JP2002022561A - Flexible piezoelectric element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve such a problem of a conventional flexible piezoelectric element that the temperature around the piezoelectric element has to be controlled by using a separately provided temperature sensor. SOLUTION: This flexible piezoelectric element is equipped with a flat plate shaped composite piezoelectric body 3 made by mixing piezoelectric ceramic powder 2 in a high polymer base material 1, flexible electrodes 4 and 5 disposed on both sides of the piezoelectric body 3 and each comprising a composite conductive body made up of a polymer for electrode and conductive particles, a vibration voltage detection means 6 for the piezoelectric body 3, a capacitance detection means 7 based on the capacitance-temperature characteristic of the electrodes 4 and 5, and a temperature convertion means 8. The flexible piezoelectric element for simultaneously detecting pressure and temperature by a simple structure can be thus provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flexible piezoelectric element.

[0002]

2. Description of the Related Art Conventionally, as a flexible piezoelectric element, as shown in FIG. 4, a polymer base material 1 and a piezoelectric ceramic powder 2 are mixed and formed into a sheet. 12 are provided. At this time, in consideration of the piezoelectric characteristics imparted by the polarization treatment and the heat resistance of the polymer base material 1, a metal foil electrode generally adhered by vapor deposition of metal such as copper, aluminum, or gold or an adhesive is used as the electrode. Used.

Further, Japanese Patent Application Laid-Open No. 5-102548 proposes a flexible piezoelectric element using a sprayed electrode obtained by spraying a metal on the flat composite piezoelectric body 3.

[0004]

However, the above-mentioned flexible piezoelectric element has a problem that it has reliability, sensitivity, and complicated manufacturing steps. That is, in the case of a vapor-deposited electrode, the thickness of the generally provided electrode is very thin, such as about 0.02 to 0.1 μm. Or no output can be obtained.

The metal foil electrode is generally 6 to 100 μm.
A metal foil having a thickness of about m is attached to the flat composite piezoelectric body via an adhesive of about 5 to 40 μm made of a polyester resin, a urethane resin, an epoxy resin, or the like. However, when the metal foil electrode is provided on both surfaces of the flat composite piezoelectric material, there is a problem that the flexibility of the composite piezoelectric material is lost and the sensitivity is low.

[0006] Further, in the case of a sprayed electrode, only a low boiling point metal can be easily sprayed due to the heat resistance of the composite piezoelectric material, and there is a problem that the electrode material used is limited. Since a load such as air pressure is sometimes applied to the flat composite piezoelectric body, there has been a problem in the reliability of the flat composite piezoelectric body.

Further, the conventional flat-plate-shaped flexible piezoelectric element has a problem that it can detect time-varying pressure but cannot detect temperature. Even when the flat composite piezoelectric body 3 is used, its maximum operating temperature is 80 to 12
It is about 0 ° C. In an environment where the flat flexible piezoelectric member 3 is left at a temperature higher than the maximum operating temperature, its piezoelectric performance is degraded. Therefore, when the flat composite piezoelectric body 3 is used, it is a sufficient temperature control brush. In this regard, the conventional flexible piezoelectric element requires a separate temperature sensor. However, there has been a problem that the configuration is complicated and the temperature detected by the temperature sensor does not always match the temperature of the flexible composite piezoelectric body 3.

[0008]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a plate-shaped composite piezoelectric body in which a piezoelectric ceramic powder is mixed into a base material of a polymer; A flexible electrode arranged in close contact with the flexible electrode; and a vibration voltage detecting means connected to the two flexible electrodes; and a capacitance detecting means connected to at least one of the flexible electrodes. Flexible piezoelectric element.

According to the above invention, when a pressure is applied to the flat composite piezoelectric body, the vibration voltage of the flat composite piezoelectric body generated between the flexible electrodes disposed on both surfaces of the flat composite piezoelectric body is reduced. Pressure is detected by detecting.

[0010] In addition, the capacitance detection means connected to at least one of the two flexible electrodes measures the temperature dependence of the capacitance value based on the temperature characteristics of the capacitance of the flexible electrode. Thus, the temperature of the flexible composite piezoelectric body can be detected.
Therefore, there is no need to prepare a special temperature sensor. Therefore, a flexible piezoelectric element capable of detecting temperature can be realized with a simple configuration.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In order to solve the above-mentioned problems, the present invention is directed to a flat composite piezoelectric body in which a piezoelectric ceramic powder is mixed in a polymer matrix, and both surfaces of the flat composite piezoelectric body. A vibration electrode detecting means connected to both of the flexible electrodes, and a capacitance detecting means connected to at least one of the flexible electrodes. A flexible piezoelectric element made of Since the flexible electrode and the flat composite piezoelectric body are in close contact with each other, the flexibility is improved, and at the same time, the capacitance of the flexible electrode can be detected by the capacitance detecting means. The average temperature of the plate-like composite piezoelectric material sandwiched between the electrodes can be detected based on the temperature dependence of the capacitance of the flexible electrode. Therefore,
Since there is no need to separately prepare a temperature sensor, a flexible piezoelectric element that can detect both pressure and temperature with a simple configuration can be provided.

According to a second aspect of the present invention, there is provided a flexible device comprising a capacitance detecting means connected to a temperature conversion means for converting a capacitance value into a temperature based on a temperature characteristic of the capacitance of the flexible electrode. A piezoelectric element. Since the capacitance value detected by the capacitance detecting means is converted into the temperature by the temperature converting means, the temperature can be easily read directly.

According to a third aspect of the present invention, there is provided a flexible piezoelectric element comprising a polymer base material made of chlorinated polyethylene. Since chlorinated polyethylene has excellent heat resistance and excellent flexibility, a flat composite piezoelectric material having these characteristics can be obtained.

According to a fourth aspect of the present invention, there is provided a flexible piezoelectric element comprising a piezoelectric ceramic powder formed of a solid solution of lead titanate and lead zirconate. Since the piezoelectric ceramic powder of the solid solution of lead titanate and lead zirconate is used in large quantities in industry, it is inexpensive and easily available, so that a highly sensitive and inexpensive flexible piezoelectric element can be provided. .

According to a fifth aspect of the present invention, there is provided a flexible piezoelectric element comprising piezoelectric ceramic powder made of lead titanate. Since the dielectric constant of lead titanate is smaller than that of a solid solution of lead titanate and lead zirconate, the dielectric constant of the piezoelectric ceramic powder can be reduced. A flexible piezoelectric element can be provided.

According to a sixth aspect of the present invention, there is provided a flexible piezoelectric element in which the flexible electrode is composed of a composite conductor comprising a polymer material for an electrode and conductive particles. Through the contact of the conductive particles, the conductivity of the composite conductor is ensured. Further, the flexibility of the composite conductor is ensured through the flexibility of the electrode polymer itself.
Further, by appropriately selecting the softening temperature of the polymer for electrode of the composite conductor electrode and the polymer base material in the plate-shaped composite piezoelectric material, bonding can be easily performed by thermocompression bonding.

The invention according to claim 7 is a flexible piezoelectric element in which the polymer for an electrode is made of the same material as the polymer base material.
Since the polymer for the electrode is the same material as the polymer base material, the electrode can be easily and firmly adhered to the plate-shaped composite piezoelectric body, and the reliability is improved.

The invention according to claim 8 is a flexible piezoelectric element in which the conductive particles are made of carbon black. Since carbon particles are industrially used in large quantities, they are inexpensive and easily available.

[0019]

Embodiments of the present invention will be described below with reference to the drawings.

Embodiment 1 FIG. 1 is a sectional view of a flexible piezoelectric element according to Embodiment 1 of the present invention. This flexible piezoelectric element is prepared by mixing a piezoelectric ceramic powder 2 in a polymer base material 1 with an open roll device and uniformly dispersing the mixture, and then using a hot press device to form a sheet having a thickness of 0.5 mm in a flat plate mold. Thus, a composite piezoelectric body 3 was obtained. The flat composite piezoelectric member 3, the flexible electrode 4 and the flexible electrode 5 were thermocompression-bonded to both surfaces of the flat composite piezoelectric member 3 by hot pressing using a flat die.

Next, in order to impart piezoelectric characteristics, a DC high voltage was applied between the flexible electrodes 4 and 5 to polarize the piezoelectric ceramic powder 2 to form a flexible piezoelectric element.

In the above flexible piezoelectric element configuration, chlorinated polyethylene was used for the polymer base material 1 and lead zirconate titanate was used for the piezoelectric ceramic powder 2. Epoxy resin, urethane resin, chloroprene resin, chlorinated polyethylene resin and the like are used as the polymer base material 1.
The heat resistance of the urethane resin is about (60 to 80 ° C.), whereas the chlorinated polyethylene is excellent in that it has a high heat resistance of 120 ° C.

The chlorinated polyethylene is effective in that the above high heat resistance can be realized without vulcanization by appropriately selecting the molecular weight, the crystallinity and the like. Further, since chlorinated polyethylene is excellent in flexibility, electrode peeling or the like due to external force is suppressed, and reliability and sensitivity are high. The material of the piezoelectric ceramic powder 2 is preferably a solid solution of lead titanate and lead zirconate. Piezoelectric ceramics of this composition are industrially used in large quantities as ceramics for electronic components, and are inexpensive and easily available.

In addition to the solid solution of lead titanate and lead zirconate, lead titanate is also preferable as the material of the piezoelectric ceramic powder 2. The relative permittivity of the solid solution of lead titanate and lead zirconate is a large value of about (800 to 3000), but the relative permittivity of lead titanate is a small value of about (200 to 300). In this case, the capacitance caused by the polymer base material 1 between the piezoelectric ceramic powder 2 and the flexible electrodes 4 and 5 can be substantially equal to the capacitance caused by the piezoelectric ceramic powder 2. Therefore, the polarization of the piezoelectric ceramic powder can be easily performed.

When a time-varying pressure is applied to a part or the entire surface of the flexible piezoelectric element, an oscillating voltage corresponding to the acceleration generated in the piezoelectric element in that part is generated by the flexible electrodes 4 and 5.
Is induced in between. This oscillating voltage is detected by the oscillating voltage detecting means 6. Using this oscillating voltage, a time-varying pressure is detected.

On the other hand, since the flexible electrodes 4 and 5 are formed in close contact with the plate-shaped composite piezoelectric body 3, the flexible electrodes 4 and 5
And 5 are almost equal to the temperature of the flat composite piezoelectric element 3. Since the flexible electrodes 4 and 5 show temperature characteristics of capacitance specific to the constituent material, the temperature can be obtained from the detected capacitance. To determine the temperature from the detected capacitance, it is necessary to refer to the temperature characteristics of the capacitance.
However, referencing each time is a complicated task,
As shown in FIG. 1, a temperature converting means 8 for converting the capacitance into a temperature based on the temperature characteristic of the capacitance is provided by a capacitance detecting means 7.
It is desirable to connect to This allows the temperature to be read directly.

As described above, the configuration of the first embodiment shown in FIG. 1 can simultaneously detect the temperature and the pressure.

(Embodiment 2) FIG. 2 is a structural view of a flexible piezoelectric element according to Embodiment 2 of the present invention.

The composite conductor 11 was used as a constituent material of the flexible electrodes 4 and 5.

The composite conductor 11 is composed of the electrode polymer 9 and the conductive particles 10.

At this time, the conductive particles 10 are arranged in a mesh-like manner in the polymer for electrode 9 so as to be in contact with each other, and the conductivity of the composite conductor 11 is secured through these contacts. Also,
The flexibility of the composite conductor 11 is ensured by the electrode polymer 9 through its own flexibility. Therefore, higher flexibility can be obtained than a piezoelectric element having a configuration in which a metal foil electrode is attached to an electrode. As the polymer for electrode 9, similarly to the polymer base material 1, an epoxy resin, a urethane resin, a chloroprene resin,
Chlorinated polyethylene resin is used. Further, carbon particles or silver particles are used as the conductive particles 10. When silver particles are used, the specific resistance of the composite conductor electrode 7 shows a small value of about 5 × 10 ⁻³ Ω · cm, but when carbon particles are used, the specific resistance value is about one digit or more. Is shown. Since the frequency range when this piezoelectric element is used for human body detection is about 5 Hz, the impedance of the flat composite piezoelectric body 3 at this time is about 100 kΩ or more, and the specific resistance of both flexible electrodes 4, 5. Since a value of about 1 kΩ or less is sufficient, it is effective to use inexpensive carbon particles as the conductive particles 10. Here, conductive carbon black powder (trade name: Ketjen Black EC manufacturer: Ketjen Black International Co., Ltd.) was used as the carbon particles.

The polymer matrix 1 and the electrode polymer 9 are desirably formed of the same material.

In the case of bonding by heat, the same material is easily bonded to each other, so that the bonding strength is high and the reliability is high because no adhesive or the like is used. At this time, it is desirable to use chlorinated polyethylene for the polymer base material 1 and the electrode polymer 9. This is because, as described in the polymer base material 1 of the flat composite piezoelectric body 3, chlorinated polyethylene has excellent flexibility, high sensitivity, and excellent heat resistance.
High reliability.

The flat composite piezoelectric body 3 of the second embodiment shown in FIG.
Using chlorinated polyethylene for the polymer base material 1 and lead zirconate titanate powder for the piezoelectric ceramic powder 2, kneading with an open roll device, followed by a 10 mm width by a hot compression device.
It was formed into a size of 75 mm long × 0.5 mm thick. Also,
The composite conductor 11 of the flexible electrodes 4 and 5 was added with 10% by weight of Ketjen Black EC with respect to chlorinated polyethylene, kneaded with an open roll device, and then heated with a hot compression device to be 10 mm wide by 75 mm long. Molded to a size of 0.3 mm thick,
A flexible piezoelectric element was obtained by thermocompression bonding on both surfaces of the flat composite piezoelectric body 3 prepared above.

FIG. 3 shows the temperature characteristic of the capacitance of the flexible electrode 4 or 5 made of the composite conductor 11. As apparent from FIG. 3, the temperature range from room temperature to about 90 ° C.
It shows a large negative temperature coefficient of 0 ppm / ° C., and a slightly higher negative temperature coefficient at a temperature higher than 0 ppm / ° C.

Accordingly, the capacitance is detected by the capacitance detecting means 7 connected to the flexible electrode 4 or 5, and the temperature is determined based on the temperature characteristics of the capacitance connected to the capacitance detecting means 7. The temperature of the flat composite piezoelectric body 3 sandwiched between the flexible electrodes 4 or 5 can be easily detected by the converting temperature converting means 8. From this, in a practical state, it is possible to notify by an alarm means in order to protect the flexible piezoelectric element when the temperature of the flexible piezoelectric element becomes higher than a certain temperature.

[0037]

As is apparent from the above embodiment, according to the first aspect of the present invention, since the flexible electrode and the flat composite piezoelectric body are in close contact with each other, the flexibility is improved and Since the capacitance of the flexible electrode can be detected by the capacitance detecting means, the average temperature of the flat composite piezoelectric body sandwiched between the flexible electrodes is determined by the temperature dependency of the capacitance of the flexible electrode. Can be detected based on Therefore, there is no need to separately prepare a temperature sensor, so that a flexible piezoelectric element that can detect both pressure and temperature with a simple configuration can be provided.

According to the second aspect of the present invention, the capacitance detecting means is connected to the temperature conversion means for converting the capacitance value into a temperature based on the temperature characteristics of the capacitance of the flexible electrode. Since the flexible piezoelectric element is formed of a flexible piezoelectric element, the capacitance value detected by the capacitance detecting means is converted into a temperature by the temperature converting means, so that the temperature can be easily read directly.

According to the third aspect of the present invention, since the polymer base material is composed of chlorinated polyethylene, a flat composite piezoelectric material having both excellent heat resistance and excellent flexibility can be obtained.

According to the fourth aspect of the present invention, since a solid solution of lead titanate and lead zirconate is used as the piezoelectric ceramic powder, the piezoelectric ceramic powder is inexpensive and easily available, so that it is highly sensitive and inexpensive. A flexible piezoelectric element can be provided.

According to the fifth aspect of the present invention, since lead titanate is used as the piezoelectric ceramic powder,
Since the dielectric constant of the piezoelectric ceramic powder can be reduced, the polarization process is facilitated.

According to the sixth aspect of the present invention, since the electrodes of the flexible piezoelectric element are composed of the composite conductor composed of the polymer for the electrode and the conductive particles, the flexibility of the polymer for the electrode itself is reduced. Through which the flexibility of the composite conductor is ensured,
It can be easily bonded by heat welding such as hot press.

According to the seventh aspect of the present invention, since the polymer for the electrode and the polymer base material are made of the same material, the electrode can be easily and firmly adhered to the plate-shaped composite piezoelectric material, and the reliability is improved. improves.

According to the eighth aspect of the present invention, since the conductive particles are made of carbon, they are inexpensive and easily available.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a flexible piezoelectric element connected to an oscillating voltage detection and temperature detection unit according to a first embodiment of the present invention.

FIG. 2 is a sectional view of a flexible electrode according to a second embodiment of the present invention.

FIG. 3 is a characteristic diagram showing an example of a capacitance-temperature characteristic of the present invention.

FIG. 4 is a sectional view of a conventional flexible piezoelectric element.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Polymer base material 2 Piezoelectric ceramic powder 3 Flat composite piezoelectric material 4, 5 Flexible electrode 6 Vibration voltage detecting means 7 Capacitance detecting means 8 Temperature conversion means 9 Electrode polymer 10 Conductive particles 11 Composite conductive body

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Naruhisa Kanazawa 1006 Kadoma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Inventor Yuko Fujii 1006 Odaka Kadoma Kadoma City, Osaka Matsushita Electric Industrial Co., Ltd. 72) Inventor Naofumi Nakatani 1006 Kadoma, Kazuma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. (72) Inventor Hiroyuki Ogino 1006 Odoma Kadoma, Kadoma City, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. (72) Koji Yoshino Osaka 1006 Kadoma Kadoma Matsushita Electric Industrial Co., Ltd. (72) Inventor Yumiko Hara 1006 Okadoma Kadoma City, Osaka Pref. Matsushita Electric Industrial Co., Ltd.F-term (reference) 5D019 AA24 BB05 BB28 BB30

Claims (8)

[Claims] 1. A flat composite piezoelectric body in which a piezoelectric ceramic powder is mixed in a polymer base material, a flexible electrode disposed in close contact with both sides of the flat composite piezoelectric body, A flexible piezoelectric element comprising: an oscillating voltage detecting means connected to the flexible electrode; and a capacitance detecting means connected to at least one of the flexible electrodes. 2. A flexible piezoelectric device according to claim 1, wherein said capacitance detecting means is connected to a temperature conversion means for converting the capacitance into a temperature based on the temperature characteristics of the capacitance of the flexible electrode. element. 3. The flexible piezoelectric element according to claim 1, wherein the polymer base material is chlorinated polyethylene. 4. The flexible piezoelectric element according to claim 1, wherein the piezoelectric ceramic powder is a solid solution of lead titanate and lead zirconate. 5. The flexible piezoelectric element according to claim 1, wherein the piezoelectric ceramic powder is lead titanate. 6. The flexible piezoelectric element according to claim 1, wherein the flat flexible electrode is a composite conductor comprising a polymer material for an electrode and conductive particles. 7. The flexible piezoelectric element according to claim 6, wherein the polymer material for an electrode is the same material as the polymer base material. 8. The flexible piezoelectric element according to claim 6, wherein the conductive particles are carbon black.