JPS62238417A - Multifunctional matrix sensor - Google Patents

Abstract

PURPOSE:To detect pressure distribution, sliding, contact and temp. distribution by one sensor, by adhering a piezoelectric film and a pyroelectric film to the insulating member in a part to be detected in a predetermined manner and leading out each electrode on each film to a terminal. CONSTITUTION:When the force from a matter 12 is applied to a sensor 6 through an insulating member 5, the sensor 6 is held between a part 8 to be detected having the sensor 6 mounted thereto and the matter 12. A piezoelectric film 2 receives said force at the part, where the force is applied to the sensor 6, through members 5, 3 to deform and the voltage corresponding to the deformation quantity generates between electrode films of both surfaces and pressure distribution in one direction is detected on the basis of the generated voltage of each film 2 while the pressure distribution in the other direction is detected on the basis of the generated voltage of the film 2 in a right-angled direction. If both pressure distributions are combined, the pressure distribution on a plane is obtained. Pyroelectric films 4 are arranged at an equal interval in directions right-angled to each other and, when the heat from the matter 12 is transmitted to the films 4 through the members 5, 3, the temp. distribution on the plane is detected.

Description

DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to a multifunctional matrix sensor capable of detecting pressure distribution, temperature distribution, etc. with a single sensor.

B6 Summary of the Invention The present invention is a multifunctional matrix sensor capable of detecting pressure and temperature.

A piezoelectric film and a pyroelectric film are attached to the surface of an elastic insulating member that is attached to the fracture detection part, and a piezoelectric film and a pyroelectric film are adhered to the surface of the elastic insulating member, and a piezoelectric film and a pyroelectric film are attached on top of the elastic insulating member at right angles to these. By attaching pyroelectric films alternately, covering them with an elastic insulating material, and connecting connecting terminals to each polarization pattern provided on both sides of each piezoelectric film and pyroelectric film, pressure can be reduced. Distribution, slip, contact, and temperature distribution can be detected with a single multifunctional matrix sensor.

C0 conventional technology Pressure distribution, slippage, and contact with robot hands, etc.

In order to provide a function that can detect temperature distribution, a dedicated detection sensor must be individually attached to each 4D.

D0 Problems to be Solved by the Invention However, since many detection sensors must be installed, this poses a major obstacle to reducing the size and weight of robots and the like.

SUMMARY OF THE INVENTION An object of the present invention is to solve such problems and provide a multifunctional matrix sensor that can detect pressure distribution, slippage, contact, and temperature distribution with a single detection sensor.

Means for Solving Problem E6 In order to achieve the above object, the present invention is constructed as follows.

A band-shaped piezoelectric film and a pyroelectric film each having an electrode film on both sides are alternately pasted at every insulation interval in a certain direction on the surface of a first insulating member that is attached to the detected part and has elasticity. . Then, secretly, piezoelectric films and pyroelectric films are alternately pasted at every insulation interval in a direction substantially perpendicular to the above through a second insulating member. do. Then, the tops of the two layers of piezoelectric film and pyroelectric film are broken with a third insulating member, and connection terminals are connected to each electrode film provided on both sides of the respective piezoelectric film and pyroelectric film.

When a force from an object is applied to the 26-action multifunctional matrix sensor via the third insulating member, the multifunctional matrix sensor is sandwiched between the object and the detected part to which the multifunctional matrix sensor is attached. In the part of the force matrix sensor where the force is applied, the force is applied to the piezoelectric film through the third and third insulating members, the piezoelectric film deforms, and a magnitude corresponding to the amount of deformation of the piezoelectric film is generated. Voltage is generated between the precepts and the precepts on both sides. By measuring the voltage generated by each piezoelectric film in the direction in which the piezoelectric films are lined up, the pressure distribution in one direction can be detected. By measuring the generated voltage, pressure distribution in other directions can be detected. By combining these pressure distributions in two directions substantially perpendicular to each other, a pressure distribution on a plane can be determined.

- Pyroelectric film has the property of generating voltage between the electrode films provided on both sides when the gA value increases, and since they are arranged at approximately equal intervals in directions that are approximately perpendicular to each other, When heat is transmitted to the pyroelectric film via the third and second insulating members, the temperature distribution on the plane can be detected in the same manner as in the case of pressure distribution detection. .

As described above, both pressure distribution and temperature distribution are detected by one multifunctional matrix sensor, and slip is detected by determining the change in pressure distribution over time in C, and a voltage is generated in the piezoelectric film. By detecting this, contact can also be detected.

G. Embodiments The present invention will be described in detail below based on embodiments shown in the drawings.

As shown in FIG. 1, a silicone rubber sheet 1 as a first insulating member having elasticity is used as a base to be attached to a fii voice output part of a robot hand or the like. On the silicone rubber sheet 1, a magnetic field, a pyroelectric film 2, a silicone rubber sheet 3 as a third insulating member, a pressure zone, a pyroelectric film 4, and a silicone rubber sheet 5 as a third insulating member are pasted in order. It is worn.

As shown in FIG. 2, piezoelectric and pyroelectric films 2 include piezoelectric films 2 whose piezoelectric properties are superior to pyroelectric properties.
Two types of piezoelectric film 2a are used: a and a pyroelectric film 2b whose pyroelectric properties are inferior to piezoelectric properties. and pyroelectric films 2b are alternately pasted in the left and right direction in the figure, separated by an insulating interval. pressure, ward and jiao 1
A piezoelectric and pyroelectric film 4 is adhered onto the film 2 via a silicone rubber sheet 3 as a second insulating member. Piezoelectric and pyroelectric film 4 is straight film 2a
, it is composed of a strip-shaped piezoelectric film 4a with electrode films on both sides, like the film 2b, and a pyroelectric film 4b. are attached alternately. A silicone rubber sheet 5 is placed on the piezoelectric and pyroelectric film 4.
is pasted.

The piezoelectric and pyroelectric films 2.4 have metal deposited on both sides to form a thin electroconductive film, and when the piezoelectric films 2a and 4a are compressed in the thickness direction or stretched in the longitudinal direction, both electrodes are formed. '4 pressure is generated between the films, and the pyroelectric films 2b and 4b! When the temperature changes, a voltage is generated between the two electrode films.

As the silicone rubber sheets 1, 3.5, a durable material such as a fluorine comb sheet or a resin sheet such as a vinyl sheet may be used. However, it is preferable to use a material with good thermal conductivity so that heat can be easily transferred to the pyroelectric film 21:l, 41''+, rather than an insulating film.

Multifunctional matrix sensor 6 configured in this way
are attached to the gripping surfaces 13a, Ib of the robot hand 8, which has fingers 7a, 7b moving toward and away from each other, as shown in FIG. 3, and wired, for example, as shown in FIG. 4. That is, 1 t of pressure
The connection terminals connected to each electrode film of each of the films 2a and 4a and each electrode film of the pyroelectric film A 2 el t' 4 t) are separately connected to the amplifier 9. 9 is connected to a digital control device 11 via an AD converter 10.

However, C is connected to the amplifier 9 by a common connection terminal on one side of the 'Ijt poles 1 provided on both sides of each piezoelectric film 2a, 4a and pyroelectric film 21-1.4b.
may be connected to.

The operation of the multifunctional matrix sensor 6 will be explained below.

Robot hand as shown in Figure 3 80) Fingers? a.T.

When the object 9a is grasped, the multi-geometric matrix sensor 6 is sandwiched between the object 12 and, for example, the finger 7a, and because the n1 silicone rubber sheet 1 has elasticity, it deforms as shown in FIG. At this time, a voltage corresponding to the rounded shape of the long piezoelectric film 4a extending in the horizontal direction in the figure is generated, and by knowing the magnitude of the voltage generated in each piezoelectric film 4a, it can be compared to the paper surface in FIG. A pressure distribution in the perpendicular direction can be obtained. Similarly, by knowing the magnitude of the voltage generated in each pressure-forming film 2a, it is possible to know the pressure distribution in the left and right direction in FIG. It is possible to know the two-dimensional pressure distribution applied to the surface of the sensor 6.

In addition, heat is transferred from the object 12 to the pyroelectric film 2J4t), and the pyroelectric films 21) and 41) are heated and generate a back pressure, so the surface of the multifunctional matrix sensor 6 is You can know the two-dimensional temperature distribution that is transmitted.

In addition to being able to detect two-dimensional pressure and temperature distributions in this way, it is also possible to determine the presence or absence of contact based on whether or not a voltage change has occurred, and by detecting changes in pressure distribution over time, it is possible to You can know whether it is present or not.

In this example, two types of films, piezoelectric film and pyroelectric film, were used, or if the change in temperature of the object that the multifunctional matrix sensor comes into contact with is negligible or at the temperature level, It may be possible to detect only pressure distribution, velocity, and contact using only a piezoelectric film.

Furthermore, in general, piezoelectric and pyroelectric films often have properties that respond not only to changes in pressure but also to changes in both pressure and temperature. Among these, a film with extremely good pressure properties and a film with very good temperature properties may be selected and used as the piezoelectric film and pyroelectric film, but the invention is not limited to these. A matrix sensor is formed by alternately arranging two types of films as piezoelectric and pyroelectric films, each of which has at least a different relationship in characteristics with respect to changes in pressure and temperature. The fourth characteristic
By storing the output signals in the digital control device shown in the figure and calculating the output signals from the adjacent films within the digital control device, the change values of the working pressure and temperature are detected as independent values of ±9. , and can also be corrected.

0 Detailed Description of the Invention According to the present invention, two types of piezoelectric and pyroelectric films, a piezoelectric film and a pyroelectric film, are alternately arranged and adhered to the surface K of the first insulating member having elasticity. ,1
! Then, the second insulating member is closed, and the two types of piezoelectric and pyroelectric films are pasted at alternating pressure approximately at right angles thereto, and then torn by the third insulating member. Connect the connecting terminals to both 1fiK and t digits of each ゛rJt polar membrane, so that the two-dimensional pressure distribution on the surface of the multifunctional matrix sensor.

It can detect not only temperature distribution but also contact and slippage. The thickness of the piezoelectric film and the pyroelectric film may be, for example, approximately 10 μm, and the thickness of the first to third insulating members may be approximately several tens of μm, so the thickness of the entire multifunctional matrix sensor can be reduced to 100 μm or less. , ultra-thin, and quantifiable.

Further, by reducing the width of the piezoelectric film and the raw electric film, it is possible to create a more finely divided pressure distribution and temperature distribution.

[Brief explanation of drawings]

The figures relate to an embodiment of the multifunctional matrix sensor according to the present invention, in which Fig. 1 is a sectional view, Fig. 2 is a view taken along the line I-I in Fig. 1, and Fig. 3 is a robot hand equipped with a multifunctional matrix sensor. 4 is a circuit diagram, and FIG. 5 is an explanatory diagram of the operation. 1.3.5...Silicone rubber sheet, 2.4...Pressure and pyroelectric film, 2a, 4a...Piezoelectric film, 2j), 4b...Pyroelectric film% 6...・Multi-functional matrix sensor. Fig. 1 Punch surface diagram for matrix punch (non-infectious 1ifI) 2.4-
-11-FEfnylf-z i+shi A2a, 4a---
Ichiu Denzui, Shiha 6-------Ichita Ka 1 Rebellion Tricks Zonge Figure 1/
) I-I arrow view (present invention) Circuit g (neissou)

Claims (1)

[Claims] A first insulating member that has elasticity when attached to the detected part, and an electrode film that is attached to the surface of the first insulating member in a certain direction and alternately at every insulation interval, and electrode films are provided on both surfaces. A belt-shaped piezoelectric film and a pyroelectric film, and a second insulating member having elasticity on the surfaces of the piezoelectric film and pyroelectric film, alternately at every insulation interval in a direction substantially perpendicular to the arrangement of the piezoelectric film and pyroelectric film. a belt-shaped piezoelectric film and pyroelectric film having electrode films on both sides, a third insulating member having elasticity and attached to the surfaces of the piezoelectric film and pyroelectric film; A multifunctional matrix sensor characterized by comprising terminals connected to each electrode film provided on an electric film.