JPS62237777A - ジヨセフソン素子用基板 - Google Patents

ジヨセフソン素子用基板

Info

Publication number
JPS62237777A
JPS62237777A JP61079139A JP7913986A JPS62237777A JP S62237777 A JPS62237777 A JP S62237777A JP 61079139 A JP61079139 A JP 61079139A JP 7913986 A JP7913986 A JP 7913986A JP S62237777 A JPS62237777 A JP S62237777A
Authority
JP
Japan
Prior art keywords
oxide film
thickness
lower electrode
substrate
tunnel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61079139A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0515313B2 (enrdf_load_stackoverflow
Inventor
Hiroyuki Mori
博之 森
Koji Yamada
宏治 山田
Shinichiro Yano
振一郎 矢野
Mikio Hirano
幹夫 平野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61079139A priority Critical patent/JPS62237777A/ja
Publication of JPS62237777A publication Critical patent/JPS62237777A/ja
Publication of JPH0515313B2 publication Critical patent/JPH0515313B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/80—Constructional details
    • H10N60/81—Containers; Mountings
    • H10N60/815—Containers; Mountings for Josephson-effect devices

Landscapes

  • Containers, Films, And Cooling For Superconductive Devices (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP61079139A 1986-04-08 1986-04-08 ジヨセフソン素子用基板 Granted JPS62237777A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61079139A JPS62237777A (ja) 1986-04-08 1986-04-08 ジヨセフソン素子用基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61079139A JPS62237777A (ja) 1986-04-08 1986-04-08 ジヨセフソン素子用基板

Publications (2)

Publication Number Publication Date
JPS62237777A true JPS62237777A (ja) 1987-10-17
JPH0515313B2 JPH0515313B2 (enrdf_load_stackoverflow) 1993-03-01

Family

ID=13681623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61079139A Granted JPS62237777A (ja) 1986-04-08 1986-04-08 ジヨセフソン素子用基板

Country Status (1)

Country Link
JP (1) JPS62237777A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02112289A (ja) * 1988-10-21 1990-04-24 Agency Of Ind Science & Technol トンネル型ジョセフソン接合の製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02112289A (ja) * 1988-10-21 1990-04-24 Agency Of Ind Science & Technol トンネル型ジョセフソン接合の製造装置

Also Published As

Publication number Publication date
JPH0515313B2 (enrdf_load_stackoverflow) 1993-03-01

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term