CN107598869A - One kind damps adjustable precise direct-driving air floating platform - Google Patents
One kind damps adjustable precise direct-driving air floating platform Download PDFInfo
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- CN107598869A CN107598869A CN201710809671.6A CN201710809671A CN107598869A CN 107598869 A CN107598869 A CN 107598869A CN 201710809671 A CN201710809671 A CN 201710809671A CN 107598869 A CN107598869 A CN 107598869A
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- linear motor
- workbench
- supporting device
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Abstract
The invention provides one kind to damp adjustable precise direct-driving air floating platform, and the left supporting device of air supporting, the right supporting device of air supporting of platform are fixedly connected with marble base, and workbench supporting device left with air supporting, the right supporting device of air supporting are connected；Grating reading head is fixedly mounted on workbench side, and grating scale is fixedly connected with the right supporting device of air supporting；Linear electric motors installs rebound is connected to the bottom of workbench, driving is fixedly connected with linear motor rotor, damping with linear motor rotor with linear electric motors installs rebound, and driving is fixedly connected with linear motor stator electric, damping with linear motor stator electric with marble base；The present invention is simple in construction to damp adjustable high-precision positioner, easy to operate.
Description
Technical field
The invention belongs to precision positioning device field, and in particular to one kind has damping adjustable function, high accuracy can be achieved
The air floating platform of positioning.
Background technology
The straight air floating platform that drives is a kind of high-precision positioner, and it is straight to drive using linear electric motors driving, air bearing supporting
There is air floating platform extremely low friction, nothing to creep, the high rigidity of high kinematic accuracy and linear electric motors driving, wide speed regulating range, height
The advantages of dynamic property, veritably realize without friction and " Zero-drive Chain ", be applied to more and more such as micro-nano technology, IC envelopes
In the field such as dress, big panel liquid crystal display manufacturing and detection, optical scanner detection.But gas suspension damping is small, and straight purging floats
Platform is the low-resistance being easily a disturbed damping system, and therefore, the damping for improving system is advantageous to obtain more excellent vibration suppression
Performance and high-precision positioning and high dynamic performance.The method for improving of air-flotation system damping both at home and abroad has at present：Improve air supporting
The structure of bearing（CN2208639Y）, it is inherent characteristic because air-bearing damping is low, such method lifting damping value is limited；Magnetic
Rheology liquid damps（CN105650191A）, oil-film damping, this kind of composed of external damping device structure is more complicated, while it is poor to damp adjustability,
Engineer applied is not strong.
The content of the invention
The technical problem to be solved in the present invention is to provide one kind to damp adjustable precise direct-driving air floating platform.
The adjustable precise direct-driving air floating platform of damping of the present invention, includes marble pedestal, the left supporting device of air supporting, work
Platform, linear electric motors installs rebound, the right supporting device of air supporting, grating reading head, driving are with linear motor rotor, driving straight line
Motor stator, damping linear motor rotor, damping linear motor stator electric, grating scale, first resistor adjusting knob, first can
Adjust resistance, second resistance adjusting knob, the second adjustable resistance, 3rd resistor adjusting knob, the 3rd adjustable resistance, damping motor lines
Astragal cable；Its annexation is：The left supporting device of described air supporting, the right supporting device of air supporting are fixedly connected with marble base,
Workbench supporting device left with air supporting, the right supporting device of air supporting are connected；Grating reading head is fixedly mounted on workbench side, grating
Chi is fixedly connected with the right supporting device of air supporting；In working table movement, the position of workbench is detected by reading head；Linear electric motors
Installs rebound is connected to the bottom of workbench, and linear motor rotor, damping linear motor rotor and linear electric motors are used in driving
Installs rebound is fixedly connected, and driving is fixedly connected with linear motor stator electric, damping with linear motor stator electric with marble base；
First adjustable resistance, the second adjustable resistance, the 3rd adjustable resistance carry out triangular form connection, then are connected with damping motor coil cable
As threephase load.
Damping is arranged on workbench bottom, installation parallel with driving linear electric motors with linear electric motors.
Damping linear electric motors are with using the first adjustable resistance, the second adjustable resistance, the 3rd adjustable electric that triangle is connected
Resistance connection.
The adjustable precise direct-driving air floating platform of damping of the present invention, pedestal realize that platform high rigidity supports；Left and right air supporting branch
Mechanism is held on pedestal, realizes the gas suspension of workbench；The stator of driving and damping linear electric motors is arranged on base
On seat, on the table, driving is used for the drive of air floating platform with linear electric motors for the mover installation of driving and damping linear electric motors
Dynamic, the damping in motion process is realized in damping with linear electric motors and adjustable resistance.
During working table movement, damping is with linear motor rotor coil with speedWith working table movement, coil is in magnetic
Cutting magnetic line in, electromotive force E is produced, electromotive force, which is applied E and is added on coil and load resistance R, can produce electric current I, and electric current I exists
Electromagnetic resistance F, electromagnetic resistance F and load resistance R, the speed of service are produced in the presence of permanent magnetic field BIt is relevant, when regulation is extraneous negative
Resistance R values are carried, its damped coefficient can change.Linear electric motors damp force direction with the direction of motion on the contrary, producing in the movement direction
Damping, it can be dissipated equivalent to the energy in motion by damping linear electric machine, so can quickly suppress to move
The vibration in direction.The present invention adjusts electric current caused by electromotive force by regulation motor mover coil outer meeting resistance, so as to adjust resistance
Buddhist nun's power, there is the characteristics of damping is adjustable, simple in construction, easy to operate.
The present invention be used for air floating platform damping adjustment beneficial effect be：Driven using gas suspension guide rail, linear electric motors
It is dynamic, high dynamic performance and low-speed stable motion can be achieved, after being damped using linear electric motors, improve the damping ratio of system, effectively
The vibration for inhibiting platform, and can be damped according to different load regulation, obtain optimal vibration performance.Apply with
Low-speed stable performance requirement diamond fly-cutting lathe on be advantageous to improve work piece surface figure accuracy and surface quality, make by
The treatment of surfaces of components few defect, even zero defect.
Brief description of the drawings
Fig. 1 is the adjustable precise direct-driving air floating platform structural front view of damping of the present invention；
Fig. 2 is the adjustable precise direct-driving air floating platform side view of damping of the present invention；
The air supporting of 4. linear electric motors installs rebound of left 3. workbench of supporting device of the air supporting of 1. marble pedestal 2. 5. in figure
The left grating reading head 7. of supporting device 6. driving is damped with straight with the driving linear motor stator electric 9. of linear motor rotor 8.
The adjustable electric of 11. grating scale of linear motor stator electric, 12. first resistor adjusting knob 13. first is used in the damping of line electric mover 10.
Hinder the adjustable resistance 18. of 14. 15. second adjustable resistance of second resistance adjusting knob, 16. 3rd resistor adjusting knob 17. the 3rd
Damp motor coil cable.
Embodiment
Fig. 1 is the adjustable precise direct-driving air floating platform structural front view of damping of the present invention, and the damping that Fig. 2 is the present invention can
The precise direct-driving air floating platform side view of tune.As can be seen that the adjustable precise direct-driving air supporting of damping of the present invention is put down from Fig. 1,2
Platform includes marble pedestal 1, the left supporting device 2 of air supporting, workbench 3, linear electric motors installs rebound 4, the right supporting device of air supporting
5th, grating reading head 6, driving linear motor rotor 7, driving linear motor stator electric 8, damping linear motor rotor 9, resistance
Buddhist nun is revolved with linear motor stator electric 10, grating scale 11, first resistor adjusting knob 12, the first adjustable resistance 13, second resistance regulation
Button 14, the second adjustable resistance 15,3rd resistor adjusting knob 16, the 3rd adjustable resistance 17, damping motor coil cable 18.
Its annexation is：The left supporting device 2 of described air supporting, the right supporting device 5 of air supporting pass through screw and marble bottom
Seat 1 is fixedly connected, and workbench 3, by screw attachment, is being passed through gas with the left supporting device 2 of air supporting, the right supporting device 5 of air supporting
Afterwards, workbench 3 can with respect to marble base 1 in Fig. 1 vertical paper direction motion；Grating reading head 6 is pacified by screw
Mounted in the side of workbench 3, grating scale 11 on the right supporting device 5 of air supporting, when workbench 3 moves, is passed through by screw in compression
Reading head detects the position of workbench；Linear electric motors installs rebound 4 is connected by screw to be used in the bottom of workbench 3, driving
Linear motor rotor 7, damping are fixedly connected with linear motor rotor 9 with linear electric motors installs rebound 4 by screw, and driving is used
Linear motor stator electric 8, damping are fixedly connected with linear motor stator electric 10 with marble base 1 by screw, and feelings are enabled in motor
Under condition, driving produces electromagnetic push with linear motor rotor 7 and driving between linear motor stator electric 8, there is provided precise direct purging
Floating platform motion-promotion force, in platform motion process, damping is used with linear motor rotor 9 and damping between linear motor stator electric 10
Damping force is produced, plays damping；First adjustable resistance, the second adjustable resistance, the connection of the 3rd adjustable resistance triangular form, pass through
The cable connection of damping motor coil is used as threephase load.
The course of work for being used to damp adjustment of the present invention is such：Before the work of precise direct-driving air floating platform, pass through
Rotation regulation first resistor adjusting knob 13, first resistor adjusting knob 15, first resistor adjusting knob 17 realize damping motor
The resistance value adjusting of load, in regulation process, first resistor 14, second resistance 16,3rd resistor 17 are measured using universal meter
Resistance value, ensure that threephase load resistance value is equal, by adjusting threephase load resistance value, it is possible to achieve precise direct-driving air floating platform
The regulation of damping force, meet the damping requirements under different working condition, threephase load resistance value is smaller, and caused damping force is got over
Greatly.When precise direct-driving air floating platform works, driving is produced with linear motor rotor 7 and driving between linear motor stator electric 8
Electromagnetic push, platform produces motion, and in motion process, damping uses linear motor stator electric 10 with linear motor rotor 9 and damping
Between produce stop position obtained by grating reading head 6 and fed back, is then being hindered with the damping force of velocity correlation, peripheral control unit
Closed loop regulation is carried out in the presence of Buddhist nun's power, realizes that precision positions are moved.
Claims (3)
1. one kind damps adjustable precise direct-driving air floating platform, it is characterised in that：Described platform includes marble pedestal（1）、
The left supporting device of air supporting（2）, workbench（3）, linear electric motors installs rebound（4）, the right supporting device of air supporting（5）, grating reading
Head（6）, driving linear motor rotor（7）, driving linear motor stator electric（8）, damping linear motor rotor（9）, damping
Use linear motor stator electric（10）, grating scale（11）, first resistor adjusting knob（12）, the first adjustable resistance（13）, second resistance
Adjusting knob（14）, the second adjustable resistance（15）, 3rd resistor adjusting knob（16）, the 3rd adjustable resistance（17）, damping motor
Coil cable（18）；Its annexation is：The left supporting device of described air supporting（2）, the right supporting device of air supporting（5）With marble bottom
Seat（1）It is fixedly connected, workbench（3）With the left supporting device of air supporting（2）, the right supporting device of air supporting（5）Connection；Grating reading head
（6）It is fixedly mounted on workbench（3）Side, grating scale（11）With the right supporting device of air supporting（5）It is fixedly connected；In workbench（3）
During motion, pass through reading head（6）Detect workbench（3）Position；Linear electric motors installs rebound（4）It is connected to workbench（3）
Bottom, driving linear motor rotor（7）, damping linear motor rotor（9）With linear electric motors installs rebound（4）It is fixed
Connection, driving linear motor stator electric（8）, damping linear motor stator electric（10）With marble base（1）It is fixedly connected；First
Adjustable resistance（17）, the second adjustable resistance（15）, the 3rd adjustable resistance（13）Triangular form connection is carried out, then with damping motor coil
Cable（18）Connection is used as threephase load.
2. kind according to claim 1 damps adjustable precise direct-driving air floating platform, it is characterised in that：Damping straight-line electric
Machine is arranged on workbench（3）Bottom, installation parallel with driving linear electric motors.
3. kind according to claim 1 damps adjustable precise direct-driving air floating platform, it is characterised in that：Damping straight-line electric
The first adjustable resistance that machine is connected with using triangle（17）, the second adjustable resistance（15）, the 3rd adjustable resistance（13）Connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710809671.6A CN107598869B (en) | 2017-09-11 | 2017-09-11 | Damping-adjustable precise direct-drive air floating platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710809671.6A CN107598869B (en) | 2017-09-11 | 2017-09-11 | Damping-adjustable precise direct-drive air floating platform |
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| Publication Number | Publication Date |
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| CN107598869A true CN107598869A (en) | 2018-01-19 |
| CN107598869B CN107598869B (en) | 2020-06-05 |
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| CN201710809671.6A Active CN107598869B (en) | 2017-09-11 | 2017-09-11 | Damping-adjustable precise direct-drive air floating platform |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111060819A (en) * | 2019-12-24 | 2020-04-24 | 兰州飞行控制有限责任公司 | Testing device and testing method for damping characteristics of permanent magnet brushless damping motor |
| CN113059537A (en) * | 2021-02-26 | 2021-07-02 | 佛山市华道超精科技有限公司 | Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench |
| CN116989064A (en) * | 2023-09-26 | 2023-11-03 | 无锡星微科技有限公司杭州分公司 | High-precision air-floatation linear platform |
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| CN101738498A (en) * | 2009-12-18 | 2010-06-16 | 重庆建设工业有限责任公司 | Device for calibrating high-speed motion measuring instrument |
| CN102528472A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Vertical axis macro and micro motion composite liner motion platform device |
| CN104343875A (en) * | 2014-10-17 | 2015-02-11 | 上海佐林电器有限公司 | Linear damper |
| CN105650191A (en) * | 2016-02-29 | 2016-06-08 | 广东工业大学 | U-shaped groove open type magnetorheological damper |
| CN105974310A (en) * | 2016-05-12 | 2016-09-28 | 上海理工大学 | Adjustable-load linear motor performance test bench |
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2017
- 2017-09-11 CN CN201710809671.6A patent/CN107598869B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101738498A (en) * | 2009-12-18 | 2010-06-16 | 重庆建设工业有限责任公司 | Device for calibrating high-speed motion measuring instrument |
| CN102528472A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Vertical axis macro and micro motion composite liner motion platform device |
| CN104343875A (en) * | 2014-10-17 | 2015-02-11 | 上海佐林电器有限公司 | Linear damper |
| CN105650191A (en) * | 2016-02-29 | 2016-06-08 | 广东工业大学 | U-shaped groove open type magnetorheological damper |
| CN105974310A (en) * | 2016-05-12 | 2016-09-28 | 上海理工大学 | Adjustable-load linear motor performance test bench |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111060819A (en) * | 2019-12-24 | 2020-04-24 | 兰州飞行控制有限责任公司 | Testing device and testing method for damping characteristics of permanent magnet brushless damping motor |
| CN113059537A (en) * | 2021-02-26 | 2021-07-02 | 佛山市华道超精科技有限公司 | Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench |
| CN116989064A (en) * | 2023-09-26 | 2023-11-03 | 无锡星微科技有限公司杭州分公司 | High-precision air-floatation linear platform |
| CN116989064B (en) * | 2023-09-26 | 2024-04-12 | 无锡星微科技有限公司杭州分公司 | High-precision air-floatation linear platform |
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| Publication number | Publication date |
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| CN107598869B (en) | 2020-06-05 |
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