JPS62252150A - 結晶体のへき開方法およびその装置 - Google Patents

結晶体のへき開方法およびその装置

Info

Publication number
JPS62252150A
JPS62252150A JP61094676A JP9467686A JPS62252150A JP S62252150 A JPS62252150 A JP S62252150A JP 61094676 A JP61094676 A JP 61094676A JP 9467686 A JP9467686 A JP 9467686A JP S62252150 A JPS62252150 A JP S62252150A
Authority
JP
Japan
Prior art keywords
crystal
cutter
pusher
pair
guide path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61094676A
Other languages
English (en)
Japanese (ja)
Other versions
JPH033393B2 (enExample
Inventor
Ichiro Kato
一郎 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP61094676A priority Critical patent/JPS62252150A/ja
Publication of JPS62252150A publication Critical patent/JPS62252150A/ja
Publication of JPH033393B2 publication Critical patent/JPH033393B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
  • Dicing (AREA)
  • Semiconductor Lasers (AREA)
JP61094676A 1986-04-25 1986-04-25 結晶体のへき開方法およびその装置 Granted JPS62252150A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61094676A JPS62252150A (ja) 1986-04-25 1986-04-25 結晶体のへき開方法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61094676A JPS62252150A (ja) 1986-04-25 1986-04-25 結晶体のへき開方法およびその装置

Publications (2)

Publication Number Publication Date
JPS62252150A true JPS62252150A (ja) 1987-11-02
JPH033393B2 JPH033393B2 (enExample) 1991-01-18

Family

ID=14116824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61094676A Granted JPS62252150A (ja) 1986-04-25 1986-04-25 結晶体のへき開方法およびその装置

Country Status (1)

Country Link
JP (1) JPS62252150A (enExample)

Also Published As

Publication number Publication date
JPH033393B2 (enExample) 1991-01-18

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