JPS6223980A - マグネトロンスパツタリング用タ−ゲツト - Google Patents

マグネトロンスパツタリング用タ−ゲツト

Info

Publication number
JPS6223980A
JPS6223980A JP16316285A JP16316285A JPS6223980A JP S6223980 A JPS6223980 A JP S6223980A JP 16316285 A JP16316285 A JP 16316285A JP 16316285 A JP16316285 A JP 16316285A JP S6223980 A JPS6223980 A JP S6223980A
Authority
JP
Japan
Prior art keywords
target body
target
magnet
magnetron sputtering
magnets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16316285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0154431B2 (enExample
Inventor
Katsuya Okumura
勝弥 奥村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP16316285A priority Critical patent/JPS6223980A/ja
Publication of JPS6223980A publication Critical patent/JPS6223980A/ja
Publication of JPH0154431B2 publication Critical patent/JPH0154431B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP16316285A 1985-07-24 1985-07-24 マグネトロンスパツタリング用タ−ゲツト Granted JPS6223980A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16316285A JPS6223980A (ja) 1985-07-24 1985-07-24 マグネトロンスパツタリング用タ−ゲツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16316285A JPS6223980A (ja) 1985-07-24 1985-07-24 マグネトロンスパツタリング用タ−ゲツト

Publications (2)

Publication Number Publication Date
JPS6223980A true JPS6223980A (ja) 1987-01-31
JPH0154431B2 JPH0154431B2 (enExample) 1989-11-17

Family

ID=15768408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16316285A Granted JPS6223980A (ja) 1985-07-24 1985-07-24 マグネトロンスパツタリング用タ−ゲツト

Country Status (1)

Country Link
JP (1) JPS6223980A (enExample)

Also Published As

Publication number Publication date
JPH0154431B2 (enExample) 1989-11-17

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term