JPS6225877U - - Google Patents

Info

Publication number
JPS6225877U
JPS6225877U JP11979586U JP11979586U JPS6225877U JP S6225877 U JPS6225877 U JP S6225877U JP 11979586 U JP11979586 U JP 11979586U JP 11979586 U JP11979586 U JP 11979586U JP S6225877 U JPS6225877 U JP S6225877U
Authority
JP
Japan
Prior art keywords
probe
fixed
insulating plate
pipe
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11979586U
Other languages
Japanese (ja)
Other versions
JPS6236139Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11979586U priority Critical patent/JPS6236139Y2/ja
Publication of JPS6225877U publication Critical patent/JPS6225877U/ja
Application granted granted Critical
Publication of JPS6236139Y2 publication Critical patent/JPS6236139Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案に係る多探針形プローブステー
シヨンの一実施例の正面図、第２図はその平面図
、第３図は絶縁板の部分の斜視図、第４図は探針
パイプの断面図、第５図、第６図はそれぞれ他の
実施例の正面図、第７図はプリント基板の他の実
施例の平面図である。 １……基台、２……ウエハ、３，４，５……プ
リント基板、６……支柱ねじ、７，８，９……ア
ーム、１０，１１，１２……取付体、１３，１４
，１５……ソケツト、２０……絶縁板、２１……
探針パイプ、２２……探針、２３……リード線、
２４……スプリング。 Fig. 1 is a front view of an embodiment of a multi-probe probe station according to the present invention, Fig. 2 is a plan view thereof, Fig. 3 is a perspective view of the insulating plate portion, and Fig. 4 is a view of the probe pipe. The sectional view, FIGS. 5 and 6 are front views of other embodiments, and FIG. 7 is a plan view of another embodiment of the printed circuit board. 1... Base, 2... Wafer, 3, 4, 5... Printed circuit board, 6... Support screw, 7, 8, 9... Arm, 10, 11, 12... Mounting body, 13, 14
, 15... socket, 20... insulating plate, 21...
Probe pipe, 22... Probe, 23... Lead wire,
24...Spring.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 複数の端子回路を有する基板からのびて形成さ
れ、その先端がほぼ同一面にかつ重ならないよう
に所定範囲内に配置された複数のアームと、各ア
ームの先端にそのほぼ中央部がそれぞれ固定され
た絶縁板と、絶縁板の周辺部に貫通して固定され
た複数のパイプと、各パイプの内に上下に移動自
在に挿入された導電材からなる探針と、探針を下
方に付勢するとともに、一端がパイプの上端に固
定され他端が探針の上端に接触するスプリングと
、各スプリングの一端と基板の対応する端子回路
とをそれぞれ接続するリード線とを備えた多探針
形プローブステーシヨン。 It is formed by extending from a board having a plurality of terminal circuits, and has a plurality of arms arranged within a predetermined range so that their tips are almost on the same plane and do not overlap, and each arm has a roughly central portion fixed to the tip. an insulating plate, a plurality of pipes fixed through the periphery of the insulating plate, a probe made of a conductive material inserted into each pipe so as to be movable up and down, and the probe is urged downward. and a multi-probe type having a spring whose one end is fixed to the upper end of the pipe and whose other end is in contact with the upper end of the probe, and lead wires that respectively connect one end of each spring to the corresponding terminal circuit of the board. probe station.
JP11979586U 1986-08-06 1986-08-06 Expired JPS6236139Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11979586U JPS6236139Y2 (en) 1986-08-06 1986-08-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11979586U JPS6236139Y2 (en) 1986-08-06 1986-08-06

Publications (2)

Publication Number Publication Date
JPS6225877U true JPS6225877U (en) 1987-02-17
JPS6236139Y2 JPS6236139Y2 (en) 1987-09-14

Family

ID=31007502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11979586U Expired JPS6236139Y2 (en) 1986-08-06 1986-08-06

Country Status (1)

Country Link
JP (1) JPS6236139Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63186441A (en) * 1987-01-29 1988-08-02 Tokyo Electron Ltd Probe measurement
JPH0236368A (en) * 1988-07-26 1990-02-06 Matsushita Electric Ind Co Ltd Prover
JP2011117767A (en) * 2009-12-01 2011-06-16 Unitechno Inc Contact probe and inspection prober equipped with the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009113183A1 (en) * 2008-03-11 2009-09-17 株式会社東京精密 Multichip prober

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63186441A (en) * 1987-01-29 1988-08-02 Tokyo Electron Ltd Probe measurement
JPH0236368A (en) * 1988-07-26 1990-02-06 Matsushita Electric Ind Co Ltd Prover
JP2011117767A (en) * 2009-12-01 2011-06-16 Unitechno Inc Contact probe and inspection prober equipped with the same

Also Published As

Publication number Publication date
JPS6236139Y2 (en) 1987-09-14

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