JPS6225747B2 - - Google Patents
Info
- Publication number
- JPS6225747B2 JPS6225747B2 JP56174646A JP17464681A JPS6225747B2 JP S6225747 B2 JPS6225747 B2 JP S6225747B2 JP 56174646 A JP56174646 A JP 56174646A JP 17464681 A JP17464681 A JP 17464681A JP S6225747 B2 JPS6225747 B2 JP S6225747B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- heating table
- replenishment
- raw material
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56174646A JPS5876139A (ja) | 1981-11-02 | 1981-11-02 | 気相成長方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56174646A JPS5876139A (ja) | 1981-11-02 | 1981-11-02 | 気相成長方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5876139A JPS5876139A (ja) | 1983-05-09 |
| JPS6225747B2 true JPS6225747B2 (enExample) | 1987-06-04 |
Family
ID=15982227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56174646A Granted JPS5876139A (ja) | 1981-11-02 | 1981-11-02 | 気相成長方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5876139A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59178373U (ja) * | 1983-05-14 | 1984-11-29 | 沖電気工業株式会社 | 化学気相成長装置 |
| JPS59178374U (ja) * | 1983-05-16 | 1984-11-29 | 沖電気工業株式会社 | 化学気相成長装置 |
| JP5029967B2 (ja) * | 2008-06-30 | 2012-09-19 | スタンレー電気株式会社 | 素子の製造方法および成膜装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4834926U (enExample) * | 1971-08-26 | 1973-04-26 |
-
1981
- 1981-11-02 JP JP56174646A patent/JPS5876139A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5876139A (ja) | 1983-05-09 |
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