ответственностью "Эссентоптикс" Спектрофотометр

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003536064A (ja) * 2000-06-09 2003-12-02 フランス テレコム 低雑音分光エリプソメータ
USRE44007E1 (en) 2000-06-09 2013-02-19 Fahrenheit Thermoscope Llc Low-noise spectroscopic ellipsometer
JP2004504590A (ja) * 2000-07-17 2004-02-12 ソシエテ・ドゥ・プロデュクシオン・エ・ドゥ・ルシェルシェ・アプリケ コンパクトな分光エリプソメータ

Also Published As

Publication number Publication date
FR2595471B1 (fr) 1988-06-10
JPH0580981B2 (enExample) 1993-11-11
DE3766727D1 (de) 1991-01-31
EP0237415B1 (fr) 1990-12-19
EP0237415A1 (fr) 1987-09-16
FR2595471A1 (fr) 1987-09-11

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