JPS6226035U - - Google Patents
Info
- Publication number
- JPS6226035U JPS6226035U JP11624085U JP11624085U JPS6226035U JP S6226035 U JPS6226035 U JP S6226035U JP 11624085 U JP11624085 U JP 11624085U JP 11624085 U JP11624085 U JP 11624085U JP S6226035 U JPS6226035 U JP S6226035U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- wafer
- manipulator
- movement range
- stored
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 9
- 230000032258 transport Effects 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11624085U JPS6226035U (cs) | 1985-07-29 | 1985-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11624085U JPS6226035U (cs) | 1985-07-29 | 1985-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6226035U true JPS6226035U (cs) | 1987-02-17 |
Family
ID=31000643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11624085U Pending JPS6226035U (cs) | 1985-07-29 | 1985-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6226035U (cs) |
-
1985
- 1985-07-29 JP JP11624085U patent/JPS6226035U/ja active Pending
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