JPS646044U - - Google Patents
Info
- Publication number
- JPS646044U JPS646044U JP10146587U JP10146587U JPS646044U JP S646044 U JPS646044 U JP S646044U JP 10146587 U JP10146587 U JP 10146587U JP 10146587 U JP10146587 U JP 10146587U JP S646044 U JPS646044 U JP S646044U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- semiconductor wafer
- stage
- cleaning member
- testing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Cleaning In General (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10146587U JPS646044U (cs) | 1987-06-30 | 1987-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10146587U JPS646044U (cs) | 1987-06-30 | 1987-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS646044U true JPS646044U (cs) | 1989-01-13 |
Family
ID=31330486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10146587U Pending JPS646044U (cs) | 1987-06-30 | 1987-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS646044U (cs) |
-
1987
- 1987-06-30 JP JP10146587U patent/JPS646044U/ja active Pending
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