JPS6225747B2 - - Google Patents

Info

Publication number
JPS6225747B2
JPS6225747B2 JP56174646A JP17464681A JPS6225747B2 JP S6225747 B2 JPS6225747 B2 JP S6225747B2 JP 56174646 A JP56174646 A JP 56174646A JP 17464681 A JP17464681 A JP 17464681A JP S6225747 B2 JPS6225747 B2 JP S6225747B2
Authority
JP
Japan
Prior art keywords
gas
heating table
replenishment
raw material
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56174646A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5876139A (ja
Inventor
Takashi Aoyama
Takaya Suzuki
Hironori Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17464681A priority Critical patent/JPS5876139A/ja
Publication of JPS5876139A publication Critical patent/JPS5876139A/ja
Publication of JPS6225747B2 publication Critical patent/JPS6225747B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP17464681A 1981-11-02 1981-11-02 気相成長方法 Granted JPS5876139A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17464681A JPS5876139A (ja) 1981-11-02 1981-11-02 気相成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17464681A JPS5876139A (ja) 1981-11-02 1981-11-02 気相成長方法

Publications (2)

Publication Number Publication Date
JPS5876139A JPS5876139A (ja) 1983-05-09
JPS6225747B2 true JPS6225747B2 (enExample) 1987-06-04

Family

ID=15982227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17464681A Granted JPS5876139A (ja) 1981-11-02 1981-11-02 気相成長方法

Country Status (1)

Country Link
JP (1) JPS5876139A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178373U (ja) * 1983-05-14 1984-11-29 沖電気工業株式会社 化学気相成長装置
JPS59178374U (ja) * 1983-05-16 1984-11-29 沖電気工業株式会社 化学気相成長装置
JP5029967B2 (ja) * 2008-06-30 2012-09-19 スタンレー電気株式会社 素子の製造方法および成膜装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834926U (enExample) * 1971-08-26 1973-04-26

Also Published As

Publication number Publication date
JPS5876139A (ja) 1983-05-09

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