JPS62262869A - プリント配線基板用露光装置 - Google Patents

プリント配線基板用露光装置

Info

Publication number
JPS62262869A
JPS62262869A JP61106433A JP10643386A JPS62262869A JP S62262869 A JPS62262869 A JP S62262869A JP 61106433 A JP61106433 A JP 61106433A JP 10643386 A JP10643386 A JP 10643386A JP S62262869 A JPS62262869 A JP S62262869A
Authority
JP
Japan
Prior art keywords
light
light source
source lamp
mirror
sensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61106433A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0427543B2 (enrdf_load_stackoverflow
Inventor
Tsugunori Masuda
増田　二紀
Hiromi Umeda
梅田　博美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tamura Corp
Original Assignee
Tamura Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tamura Corp filed Critical Tamura Corp
Priority to JP61106433A priority Critical patent/JPS62262869A/ja
Publication of JPS62262869A publication Critical patent/JPS62262869A/ja
Publication of JPH0427543B2 publication Critical patent/JPH0427543B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP61106433A 1986-05-09 1986-05-09 プリント配線基板用露光装置 Granted JPS62262869A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61106433A JPS62262869A (ja) 1986-05-09 1986-05-09 プリント配線基板用露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61106433A JPS62262869A (ja) 1986-05-09 1986-05-09 プリント配線基板用露光装置

Publications (2)

Publication Number Publication Date
JPS62262869A true JPS62262869A (ja) 1987-11-14
JPH0427543B2 JPH0427543B2 (enrdf_load_stackoverflow) 1992-05-12

Family

ID=14433516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61106433A Granted JPS62262869A (ja) 1986-05-09 1986-05-09 プリント配線基板用露光装置

Country Status (1)

Country Link
JP (1) JPS62262869A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0427543B2 (enrdf_load_stackoverflow) 1992-05-12

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