JP2001085754A - Flexible piezoelectric element - Google Patents
Flexible piezoelectric elementInfo
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- JP2001085754A JP2001085754A JP26211399A JP26211399A JP2001085754A JP 2001085754 A JP2001085754 A JP 2001085754A JP 26211399 A JP26211399 A JP 26211399A JP 26211399 A JP26211399 A JP 26211399A JP 2001085754 A JP2001085754 A JP 2001085754A
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- Prior art keywords
- electrode
- piezoelectric element
- composite
- flexible
- piezoelectric sheet
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、可撓性圧電素子に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flexible piezoelectric element.
【０００２】[0002]
【従来の技術】従来、可撓性圧電素子としては、図４に
示すように高分子母材１と圧電セラミック粉末２とを混
合しシート状に成形後、この複合圧電シート３表面に電
極４を設ける。この際に、電極としては分極処理によっ
て付与された圧電特性や高分子母材１の耐熱性等を考慮
して一般に銅、アルミニウム、金等の金属蒸着あるいは
接着剤により貼付した金属の箔電極が用いられている。2. Description of the Related Art Conventionally, as a flexible piezoelectric element, as shown in FIG. 4, a polymer base material 1 and a piezoelectric ceramic powder 2 are mixed and formed into a sheet shape. Is provided. At this time, in consideration of the piezoelectric characteristics imparted by the polarization treatment and the heat resistance of the polymer base material 1, a metal foil electrode generally adhered by vapor deposition of metal such as copper, aluminum, or gold or an adhesive is used as the electrode. Used.
【０００３】また、特開平５−１０２５４８号公報で
は、複合圧電体シート３に金属を溶射した溶射電極を用
いた可撓性圧電素子が提案されている。Further, Japanese Patent Application Laid-Open No. 5-102548 proposes a flexible piezoelectric element using a sprayed electrode obtained by spraying a metal on the composite piezoelectric sheet 3.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、前記の
可撓性圧電素子は信頼性や感度、及び複雑な製造工程を
有するという課題を有していた。すなわち、蒸着電極で
は一般に設けられる電極の厚みが０．０２〜０．１μm
と程度と非常に薄いため複合圧電体シートが撓んだ場合
に電極内に亀裂が生じてしまい感度が低下あるいは、出
力が得られないという課題があった。However, the above-mentioned flexible piezoelectric element has problems of reliability, sensitivity, and complicated manufacturing steps. That is, the thickness of the electrode generally provided in the deposition electrode is 0.02 to 0.1 μm
When the composite piezoelectric sheet is bent because of its extremely small thickness, cracks are generated in the electrodes, resulting in a problem that the sensitivity is reduced or an output is not obtained.
【０００５】また、金属箔電極は、一般に６〜１００μ
m程度の厚さの金属箔を、ポリエステル系樹脂、ウレタ
ン系樹脂、エポキシ系樹脂等からなる５〜４０μm程度
の接着剤を介して、複合圧電体シート貼付される。しか
し、この金属箔電極は、特に複合圧電体シート両面に設
けた場合、複合圧電体の可撓性という重量な長所を損な
い、感度が低いという課題があった。The metal foil electrode is generally 6 to 100 μm.
A metal foil having a thickness of about m is attached to the composite piezoelectric sheet via an adhesive of about 5 to 40 μm made of polyester resin, urethane resin, epoxy resin or the like. However, when this metal foil electrode is provided on both surfaces of the composite piezoelectric sheet, there is a problem in that the flexibility of the composite piezoelectric substance is impaired, and the sensitivity is low.
【０００６】さらに、溶射電極の場合は複合圧電体の耐
熱性のため、容易に溶射成形できるのは低沸点の金属の
みであり、用いられる電極材料が制限されるという課題
があると同時に、溶射時に複合圧電体シートにエアー圧
等の負荷が印加されるため、複合圧電体シートの信頼性
に課題があった。Further, in the case of a sprayed electrode, only a low-boiling-point metal can be easily spray-formed due to the heat resistance of the composite piezoelectric material, and there is a problem that the electrode material used is limited. Since a load such as air pressure is sometimes applied to the composite piezoelectric sheet, there has been a problem in the reliability of the composite piezoelectric sheet.
【０００７】[0007]
【課題を解決するための手段】本発明は、上記課題を解
決するために、高分子中母材に圧電セラミック粉末を混
入した複合圧電体シートと、前記複合圧電体シートの両
面に配置された電極とからなり、前記複合圧電体シート
の少なくとも一方の面を凹凸形状にした可撓性圧電素子
である。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a composite piezoelectric sheet in which a piezoelectric ceramic powder is mixed in a base material of a polymer, and is disposed on both surfaces of the composite piezoelectric sheet. A flexible piezoelectric element comprising electrodes and having at least one surface of the composite piezoelectric sheet in an uneven shape.
【０００８】上記発明によれば、複合圧電体シートを凹
凸形状にすることによって、複合圧電体シートの可撓性
が向上するとともに、複合圧電体シートの凹部と電極と
の間に空気層が形成され、感度及び信頼性の高い可撓性
圧電素子を簡単な構成で実現できる。According to the above invention, by forming the composite piezoelectric sheet into an uneven shape, the flexibility of the composite piezoelectric sheet is improved, and an air layer is formed between the concave portion of the composite piezoelectric sheet and the electrode. Thus, a flexible piezoelectric element having high sensitivity and high reliability can be realized with a simple configuration.
【０００９】[0009]
【発明の実施の形態】上記課題を解決するために請求項
１の発明は、高分子中母材に圧電セラミック粉末を混入
した複合圧電体シートと、前記複合圧電体シートの両面
に配置された電極とからなり、前記複合圧電体シートの
少なくとも一方の面が凹凸形状である可撓性圧電素子で
ある。In order to solve the above-mentioned problems, a first aspect of the present invention is to provide a composite piezoelectric sheet in which a piezoelectric ceramic powder is mixed in a matrix of a polymer, and disposed on both surfaces of the composite piezoelectric sheet. A flexible piezoelectric element comprising electrodes and at least one surface of the composite piezoelectric sheet has an uneven shape.
【００１０】そして、前記複合圧電体シートの少なくと
も一方の面を凹凸状にすることによって前記複合圧電体
シートの可撓性が向上するとともに、前記電極との間に
空気層が形成されるため、感度及び信頼性の高い可撓性
圧電素子を提供できる。By making at least one surface of the composite piezoelectric sheet uneven, the flexibility of the composite piezoelectric sheet is improved, and an air layer is formed between the composite piezoelectric sheet and the electrodes. A flexible piezoelectric element with high sensitivity and high reliability can be provided.
【００１１】請求項２記載の発明は、高分子母材を塩素
化ポリエチレンで構成した可撓性圧電素子である。According to a second aspect of the present invention, there is provided a flexible piezoelectric element comprising a polymer base material made of chlorinated polyethylene.
【００１２】そして、塩素化ポリエチレンは優れた耐熱
性と優れた可撓性を有するのでこれらの特性を兼ね備え
た複合圧電体シートが得られる。Since chlorinated polyethylene has excellent heat resistance and excellent flexibility, a composite piezoelectric sheet having these characteristics can be obtained.
【００１３】請求項３記載の発明は、圧電セラミック粉
末をチタン酸鉛とジルコン酸鉛の固溶体で構成した可撓
性圧電素子である。According to a third aspect of the present invention, there is provided a flexible piezoelectric element comprising a piezoelectric ceramic powder formed of a solid solution of lead titanate and lead zirconate.
【００１４】そして、粉末をチタン酸鉛とジルコン酸鉛
の固溶体の圧電セラミック粉末は工業的に多量に利用さ
れているので、安価であり、入手も容易であるため、高
感度で安価な可撓性圧電素子が提供できる。The piezoelectric ceramic powder, which is a solid solution of lead titanate and lead zirconate, is inexpensively used because it is industrially used in large quantities, and is easily available. Piezoelectric element can be provided.
【００１５】請求項４記載の発明は、圧電セラミック粉
末をチタン酸鉛で構成した可撓性圧電素子である。According to a fourth aspect of the present invention, there is provided a flexible piezoelectric element comprising piezoelectric ceramic powder made of lead titanate.
【００１６】そして、チタン酸鉛の誘電率は、チタン酸
鉛とジルコン酸鉛の固溶体の誘電率よりも小さいので、
圧電セラミック粉末の誘電率を小さくできるため、分極
処理が容易になり、簡単に高感度な可撓性圧電素子が提
供できる。Since the dielectric constant of lead titanate is smaller than the dielectric constant of a solid solution of lead titanate and lead zirconate,
Since the dielectric constant of the piezoelectric ceramic powder can be reduced, the polarization process is facilitated, and a highly sensitive flexible piezoelectric element can be easily provided.
【００１７】請求項５の発明は、電極を金属箔電極で構
成した可撓性圧電素子である。According to a fifth aspect of the present invention, there is provided a flexible piezoelectric element in which the electrodes are constituted by metal foil electrodes.
【００１８】そして、電極を金属箔電極で構成すること
で、可撓性を維持し、信頼性の高い、可撓性圧電素子が
実現できる。By forming the electrodes with metal foil electrodes, it is possible to realize a flexible piezoelectric element that maintains flexibility and has high reliability.
【００１９】請求項６の発明は、電極を電極用高分子と
導電性粒子とからなる複合導電体で構成した可撓性圧電
素子である。According to a sixth aspect of the present invention, there is provided a flexible piezoelectric element in which an electrode is formed of a composite conductor comprising a polymer for an electrode and conductive particles.
【００２０】そして、導電性粒子の接触を通して複合導
電体の導電性が確保される。また、電極用高分子自身の
可撓性を通して複合導電体の可撓性が確保される。ま
た、複合導電体電極の電極用高分子と、複合圧電体シー
トの高分子母材の軟化温度の適切な選択により、容易に
熱プレス等により接着できる。Then, the conductivity of the composite conductor is ensured through the contact of the conductive particles. Further, the flexibility of the composite conductor is ensured through the flexibility of the electrode polymer itself. In addition, by appropriately selecting the softening temperature of the polymer for the electrode of the composite conductor electrode and the polymer base material of the composite piezoelectric sheet, the composite can be easily bonded by hot pressing or the like.
【００２１】請求項７の発明は、電極用高分子と高分子
母材とを同質材料で構成した可撓性圧電素子である。According to a seventh aspect of the present invention, there is provided a flexible piezoelectric element in which a polymer for an electrode and a polymer base material are made of the same material.
【００２２】そして、電極用高分子と高分子母材とが同
質材料であるので、電極を複合圧電体シートに容易に強
固接着でき、信頼性が向上する。Since the polymer for the electrode and the polymer matrix are made of the same material, the electrodes can be easily and firmly bonded to the composite piezoelectric sheet, and the reliability is improved.
【００２３】請求項８の発明は、導電性粒子をカーボン
で構成した可撓性圧電素子である。The invention according to claim 8 is a flexible piezoelectric element in which conductive particles are made of carbon.
【００２４】そして、カーボン粒子は工業的に多量に利
用されているので、安価であり、入手も容易である。Since carbon particles are industrially used in large quantities, they are inexpensive and easy to obtain.
【００２５】[0025]
【実施例】以下、本説明の実施例について図面を用いて
説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００２６】（実施例１）図１は本発明の実施例１にお
ける可撓性圧電素子の断面図である。この可撓性圧電素
子は高分子母材１中に圧電セラミック粉末２を分散して
混入した後、厚さ０．５mmのシートとし、その後凹凸状
の金型を用いて熱プレスにより、複合圧電体シート３の
表面形状を凹凸状に成形した。この複合圧電体シート３
の凸部に接着剤６を塗布した後、電極４を配置すること
により、複合圧電体３の凹部と電極４とは接触しない構
成となり、両者間に空気層５形成される。さらに、電極
４と複合圧電体シート３とが部分的に接着されているた
め、電極４の引っ張り力が緩和され可撓性が向上した。Embodiment 1 FIG. 1 is a sectional view of a flexible piezoelectric element according to Embodiment 1 of the present invention. This flexible piezoelectric element is obtained by dispersing and mixing a piezoelectric ceramic powder 2 in a polymer base material 1 and then forming a sheet having a thickness of 0.5 mm. The surface shape of the body sheet 3 was formed into an uneven shape. This composite piezoelectric sheet 3
After the adhesive 6 is applied to the convex portion of the composite piezoelectric member 3, the concave portion of the composite piezoelectric body 3 is not in contact with the electrode 4 by disposing the electrode 4, and an air layer 5 is formed between the two. Furthermore, since the electrode 4 and the composite piezoelectric sheet 3 are partially adhered, the tensile force of the electrode 4 is reduced and the flexibility is improved.
【００２７】本実施例では電極４としてアルミニウム１
５μmの金属泊電極を用い、複合圧電体シート３と接着
剤６により接着させた。接着剤６としてポリエステル系
樹脂、ウレタン系樹脂、エポキシ系樹脂や各々に導電性
粒子を混入した導電性接着剤等が挙げられる。本実施例
ではエポキシ系樹脂を使用した。この接着剤６の塗布厚
を制御することによって可撓性を自由に調節することも
可能である。In this embodiment, aluminum 1 is used as the electrode 4.
The composite piezoelectric sheet 3 was bonded to the composite piezoelectric sheet 3 with an adhesive 6 using a 5 μm metal electrode. Examples of the adhesive 6 include a polyester-based resin, a urethane-based resin, an epoxy-based resin, and a conductive adhesive mixed with conductive particles. In this embodiment, an epoxy resin was used. By controlling the applied thickness of the adhesive 6, the flexibility can be freely adjusted.
【００２８】次に圧電特性を付与するために、電極４の
間に直流高電圧を印加して圧電セラミック粉末２を分極
し、可撓性圧電素子を構成した。Next, in order to impart piezoelectric characteristics, a high DC voltage was applied between the electrodes 4 to polarize the piezoelectric ceramic powder 2 to form a flexible piezoelectric element.
【００２９】可撓性圧電素子は外力によって電荷を発生
し、電荷発生量Ｑ［＝ＣＶ］は可撓性圧電素子自身の静
電容量Ｃと出力電圧Ｖの積で表される。この電荷発生量
は周波数や静電容量Ｃに依存しないが、出力電圧Ｖは静
電容量Ｃに依存する。このため、静電容量Ｃが小さいほ
ど出力電圧Ｖは大きくなり見かけ上の感度が向上する。
また、静電容量Ｃは複合圧電体シート３の凹部に形成さ
れた空気層５に依存し、凹部の占める割合が大きいほど
可撓性圧電素子の静電容量は低下し、感度が向上するこ
ととなる。本発明の可撓性圧力センサは外力が印加され
ない状態では図１（ａ）に示すように複合圧電体シート
３と電極４との接触面積は小さいが、外力が印加される
と図１（ｂ）に示すように、電極４が複合圧電体シート
３の凹部とも接触するため印加面積部分の静電容量は増
加し、印加面積に応じた出力が得られる。つまり、複合
圧電体シート３の形状を凹凸状にすることによって外力
の印加面積に近い容量に抑えることが可能となるため、
出力電圧を高くでき、感度が向上する。The flexible piezoelectric element generates electric charge by an external force, and the amount of generated electric charge Q [= CV] is represented by the product of the capacitance C of the flexible piezoelectric element itself and the output voltage V. The amount of charge generation does not depend on the frequency or the capacitance C, but the output voltage V depends on the capacitance C. Therefore, the smaller the capacitance C is, the larger the output voltage V is, and the apparent sensitivity is improved.
Further, the capacitance C depends on the air layer 5 formed in the concave portion of the composite piezoelectric sheet 3, and the larger the ratio of the concave portion, the lower the capacitance of the flexible piezoelectric element and the higher the sensitivity. Becomes When the external force is not applied to the flexible pressure sensor of the present invention, the contact area between the composite piezoelectric sheet 3 and the electrode 4 is small as shown in FIG. As shown in (2), since the electrode 4 is also in contact with the concave portion of the composite piezoelectric sheet 3, the capacitance in the applied area increases, and an output corresponding to the applied area is obtained. That is, by making the shape of the composite piezoelectric sheet 3 uneven, it is possible to suppress the capacitance to an area where an external force is applied.
Output voltage can be increased, and sensitivity is improved.
【００３０】本実施例において、複合圧電体シート３の
凹部と凸部の面積比（凹／凸）を変化させて、可撓性圧
電素子を変化させ各々の可撓性圧電素子の外力よる出力
電圧を測定した。この結果を図２に示す。この時、外力
として可撓性圧電素子が１mm歪む圧力を印加し、印加面
積は一定とした。この結果からも複合圧電体シート３を
凹凸形状にして空気層５を形成することによって感度が
向上し、複合圧電体シート３の凹部の占める割合が大き
いほどその傾向が大きいことが解った。よって本発明の
可撓性圧電素子は電極４として蒸着電極を使用しなくて
も感度が高く、信頼性の高い圧電素子を実現することが
できた。また、複合圧電体シート３と電極４とを接着剤
６によって接着できるため、簡単な製造工程で可撓性圧
電素子を容易に形成できる。In this embodiment, the area ratio (concave / convex) of the concave and convex portions of the composite piezoelectric sheet 3 is changed to change the flexible piezoelectric elements, and the output by the external force of each flexible piezoelectric element. The voltage was measured. The result is shown in FIG. At this time, a pressure for distorting the flexible piezoelectric element by 1 mm was applied as an external force, and the applied area was kept constant. From this result, it was found that the sensitivity was improved by forming the air layer 5 with the composite piezoelectric sheet 3 having a concave-convex shape, and the tendency was larger as the proportion of the concave portion of the composite piezoelectric sheet 3 was larger. Therefore, the flexible piezoelectric element of the present invention can realize a highly reliable and highly reliable piezoelectric element without using a deposition electrode as the electrode 4. Further, since the composite piezoelectric sheet 3 and the electrodes 4 can be bonded to each other with the adhesive 6, a flexible piezoelectric element can be easily formed by a simple manufacturing process.
【００３１】また、圧電セラミック粉末２の材質は、チ
タン酸鉛とジルコン酸鉛の固溶体であることが望まし
い。この組成の圧電セラミックは電子部品用セラミック
として工業的に多量に実用されているので、安価であり
入手も容易である。The material of the piezoelectric ceramic powder 2 is preferably a solid solution of lead titanate and lead zirconate. Piezoelectric ceramics of this composition are industrially used in large quantities as ceramics for electronic components, and are inexpensive and easily available.
【００３２】また、チタン酸鉛とジルコン酸鉛の固溶体
以外にも圧電セラミック粉末２の材質としてチタン酸鉛
も好ましい。チタン酸鉛とジルコン酸鉛の固溶体の比誘
電率はおよそ８００〜３０００程度の大きな値である
が、チタン酸鉛の比誘電率は２００〜３００程度の小さ
な値である。この場合、圧電セラミック粉末２と電極４
の間に高分子母材１に起因する静電容量は圧電セラミッ
ク粉末２に起因する静電容量と同程度にできる。従っ
て、圧電セラミック粉末の分極が容易にできる。In addition to the solid solution of lead titanate and lead zirconate, lead titanate is also preferable as the material of the piezoelectric ceramic powder 2. The relative dielectric constant of the solid solution of lead titanate and lead zirconate is a large value of about 800 to 3000, while the relative dielectric constant of lead titanate is a small value of about 200 to 300. In this case, the piezoelectric ceramic powder 2 and the electrode 4
During this time, the capacitance caused by the polymer base material 1 can be substantially equal to the capacitance caused by the piezoelectric ceramic powder 2. Therefore, the polarization of the piezoelectric ceramic powder can be easily performed.
【００３３】また、高分子母材１としてエポキシ樹脂、
ウレタン樹脂、クロロプレン樹脂、塩素化ポリエチレン
樹脂などが用いられるが、エポキシ樹脂、ウレタン樹脂
の耐熱性は６０〜８０℃程度であるのに対し、塩素化ポ
リエチレンは、１２０℃の高耐熱を有する点で優れてい
る。また、塩素化ポリエチレンは分子量や結晶化度等を
適切に選ぶことにより、加硫無しでも上記高耐熱性を実
現できる点でも好ましい。また、塩素化ポリエチレンは
可撓性に優れるため、外力による電極剥離等が抑制さ
れ、信頼性及び感度が高い。Also, an epoxy resin as the polymer base material 1,
Urethane resin, chloroprene resin, chlorinated polyethylene resin, etc. are used. Epoxy resin and urethane resin have heat resistance of about 60 to 80 ° C, whereas chlorinated polyethylene has high heat resistance of 120 ° C. Are better. Chlorinated polyethylene is also preferable in that the above high heat resistance can be realized without vulcanization by appropriately selecting the molecular weight, the crystallinity, and the like. Further, since chlorinated polyethylene is excellent in flexibility, electrode peeling or the like due to external force is suppressed, and reliability and sensitivity are high.
【００３４】（実施例２）本実施例の断面図を図３に示
す。実施例１と異なる点は、電極４として、金属箔電極
ではなく、複合導電体７を使用した点である。複合導電
体７は電極用高分子７ａと導電性粒子７ｂとから構成さ
れる。このとき、導電性粒子７ｂは電極用高分子７ａ中
に網目状に相互に接触して配列され、これらの接触を通
して複合導電体７の導電性が確保される。また、電極用
高分子７ｂにより、それ自身の可撓性を通して複合導電
体７の可撓性が確保される。(Embodiment 2) FIG. 3 is a sectional view of this embodiment. The difference from the first embodiment is that the electrode 4 is not a metal foil electrode but a composite conductor 7. The composite conductor 7 is composed of an electrode polymer 7a and conductive particles 7b. At this time, the conductive particles 7b are arranged in a mesh pattern in the electrode polymer 7a so as to be in contact with each other, and the conductivity of the composite conductor 7 is ensured through these contacts. Further, the flexibility of the composite conductor 7 is ensured by the electrode polymer 7b through its own flexibility.
【００３５】このため、金属箔電極４を使用した場合以
上の可撓性が得られる。For this reason, flexibility higher than that when the metal foil electrode 4 is used is obtained.
【００３６】また、電極用高分子７ａとして、高分子母
材１と同様、エポキシ樹脂、ウレタン樹脂、クロロプレ
ン樹脂、塩素化ポリエチレン樹脂などが用いられる。ま
た、導電性粒子７ｂとして、カーボン粒子や銀粒子が用
いられる。銀粒子を用いた場合、複合導電体電極７の比
抵抗は５×１０-3Ω・cm程度の小さな値を示すが、カー
ボン粒子を用いた場合、同比抵抗値は約１桁以上の大き
な値を示す。この圧電素子を人体検知に用いた場合の周
波数範囲は約５Ｈｚ程度であるので、この時の複合圧電
体シート３のインピーダンスは約１００ｋΩ以上であ
り、電極４の比抵抗値は１ｋΩ以下程度で充分であるの
で、導電性粒子７ｂとして低価格のカーボン粒子を用い
ることが望ましい。As the polymer 7a for the electrode, an epoxy resin, a urethane resin, a chloroprene resin, a chlorinated polyethylene resin or the like is used as in the case of the polymer base material 1. Further, carbon particles or silver particles are used as the conductive particles 7b. When silver particles are used, the specific resistance of the composite conductor electrode 7 shows a small value of about 5 × 10 −3 Ω · cm, but when carbon particles are used, the specific resistance value is about one digit or more. Is shown. Since the frequency range when this piezoelectric element is used for human body detection is about 5 Hz, the impedance of the composite piezoelectric sheet 3 at this time is about 100 kΩ or more, and the specific resistance value of the electrode 4 is about 1 kΩ or less. Therefore, it is desirable to use inexpensive carbon particles as the conductive particles 7b.
【００３７】高分子母材１と電極用高分子７ａは同質材
料で形成することが望ましい。It is desirable that the polymer base material 1 and the electrode polymer 7a are formed of the same material.
【００３８】これは、熱によって接着する場合、同質材
料同志が容易に接着しやすいため、接着強度が高く接着
剤等を使用しないため信頼性も高い。本実施例では複合
圧電体シート３を凹凸状に成形した金型を使用して熱プ
レスにより、複合圧電体シート３と電極４とを熱溶着し
た。この時、高分子母材１と電極用高分子７ａに塩素化
ポリエチレンを使用することが望ましい。これは、複合
圧電体シート３の高分子母材１で述べたように、塩素化
ポリエチレンは可撓性に優れるため、感度も高いうえ、
耐熱性も優れているため、信頼性も高い。In the case of bonding by heat, the same material can be easily bonded together, so that the bonding strength is high and the reliability is high because no adhesive or the like is used. In the present embodiment, the composite piezoelectric sheet 3 and the electrodes 4 were heat-welded by hot pressing using a mold in which the composite piezoelectric sheet 3 was formed into an uneven shape. At this time, it is desirable to use chlorinated polyethylene for the polymer base material 1 and the electrode polymer 7a. This is because, as described in the polymer matrix 1 of the composite piezoelectric sheet 3, the chlorinated polyethylene is excellent in flexibility and thus has high sensitivity and
Excellent reliability because of excellent heat resistance.
【００３９】[0039]
【発明の効果】上記実施例から明らかなように、請求項
１の発明によれば、複合圧電体シートを凹凸形状にする
ことで可撓性が向上するとともに、複合圧電体シートの
凹部と電極間に空気層が形成されるため静電容量が低下
し、感度及び信頼性の高い可撓性圧電素子を提供でき
る。As is clear from the above embodiment, according to the first aspect of the present invention, the composite piezoelectric sheet is formed in a concave and convex shape to improve flexibility, and the concave portion of the composite piezoelectric sheet and the electrode are formed. Since an air layer is formed between the layers, the capacitance is reduced, and a highly sensitive and reliable flexible piezoelectric element can be provided.
【００４０】また、請求項２記載の発明によれば、高分
子母材を塩素化ポリエチレンで構成したので、優れた耐
熱性と優れた可撓性を兼ね備えた複合圧電体シートが得
られる。According to the second aspect of the present invention, since the polymer matrix is made of chlorinated polyethylene, a composite piezoelectric sheet having both excellent heat resistance and excellent flexibility can be obtained.
【００４１】また、請求項３記載の発明によれば、圧電
セラミック粉末としてチタン酸鉛とジルコン酸鉛の固溶
体を用いているので、安価であり、入手も容易である。According to the third aspect of the present invention, since a solid solution of lead titanate and lead zirconate is used as the piezoelectric ceramic powder, it is inexpensive and easily available.
【００４２】また、請求項４記載の発明によれば、圧電
セラミック粉末としてをチタン酸鉛を用いているので、
圧電セラミック粉末の誘電率を小さくできるため、分極
処理が容易になる。According to the fourth aspect of the present invention, since lead titanate is used as the piezoelectric ceramic powder,
Since the dielectric constant of the piezoelectric ceramic powder can be reduced, the polarization process is facilitated.
【００４３】また、請求項５の発明によれば、電極を金
属箔電極で構成することで、可撓性を維持し、信頼性の
高い、可撓性圧電素子が実現できる。According to the fifth aspect of the present invention, since the electrodes are formed of metal foil electrodes, a flexible piezoelectric element which maintains flexibility and has high reliability can be realized.
【００４４】また、請求項６の発明によれば、電極を電
極用高分子と導電性粒子とからなる複合導電体で構成し
たため、電極用高分子自身の可撓性を通して複合導電体
の可撓性が確保されるとともに、容易に熱プレス等の熱
溶着により接着できる。According to the sixth aspect of the present invention, since the electrode is formed of the composite conductor composed of the polymer for the electrode and the conductive particles, the flexibility of the composite conductor is increased through the flexibility of the polymer for the electrode itself. As a result, it can be easily bonded by heat welding such as hot press.
【００４５】また、請求項７の発明によれば、電極用高
分子と高分子母材とを同質材料で構成したので、電極を
複合圧電体シートに容易に強固接着でき、信頼性が向上
する。According to the seventh aspect of the present invention, since the polymer for the electrode and the polymer base material are made of the same material, the electrode can be easily and firmly bonded to the composite piezoelectric sheet, and the reliability is improved. .
【００４６】また、請求項８の発明によれば、導電性粒
子をカーボンで構成したので、安価であり、入手も容易
である。According to the invention of claim 8, since the conductive particles are made of carbon, they are inexpensive and easily available.
【図１】（ａ）本発明の実施例１における外力印加前の
可撓性圧電素子の断面図 （ｂ）本発明の実施例１における外力印加時の可撓性圧
電素子の断面図FIG. 1A is a cross-sectional view of a flexible piezoelectric element before an external force is applied in Example 1 of the present invention. FIG. 1B is a cross-sectional view of a flexible piezoelectric element when an external force is applied in Example 1 of the present invention.
【図２】本発明の実施例１における凹凸比率と出力電圧
との関係を示す特性図FIG. 2 is a characteristic diagram showing a relationship between an unevenness ratio and an output voltage in Embodiment 1 of the present invention.
【図３】本発明の実施例２における可撓性圧電素子の断
面図FIG. 3 is a sectional view of a flexible piezoelectric element according to a second embodiment of the present invention.
【図４】従来の可撓性圧電素子の断面図FIG. 4 is a sectional view of a conventional flexible piezoelectric element.
１ 高分子母材 ２ 圧電セラミック粉末 ３ 複合圧電シート ４ 電極 ５ 空気層 ６ 接着剤 ７ 複合導電体電極 ７ａ 電極用高分子 ７ｂ 導電性粒子 Reference Signs List 1 polymer base material 2 piezoelectric ceramic powder 3 composite piezoelectric sheet 4 electrode 5 air layer 6 adhesive 7 composite conductor electrode 7a polymer for electrode 7b conductive particles
───────────────────────────────────────────────────── フロントページの続き (72)発明者 福田 祐 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 伊藤 雅彦 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 中谷 直史 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yu Fukuda 1006 Kadoma Kadoma, Osaka Pref. Matsushita Electric Industrial Co., Ltd. 72) Inventor Naofumi Nakatani 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.
Claims (8)
した複合圧電体シートと、前記複合圧電体シートの両面
に配置された電極とからなり、前記複合圧電体シートの
少なくとも一方の面が凹凸形状である可撓性圧電素子。1. A composite piezoelectric sheet in which a piezoelectric ceramic powder is mixed into a polymer base material, and electrodes disposed on both sides of the composite piezoelectric sheet, wherein at least one surface of the composite piezoelectric sheet is provided. A flexible piezoelectric element having an uneven shape.
求項１記載の可撓性圧電素子。2. The flexible piezoelectric element according to claim 1, wherein the polymer base material is chlorinated polyethylene.
ン酸鉛の固溶体である請求項１記載の可撓性圧電素子。3. The flexible piezoelectric element according to claim 1, wherein the piezoelectric ceramic powder is a solid solution of lead titanate and lead zirconate.
求項１記載の可撓性圧電素子。4. The flexible piezoelectric element according to claim 1, wherein the piezoelectric ceramic powder is lead titanate.
撓性圧電素子。5. The flexible piezoelectric element according to claim 1, wherein the electrode is a metal foil electrode.
る複合導電体である請求項１記載の可撓性圧電素子。6. The flexible piezoelectric element according to claim 1, wherein the electrode is a composite conductor comprising a polymer for an electrode and conductive particles.
ある請求項６記載の可撓性圧電素子。7. The flexible piezoelectric element according to claim 6, wherein the polymer for electrode and the polymer base material are the same material.
の可撓性圧電素子。8. The flexible piezoelectric element according to claim 6, wherein the conductive particles are carbon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26211399A JP2001085754A (en) | 1999-09-16 | 1999-09-16 | Flexible piezoelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26211399A JP2001085754A (en) | 1999-09-16 | 1999-09-16 | Flexible piezoelectric element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001085754A true JP2001085754A (en) | 2001-03-30 |
Family
ID=17371232
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26211399A Withdrawn JP2001085754A (en) | 1999-09-16 | 1999-09-16 | Flexible piezoelectric element |
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| Country | Link |
|---|---|
| JP (1) | JP2001085754A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014017635A1 (en) * | 2012-07-26 | 2014-01-30 | 株式会社村田製作所 | Ceramic electronic component and method for producing ceramic electronic component |
-
1999
- 1999-09-16 JP JP26211399A patent/JP2001085754A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014017635A1 (en) * | 2012-07-26 | 2014-01-30 | 株式会社村田製作所 | Ceramic electronic component and method for producing ceramic electronic component |
| JPWO2014017635A1 (en) * | 2012-07-26 | 2016-07-11 | 株式会社村田製作所 | Ceramic electronic components |
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