JPS62260798A - Production of silicon carbide whisker - Google Patents
Production of silicon carbide whiskerInfo
- Publication number
- JPS62260798A JPS62260798A JP61104169A JP10416986A JPS62260798A JP S62260798 A JPS62260798 A JP S62260798A JP 61104169 A JP61104169 A JP 61104169A JP 10416986 A JP10416986 A JP 10416986A JP S62260798 A JPS62260798 A JP S62260798A
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- silicon
- carbide whiskers
- raw material
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 51
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 229910010271 silicon carbide Inorganic materials 0.000 title abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 55
- 239000002994 raw material Substances 0.000 claims abstract description 44
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 42
- 239000010703 silicon Substances 0.000 claims abstract description 42
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 41
- 238000006243 chemical reaction Methods 0.000 claims abstract description 38
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 26
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 26
- 238000010438 heat treatment Methods 0.000 claims abstract description 24
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 23
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims abstract description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000011780 sodium chloride Substances 0.000 claims abstract description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000006229 carbon black Substances 0.000 claims abstract description 6
- 239000003054 catalyst Substances 0.000 claims abstract description 4
- 229910052742 iron Inorganic materials 0.000 claims abstract description 3
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 3
- 239000007787 solid Substances 0.000 claims description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 2
- 229910001508 alkali metal halide Inorganic materials 0.000 claims description 2
- 229910001615 alkaline earth metal halide Inorganic materials 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 150000008045 alkali metal halides Chemical group 0.000 claims 1
- 150000004820 halides Chemical class 0.000 claims 1
- 239000000835 fiber Substances 0.000 abstract description 5
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 4
- 239000001257 hydrogen Substances 0.000 abstract description 4
- 239000011261 inert gas Substances 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 24
- 239000000843 powder Substances 0.000 description 9
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 7
- 239000000047 product Substances 0.000 description 6
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 6
- 238000005452 bending Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical compound [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 description 4
- 150000003377 silicon compounds Chemical class 0.000 description 4
- 238000010532 solid phase synthesis reaction Methods 0.000 description 4
- 239000007809 chemical reaction catalyst Substances 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 239000008240 homogeneous mixture Substances 0.000 description 3
- 230000035484 reaction time Effects 0.000 description 3
- 239000011775 sodium fluoride Substances 0.000 description 3
- 235000013024 sodium fluoride Nutrition 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005469 granulation Methods 0.000 description 2
- 230000003179 granulation Effects 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 2
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 239000001103 potassium chloride Substances 0.000 description 2
- 235000011164 potassium chloride Nutrition 0.000 description 2
- 239000011698 potassium fluoride Substances 0.000 description 2
- 235000003270 potassium fluoride Nutrition 0.000 description 2
- 239000012256 powdered iron Substances 0.000 description 2
- -1 silicon halides Chemical class 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 238000001308 synthesis method Methods 0.000 description 2
- 208000016261 weight loss Diseases 0.000 description 2
- 239000013585 weight reducing agent Substances 0.000 description 2
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000001110 calcium chloride Substances 0.000 description 1
- 229910001628 calcium chloride Inorganic materials 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 229910001629 magnesium chloride Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- CHWRSCGUEQEHOH-UHFFFAOYSA-N potassium oxide Chemical compound [O-2].[K+].[K+] CHWRSCGUEQEHOH-UHFFFAOYSA-N 0.000 description 1
- 229910001950 potassium oxide Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 235000002639 sodium chloride Nutrition 0.000 description 1
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
- 229910001948 sodium oxide Inorganic materials 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/005—Growth of whiskers or needles
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、高純度の炭化ケイ素ウィスカーを低廉に製造
する方法に関し、詳しくは、ケイ素含有原料と粉末状炭
素原料との加熱による炭化ケイ素ウィスカーの生成反応
において、ケイ素含有原料として、二酸化ケイ素を所定
量含有する成形体を繰り返して用いることによって、未
反応二酸化ケイ素を含有しない高純度炭化ケイ素ウィス
カーを低廉に製造し得る方法に関する。Detailed Description of the Invention (Industrial Application Field) The present invention relates to a method for manufacturing high-purity silicon carbide whiskers at low cost, and more particularly, to a method for producing silicon carbide whiskers by heating a silicon-containing raw material and a powdered carbon raw material. The present invention relates to a method for inexpensively producing high-purity silicon carbide whiskers containing no unreacted silicon dioxide by repeatedly using a molded article containing a predetermined amount of silicon dioxide as a silicon-containing raw material in the production reaction.
(従来の技術)
炭化ケイ素ウィスカーは、強度が大きいので、この性質
を利用し、強化材として種々の用途が期待されている。(Prior Art) Silicon carbide whiskers have high strength and are expected to be used in various ways as reinforcing materials by utilizing this property.
このような炭化ケイ素ウィスカーの製造方法としては、
従来より、気相合成法と固相合成法とが代表的に知られ
ている。気相合成法としては、ハロゲン化ケイ素と炭化
水素との混合ガス、又は炭素及びハロゲンを含む有機ケ
イ素化合物ガスを水素気流中で熱分解する方法や、ケイ
素化合物を仕込んだ反応炉内に炭化水素や塩化水素等の
ガスを流通させることによって反応炉内に炭化ケイ素ウ
ィスカーを生成させる方法(特公昭52−28757号
公報)、二酸化ケイ素、炭素粉末、フッ化ナトリウム等
を充填したるつぼを不活性雰囲気中で加熱し、気化した
一酸化ケイ素や一酸化炭素を低温域で反応させて、炭化
ケイ素ウィスカーを析出成長させる方法(特公昭54−
15555号公報、特開昭56−100125号公報)
等が知られている。しかし、これらの方法はいずれも、
バッチ方式によらざるを得す、炭化ケイ素ウィスカーを
連続方式にて得ることができないので、炭化ケイ素ウィ
スカーを量産するには不適当である。The method for manufacturing such silicon carbide whiskers is as follows:
Conventionally, gas phase synthesis method and solid phase synthesis method are typically known. Gas phase synthesis methods include thermally decomposing a mixed gas of silicon halides and hydrocarbons, or organosilicon compound gas containing carbon and halogen, in a hydrogen stream, and adding hydrocarbons to a reactor containing silicon compounds. A method of generating silicon carbide whiskers in a reactor by circulating a gas such as hydrogen chloride or hydrogen chloride (Japanese Patent Publication No. 52-28757), a crucible filled with silicon dioxide, carbon powder, sodium fluoride, etc. is placed in an inert atmosphere. A method of precipitating and growing silicon carbide whiskers by heating the vaporized silicon monoxide and carbon monoxide in a low temperature range (Special Publication No. 1973-
15555, Japanese Unexamined Patent Publication No. 1983-100125)
etc. are known. However, all of these methods
Since silicon carbide whiskers cannot be obtained continuously by a batch method, it is not suitable for mass production of silicon carbide whiskers.
一方、固相合成法としては、粉末状ケイ素含有原料と粉
末状炭素含有原料とを均一に混合し、これをアチソン型
加熱炉において加熱して、炭化ケイ素ウィスカーを生成
させる方法(特開昭58−145700号公報)粉末状
ケイ素含有原料と炭素含有原料を混合して、成形し、こ
の成形体を匣鉢に入れてトレープッシャ一式加熱炉にて
加熱する方法(特開昭58−20799号公報、特開昭
58−91010号公報、特公昭50−25907号公
報)等が知られている。このような固相合成法のうち、
前者の方法は、バッチ方式であるために量産には適さな
い。従って、現在、工業的規模での炭化ケイ素ウィスカ
ーの製造には、殆どの場合、後者による連続製造方法が
採用されている。On the other hand, as a solid phase synthesis method, a powdered silicon-containing raw material and a powdered carbon-containing raw material are uniformly mixed and heated in an Acheson-type heating furnace to produce silicon carbide whiskers (Japanese Patent Laid-Open No. 58 -145700 Publication) A method in which a powdered silicon-containing raw material and a carbon-containing raw material are mixed and molded, and the molded body is placed in a sagger and heated in a heating furnace equipped with a tray pusher (Japanese Unexamined Patent Publication No. 58-20799) , Japanese Unexamined Patent Publication No. 58-91010, Japanese Patent Publication No. 50-25907), etc. are known. Among these solid phase synthesis methods,
The former method is not suitable for mass production because it is a batch method. Therefore, the latter continuous production method is currently employed in most cases to produce silicon carbide whiskers on an industrial scale.
かかる固相合成法において、上記ケイ素含有原料として
は、従来より、籾から(特開昭53−113300号公
報、特開昭57−209813号公報)、シリカゲル(
特開昭58−145700号公報)、クリスフライト、
シラス(特開昭58−20799号公報)等が知られて
いるが、しかし、これらをケイ素含有原料として用いる
場合は、予め減量処理や造粒成形処理を必要としたり、
或いは原料として高価である等の問題があるうえに、生
成した炭化ケイ素ウィスカーとの分離や、ケイ素含有原
料としての操り返し使用が必ずしも容易ではない。In this solid-phase synthesis method, the silicon-containing raw material has conventionally been derived from rice (Japanese Patent Laid-Open Nos. 53-113300 and 57-209813), silica gel (
JP-A No. 58-145700), Chris Flight,
Shirasu (Japanese Unexamined Patent Publication No. 58-20799) and the like are known, but when these are used as silicon-containing raw materials, they require preliminary weight reduction treatment or granulation molding treatment,
Alternatively, it has problems such as being expensive as a raw material, and it is not always easy to separate it from the generated silicon carbide whiskers or to reuse it as a silicon-containing raw material.
しかも、これらの従来の方法によれば、繊維長が長く、
且つ、アスペクト比が高い炭化ケイ素ウィスカーを得る
ことが困難であるほか、得られる炭化ケイ素ウィスカー
は、副生ずるシリカを含有して、一般に純度が低い。Moreover, according to these conventional methods, the fiber length is long;
In addition, it is difficult to obtain silicon carbide whiskers with a high aspect ratio, and the obtained silicon carbide whiskers generally have low purity because they contain silica as a by-product.
(発明の目的)
本発明者らは、炭化ケイ素ウィスカーの製造における上
記した問題を解決するために鋭意研究した結果、粉末状
のケイ素含有原料を予め所定形状に成形し、これを水素
ガス雰囲気下に粉末状炭素含有原料と共に高温に加熱す
ることによって、上記成形体からケイ素化合物が選択的
に気化し、炭素と反応して、屈曲のない直線状であって
1.且つ、長い繊維長と高いアスペクト比を有し、更に
、極めて高純度である炭化ケイ素ウィスカーを高収率高
生産性にて得ることができると共に、特に、上記成形体
が二酸化ケイ素を所定の範囲にて含有するとき、この成
形体が粉末状炭素原料との加熱反応において何ら変形せ
ず、従って、繰り返して使用することができることを見
出して、本発明に至ったものである。(Purpose of the Invention) As a result of intensive research to solve the above-mentioned problems in the production of silicon carbide whiskers, the present inventors formed a powdered silicon-containing raw material into a predetermined shape in advance, and molded it in a hydrogen gas atmosphere. By heating the molded body to a high temperature together with a powdered carbon-containing raw material, the silicon compound is selectively vaporized from the molded body, reacts with the carbon, and forms a linear shape with no bends. Moreover, silicon carbide whiskers having a long fiber length and a high aspect ratio can be obtained with extremely high purity in high yield and productivity, and in particular, the molded article can contain silicon dioxide within a predetermined range. The present invention was achieved based on the discovery that the molded body does not undergo any deformation during the heating reaction with the powdered carbon raw material, and therefore can be used repeatedly.
従って、本発明は、ケイ素含有原料として、所定の範囲
にて二酸化ケイ素を含有する成形体を用いることによっ
て、屈曲のない直線状であって、且つ、長い繊維長と高
いアスペクト比を有し、更に、極めて高純度である炭化
ケイ素ウィスカーを低度に製造し得る方法を提供するこ
とを目的とする。Therefore, the present invention uses a molded article containing silicon dioxide in a predetermined range as a silicon-containing raw material, so that it has a straight shape without bending, a long fiber length, and a high aspect ratio. Furthermore, it is an object of the present invention to provide a method by which silicon carbide whiskers of extremely high purity can be produced at low levels.
(発明の構成)
本発明による炭化ケイ素ウィスカーの製造方法は、固体
状のケイ素含有原料と炭素含有原料とを加熱反応させて
、炭化ケイ素ウィスカーを製造する方法において、二酸
化ケイ素を90重量%以上又は60重量%以下の範囲で
含有するケイ素含有成形体と粉末状炭素原料とを水素ガ
ス雰囲気下に所定の反応温度に加熱することを特徴とす
る。(Structure of the Invention) A method for producing silicon carbide whiskers according to the present invention is a method for producing silicon carbide whiskers by heating and reacting a solid silicon-containing raw material and a carbon-containing raw material. The method is characterized in that a molded body containing silicon in an amount of 60% by weight or less and a powdered carbon raw material are heated to a predetermined reaction temperature in a hydrogen gas atmosphere.
本発明において用いるケイ素含有成形体は、二酸化ケイ
素を含有する任意の材料を必要に応じて有機質バインダ
ーと共に混練し、適宜の手段、例えば、押出成形、プレ
ス成形、造粒等の手段にて成形し、焼成して、板、棒、
管、筒、球、線状及びこれらの組み合わせとしての形状
を有する成形体に成形し、焼成することによって得るこ
とができる。ここに、ケイ素含有材料としては、特に制
限されるものではないが、低度なケイ石、恨砂、ロウ石
、粘土等を用いることが有利である。The silicon-containing molded article used in the present invention is prepared by kneading any material containing silicon dioxide with an organic binder as necessary, and molding it by an appropriate means such as extrusion molding, press molding, granulation, etc. , fired, plates, bars,
It can be obtained by molding into a molded body having a shape of a tube, cylinder, sphere, line, or a combination thereof, and firing the molded body. Here, the silicon-containing material is not particularly limited, but it is advantageous to use low-grade silica, sand, waxite, clay, and the like.
特に、本発明においては、上記ケイ素含有成形体の形状
は、管状や箱型等の容器状であるとき、反応容器として
用いることができるので好ましい。In particular, in the present invention, it is preferable that the shape of the silicon-containing molded body is a container shape such as a tubular shape or a box shape because it can be used as a reaction vessel.
即ち、一般に、固体のケイ素含有原料と粉末状炭素含有
原料とを加熱反応させて、炭化ケイ素ウィスカーを製造
する方法においては、これら原料を反応容器内に充填し
、加熱手段を備えた反応管内、例えば、電気炉内に挿入
して、所定の温度に加熱するが、上記ケイ素含有成形体
が容器状であるときは、成形体は反応混合物を収容する
反応容器であると同時に、反応原料でもあるので、反応
炉における加熱によって、成形体からケイ素化合物が選
択的に気化し、炭素含有原料から気化した一酸化炭素と
反応して、炭化ケイ素ウィスカーが生成し、析出するの
で、炭化ケイ素ウィスカーを成形体から容易に分離する
ことができる。That is, in general, in a method for producing silicon carbide whiskers by heating and reacting a solid silicon-containing raw material and a powdery carbon-containing raw material, these raw materials are filled into a reaction vessel, and the reaction tube equipped with a heating means is heated. For example, it is inserted into an electric furnace and heated to a predetermined temperature, but if the silicon-containing molded body is in the shape of a container, the molded body is not only a reaction vessel containing the reaction mixture but also a reaction raw material. Therefore, by heating in the reactor, the silicon compound is selectively vaporized from the compact and reacts with the vaporized carbon monoxide from the carbon-containing raw material to generate and precipitate silicon carbide whiskers. Can be easily separated from the body.
しかし、酸化ケイ素含有成形体は、例えば、任意形状の
断面を有する棒状や板状であってもよい。However, the silicon oxide-containing molded article may be, for example, rod-shaped or plate-shaped with an arbitrary cross section.
かかる成形体を用いる場合は、成形体はその他の所要の
反応原料と共に適宜の反応容器、例えば、アルミナや黒
鉛からなる容器に充填されて、反応炉内で加熱される。When such a molded body is used, the molded body is packed together with other necessary reaction raw materials into a suitable reaction vessel, for example, a vessel made of alumina or graphite, and heated in a reactor.
本発明においては、ケイ素含有成形体は、二酸化ケイ素
を90重量%以上又は60重量%以下の範囲で含有する
ことが必要であり、好ましくは、残余が主としてアルミ
ナからなることが好ましい。In the present invention, the silicon-containing molded article needs to contain silicon dioxide in a range of 90% by weight or more or 60% by weight or less, and preferably, the remainder mainly consists of alumina.
特に、ケイ素含有成形体は、二酸化ケイ素(及びアルミ
ナ)を主成分とし、二酸化ケイ素及びアルミナ以外の酸
化物が10重量%以下である組成を有することが好まし
い。In particular, it is preferable that the silicon-containing molded article has a composition in which silicon dioxide (and alumina) is the main component, and oxides other than silicon dioxide and alumina are 10% by weight or less.
その理由は必ずしも明確ではないが、二酸化ケイ素含有
量が上記範囲にある成形体をケイ素原料として用いると
き、特に、良好な収率にて炭化ケイ素ウィスカーを得る
ことができるのみならず、この成形体は、炭素原料との
加熱反応によって、その重量は減少するにもかかわらず
、内部での気泡発生や、割れ、膨れ、曲がり等の変形が
起こらないので、二酸化ケイ素含有成形体として、繰り
返して使用することができる。The reason for this is not necessarily clear, but when a molded body with a silicon dioxide content in the above range is used as a silicon raw material, not only can silicon carbide whiskers be obtained with a particularly good yield, but also the molded body Although its weight decreases due to the heating reaction with the carbon raw material, it does not generate internal bubbles or undergo deformation such as cracking, blistering, or bending, so it can be used repeatedly as a silicon dioxide-containing molded product. can do.
これに対して、二酸化ケイ素含有量が上記範囲にない成
形体を用いるとき、この成形体は、炭素原料との加熱反
応によって、内部での気泡発生や、割れ、膨れ、曲がり
等の変形が著しく、従って、二酸化ケイ素含有成形体と
して、繰り返して使用することができない。しかも、得
られる炭化ケイ素ウィスカーがその直径や長さにおいて
ばらつきが大きく、或いは屈曲状物を含んで、針状性に
劣る。On the other hand, when using a molded body whose silicon dioxide content does not fall within the above range, the molded body undergoes significant deformation such as generation of bubbles, cracking, blistering, and bending within the molded body due to the heating reaction with the carbon raw material. Therefore, it cannot be used repeatedly as a silicon dioxide-containing molded article. Moreover, the obtained silicon carbide whiskers have large variations in diameter and length, or contain bent parts, and are poor in needle-like properties.
このように、本発明の方法によれば、ケイ素含有原料を
その成形体として用いるとき、この成形体から選択的に
ケイ素化合物が気化し、炭素と反応して、炭化ケイ素ウ
ィスカーを生成するので、不純物が数%以下の高純度の
炭化ケイ素ウィスカーを得ることができる。しかも、生
成する炭化ケイ素ウィスカーは、成形体から分離するこ
とが非常に容易であるので、生産性が高い。As described above, according to the method of the present invention, when a silicon-containing raw material is used as a molded body, the silicon compound is selectively vaporized from the molded body and reacts with carbon to produce silicon carbide whiskers. High purity silicon carbide whiskers containing impurities of several percent or less can be obtained. Furthermore, the silicon carbide whiskers produced are very easy to separate from the molded body, resulting in high productivity.
粉末状炭素含有原料としては、カーボンブラックや粉末
活性炭等を用いることができるが、これら炭素原料は、
微粉であって、嵩高いほど反応性が高いので、特にカー
ボンブラックが好ましい。Carbon black, powdered activated carbon, etc. can be used as powdered carbon-containing raw materials, but these carbon raw materials are
Carbon black is particularly preferred because it is a fine powder and the more bulky the powder, the higher the reactivity.
本発明の方法においては、反応触媒を用いることが好ま
しい。反応触媒としては、鉄、ニッケル、コバルト、又
はこれらの化合物、例えば、酸化物、硝酸塩、塩化物、
硫酸塩、炭酸塩等が粉末又は水溶液として炭素原料に混
合されて用いられる。酸化鉄は、本発明において特に好
ましく用いることができる触媒である。In the method of the present invention, it is preferred to use a reaction catalyst. As a reaction catalyst, iron, nickel, cobalt, or compounds thereof, such as oxides, nitrates, chlorides,
Sulfates, carbonates, etc. are used as powders or aqueous solutions mixed with carbon raw materials. Iron oxide is a catalyst that can be particularly preferably used in the present invention.
更に、本発明においては、反応を促進すると共に、高純
度で且つアスペクト比が高く、更に、嵩密度の小さい炭
化ケイ素ウィスカーを得るために、反応促進剤が用いら
れる。このような反応促進剤としては、アルカリ金属又
はアルカリ土類金属のハロゲン化物、特に、塩化物又は
フッ化物を好適に用いることができる。従って、具体例
として、塩化リチウム、塩化ナトリウム、塩化カリウム
、塩化カルシウム、塩化マグネシウム、フッ化リチウム
、フッ化ナトリウム、フッ化カリウム等を挙げることが
できる。これらのなかでも特に好ましい反応促進剤は、
塩化ナトリウム、塩化カリウム、フッ化ナトリウム及び
フッ化カリウムである。Furthermore, in the present invention, a reaction accelerator is used in order to accelerate the reaction and obtain silicon carbide whiskers with high purity, high aspect ratio, and low bulk density. As such a reaction accelerator, an alkali metal or alkaline earth metal halide, particularly a chloride or a fluoride, can be suitably used. Therefore, specific examples include lithium chloride, sodium chloride, potassium chloride, calcium chloride, magnesium chloride, lithium fluoride, sodium fluoride, potassium fluoride, and the like. Among these, particularly preferred reaction accelerators are:
These are sodium chloride, potassium chloride, sodium fluoride and potassium fluoride.
本発明の方法においては、上記ケイ素含有成形体と粉末
状炭素原料とを水素ガス雰囲気下に所定の反応温度に加
熱することによって、炭化ケイ素ウィスカーを得る。こ
こに、水素ガス雰囲気とは、水素ガスのみの場合だけで
なく、20容量%以上の水素を含有し、残部が非酸化性
不活性ガスである雰囲気をも含むものとする。In the method of the present invention, silicon carbide whiskers are obtained by heating the silicon-containing compact and powdered carbon raw material to a predetermined reaction temperature in a hydrogen gas atmosphere. Here, the hydrogen gas atmosphere includes not only hydrogen gas but also an atmosphere containing 20% by volume or more of hydrogen, with the remainder being a non-oxidizing inert gas.
本発明の方法において、反応温度は少なくとも1400
℃以上であり、通常、好ましくは1500〜1700°
Cの範囲である。反応温度が1400°Cよりも低いと
きは、炭化ケイ素ウィスカーの生成が不十分であり、未
反応のケイ素含有原料の残留が多い。一方、余りに高温
としても、収率の向上や不純物の低減の効果カリ色和す
ると共に、製造費用の上昇を招く。従って、反応温度の
上限は、通常、1700℃程度が好ましい。加熱手段は
任意であるが、電気加熱が使用しやすい。In the method of the invention, the reaction temperature is at least 1400
℃ or higher, usually preferably 1500 to 1700°
It is in the range of C. When the reaction temperature is lower than 1400°C, silicon carbide whiskers are insufficiently produced and a large amount of unreacted silicon-containing raw material remains. On the other hand, if the temperature is too high, the effects of improving the yield and reducing impurities will be diminished, and the production cost will increase. Therefore, the upper limit of the reaction temperature is usually preferably about 1700°C. Although the heating means is arbitrary, electric heating is easy to use.
反応時間は30分乃至10時間であり、通常、2〜6時
間程度で十分である。反応時間が余りに短いときは、未
反応原料が多量に残留し、一方、余りに長時間反応させ
ても、炭化ケイ素ウィスカーの収量の増加が僅かである
ので、生産性及び熱工」ルギー費用の観点からみて、何
ら利点がない。The reaction time is 30 minutes to 10 hours, and usually about 2 to 6 hours is sufficient. If the reaction time is too short, a large amount of unreacted raw materials will remain; on the other hand, if the reaction time is too long, the yield of silicon carbide whiskers will only increase slightly, which will reduce productivity and heat engineering costs. From my point of view, there is no advantage.
本発明の方法においては、前記したように、所定の温度
で炭化ケイ素ウィスカーを生成させた後、加熱を停止し
、反応生成物を反応管から取り出し、次いで、この反応
生成物をマツフル炉内にて600〜1100°Cの温度
に加熱して、未反応炭素原料を熱焼焼却すれば、炭化ケ
イ素ウィスカーを得ることができる。In the method of the present invention, as described above, after silicon carbide whiskers are generated at a predetermined temperature, heating is stopped, the reaction product is taken out from the reaction tube, and then this reaction product is placed in a Matsufuru furnace. Silicon carbide whiskers can be obtained by heating to a temperature of 600 to 1100° C. and thermally incinerating the unreacted carbon raw material.
(発明の効果)
このようにして、本発明の方法によれば、一般に、屈曲
のない直線状であって、繊維長が長く、且つ、アスペク
ト比も高い炭化ケイ素ウィスカーを製造することができ
る。しかも、本発明の方法によれば、二酸化ケイ素含有
量が所定の範囲にあるケイ素含有成形体をケイ素原料と
して用いることによって、この成形体を繰り返して用い
ることができるので、炭化ケイ素ウィスカーを低度に製
造することができる。(Effects of the Invention) As described above, according to the method of the present invention, silicon carbide whiskers that are generally straight without bending, have a long fiber length, and have a high aspect ratio can be produced. Moreover, according to the method of the present invention, by using a silicon-containing molded body with a silicon dioxide content within a predetermined range as a silicon raw material, this molded body can be used repeatedly, so that silicon carbide whiskers can be reduced to a low level. can be manufactured.
(実施例)
以下に実施例を挙げて本発明を説明するが、本発明はこ
れら実施例により何ら限定されるものではない。(Examples) The present invention will be described below with reference to Examples, but the present invention is not limited to these Examples in any way.
実施例1
カーボンブラック粉末1.5g、反応触媒としての微粉
状酸化鉄0.005 g及び反応促進剤としての塩化ナ
トリウム粉末0.5gをボールミルにて1時間攪拌して
均一な混合物とした。Example 1 1.5 g of carbon black powder, 0.005 g of finely divided iron oxide as a reaction catalyst, and 0.5 g of sodium chloride powder as a reaction promoter were stirred in a ball mill for 1 hour to form a homogeneous mixture.
反応容器を兼ねるケイ素含有成形体として二酸化ケイ素
49重量%、アルミナ45重量%及び酸化マグネシウム
、酸化カルシウム、酸化カリウム、酸化ナトリウム等の
その他の酸化物6重量%からなり、外径25龍、内径2
0龍及び長さ100m+gのムライト系ケイ素含有成形
体に上記混合物を充填し、これを電気炉内にて水素雰囲
気下、1500°Cの温度に4時間加熱した。The silicon-containing molded body, which also serves as a reaction vessel, consists of 49% by weight of silicon dioxide, 45% by weight of alumina, and 6% by weight of other oxides such as magnesium oxide, calcium oxide, potassium oxide, and sodium oxide, and has an outer diameter of 25 mm and an inner diameter of 2 mm.
A mullite-based silicon-containing molded body having a length of 0.0 mm and a length of 100 m+g was filled with the above mixture, and this was heated in an electric furnace to a temperature of 1500° C. in a hydrogen atmosphere for 4 hours.
その結果、ケイ素含有成形体は、その重量が2゜1g減
少したことが見出されたが、しかし、何らの変形も認め
られず、再度、使用することができた。As a result, it was found that the weight of the silicon-containing molded article decreased by 2.1 g, but no deformation was observed and it was possible to use it again.
他方、上記反応によって、径0.5〜1μm1長さ50
〜100μm、針状β型立方最密充填の完全な単結晶1
.2gを得ることができた。On the other hand, by the above reaction, a diameter of 0.5 to 1 μm and a length of 50
~100μm, acicular β-type cubic close-packed perfect single crystal 1
.. I was able to obtain 2g.
実施例2
反応容器を兼ねるケイ素含有成形体として二酸化ケイ素
97重量%、アルミナ1.5重量%及びその他の酸化物
1.5重量%からなる高純度シリカ製容器に、実施例1
と同様にして調製したカーボブラック粉末1.2g、微
粉状酸化鉄0.005g及び塩化ナトリウム粉末0.4
gからなる均一な混合物を充填し、実施例工と同じ条件
下に加熱反応させた。Example 2 A container made of high-purity silica consisting of 97% by weight of silicon dioxide, 1.5% by weight of alumina, and 1.5% by weight of other oxides was used as a silicon-containing molded body that also served as a reaction container.
Carboblack powder 1.2g, finely powdered iron oxide 0.005g and sodium chloride powder 0.4g prepared in the same manner as above.
A homogeneous mixture consisting of g was charged and reacted by heating under the same conditions as in the example.
その結果、ケイ素含有成形体は、その重量が2゜7g減
少したことが見出されたが、しかし、割れ、膨れ、曲が
り等の異常や変形は何ら認められず、再度、使用するこ
とができた。As a result, it was found that the weight of the silicon-containing molded product had decreased by 2.7g, but no abnormality or deformation such as cracking, blistering, or bending was observed, and the product could not be used again. Ta.
他方、上記反応によって、実施例1とほぼ同じ性質形状
の炭化ケイ素ウィスカー1.6gを得ることができた。On the other hand, 1.6 g of silicon carbide whiskers having substantially the same properties and shape as in Example 1 could be obtained by the above reaction.
また、上記反応を更に4回繰り返したところ、4回目の
反応によって、ケイ素含有成形体の重量減少は1.9g
とやや城少し、これに応じて、炭化ケイ素ウィスカーの
収量も1.1gとやや減少したが、その形状性質は、実
施例2によるものと全く同じであった。In addition, when the above reaction was repeated four more times, the weight reduction of the silicon-containing molded product was 1.9 g by the fourth reaction.
Correspondingly, the yield of silicon carbide whiskers was slightly reduced to 1.1 g, but the shape and properties were exactly the same as those in Example 2.
以上のようにして、二酸化ケイ素含有量の種々異なるケ
イ素含有成形体を用いて、炭化ケイ素ウィスカーの製造
を行なった。ケイ素含有成形体における二酸化ケイ素含
有量と成形体の変形との関係を図面に示す。As described above, silicon carbide whiskers were produced using silicon-containing molded bodies having various silicon dioxide contents. The relationship between the silicon dioxide content in a silicon-containing molded body and the deformation of the molded body is shown in the drawing.
比較例1
二酸化ケイ素77重量%、アルミナ21重量%及びその
他の酸化物2重量%からなる断面10IIm角、長さ1
00++謙の棒状のケイ素含有成形体を実施例1と同様
にして調製したカーボンブラック粉末1.5g、微粉状
酸化鉄0.005 g及び塩化ナトリウム粉末0.4g
からなる均一な混合物と共に実施例2と同じ条件下に加
熱反応させた。Comparative Example 1 Cross section 10IIm square, length 1, consisting of 77% by weight of silicon dioxide, 21% by weight of alumina, and 2% by weight of other oxides.
1.5 g of carbon black powder, 0.005 g of finely powdered iron oxide, and 0.4 g of sodium chloride powder prepared from a rod-shaped silicon-containing molded body of 00++ Ken in the same manner as in Example 1.
A heating reaction was carried out under the same conditions as in Example 2 with a homogeneous mixture consisting of:
その結果、ケイ素含有成形体は、その重量が1゜1g減
少すると共に、局部的にガラス化し、しかも、成形体内
部に気泡が発生して、成形体は膨らんで、著しく変形し
ているので、その再使用は困難であった。As a result, the weight of the silicon-containing molded product decreased by 1.1 g, and it also became locally vitrified. Furthermore, air bubbles were generated inside the molded product, causing it to swell and become significantly deformed. Its reuse was difficult.
他方、上記反応によって、炭化ケイ素ウィスカー0.6
gを得ることができたが、この炭化ケイ素ウィスカー
は、屈曲状物を含み、また、寸法のばらつきも大きいこ
とが認められた。On the other hand, by the above reaction, silicon carbide whiskers 0.6
g was successfully obtained, but it was recognized that the silicon carbide whiskers contained bent parts and also had large dimensional variations.
図面は、ケイ素含有成形体における二酸化ケイ素含有量
と、反応後のこの成形体の変形との関係を示すグラフで
ある。
特許出願人 株式会社神戸製鋼所
同 鐘紡株式会社
代理人 弁理士 牧 野 逸 部
S、= o2含ブ神(塾量勾The drawing is a graph showing the relationship between the silicon dioxide content in a silicon-containing molded body and the deformation of this molded body after reaction. Patent Applicant: Kobe Steel, Ltd., Kanebo Co., Ltd., Agent: Patent Attorney: Ittsu Makino
Claims (9)
反応させて、炭化ケイ素ウィスカーを製造する方法にお
いて、二酸化ケイ素を90重量%以上又は60重量%以
下の範囲で含有するケイ素含有成形体と粉末状炭素原料
とを水素ガス雰囲気下に所定の反応温度に加熱すること
を特徴とする炭化ケイ素ウィスカーの製造方法。(1) A silicon-containing molded article containing silicon dioxide in a range of 90% by weight or more and 60% by weight or less in a method for producing silicon carbide whiskers by heating a solid silicon-containing raw material and a carbon-containing raw material to react. and a powdered carbon raw material are heated to a predetermined reaction temperature in a hydrogen gas atmosphere.
炭であることを特徴とする特許請求の範囲第1項記載の
炭化ケイ素ウィスカーの製造方法。(2) The method for producing silicon carbide whiskers according to claim 1, wherein the powdered carbon raw material is carbon black or powdered activated carbon.
反応促進剤の存在下に加熱することを特徴とする特許請
求の範囲第1項記載の炭化ケイ素ウィスカーの製造方法
。(3) The method for producing silicon carbide whiskers according to claim 1, which comprises heating the silicon-containing compact and the powdered carbon raw material in the presence of a catalyst and a reaction promoter.
物であることを特徴とする特許請求の範囲第3項記載の
炭化ケイ素ウィスカーの製造方法。(4) The method for producing silicon carbide whiskers according to claim 3, wherein the catalyst is iron, nickel, cobalt, or a compound thereof.
カリ土類金属ハロゲン化物であることを特徴とする特許
請求の範囲第3項記載の炭化ケイ素ウィスカーの製造方
法。(5) The method for producing silicon carbide whiskers according to claim 3, wherein the reaction accelerator is an alkali metal halide or an alkaline earth metal halide.
特徴とする特許請求の範囲第5項記載の炭化ケイ素ウィ
スカーの製造方法。(6) The method for producing silicon carbide whiskers according to claim 5, wherein the halide is a chloride or a fluoride.
する特許請求の範囲第5項記載の炭化ケイ素ウィスカー
の製造方法。(7) The method for producing silicon carbide whiskers according to claim 5, wherein the reaction accelerator is sodium chloride.
る特許請求の範囲第1項記載の炭化ケイ素ウィスカーの
製造方法。(8) The method for producing silicon carbide whiskers according to claim 1, wherein the reaction temperature is 1400°C or higher.
とを特徴とする特許請求の範囲第1項記載の炭化ケイ素
ウィスカーの製造方法。(9) The method for producing silicon carbide whiskers according to claim 1, wherein the silicon-containing molded body is formed in a reaction vessel.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61104169A JPS62260798A (en) | 1986-05-06 | 1986-05-06 | Production of silicon carbide whisker |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61104169A JPS62260798A (en) | 1986-05-06 | 1986-05-06 | Production of silicon carbide whisker |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62260798A true JPS62260798A (en) | 1987-11-13 |
Family
ID=14373537
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61104169A Pending JPS62260798A (en) | 1986-05-06 | 1986-05-06 | Production of silicon carbide whisker |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62260798A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0323300A (en) * | 1989-06-17 | 1991-01-31 | Toshiba Ceramics Co Ltd | Production of silicon carbide whisker |
JPH0383900A (en) * | 1989-07-06 | 1991-04-09 | Soc Atochem | Single-crystal silicon-carbide fiber and its manufacture |
-
1986
- 1986-05-06 JP JP61104169A patent/JPS62260798A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0323300A (en) * | 1989-06-17 | 1991-01-31 | Toshiba Ceramics Co Ltd | Production of silicon carbide whisker |
JPH0383900A (en) * | 1989-07-06 | 1991-04-09 | Soc Atochem | Single-crystal silicon-carbide fiber and its manufacture |
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