JPS62254400A - Charged particle apparatus - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a charged particle device, and in particular to a device that accelerates or accumulates a beam of charged particles such as electrons to generate synchrotron radiation from a bending electromagnet. This relates to the charged particle device to be used.

[Conventional technology]

Figure 2 is an example of "Superconducting racetrack electron storage ring and shared injector microtron for synchrotron radiation" by Yoshikazu Myahara.

Koshi Takata, Teya Nakanishi, l5SP technique.

Series No. 8.21, 1984 J (rsup
erconducting Racetrack E
lectron Storage Ring andC
oexistent Injector Microt
ron for 5ynchrotr.

nRadiation J by Toshika
zu Miyahara, Koji↑akata a
nd Tetsuya Nakanishi, TBC
HNICAL REPORT of l5SP, Se
r B No., 21.1984), in which 1 is a storage ring that accumulates charged particles, 2 is an entrance beam line that guides charged particles to storage ring 1, and 3 is an inlet beam line that leads charged particles to storage ring 1. A deflection electromagnet for deflecting charged particles to form a balanced trajectory 4; 5 a synchrotron radiation beam line for extracting synchrotron radiation 10 generated when deflecting charged particles to the outside for use in lithography, etc.; 6; 4 is a scratching magnet that focuses charged particles, 7 is a vacuum donut that is a path for charged particles, and 8 is a magnet that accelerates charged particles to a predetermined energy in order to compensate for the energy of charged particles lost by emitting synchrotron radiation. The high frequency cavity 9 is a septum magnet that deflects the charged beam in a pulsed manner in order to make the charged particles enter the vacuum donut graph from the entrance beam line 2.

Next, the operation will be explained. Charged particles guided by the entrance beam line 2 are incident into the vacuum donut graph by pulsed deflection of the charged beam by a septum magnet 9. Then, the incident charged particles pass through a transient trajectory (referred to as a bump trajectory) and then pass through the bending electromagnets 3 and 4.
It enters the equilibrium orbit 4 determined by the arrangement with the scratching magnet 6 and revolves on the orbit 4. At this time, the incident beam line 2 and the vacuum donut 7 are usually arranged on the same plane, and when the charged particles orbiting on the equilibrium orbit 4 are deflected by the magnetic field of the deflecting electromagnet 3, Then, electromagnetic waves due to bremsstrahlung are radiated horizontally in the tangential direction of the orbit 4. This is synchrotron radiation 10 (hereinafter referred to as
Since the synchrotron radiation 10 can be obtained from any position on the orbit of the charged particles in the bending electromagnet 3, the synchrotron radiation beam line 5 is usually arranged in multiple stages to increase the utilization efficiency of the apparatus. ing.

[Problem that the invention seeks to solve]

Conventional charged particle devices are configured as described above.
However, the irradiation area of the synchrotron radiation is determined by the diameter of the charged beam in the vertical direction, making it difficult to increase the irradiation area.

This invention was made to solve the above-mentioned problems, and an object thereof is to obtain a charged particle device that can increase the area irradiated with synchrotron radiation.

[Means for solving problems]

A charged particle device according to the present invention is provided with an electromagnetic field generating means to swing the trajectory of charged particles in a bending electromagnet.

[Effect]

In this invention, an electromagnetic field generating means is provided to oscillate the trajectory of the charged particles in the bending electromagnet, so the diameter of the charged beam increases and the light source of synchrotron radiation light expands. The irradiation area of the radiation light can be increased.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings. 1st
The figure shows a bending electromagnet section of a charged particle device according to an embodiment of the present invention. In the figure, 3 is a bending electromagnet, 4 is an equilibrium trajectory of charged particles determined by the deflection magnetic field of the bending electromagnet 3, and 3a is a plurality of pairs of Permanent magnets, which are arranged in the plane of a balanced orbit 4 along the orbit 4 such that each magnet of each moon faces each other across the orbit 4 and two adjacent pairs have opposite polarity. are arranged sequentially. 3b is a horizontal magnetic field generated by the permanent magnet 3a, 4a is an oscillating orbit of a charged particle, 5a is a light source of synchrotron radiation increased by the oscillating orbit 4a, and 5b is synchrotron radiation emitted from the light source 5a.

In this embodiment device, when charged particles enter the deflecting electromagnet 3, their traveling direction is bent by the deflecting magnetic field as in the conventional case, but at this time, the deflecting electromagnet 3 has a plurality of pairs for generating a horizontal magnetic field 3b. Since the permanent magnet 3a is installed, an upward force and a downward force are sequentially applied to the charged particles in the vertical plane, so that the trajectory of the charged particles becomes a wavy oscillating trajectory 4a. Therefore, the angle of divergence of the synchrotron radiation in the vertical direction increases, the light source of the synchrotron radiation expands, and the irradiation area of the synchrotron radiation increases.

As described above, in the device of this embodiment, by swinging the trajectory of the charged particles in the bending electromagnet, the irradiation area of synchrotron radiation light can be expanded, and uniform irradiation can be performed over a wide area. Moreover, special measures for uniform irradiation, such as scanning the emitted light with a mirror or scattering the emitted light with a scatterer, are not required.

In the above embodiment, a permanent magnet is used to generate the horizontal magnetic field, but an electromagnet may also be used and the same effect can be obtained.

Furthermore, in the above embodiment, the charged particle trajectory is oscillated by a magnetic field, but this may be done by an electric field as a second embodiment of the present invention. In a vertical plane containing the equilibrium orbit of An electric field may be applied, thereby making it possible to oscillate the charged particle trajectory in the same manner as in the above embodiment.

In addition, in the above embodiment and the second embodiment, the electromagnetic field for swinging the charged particle trajectory is a magnetic field in a horizontal plane containing the balanced trajectory of the charged particle and an electric field in a vertical plane. A similar magnetic field may also be used, and the same effect will be achieved.

〔Effect of the invention〕

As described above, according to the charged particle device of the present invention, since the electromagnetic field generating means for swinging the charged particle trajectory in the bending electromagnet is provided, the light source of the synchrotron radiation light is enlarged and the synchrotron radiation light source is expanded. This has the effect that the irradiation area can be expanded and uniform irradiation can be performed over a wide area.

[Brief explanation of drawings]

FIG. 1 is a diagram showing a bending electromagnet section of a charged particle device according to an embodiment of the present invention, and FIG. 2 is a plan view showing a conventional charged particle device. In the figure, 3 is a bending electromagnet, 3a is a permanent magnet, 3b is a horizontal magnetic field, 4 is a balanced orbit, 4a is an oscillating orbit, 5a is a light source, and 5b is synchrotron radiation light. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (3)

[Claims] (1) In a charged particle device that is equipped with a bending electromagnet that bends the traveling direction of charged particles by its deflection magnetic field and that makes the charged particles orbit on a fixed trajectory, for swinging the trajectory of the charged particles in the bending electromagnet A charged particle device comprising an electromagnetic field generating means for generating an electromagnetic field. (2) The electromagnetic field generating means includes a plurality of pairs of permanent magnets or electromagnets arranged in a plane of the charged particle trajectory so that each pair of magnets face each other across the trajectory, and two or more adjacent 2. The charged particle device according to claim 1, wherein the magnetic field generating means is formed by sequentially arranging two pairs along the trajectory so as to have opposite polarities. (3) The electromagnetic field generating means arranges a plurality of pairs of electrodes in a vertical plane including the charged particle trajectory, so that each electrode of each pair faces each other across the trajectory, and two adjacent electrodes The charged particle device according to claim 1, characterized in that the electric field generating means is formed by sequentially arranging the pairs along the trajectory so that the pairs have opposite polarities.