JPS62265519A - Three-dimensional measuring machine - Google Patents

Abstract

PURPOSE:To attain size and weight reduction and to take a measurement with high accuracy by reducing the size of columns and employing a mount moving type, and putting its driving means between a mount table and a pedestal. CONSTITUTION:The pedestal 3 is mounted on a base 1 and a couple of columns 25 are stood on the pedestal 3 in the X-axial direction. A lateral beam member 30 which extends in the X-axial direction is mounted on the columns 25; an X slider 35 which is movable along the lateral beam member 30 is provided with a Z guide box 40 integrally; and this Z guide box 40 supports a spindle 41 having a detecting element (video camera) 42 atop slidably in the Z-axial direction. The mount table 20, on the other hand, is supported on the pedestal 3 movably in the Y-axial direction and an X-axial position control means, a Z-axial position control means, a Y-axial displacement detecting means, and a driving means which moves the mount table in the Y-axial direction are accommodated in a recessed part 5 formed in the pedestal 3 in the Y-axial direction.

Description

[Detailed Description of the Invention] [Industrial Field of Application] The present invention is capable of changing the shape and size of an object to be measured on a stage and a detector displaceably supported by a column while moving them relative to each other in a three-dimensional direction. Concerning the improvement of a three-dimensional measuring machine for measuring the ′′ method, etc.

[Background technology and its problems]

The object to be measured placed on the stage and the touch supported movably in the X-axis and the A so-called three-dimensional measuring machine is known that measures the shape and dimensions of an object while relatively moving it in a three-dimensional direction, and is used in many industrial fields because it is capable of high-precision measurement.

The general structure of such a three-dimensional measuring machine includes a mechanical part formed of a moving mechanism for supporting a detector and moving it in three-dimensional directions (X, Y, and X-axis directions), and a stage. , and an electronic section including a data processing device that processes signals from the detector in a predetermined manner to obtain shapes and the like.

Here, the above-mentioned mechanical part of a conventional three-dimensional measuring machine will be explained with reference to the drawings. First, a fixed column type as shown in FIG. 7 is known, and this fixed column type is mounted on a base 3-H. A table 20 and a support 25.25 are provided, and a support 25.2 is provided.
5 X slider 37.3 that can be moved in the Y-axis direction
7. An X slider 35 which is movable in the X-axis direction on the horizontal row member 30 mounted on this X slider 37.37.
The inside of the Z2E inner box 40 supported by this X slider 35 is moved in the X-axis direction (from a multi-moveable spindle 41 (forming a moving mechanism, and a detector 42 is attached to the tip side of the spindle 41 to move the mechanical part. It consisted of

On the other hand, in the movable column type as shown in FIG.
Y guide rails 38.38 are fixed to both ends of the Y'
The cross beam member 30 is suspended over an X slider 37.37 which is movable in the Y-axis direction on a guide rail 38.38, and a column 25.25 whose base end is fixed to the X slider 37.37. X slider 35 that can move in the X-axis direction
A moving mechanism was formed by a spindle 41 that was supported by the X slider 35 and movable in the X-axis direction within the Z guide water box 40, and a detector 42 was attached to the spindle 41 to constitute a mechanical section.

Therefore, in both types, the detector 42 is moved to the stage 2 manually or by a drive device (not shown) while holding the spindle 41.
It was possible to move in a three-dimensional direction with respect to the object to be measured placed on the surface of the object, and determine all the dimensions etc. while interacting with the object.

However, the above-mentioned conventional three-dimensional measuring machine had the following problems.

■In order to guarantee the height of 111 degrees around 1μm, the pillar 2
5. Deformation of the 25th component (because baldness is not allowed,
Their mechanical rigidity and mechanical strength must be robust. However, in both the older and older models, the X slider 35, etc. was provided on the support 25.25, and each support 25.25 was supported below the stage 20. . Therefore, the problem was that the struts 25.25 had to be made more robust in order to withstand large vertical loads. This means that the movable column (Fig. 8)
In the case of Y guide rail 38.3B, these are R anastomosis 20
Because supporting members and other components had to be strengthened to support the construction, the overall size had to be increased, leading to a scandal.

■In addition, in the case of the fixed column type, since the columns 25 and 25 are erected on both sides of the base 3, not only the effective measurement range is narrowed, but also measurements (not shown) on the stage 20 are made. Target 1'9
), which has hindered the flow of people, and further automation is required.
There was also the problem of On the other hand, does the supportable FJII type solve these drawbacks to some extent? i'i can, but especially the Y that is attached to the YZZ rail 38.38! The protection of the scale (not shown) as a displacement detection means had to be strengthened, making the structure even more cluttered. In addition, there have been other problems such as the difficulty in guaranteeing the stacking capacity unless dust-proof measures are taken.

■Furthermore, since both types have a structure in which the detector 43 side is moved three-dimensionally relative to the stage 20, vibrations of the support columns 25, 25, etc. It is necessary to add a mechanism to prevent this.
It was disadvantageous to make it an automatic moving type.

[Purpose of the invention]

The present invention was made in view of the above-mentioned conventional problems, and an object of the present invention is to provide a three-dimensional measuring machine that guarantees high-precision measurement while maintaining stability by simplifying the structure and taking dust-proof measures. shall be.

[Means and effects for solving the problems] The present invention has the following features:
The above-mentioned conventional problems are due to the fact that the detector is movable, that the support is installed from above or below the stage, and that the Y slider etc. are exposed and installed in a U-shaped manner. This problem was solved by shortening the column dimensions, making the stage movable, and configuring its drive means to be housed between the stage and the base. .

For this reason, in a three-dimensional measuring machine that measures the shape and dimensions while relatively moving the object to be measured on the stage and the detector displaceably supported on the support in three dimensions, the base is placed in the X-axis direction. A recess having a predetermined width, a predetermined depth in the X-axis direction, and extending in the Y-axis direction is provided in the base, and a Y guide rail for center distribution is provided in the recess in the base, and the document table is guided by the Y guide rail. X-axis position regulation for regulating the position of the document table in the X-axis direction with respect to the base, by supporting the support on the base so as to be movable along a rail and fixing the support pillars upright on both ends of the base; means, an X-axis position regulating means for regulating the position in the X-axis direction, a driving means around the Y-axis for automatically feeding the document table in the Y-axis direction, and an amount of displacement of the document table in the Y-axis direction. The above object is achieved by arranging a Y-axis displacement detecting means for detecting the Y-axis displacement in a recess of the object table.

Since the present invention is configured in this way, the driving means etc. can be housed in the recessed part of the base, so that the relative relationship between the mounting position of the stage, its guide rail etc. and the support can be improved. The length of the support can be shortened, and the effective measurement range and measurement can be expanded and improved by 1 degree.

Further, since the stage is formed to be movable, the support and the base can be firmly attached to each other, and the width can be reduced to 1JL, which is advantageous for assembly and adjustment. Furthermore, since the driving means and the like are housed in the recessed portion of the base, the entire device can be made smaller and lighter. In addition to producing the above-mentioned effects, the present invention operates so that the shape, dimensions, etc. of the object to be measured mounted on the stage can be measured with high precision and smoothly.

〔Example〕

An embodiment of the coordinate measuring machine according to the present invention will be described with reference to the drawings.

The three-dimensional a+++ machine of this embodiment is shown in FIGS. 1 to 6, and is constructed as a whole as shown in FIGS. 1 to 3.

That is, the base 3 is installed on the base 1. A pair of support columns 25.degree. 25 are erected on the base 3 in the X-axis direction with their base ends 27 fixed. A cross beam member 30 extending in the X-axis direction is spanned over the support columns 25.25, and a Z guide box 40 is integrally provided on the X slider 35 which is movable along the cross beam member 30. . A spindle 4 having a detector 42 serving as a video camera at its tip
1 is slidably supported in the ZXX water box 40 in the X-axis direction. Here, the moving mechanism of the detector 42 is
It is formed to be able to move in the X-axis direction and in the X-axis direction. On the other hand, the stage 20 is supported by the base 3 so as to be movable in the Y-axis direction.

Therefore, the object to be measured (not shown) cut out on the stage 20 and the detector 42 can be moved in the three-dimensional direction.

In addition, the base 3 has a recess 5 with a U-shaped cross section distributed at the center.
are provided along the Y-axis direction, and bellows mounting plates 94 (94) are provided on both ends thereof for closing the four parts 5 and fixing one end side of the bellows 92 of the dust-proofing device 90, which will be described later. 5 includes an X-axis position r11 regulating means 50, an X-axis position regulating means 60, a Y-axis displacement detecting means 70, and a driving means 80, which will be described later.
etc. are accommodated. Note that electronic parts such as a data processing device are not shown.

Now, the bottom of the concave portion 5 of the base 3 is an intermediate floor portion 4 which is a magnetic material portion, and rising portions 7.7 are formed on both sides. Note that reference numeral 17.17 is an adjustment bolt for correcting the attitude of the base 3 with respect to the heath 1. On the intermediate floor 4 of the base 3, there is a Y guide rail 38.3 for center distribution.
8 are provided along the Y-axis direction and fixed with bolts.

The cross section of the Y guide rail 3 is a rectangular parallelepiped, and each surface is finished smooth. Therefore, the stage 20 is formed to be positioned based on the top and side surfaces of the Y guide rails 38,38. Then, the base end 27.27 of the support column 25.25 is fixed to the upright part 7 of the base 3 with a fixing bolt 26.2G.
, 7 are fixed to the upper 0th surface of each of them. As a result, the height of the support column 25.25 can be reduced because its base end 27.27 is located higher than the Y guide rail 38.38 that guides the stage 20.

The Z-axis position regulating means 60 is attached to a pair of air bearings 61 and 61 provided on the lower end surface 22 of the stage 20, and the stage 20 that has a suction effect with the Φ opening part 4 of the base 3. It is configured to include a magnet 62. Compressed air is supplied to the air 7 ring 61.61 from an air source (not shown), and the air is blown out onto the upper end surface of the Y guide rail 38.38! l! A few μm to several + μm of table anastomosis
The m1 table 20 is levitated by 100 mm to restrict its position in the Z-axis direction, and allows the m1 table 20 to move in the Y-axis direction. here,
When the stage 20 is small and lightweight, or in consideration of the weight of the object to be measured (not shown) to be placed, a magnet 62 is provided as a means for pulling the stage 20 downward in FIG. There is. The magnet 62 is adjusted in the height direction with an adjustment bolt 64 and is fixed to the stage 20 with a mounting bolt 65. Note that the magnetic body 63 is provided to improve magnetic efficiency, and is further fixed to the f2 table 20 via a non-magnetic body 66. Therefore, the stage 20 is formed so that its position in the Z-axis direction is regulated by the balance between the downward attractive force caused by the magnetic force and the air pressure of the air bearing 61 that resists this force.

On the other hand, the X-axis direction position regulating means 50
Air bearings corresponding to each side of 8.38 51.51
Each F7 ring 51.51 is configured such that its clearance can be adjusted using adjustment bolts 53.53 while ensuring freedom of posture through balls 52.52.

The Y-axis displacement detection means 70 also detects a main scale 71 supported by a scale support 76 erected at the center of the base 3 in the X-axis direction, an index scale 72 corresponding to the main scale 71, and a A detector 73 including a circuit is formed from the base 3! It is configured to be able to detect the amount of displacement of the moving table 20 in the Y-axis direction. Position adjustment bolts 74 and 75 are provided for adjusting the attitude of the index scale 72 with respect to the main scale 71. The type of this main scale 71 etc. does not matter, but
This embodiment is of a photoelectric type having an optical grating.

The driving means 80 is for automatically moving the stage 20 in the Y-axis direction. It is formed from a NAND member 82 screwed into a ball screw 81 and attached to the stage 20, and a motor (not shown).

Further, a dustproof device 90 is provided, and is composed of a dustproof device 90; a security DI device 91 and a store-proof cover 101. As is clear from FIGS. 1, 5, and 6, this bellows device 91 has a first bellows 92a and a second bellows 92.
b, and the first bellows 92a has one end 23 in the Y-axis direction of the stage 20, the bellows end +Fj, 93.93, and the bellows mounting plate 9.
4 to the serpentine Ill attachment portion 6 on the 52 side of the base 3. The second snake l1192b is also located on the base 3 corresponding to the other end 24 of the stage 20 in the Y-axis direction! ! Similar to the first bellows 92a, it is stretched between the first bellows 92a and the first bellows 92a. Therefore,
Both snakes 92a and 92b can expand and contract as the stage 20 moves in the Y-axis direction, and can close the recess 5 of the base 3 in which each means is disposed.

Also, Snake IIs! The device 91 is formed to include a bellows floating prevention mechanism 99. This bellows floating mechanism 99 prevents each bellows 92a, 92b from floating in the Z-axis direction (upward in the figure) due to wind pressure when expanding and contracting, and is designed to prevent the bellows 92a, 92b from floating in the Z-axis direction (upward in the figure) at the substantially central lower end of each bellows 92a (92b). X set in
Guide plate 95 having a groove 97 opening in the axial direction
and a guide rail 96 whose distal end is inserted into the groove 97 and whose proximal end is fixed to the base 3 via the support member 11. Therefore, the axial displacement of the snake 11M92a (92b) is restricted by the guide rail 96 via the guide plate 95, so that it is prevented from floating.

Further, the dustproof covers 101, 101 are attached to the support member 11.1.
It is fixed to the base 3 through 1 and 3+%i! ! 'll
can be inserted into recesses 21 provided on each side of the stage 20, respectively. Therefore, the width equivalent to the stage 20 is determined by the snake nM device 91, and the gap in the X-axis direction between the stage 20 and the upright part 7 of the base 3 is determined by the dustproof covers 101, 101, which can be closed. Naturally, both ends of the base 3 in the Y-axis direction are closed by the bellows mounting plates 94 (94).

Reference numeral 11 denotes a support member, which is fixedly disposed on the base 3 along the Y-axis direction, and is attached to the dustproof cover 101 and the bellows floating prevention a.
It supports the guide rail 96 that constitutes fA99. Moreover, rubber 13 is attached to the recess 12 so that tools can be accommodated therein.

Note that the limit switch 111 attached to the base 3
The apparatus detecting means 110, which is constituted by the engaging member 112 attached to the stage 20, detects the limit position of the stage 20 in the Y-axis direction.

In the three-dimensional measuring machine configured in this way, the Y-axis displacement detecting means 70, etc. are moved while the object to be measured (not shown) placed R on the stage 20 and the detector 42 are moved relative to each other in the three-dimensional direction. The dimensions of the object to be measured can be measured with high accuracy by using the output No. 13 from the .

Here, the i3i table 20 is moved in the Y-axis direction by rotating the ball screw 81 of the drive means 80 with a motor (not shown). The position of the stage 20 in the X-axis direction is regulated by the X-axis position regulating means 50 whose clearance is adjusted in advance, and the position in the Z-axis direction is regulated by the Z-axis position regulating means 60 with respect to the upper surface of the YG inner rail 38.38. is regulated. Therefore, the stage 20, that is, the object to be measured placed thereon, is moved in the Y-axis direction while its position is regulated in the X- and Z-axis directions.

During this movement in the Y-axis direction, together with the action of the bellows floating prevention mechanism 99, the snakes 1t192a and 92b expand and contract with the movement of the stage 20 without moving up 17. The means 70 etc. are covered to prevent dust. Also,
Since the clearance in the X-axis direction between the stage 20 and the base 3 is covered by the dustproof cover, reliable dustproofing is achieved.

According to this embodiment, a distribution recess 5 is provided in the base 3, and the Y2E inner rail 38, 38 is arranged in this recess 5, and the position regulating means 50, 60 and the Y-axis displacement detecting means 70 are arranged.
Since the drive means 80 and the like are accommodated, the Z of the stage 20 is
It is possible to attach the supports 25, 25 to the base 3 at a lower axial height, that is, at a higher position. As a result, post 25
．． Since the detector 25 can be shortened, it can be made smaller and lighter and/or more rigid, and the position of the detector 42 can be fixed to achieve high precision measurement.

Further, the X-axis position regulating means 60 includes an air bearing 61.
61 and a means using magnets 62 and 62 that press the workpiece stand 20 downward by penetrating it, so even if the workpiece stand 20 is lightweight or the object to be measured is lightweight. Even in this case, the position of the stage 20 in the Z-axis direction can be slightly regulated by 6' without making minute adjustments to the air supplied to the air bearings 61, 61.

Furthermore, since a dustproof device 90 is provided to cover the recess 5 in which each means 50, 60, 70.8O of the base 3 is accommodated, the characteristics and functions of these means can be stably maintained. , can ensure safe work. Also, bellows! Since the jty9t is provided with a bellows floating prevention mechanism 99, reliable dust-proof operation can be achieved from this point as well. "Furthermore, since the ball screw 81 of the driving means 80 and the NAND member 92 are screwed together at the center of the stage 20, the screwing together with the function of the X-axis position regulating means 50 Shake and meandering can be prevented and the stage 20 can be moved directly in the Y-axis direction.

High precision measurement can also be guaranteed from this point of view.

In the above embodiment, the detector 42 is a video camera, but it may be a touch signal probe or the like, and its type is not limited. Also, the X slider 35, spindle 4
The first type may be a motor feeding method or a manual feeding method.Furthermore, the guide rail 96 of the dustproof device 9o, the dustproof cover 10
Each tip of 1 or a recess 2'l corresponding to these,
It is also possible to provide a rotating roller on either one of the R1 portions 97 to improve sliding properties.

〔Effect of the invention〕

As is clear from the above explanation, the present invention has the excellent effect of being able to achieve a reduction in size and weight by housing the driving means etc. in the recess of the base, and also to achieve high precision measurement by shortening the support. .

[Brief explanation of drawings]

FIG. 1 is a perspective view showing the overall configuration of an embodiment of a three-dimensional III straightening machine according to the present invention, FIGS. 2 and 3 are front and side views corresponding to FIG. 1, and FIG. 4 is also the first [
2], FIG. 5 is a sectional view also taken along the V-V arrow line in FIG. 1, FIG. 6 is a perspective view of the main part of the bellows device, and FIG. 214 is an overall configuration diagram of a fixed column type coordinate measuring machine, and FIG. 8 is an overall configuration diagram of a conventional column movable type coordinate measuring machine. 3... Base, 5... Recess, 20... Loading stand, 25
... Pillar, 38... YG inner rail, 42... Detector, 50... X-axis position regulating means, 60... Z-axis position regulating means, 61... Air bearing, 62... Magnet, 63... Magnetic material, 70... Y-axis displacement detection means, 80... Drive means.

Claims (2)

[Claims] (1) In a three-dimensional measuring machine that measures the shape and dimensions of an object to be measured on a stage and a detector movably supported on a support in three-dimensional directions, the base is placed in the X-axis direction. A recess having a predetermined width, a predetermined depth in the Z-axis direction, and extending in the Y-axis direction is provided in the base, and a set of Y guide rails distributed in the center is provided in the recess of the base, so that the document table is connected to the Y-axis. an X-axis position for regulating the position of the document table in the X-axis direction with respect to the base; a regulating means, a Z-axis position regulating means for regulating the position in the Z-axis direction, a drive means for the Y-axis for automatically feeding the document table in the Y-axis direction, and a movement displacement of the document table in the Y-axis direction. A three-dimensional measuring machine, characterized in that a Y-axis displacement detection means for detecting a quantity is disposed in a recess of the object table. (2) In claim 1, the Z-axis position regulating means includes an air bearing attached to the object stand in correspondence with the upper end surface of the Y guide rail, and a magnetic portion of the base. and a means for tensioning and biasing the document table downward from the base, which is formed from the magnetic material portion and a magnet attached to the document table which acts as an attraction.