JPS62244417A - フィルタ装置 - Google Patents
フィルタ装置Info
- Publication number
- JPS62244417A JPS62244417A JP8745186A JP8745186A JPS62244417A JP S62244417 A JPS62244417 A JP S62244417A JP 8745186 A JP8745186 A JP 8745186A JP 8745186 A JP8745186 A JP 8745186A JP S62244417 A JPS62244417 A JP S62244417A
- Authority
- JP
- Japan
- Prior art keywords
- filter
- opening
- filter device
- cylindrical
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010276 construction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8745186A JPS62244417A (ja) | 1986-04-15 | 1986-04-15 | フィルタ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8745186A JPS62244417A (ja) | 1986-04-15 | 1986-04-15 | フィルタ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62244417A true JPS62244417A (ja) | 1987-10-24 |
| JPH0353964B2 JPH0353964B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-08-16 |
Family
ID=13915217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8745186A Granted JPS62244417A (ja) | 1986-04-15 | 1986-04-15 | フィルタ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62244417A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009218309A (ja) * | 2008-03-10 | 2009-09-24 | Kondo Kogyo Kk | ミニエンバイラメント方式の半導体製造装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5392769U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1976-12-28 | 1978-07-28 | ||
| JPS578599U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1980-06-17 | 1982-01-16 | ||
| JPS57156114U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1981-03-26 | 1982-10-01 |
-
1986
- 1986-04-15 JP JP8745186A patent/JPS62244417A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5392769U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1976-12-28 | 1978-07-28 | ||
| JPS578599U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1980-06-17 | 1982-01-16 | ||
| JPS57156114U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1981-03-26 | 1982-10-01 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009218309A (ja) * | 2008-03-10 | 2009-09-24 | Kondo Kogyo Kk | ミニエンバイラメント方式の半導体製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0353964B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-08-16 |