CN107214530A - A kind of ultraprecise air supporting locating platform - Google Patents
A kind of ultraprecise air supporting locating platform Download PDFInfo
- Publication number
- CN107214530A CN107214530A CN201710632556.6A CN201710632556A CN107214530A CN 107214530 A CN107214530 A CN 107214530A CN 201710632556 A CN201710632556 A CN 201710632556A CN 107214530 A CN107214530 A CN 107214530A
- Authority
- CN
- China
- Prior art keywords
- slide unit
- side plate
- base
- column
- locating platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000725 suspension Substances 0.000 claims abstract description 4
- 238000006073 displacement reaction Methods 0.000 claims description 13
- 239000004579 marble Substances 0.000 claims description 6
- 238000010276 construction Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- 238000005188 flotation Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
Abstract
The invention discloses a kind of ultraprecise air supporting locating platform, including horizontal base, it is located at the slide unit on base, column for supporting slide unit, linear electric motors for driving slide unit, and it is fixed on base side and the vertical side plate extended along slide unit moving direction, the stator of linear electric motors is fixed on base, the mover of linear electric motors is fixedly connected with the bottom surface of slide unit, column is fixed on the bottom surface of slide unit, and column bottom is provided with for producing malleation so that the positive pressure air bearing of slide unit vertical suspension, slide unit is fixed with for ensureing its positive/negative-pressure air bearing moved along side plate bearing of trend close to the side of the side plate；The ultraprecise air supporting locating platform that the present invention is provided, it is simple in construction, it is easy to process, bearing capacity is strong, slide unit small volume, is that ensure that moving direction can produce air film gap again by positive/negative-pressure air bearing, can realize the high speed of slide unit, high-accuracy positioning trip.
Description
Technical field
The present invention relates to air supporting locating platform technical field, more particularly to a kind of ultraprecise air supporting locating platform.
Background technology
High-precision and high-resolution accurate displacement work system is in high-tech such as modern military project, navigation, electronic manufactures
Occupy particularly important status in industry and field of scientific study, some precision, Ultra-precision machining, Precision measurement, super larges
High-precision accurate displacement workbench is all used in scale integrated circuit production.
Separated between workbench and guide rail with one layer of very thin gas, can be with using gas as the air-flotation workbench of lubricant
Realize workbench without friction, at high speed, high accuracy operation, and there is long lifespan, it is pollution-free, therefore be often applied to
In precision optical machinery.What is generally used at present has orifice restriction guide rail air-flotation workbench and porous material air-flotation workbench, but small
Hole throttling guide rail air-flotation workbench orifice restriction bearing capacity is not strong, and the larger processed complex of platform, and porous material air supporting
Workbench processing technology is complicated, and platform is also larger.
Therefore how to solve that air-flotation workbench is complicated, the low problem of bearing capacity, be that those skilled in the art are current
The technical issues that need to address.
The content of the invention
It is an object of the invention to provide a kind of ultraprecise air supporting locating platform, its simple in construction, positioning precision is high and carries
Ability is strong.
In order to solve the above technical problems, the present invention provides a kind of ultraprecise air supporting locating platform, including horizontal base, it is located at
Slide unit on the base, the column for supporting the slide unit for driving the linear electric motors of the slide unit, and is fixed on
The base side and the vertical side plate extended along the slide unit moving direction, the stator of the linear electric motors are fixed on the bottom
On seat, the mover of the linear electric motors is fixedly connected with the bottom surface of the slide unit, and the column is fixed on the bottom surface of the slide unit,
And the column bottom is provided with for producing malleation so that the positive pressure air bearing of the slide unit vertical suspension, the slide unit is leaned on
The side of the nearly side plate is fixed with for ensureing its positive/negative-pressure air bearing moved along the side plate bearing of trend.
Preferably, the grating scale for measuring the slide unit displacement is installed, the grating scale is provided with the side plate
Grating reading head.
Preferably, the limiting photoelectric switch for limiting the slide unit displacement is also equipped with the base.
Preferably, including four columns, four columns are respectively provided at the corner of the slide unit bottom surface, wherein two
The individual column is close to the side plate, and the positive/negative-pressure air bearing is fixed on column described in above-mentioned two close to the side plate
Side.
Preferably, the base is marble base, and the side plate is marble side plate.
Preferably, the base is connected with the side plate bolt, the slide unit and the column and the linear electric motors
The equal bolt connection of mover.
The ultraprecise air supporting locating platform that the present invention is provided, including horizontal base, the slide unit that is located on base, for supporting
The column of slide unit, for driving the linear electric motors of slide unit, and is fixed on base side and erecting along the extension of slide unit moving direction
Front plate, the stator of linear electric motors is fixed on base, and the mover of linear electric motors is fixedly connected with the bottom surface of slide unit, and column is fixed
In the bottom surface of slide unit, and column bottom is provided with for producing malleation so that the positive pressure air bearing of slide unit vertical suspension, slide unit
Side close to the side plate is fixed with for ensureing its positive/negative-pressure air bearing moved along side plate bearing of trend.
During slide unit normal work, the positive pressure air bearing ventilation of column bottom produces malleation, positive pressure air bearing and base
Between form air film gap, slide unit is suspended in z-direction, and positioned at the positive/negative-pressure air bearing ventilation production simultaneously of slide unit side
Raw malleation and negative pressure, negative pressure make the side of slide unit hold side plate, and the free degree of limitation slide unit in the X direction prevents slide unit from moving
When shift, the malleation of generation makes to form air film gap between slide unit side and side plate, and straight-line electric is then controlled in the Y direction
The motion of machine is that controllable slide unit realizes precision positioning.
In summary, the ultraprecise air supporting locating platform that the present invention is provided, simple in construction, easy to process, bearing capacity is strong,
Slide unit small volume, is that ensure that moving direction can produce air film gap again by positive/negative-pressure air bearing, can realize slide unit
High speed, high-accuracy positioning trip.
Brief description of the drawings
Fig. 1 is a kind of structural representation of embodiment of ultraprecise air supporting locating platform provided by the present invention.
Embodiment
The core of the present invention is to provide a kind of ultraprecise air supporting locating platform, and its simple in construction, positioning precision is high and carries
Ability is strong.
In order that those skilled in the art more fully understand the present invention program, with reference to the accompanying drawings and detailed description
The present invention is described in further detail.
Fig. 1 is refer to, Fig. 1 is a kind of knot of embodiment of ultraprecise air supporting locating platform provided by the present invention
Structure schematic diagram.
The ultraprecise air supporting locating platform that the specific embodiment of the invention is provided, including horizontal base 1, be located on base 1
Slide unit 3, for the linear electric motors 4 for driving slide unit 3 to move, and be fixed on the vertical side plate 2 of the side of base 1, vertical side plate 2
Extend along the moving direction of slide unit 3, the stator of linear electric motors 4 is fixed on the base 1, mover and the slide unit 3 of linear electric motors 4
Bottom surface is fixedly connected, and slide unit 3 is supported by column 5, and the top of column 5 is fixed on the bottom surface of slide unit 3, and the bottom of column 5 is provided with
Positive pressure air bearing 6, slide unit 3 is fixed with positive/negative-pressure air bearing 7 close to the side of side plate 2.
Can be the side that linear electric motors 4 drive slide unit 3 to move by the bearing of trend of horizontal direction epipleural 2 for convenience of describing
It is X-direction to direction vertical with Y-direction in Y-direction, horizontal direction is set to, vertical direction is set to Z-direction.
During 3 normal work of slide unit, the ventilation of the positive pressure air bearing 6 of the bottom of column 5 produces malleation, positive pressure air bearing 6 with
Air film gap is formed between base 1, slide unit 3 is suspended in z-direction, and the positive/negative-pressure air bearing 7 positioned at the side of slide unit 3 is led to
Gas produces malleation and negative pressure simultaneously, and negative pressure makes the side of slide unit 3 hold side plate 2, and the free degree of limitation slide unit 3 in the X direction is prevented
On-slip platform 3 shifts when moving, and the malleation of generation makes to form air film gap between the side of slide unit 3 and side plate 2, then in Y side
The motion of control linear electric motors 4 is that controllable slide unit 3 realizes precision positioning upwards.
In summary, the ultraprecise air supporting locating platform that the present invention is provided, simple in construction, easy to process, bearing capacity is strong,
The small volume of slide unit 3, ensure that moving direction can produce air film gap again by positive/negative-pressure air bearing 7, can realize cunning
The high speed of platform 3, high-accuracy positioning trip.
On the basis of above-mentioned embodiment, the ultraprecise air supporting positioning that the specific embodiment of the invention is provided is flat
Platform, can be provided with the grating scale 8 for measuring the displacement of slide unit 3 on side plate 2, and grating scale 8 is provided with grating reading head 9；It is sliding
When platform 3 is moved under the drive of linear electric motors 4, the displacement of slide unit 3 is read in the measurement in real time of grating reading head 9, it is possible to by slide unit 3
Displacement is uploaded to the controller of control locating platform.
Further, the ultraprecise air supporting locating platform that the specific embodiment of the invention is provided, can also pacify on base 1
Equipped with the limiting photoelectric switch 10 for limiting the displacement of slide unit 3；Limiting photoelectric switch 10 can be connected with controller, it is possible to pre-
The limit displacement value of slide unit 3 is first set on the controller as needed, when slide unit 3 is moved under the drive of linear electric motors 4, grating scale 8
On grating reading head 9 in real time measurement slide unit 3 displacement and be uploaded to controller, when slide unit 3 is moved to default limit displacement value
When, controller control limiting photoelectric switch 10 is opened, and slide unit 3 can not be moved again, so as to realize spacing.
On the basis of above-mentioned each embodiment, slide unit 3 is usually square, to ensure the balance of slide unit 3 and holding
Loading capability, the specific embodiment of the invention provide ultraprecise air supporting locating platform, can set four be used for support column
5, four columns 5 can be respectively provided at the corner of the bottom surface of slide unit 3, and each bottom of column 5 is respectively and fixedly provided with a positive pressure air axle
Hold 6；In addition, two close side plates 2 in four columns 5, can be fixed on above-mentioned two column 5 by positive/negative-pressure air bearing 7
Close to the side of side plate 2, to facilitate the setting of positive/negative-pressure air bearing 7, and ensure not influenceing slide unit 3.
On the basis of above-mentioned each embodiment, the ultraprecise air supporting positioning that the specific embodiment of the invention is provided is flat
Platform, to ensure the positioning precision and mobile stationarity of slide unit 3, it is desirable to which the surface of base 1 and side plate 2 is smooth surface, specifically,
Base 1 can be marble base 1, and side plate 2 is marble side plate 2；It is of course also possible to from other smooth plates such as glass plate
Material, within protection scope of the present invention.
The ultraprecise air supporting locating platform that the specific embodiment of the invention is provided, specifically can be with spiral shell between base 1 and side plate 2
Tether and connect, can be connected by screw bolts between the mover of slide unit 3 and column 5 and linear electric motors 4, bolt connection is simply square
Just, it is reliable and stable, and detachably, it is of course also possible to use other connected modes such as welding, clamping, the protection in the present invention
Within the scope of.
Ultraprecise air supporting locating platform provided by the present invention is described in detail above.It is used herein specifically
Individual example is set forth to the principle and embodiment of the present invention, and the explanation of above example is only intended to help and understands the present invention
Method and its core concept.It should be pointed out that for those skilled in the art, not departing from original of the invention
On the premise of reason, some improvement and modification can also be carried out to the present invention, these are improved and modification also falls into right of the present invention and wanted
In the protection domain asked.
Claims (6)
1. a kind of ultraprecise air supporting locating platform, it is characterised in that including horizontal base, the slide unit being located on the base, is used
In the column for supporting the slide unit, for driving the linear electric motors of the slide unit, and the base side is fixed on and along institute
The vertical side plate of slide unit moving direction extension is stated, the stator of the linear electric motors is fixed on the base, the linear electric motors
Mover be fixedly connected with the bottom surface of the slide unit, the column is fixed on the bottom surface of the slide unit, and the column bottom is pacified
Equipped with for producing malleation so that the positive pressure air bearing of the slide unit vertical suspension, the slide unit is close to the side of the side plate
It is fixed with for ensureing its positive/negative-pressure air bearing moved along the side plate bearing of trend.
2. ultraprecise air supporting locating platform according to claim 1, it is characterised in that be provided with the side plate for surveying
The grating scale of the slide unit displacement is measured, the grating scale is provided with grating reading head.
3. ultraprecise air supporting locating platform according to claim 2, it is characterised in that be also equipped with being used on the base
Limit the limiting photoelectric switch of the slide unit displacement.
4. the ultraprecise air supporting locating platform according to claims 1 to 3 any one, it is characterised in that including four institutes
State column, four columns are respectively provided at the corner of the slide unit bottom surface, column described in two of which close to the side plate, and
The positive/negative-pressure air bearing is fixed on column described in above-mentioned two close to the side of the side plate.
5. ultraprecise air supporting locating platform according to claim 4, it is characterised in that the base is marble base,
The side plate is marble side plate.
6. ultraprecise air supporting locating platform according to claim 5, it is characterised in that the base and the side plate bolt
Connection, the slide unit and the equal bolt connection of the mover of the column and the linear electric motors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710632556.6A CN107214530B (en) | 2017-07-28 | Ultra-precise air floatation positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710632556.6A CN107214530B (en) | 2017-07-28 | Ultra-precise air floatation positioning platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107214530A true CN107214530A (en) | 2017-09-29 |
| CN107214530B CN107214530B (en) | 2024-04-19 |
Family
ID=
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109014457A (en) * | 2018-08-13 | 2018-12-18 | 中国纺织科学研究院有限公司 | A kind of air bearing for processing spinneret is guide locating device provided |
| CN115648132A (en) * | 2022-12-13 | 2023-01-31 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | High-bearing precision motion platform for flip chip bonding |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11106963A (en) * | 1997-09-30 | 1999-04-20 | Res Dev Corp Of Japan | Highly efficient machining device by high density radical reaction using rotary electrode |
| CN1305627A (en) * | 1998-06-17 | 2001-07-25 | 多弗仪器公司 | High stability spin stand platform |
| CN101520606A (en) * | 2008-01-02 | 2009-09-02 | 西安交通大学 | Non-contact long-stroke multi-degree-of-freedom nanometer precision working table |
| CN101693365A (en) * | 2009-10-22 | 2010-04-14 | 中国计量科学研究院 | Air bearing structure and method for achieving air film thickness compensation |
| CN101804568A (en) * | 2010-03-19 | 2010-08-18 | 中国电子科技集团公司第二研究所 | Linear motor driven air suspension motion platform |
| CN207255698U (en) * | 2017-07-28 | 2018-04-20 | 广东工业大学 | A kind of ultraprecise air supporting locating platform |
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11106963A (en) * | 1997-09-30 | 1999-04-20 | Res Dev Corp Of Japan | Highly efficient machining device by high density radical reaction using rotary electrode |
| CN1305627A (en) * | 1998-06-17 | 2001-07-25 | 多弗仪器公司 | High stability spin stand platform |
| CN101520606A (en) * | 2008-01-02 | 2009-09-02 | 西安交通大学 | Non-contact long-stroke multi-degree-of-freedom nanometer precision working table |
| CN101693365A (en) * | 2009-10-22 | 2010-04-14 | 中国计量科学研究院 | Air bearing structure and method for achieving air film thickness compensation |
| CN101804568A (en) * | 2010-03-19 | 2010-08-18 | 中国电子科技集团公司第二研究所 | Linear motor driven air suspension motion platform |
| CN207255698U (en) * | 2017-07-28 | 2018-04-20 | 广东工业大学 | A kind of ultraprecise air supporting locating platform |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109014457A (en) * | 2018-08-13 | 2018-12-18 | 中国纺织科学研究院有限公司 | A kind of air bearing for processing spinneret is guide locating device provided |
| CN109014457B (en) * | 2018-08-13 | 2024-03-26 | 中国纺织科学研究院有限公司 | Air floatation guiding and positioning device for processing spinneret plate |
| CN115648132A (en) * | 2022-12-13 | 2023-01-31 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | High-bearing precision motion platform for flip chip bonding |
| CN115648132B (en) * | 2022-12-13 | 2023-04-18 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | High-bearing precision motion platform for flip chip bonding |
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