JPS62200699A - Charged particle device - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Field of Industrial Application] This invention relates to a charged particle device, and more specifically, a device for accelerating or accumulating a beam of charged particles such as an electron beam. , relates to a charged particle device that utilizes synchrotron radiation generated from a deflection section.

FIG. 4 is a plan view showing an example of a conventional charged particle device. 1 is a storage ring that stores charged particles. Reference numeral 2 denotes an entrance beam line for guiding charged particles to the storage ring 1. 3 is a deflecting electromagnet for deflecting charged particles to form a balanced trajectory 4; 5 is synchrotron radiation (SOR) generated when deflecting charged particles.
ynchronorbital radiation
This is a synchrotron radiation beam line for taking out the radiation (also called "on") to the outside for use in lithography, etc. 6
is a quadrupole electromagnet that focuses charged particles. 7 is a vacuum donut which is a passage for charged particles. 8 is a high frequency cavity for accelerating charged particles to a predetermined energy without compensating for energy loss caused by emitting synchrotron radiation. Reference numeral 9 denotes a septum magnet that deflects the beam in a pulsed manner in order to make the charged particles enter the vacuum donut graph from the entrance beam line 2.

Next, the operation will be explained.

Charged particles incident from the entrance beam line 2 are deflected in a pulsed manner by a septum magnet 9 and enter the vacuum donut graph. After that, the charged particle passes through a transient trajectory (referred to as a bump trajectory) and then enters an equilibrium trajectory 4 determined by the arrangement of the bending magnet 3 and the quadrupole electromagnet 6.
It continues to rotate along this orbit for a long time. Normally, the entrance beam line 2 and the vacuum donut 7 are arranged in the same plane. For example, when a charged particle in the entrance beam line 2 enters while traveling in the horizontal direction, the charged particle is deflected in the horizontal direction by the septum magnet 9 and finally follows the horizontal equilibrium trajectory 4. and rotate. When charged particles rotating along the balanced orbit 4 are deflected by the magnetic field of the bending electromagnet 3, they radiate electromagnetic waves horizontally in the tangential direction of the orbit due to bremsstrahlung radiation. This is synchrotron radiation. Since the synchrotron radiation can be obtained from any position on the orbit of the charged particles in the bending electromagnet 3, the synchrotron radiation beam line 5 is normally used.
are arranged in multiple stages to increase the efficiency of equipment utilization.

[Problems to be Solved by the Invention] Since the conventional charged particle device is configured as described above, there is a synchrotron radiation beam line arranged to intersect with the incident beam line. A synchrotron radiation beam line could not be installed at a position where these two types of beam lines were expected to intersect because the entrance beam line would block the synchrotron radiation.

Therefore, there was a problem in that the efficiency of using the synchrotron radiation was significantly reduced.

This invention was made to solve the above-mentioned problems, and it is possible to use synchrotron radiation even when the entrance beam line and the synchrotron radiation beam line intersect, dramatically increasing the efficiency of synchrotron radiation use. The purpose is to obtain a charged particle device that can be used to increase

[Means for solving problems]

In the charged particle device according to the present invention, an entrance beam line and a synchrotron radiation beam line that is expected to intersect with this beam line are installed so as to intersect with each other, and a hole is formed in the side wall of a duct forming both beam lines. Both beam lines are connected as the same vacuum system with a gap between them.

[Effect]

In this invention, even when the entrance beam line and the synchrotron radiation beam line intersect, charged particles are incident on the N beam as in the case where both beam lines intersect in the conventional example, Thereafter, the synchrotron radiation is emitted completely unobstructed.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings. 1st
In the figure, 5a is a synchrotron radiation beam line that intersects the entrance beam line 2, and 2o is the intersection of the entrance beam line 2 and the synchrotron radiation beam line 5a. The intersection 2o is connected and fixed using a vacuum-resistant method such as explosion welding.

2 and 3 are a perspective view and a cross-sectional perspective view of the intersection 2o, respectively. 21 is a Kapton film, which is used as a vacuum shielding wall for parts with different degrees of vacuum.

Charged particles enter the vacuum donut 7 from the entrance beam line 2.
The light is applied in a pulsed manner by the heseptum magnet 9.

When the injection into the vacuum donut 7 is completed, no charged particles are present in the input beam line 2. The incident charged particle rotates around the equilibrium orbit 4 many times, and the deflecting electromagnet 3
Synchrotron radiation 40 is generated inside the beam line 5.degree. 5a, and this radiation light 40 is taken out to the outside by a beam line 5.degree. 5a. At the intersection 20 of the synchrotron radiation beam line 5a that intersects with the entrance beam line 2, the charged particles that are injected in a pulsed manner rapidly decrease, so that the synchrotron radiation stops being incident after a very short period of time. It has completely the same characteristics as the synchrotron radiation in the synchrotron radiation beam line 5 that does not intersect with the other beam lines.

The degree of vacuum at the intersection 20 is maintained at the same ultra-high vacuum level as the vacuum donut 2 by a Kapton membrane 21.

In the above embodiment, the entrance beam line and the synchrotron radiation beam line in one storage ring are arranged to intersect, but the entrance beam line of one storage ring and the synchrotron radiation beam line of another storage ring are arranged to intersect with each other. May be crossed.

Further, the arrangement may be such that the entrance beam lines or the synchrotron radiation beam lines intersect with each other.

〔Effect of the invention〕

As described above, according to the present invention, since the entrance beam line and the synchrotron radiation beam line are configured to intersect and form the same vacuum system, multiple synchrotron radiation beam lines are installed in one storage ring. This has the effect of significantly increasing the efficiency of using synchrotron radiation without complicating the device, such as installing a new magnet.

[Brief explanation of drawings]

FIG. 1 is a plan view showing a charged particle device according to an embodiment of the present invention, FIGS. 2 and 3 are perspective views showing the beam line intersection of the above embodiment, and FIG. It is a top view showing a particle device. 2 is an entrance beam line, and 5a is an intersecting radiation beam line. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

[Claims] (1) In a charged particle device equipped with an entrance beam line, a storage ring that accumulates charged particles incident from the entrance beam line, and a synchrotron radiation beam line that extracts synchrotron radiation generated from the storage ring. , A charged particle device characterized in that the entrance beam line and the synchrotron radiation beam line intersect to form the same vacuum system.