CN211373497U - Vertical interferometer lifting adjusting frame mechanism - Google Patents

Vertical interferometer lifting adjusting frame mechanism Download PDF

Info

Publication number
CN211373497U
CN211373497U CN201922459360.9U CN201922459360U CN211373497U CN 211373497 U CN211373497 U CN 211373497U CN 201922459360 U CN201922459360 U CN 201922459360U CN 211373497 U CN211373497 U CN 211373497U
Authority
CN
China
Prior art keywords
interferometer
adjusting frame
counterweight
vertical
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201922459360.9U
Other languages
Chinese (zh)
Inventor
杨旭
刘凤鸣
王青
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanjing Interfero Opto Electronics Technology Co ltd
Original Assignee
Nanjing Interfero Opto Electronics Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanjing Interfero Opto Electronics Technology Co ltd filed Critical Nanjing Interfero Opto Electronics Technology Co ltd
Priority to CN201922459360.9U priority Critical patent/CN211373497U/en
Application granted granted Critical
Publication of CN211373497U publication Critical patent/CN211373497U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The utility model discloses a vertical interferometer lift alignment frame, including first supporting mechanism, install in can link to each other and can be on first supporting mechanism along first supporting mechanism axial displacement's first alignment frame mechanism, with first alignment frame mechanism and the counter weight mechanism of being connected with first alignment frame through coupling mechanism and the magnetism locking mechanism of locking on first supporting mechanism. The utility model discloses a vertical interferometer lift adjustment frame can multidimension degree direction be adjusted and is surveyed a gesture, and easily damaged structure protection is hidden, and overall structure has that the frame is steady, the reliability is high, easy operation is convenient, is applicable to the big on a large scale lens surface's of vertical interferometer short-term test.

Description

Vertical interferometer lifting adjusting frame mechanism
Technical Field
The utility model relates to an optical measurement equipment and optical parts alignment jig, in particular to vertical interferometer lift alignment jig mechanism that interferometry used.
Background
With the requirement of mass products (taking ten thousand pieces as a counting unit) such as mobile phone lenses, monitoring lenses and the like on the precision of optical cold machining becoming higher and higher, the vertical laser interferometer can be widely used in production fields because the vertical laser interferometer can quickly measure the aperture and the surface shape of spherical parts. In the vertical laser interferometer, a lifting adjusting frame system bears a measured piece and forms an interference cavity together with a standard lens. The requirements on quick and convenient adjustment, environmental interference on a production site and the like are much higher than those of a horizontal interferometer used in a laboratory.
First, the carrier adjustment stand needs to be stable. The standard lens and the measured spherical surface which form the interference measurement are connected together through the adjusting frame, and the stability of an interference pattern needs to be ensured. Therefore, the optical element is not afraid of synchronous vibration of the two optical elements and is sensitive to cavity length change generated by relative vibration of the two optical elements. In the field measurement environment, the adjusting frame is required to realize better rigid connection.
Secondly, the object-carrying adjusting frame needs to be lifted on the guide rail quickly and stably and can be stopped at any position. Therefore, there are various mechanisms such as a guide rail, a weight, a spring, and a screw. Where the guide rail and counterweight are the most common combination and the spring is typically used only in the light-weight trim system of the small interferometer and is also damaged. The screw is expensive and generally requires a counterweight balance adjustment frame to weigh. In a common lifting system, a steel wire rope for connecting a balance weight and an adjusting frame is exposed, but not beautiful, and rustproof lubricating grease on the steel wire rope is easy to touch to form a pollution source.
Third, the carrier adjustment frame needs to be able to lock at any height on the track. The conventional locking method is to clamp (or press) the surface of the guide rail or the vertical plate by using a mechanical structure. Both methods can generate a lateral force on the guide rail, the locking is loose, and the guide rail can creep up and down, so that interference fringes change in a long time to influence the continuous measurement of the interferometer; if the guide rail is tight, the straightness of the guide rail is adversely affected in the long-term use process, and a heavy guide rail with higher cost must be adopted.
SUMMERY OF THE UTILITY MODEL
Utility model purpose: in order to solve the problem, the utility model provides a vertical interferometer lift adjustment frame that lateral force influence is exerted to the guide rail to good, the hidden counter weight system of rigidity, avoid locking mechanism.
The technical scheme is as follows: a vertical interferometer lift alignment frame, including first supporting mechanism, install in can be along first supporting mechanism axial displacement's first alignment frame mechanism on the first supporting mechanism, link to each other and can be on first supporting mechanism the magnetism locking mechanism of locking and the counter weight mechanism of being connected with first alignment frame mechanism through coupling mechanism with first alignment frame mechanism.
The first support mechanism comprises a base and an axially extending upright post vertically arranged on the base, and the first adjusting frame mechanism and the counterweight mechanism are respectively arranged on two sides of the upright post; and a first guide rail for axial guiding of the first adjusting frame is mounted on the upright post.
The counterweight mechanism comprises a counterweight block, a second guide rail and a linear bearing, wherein the second guide rail is arranged on the upright post and used for guiding the counterweight block, and the linear bearing is connected with the second guide rail and the counterweight block.
The first adjusting frame mechanism comprises an X/Y translation table and a Z-axis micro-motion fixing structure.
The magnetic locking mechanism comprises a fixed steel plate arranged on the stand column and a magnetic base fixing mechanism arranged on the first guide rail, and the magnetic locking mechanism is fixedly connected with the Z-axis micro-motion fixing structure of the first adjusting frame mechanism.
And a plurality of second supporting mechanisms and positioning clamping seats which are distributed at intervals are arranged on the upper surface of the X/Y translation table of the first adjusting frame mechanism.
And a second adjusting frame mechanism is arranged above the X/Y translation table of the first adjusting frame mechanism, and a positioning mechanism matched with the positioning clamping seat is arranged at the lower end of the second adjusting frame mechanism.
The connecting mechanism comprises a steering mechanism arranged at the top of the upright post and a flexible suspension mechanism spanning the front and the back of the steering mechanism.
The surface of the upright post is bilaterally symmetrically provided with first grooves for accommodating the soft suspension mechanism, and the middle of the upright post is provided with second grooves for accommodating the fixed steel plate.
Has the advantages that: (1) the utility model can be adjusted in multiple dimensions and is suitable for various types of lenses; (2) the utility model has simple and convenient operation, and can be used without training basically; (3) the utility model can protect and hide the vulnerable structure, thus prolonging the service life of the product; (4) the utility model has the advantages of the frame is steady, the reliability is high, convenient operation, range of application are wide, be applicable to the big on a large scale lens surface's of vertical interferometer short-term test.
Drawings
FIG. 1 is a schematic view of the overall structure of the vertical interferometer lift adjustment frame of the present invention;
FIG. 2 is a schematic top view of the adjusting mechanism of the present invention;
fig. 3 is a schematic view of the structure and installation of the first adjusting frame mechanism and the counterweight mechanism of the present invention;
fig. 4 is a schematic view of the magnetic locking mechanism of the present invention;
FIG. 5 is a schematic view of a surface structure of a first guiding frame mechanism according to the present invention;
FIG. 6 is a schematic view of the counterweight mechanism of the present invention;
fig. 7 is a schematic structural view of a second adjusting frame mechanism of the present invention.
Detailed Description
Example 1: as shown in fig. 1, a vertical interferometer lift adjustment frame, including first supporting mechanism 1, install first guiding frame mechanism 2 and magnetism locking mechanism 3 on first supporting mechanism 1 and through coupling mechanism 4 with the counter weight mechanism 5 that first guiding frame structure 2 is connected, in this embodiment, first guiding frame mechanism 2 and counter weight mechanism 5 are drawn together with soft mode of hanging through coupling mechanism 4.
As shown in fig. 1, the axial direction in the present invention is the vertical direction of the Z axis in fig. 1, the transverse direction is the X axis direction in fig. 1, and the Y direction perpendicular to the paper surface is taken as the longitudinal direction.
As shown in fig. 1 and 2, the first support mechanism 1 includes a base 11 placed horizontally (X-Y plane) and a column 12 vertically mounted on the base 1 and extending in the axial direction; the upright 12 is used for providing the reinforced rigid structure of the present invention, and the upright 12 is a concave structure, including a vertical panel 121 and a reinforced containment plate 122 on each side of the rear side. The upright post 12 is arranged on the base 11, and the side opposite to the interferometer 7 is a front side. The upright post 12 of the utility model is manufactured by two methods, one is that the aluminum material is directly used for drawing and forming, and then various mounting positions, screw holes and other structures are processed; and the other is splicing and molding after being processed separately by aluminum plates. In this embodiment, an aluminum material drawing process with better stability is adopted. The space for accommodating the counterweight mechanism 5 is formed at the rear side of the upright column, so that the counterweight mechanism 5 is hidden and stably runs.
As shown in fig. 1 and 2, the first adjusting frame mechanism 2 and the counterweight mechanism 5 are respectively installed on different side surfaces (front and back surfaces) of the upright post 12, axially extending first guide rails 21 for guiding movement of the first adjusting frame 2 are installed on two side edges of the front surface of the upright post 12, and two enclosure reinforcing plates 123 are installed on the back side (back surface) of the upright post 12, and an enclosure space thereof is used for installing the counterweight mechanism 5.
As shown in fig. 3 and 4, the first adjusting bracket mechanism 2 includes an X/Y translation stage 22 and a Z-axis fine-adjustment fixing structure 23, and the structures and movement manners of the X/Y translation stage 22 and the Z-axis fine-adjustment fixing structure 23 of the first adjusting bracket mechanism 2 belong to the prior art, and after the magnetic locking mechanism 3 is locked, the X/Y translation stage 22 of the first adjusting bracket mechanism 2 can perform Z-axis fine adjustment; the moving part (X/Y translation stage) of the first carriage mechanism 2 and the moving part (magnetic base fixing mechanism 32) of the magnetic locking mechanism 3 are fixed to the first guide rail 21 through sliders, respectively.
As shown in fig. 4, the magnetic locking mechanism 3 includes a fixed steel plate 31 mounted on the column 12 and a magnetic base fixing mechanism 32 mounted on the first guide rail 21 of the first adjusting frame mechanism 2, the magnetic base fixing mechanism 32 is fixedly connected to the first adjusting frame mechanism 2 through a Z-axis micro-moving mechanism 23, and the magnetic locking mechanism 3 further includes a magnetic head with switch 33 mounted on the magnetic base fixing mechanism. The utility model discloses a magnetism locking mechanism 3's fixed steel sheet 31 is fixed in the middle trough of the positive panel 121 of stand 12 and is in second recess 125 (second recess 125 is for setting up in the recess of positive panel 121), and the magnetic base fixed establishment 32 of activity passes through the slider and installs on first guide rail 21 to connect the X/Y translation platform 22 of first adjustment frame mechanism 2 through Z axle fine motion mechanism 23.
The magnetic locking mechanism 3 works in the following modes: a tiny gap is reserved between the magnetic head of the magnetic locking mechanism 3 and the fixed steel plate 31, and in the embodiment, the gap is between 0.01mm and 0.02mm so as to ensure that the magnetic head 33 can move smoothly away from the surface of the fixed steel plate 31 when being loosened; when the magnetic head 33 is locked, it can closely contact with the surface of the fixed steel plate 31, and its friction resistance under strong magnetic pressure can completely prevent the magnetic seat fixing mechanism 32 from moving up and down. At this time, the magnetic base fixing mechanism 32 becomes a Z-axis adjusting fixing block of the first adjusting frame mechanism 2, and the fine adjustment screw can operate the fine adjustment of the X/Y translation stage 22 of the first adjusting frame mechanism 2 up and down.
As shown in fig. 5, the upper surface of the X/Y translation stage 22 of the present invention is provided with a plurality of second supporting mechanisms 25 and positioning clamping seats 24 distributed at intervals. In this embodiment, three sets of workpiece fixture supporting claws with adjustable sizes are installed on the upper surface of the X/Y translation stage 22 of the first adjusting frame mechanism 2 as the second supporting mechanism 25, and the measured lens of the interferometer 7 can be placed on the workpiece fixture; three sunken magnetic positioners are arranged on the upper surface of the X/Y translation table 22 and used as positioning clamping seats 24, and each magnetic positioner consists of a magnet 241 and limiting shafts 242 on two sides.
As shown in fig. 6, the counterweight mechanism 5 of the present invention includes a second guide rail 51 mounted on the back surface of the column 21 and extending in the axial direction, a counterweight block 52 capable of sliding in the axial direction along the second guide rail 51, and a linear bearing 53 mounted in the middle of the counterweight block 52. Two ends of a second guide rail 51 of the counterweight mechanism 5 are fixed on the back of the upright post 12 through guide rail supports 54, the counterweight block is fixed on the second guide rail 51 through a linear bearing 53, and the linear bearing 53 runs on the second guide rail 51 and is used for limiting the movement track of the counterweight block 52, so that the counterweight block 52 can not touch all aspects of the vertical plate enclosure and the back cover plate, the additional swinging around and around can not be caused during the lifting, and the stability is good.
The working method of the first adjusting frame mechanism 2 and the counterweight mechanism 5 is as follows: the first adjusting frame mechanism 2 and the counterweight mechanism 5 are mutually pulled through the soft hanging mechanism 42 and stably move up and down on respective guide rails, the first adjusting frame mechanism 2 and the counterweight mechanism 5 are in a balanced state, and when the first adjusting frame mechanism 2 is lifted in the Z-axis direction, the counterweight mechanism 4 is pulled to move reversely.
In this embodiment, the connection mechanism 4 includes a steering mechanism 41 mounted on the top of the upright column and a flexible suspension mechanism 42 spanning the front and back of the steering mechanism, in this embodiment, pulleys fixed on two sides of the top end of the upright column 12 are used as the steering mechanism 41, and each steering mechanism 41 is configured with one flexible suspension mechanism 42, in this embodiment, a steel wire rope is used as the flexible suspension mechanism 42 of the connection mechanism 4, the flexible suspension mechanism 42 connects the first adjusting frame mechanism 2 and the counterweight mechanism 5 together to form a balanced state, and the steel wire rope is hidden in the first groove 124 disposed on the surface of the upright column front vertical plate 121.
As shown in fig. 7, the second adjusting frame mechanism 6 is disposed above the first adjusting frame mechanism 2, the main body of the second adjusting frame mechanism 6 is a two-dimensional tilting table 61 for realizing X/Y tilt adjustment, the lower end of the second adjusting frame mechanism 6 is provided with a positioning mechanism 62 matched with the positioning cassette 24, in this embodiment, three steel balls matched with three magnetic mounting and positioning cassettes are embedded in the lower surface of the second adjusting frame mechanism 6 as the positioning mechanism 61, when the second adjusting frame mechanism 6 is placed on the surface of the first adjusting frame mechanism 2, only three steel balls of the additional second adjusting frame mechanism 6 need to be aligned and close to the positioning cassette 24 corresponding to the fixed first adjusting frame mechanism 2, the automatic steel balls are sucked into the clamping grooves by the magnetic force between the two, the positioning action is completed, the steel balls are supported and adsorbed by the three magnetic mounting and positioning cassettes, the stability and reliability of installation are ensured, and can maintain enough suction force to make the two become an integrated five-dimensional adjusting frame.
In order to realize the utility model discloses a vertical interferometer lift alignment frame still is provided with antivibration foot 13 below base 11, and interferometer 7 lays and constitutes inversion laser interferometer or lays and constitute positive laser interferometer on the stand top at base 11 upper surface.
Can find out from above structure, the utility model discloses a vertical interferometer lift adjustment frame, but multidimension degree direction is adjusted, and easily damaged structure protection is hidden, and overall structure has that the frame is steady, the reliability is high, easy operation is convenient, is applicable to the big on a large scale lens surface's of vertical interferometer short-term test.

Claims (9)

1. The utility model provides a vertical interferometer lift alignment frame, its characterized in that, including first supporting mechanism (1), install in can be along first supporting mechanism (1) axial displacement's first alignment frame mechanism (2), with first alignment frame mechanism (2) link to each other and can be on first supporting mechanism (1) magnetism locking mechanism (3) of locking and through coupling mechanism (4) counter weight mechanism (5) of being connected with first alignment frame mechanism (2) on first supporting mechanism (1).
2. The vertical interferometer lift adjustment stand of claim 1, wherein the first support mechanism (1) comprises a base (11) and an axially extending upright (12) vertically mounted on the base (11), the first adjustment stand mechanism (2) and the counterweight mechanism (5) being respectively mounted on both sides of the upright (12); and a first guide rail (21) for axially guiding the first adjusting frame is arranged on the upright post.
3. The vertical interferometer lift adjustment stand of claim 2, wherein the counterweight mechanism (5) comprises a counterweight (52) and a second guide (51) mounted on the column (12) for guiding the counterweight (52) and a linear bearing (53) connecting the second guide and the counterweight.
4. Vertical interferometer lift adjust stand according to claim 3, characterized in that the first stand mechanism (2) comprises an X/Y translation stage (22) and a Z-axis micro-motion fixing structure (23).
5. The vertical interferometer lift adjustment stand of claim 4, wherein the magnetic locking mechanism (3) comprises a fixed steel plate (31) mounted on the upright (12) and a magnetic base fixing mechanism (32) mounted on the first guide rail (21), and the magnetic locking mechanism (3) is fixedly connected with the Z-axis micro-motion fixing structure (23) of the first adjustment stand mechanism (2).
6. The vertical interferometer lifting and adjusting stand according to claim 5, wherein the upper surface of the X/Y translation stage (22) of the first adjusting stand mechanism (2) is provided with a plurality of second supporting mechanisms (25) and positioning clamping seats (24) which are distributed at intervals.
7. The vertical interferometer lifting adjusting frame according to claim 6, wherein a second adjusting frame mechanism (6) is arranged above the X/Y translation stage (22) of the first adjusting frame mechanism (2), and a positioning mechanism (61) matched with the positioning clamping seat (24) is arranged at the lower end of the second adjusting frame mechanism (6).
8. The interferometer riser according to claim 7, wherein the connection means (4) comprises a steering means (41) mounted on top of the column and a flexible suspension means (42) spanning the steering means.
9. The vertical interferometer lifting and adjusting stand according to claim 8, wherein the upright column (12) is provided with a first groove for accommodating the soft suspension mechanism in bilateral symmetry on the surface and a second groove for accommodating the fixed steel plate (31) in the middle.
CN201922459360.9U 2019-12-31 2019-12-31 Vertical interferometer lifting adjusting frame mechanism Active CN211373497U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201922459360.9U CN211373497U (en) 2019-12-31 2019-12-31 Vertical interferometer lifting adjusting frame mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201922459360.9U CN211373497U (en) 2019-12-31 2019-12-31 Vertical interferometer lifting adjusting frame mechanism

Publications (1)

Publication Number Publication Date
CN211373497U true CN211373497U (en) 2020-08-28

Family

ID=72157213

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201922459360.9U Active CN211373497U (en) 2019-12-31 2019-12-31 Vertical interferometer lifting adjusting frame mechanism

Country Status (1)

Country Link
CN (1) CN211373497U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113017839A (en) * 2021-02-01 2021-06-25 武汉中科医疗科技工业技术研究院有限公司 Lifting upright post and surgical robot

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113017839A (en) * 2021-02-01 2021-06-25 武汉中科医疗科技工业技术研究院有限公司 Lifting upright post and surgical robot
CN113017839B (en) * 2021-02-01 2022-07-26 武汉中科医疗科技工业技术研究院有限公司 Lifting upright post and surgical robot

Similar Documents

Publication Publication Date Title
US5388342A (en) Assembly for supporting and guiding a movable member of a machine, particularly a measuring machine
JPH0478927B2 (en)
CN211373497U (en) Vertical interferometer lifting adjusting frame mechanism
JP2012009023A (en) Error compensation system using encoder feedback, error mapping, and air pressure control
CN110640689A (en) High-precision aligning device based on vision system
JP4322762B2 (en) Stage guide mechanism
CN108534731B (en) Lifting driving device and measuring machine adopting same
CN115912812B (en) Linear motor mounting method, linear motor mounting structure and electric equipment
CN205022004U (en) High accuracy, simple and easy 3D printer of assembly
CN211824361U (en) Novel flatness detection equipment
CN112033327A (en) Thickness measuring device
CN210036678U (en) Warping degree tester
CN209615416U (en) A kind of gantry is double to drive structure
CN210189044U (en) Two-dimensional platform driven by magnetic suspension type linear motor
CN107477088B (en) Rocker compensating gear, enclosed type air-float guide rail and locating platform
CN109436367B (en) Device for mounting cylindrical flange
JP2017013210A (en) Biaxial positioning stage apparatus
JP2012242193A (en) Outer dimension measuring instrument
US8984971B2 (en) Parallel slider device with a pneumatic linear guide, control method therefor and measuring device using same
CN212320675U (en) Thickness measuring device
CN218066356U (en) Profile measuring instrument capable of adjusting Z-axis direction measuring range
CN219404225U (en) Displacement table
CN214304865U (en) Precision adjusting platform for optical instrument
CN212444948U (en) Automobile part support for vision measurement
CN218068156U (en) A novel test fixture for electronic product

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant