JPS6224138Y2 - - Google Patents

Info

Publication number
JPS6224138Y2
JPS6224138Y2 JP18277980U JP18277980U JPS6224138Y2 JP S6224138 Y2 JPS6224138 Y2 JP S6224138Y2 JP 18277980 U JP18277980 U JP 18277980U JP 18277980 U JP18277980 U JP 18277980U JP S6224138 Y2 JPS6224138 Y2 JP S6224138Y2
Authority
JP
Japan
Prior art keywords
valve
seat body
valve seat
air suction
box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18277980U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56109619U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18277980U priority Critical patent/JPS6224138Y2/ja
Publication of JPS56109619U publication Critical patent/JPS56109619U/ja
Application granted granted Critical
Publication of JPS6224138Y2 publication Critical patent/JPS6224138Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exhaust Gas After Treatment (AREA)
JP18277980U 1980-12-18 1980-12-18 Expired JPS6224138Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18277980U JPS6224138Y2 (enrdf_load_stackoverflow) 1980-12-18 1980-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18277980U JPS6224138Y2 (enrdf_load_stackoverflow) 1980-12-18 1980-12-18

Publications (2)

Publication Number Publication Date
JPS56109619U JPS56109619U (enrdf_load_stackoverflow) 1981-08-25
JPS6224138Y2 true JPS6224138Y2 (enrdf_load_stackoverflow) 1987-06-19

Family

ID=29693104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18277980U Expired JPS6224138Y2 (enrdf_load_stackoverflow) 1980-12-18 1980-12-18

Country Status (1)

Country Link
JP (1) JPS6224138Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6998014B2 (en) 2002-01-26 2006-02-14 Applied Materials, Inc. Apparatus and method for plasma assisted deposition
US7402210B2 (en) 2002-11-14 2008-07-22 Applied Materials, Inc. Apparatus and method for hybrid chemical processing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6998014B2 (en) 2002-01-26 2006-02-14 Applied Materials, Inc. Apparatus and method for plasma assisted deposition
US7402210B2 (en) 2002-11-14 2008-07-22 Applied Materials, Inc. Apparatus and method for hybrid chemical processing

Also Published As

Publication number Publication date
JPS56109619U (enrdf_load_stackoverflow) 1981-08-25

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