JPS62235921A - Optical shutter element - Google Patents

Abstract

PURPOSE:To reduce the driving voltage of an element and to expand a light transmitting area by laminating substrates coated with electrode materials so that power supply electrodes are formed on the opposed lamination end faces and the other end faces are formed as light transmitting faces. CONSTITUTION:Electrodes 11 consisting of Ni or the like are formed on both the sides of the substrate consisting of a ceramic material having electro-optical effect except non-adhering parts 12. The substrates 10 are laminated so that non-adhering parts 12 are arranged on the same side every other layer and an insulating part 22 based upon a filler consisting of insulating adhesive is formed between the non-adhering parts 12. The power supply electrodes 15 consisting of Ni or the like are adhesively formed on the end faces on which the electrode layers 14 consisting of the electrodes 11 and the insulating parts 22 are alternately exposed and the other end faces of the based 10 are used as the light transmitting faces 21. Since an electric field is infiltrated into the whole substrates in said constiution, the driving voltage can be reduced and the transmission loss can be also reduced because of the expansion of the light transmission area.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Application The present invention relates to an optical shutter element having a structure in which substrates having an electro-optic effect are laminated. Regarding elements.

BACKGROUND ART An optical shutter that utilizes the electro-optic effect uses (PbLi)(ZrTj) between a pair of polarizers whose polarization directions are orthogonal to each other.
) 03. It is made of a ceramic substrate such as LiNbO3, 8L+2SL020, and is constructed by arranging an optical shutter element in which the electric field direction forms a 45° intersection angle with the polarization direction of the incident light, and is used as an ejection device for optical printers, shutters for optical cameras, etc. Alternatively, versatile applications such as stereoscopic glasses and welding safety glasses are being considered.

As such an optical shutter element, as shown in FIG. 3, a pair of circular planar electrodes (2×3) are inserted into each of the front and back surfaces of the element substrate (1), which has been mirror-polished in advance, with their tooth-shaped portions alternately inserted. A so-called planar type (* type configuration) is known, which consists of power feeding parts (2a) (3a) and drive electrode parts (2b) (3b).

However, in the above configuration, the required drive electrode portions (2b) (3b
) is formed on the surface of the element substrate (1), the electric field does not penetrate sufficiently into the element substrate (1), causing problems such as concentrating on the surface of the element substrate (1) and requiring a higher driving voltage. However, because the electrodes are formed on mirror-finished surfaces, they have weak adhesion and are easily peeled off and damaged by the application of high driving voltages.

As an optical shutter element having a structure that solves this problem, a so-called groove-type structure shown in FIG. 4 is known. That is, a large number of parallel grooves are provided in the element substrate (1), and every other parallel groove is electrically connected to power supply electrodes (4a) (5a) formed on both end surfaces of the element substrate (1). and then to the drive power 1 (
4b) The groove shown in (5b) is made of a +M configuration in which electrodes (4×5) are arranged.

In the structure of the groove-type electrodes (4) and (5) in which the electrode material is adhered to the groove surface, the electric field can effectively penetrate into the inside of the element substrate (1). , the drive voltage is reduced, but the drive voltage is lowered roughly and the element substrate (
Expand the light transmission surface (6) area of 1) as much as possible to transmit 10
In order to reduce the loss, it is necessary to increase the groove depth and narrow the full width of the groove-shaped electrode.

It is difficult to deposit the required D4* material in the concave groove of the full-sized D4 (similar to 4) (5) using methods such as sputtering and vapor deposition with zero public cost, and usually, A method of applying conductive paste has been adopted, but in order to avoid adhering the electrode material uniformly and with the required adhesion strength to the groove surface, the depth and width of the groove are inevitably limited, and the drive voltage and Not only is it difficult to reduce transmission loss, but the 'lA manufacturing process is also complicated.
It is unsuitable for manufacturing on an industrial scale, and there is a strong need for an optical shutter element with excellent manufacturability.

OBJECTS OF THE INVENTION The object of the present invention is to provide an optical Yatta element which reduces losses in drive voltage and transmission, is extremely easy to assemble and manufacture, and has excellent productivity.

Structure of the Invention The present invention provides electrode non-adhesive portions on both main surfaces of a substrate having an electro-optic effect on which electrode materials are adhered, and on mutually opposing end surfaces of each main surface. It consists of a structure in which multiple substrates are stacked in the thickness direction, with each substrate facing each other so that the non-covered parts are on the same end surface side, and an insulating adhesive is interposed between the non-covering parts between the substrates and the internal electrodes. , a light source characterized in that a power feeding electrode is adhered to the end face of the laminated layer having an insulating part formed of an adhesive filled between the non-adhered parts, and the thickness end face of the substrate is made a light transmitting surface. It is protected by a shutter element.

More specifically, as shown in FIG. 1, the optical shutter element according to the present invention has a plurality of strip-shaped substrates (10) laminated in the thickness direction, and the length of the substrate (10) is determined by the lamination direction. It has a laminated plate-like structure in which the width is the thickness in the light transmission direction, and the internal electrode layer (14) is integrated with an insulating adhesive (13) and laminated between the substrates (10), and the internal electrode is not adhered. Part (1
2) Insulating part (22) formed with adhesive filled in between
By installing a power supply electrode (15H15) on the end face of the laminated substrate (15H15), a required south-shaped electrode is formed on the rectangular plate surface, and the thickness of each laminated substrate (10) is connected to the light transmitting surface (15H15). 21).

In addition, lamination+
Since I am a M,! ¥! In addition, the driving internal electrodes can be applied in the thickness direction of the device in an appropriate amount, allowing the electric field to penetrate the entire thickness of the device and reducing the driving voltage. Since each of the substrates having the required thickness serves as a light transmitting surface, the light transmitting area of the element is enlarged compared to the conventional groove type element, and there is an advantage that transmission loss can be greatly reduced.

In this invention, the laminated substrates include (PbLa) (Z
rTL) 03 (hereinafter referred to as PLZT), L'LNb
○3°BL+z A known ceramic substrate such as Sjo 20 can be used.

The electrode material to be deposited on both main surfaces of the substrate, which will become the internal electrodes of the optical shutter element, is preferably a metal film of Cr, N5 Cu, etc., bonded using an R film forming technique such as sputtering or vapor deposition.

The thickness of each internal electrode between the laminated substrates and the thickness of the insulating adhesive between the internal electrodes are preferably as thin as possible in order to expand the light transmission area, and each is preferably 2.4 m or less.

Although the insulating adhesive between the internal electrodes is not necessary for the function of the optical shutter element, the insulating adhesive filled in the non-adhered area provided on each of the laminated substrates adheres each substrate, and It is indispensable to ensure insulation from the power supply (power supply)* applied to the end surface of the laminated layer and to form a so-called tooth-shaped electrode, and various known adhesives can be used.

Disclosure of the Invention Based on Drawings FIG. 1 is a perspective explanatory view of an optical shutter element according to the present invention, and FIG. 2 is a perspective explanatory view showing a manufacturing process of the optical shutter according to the present invention. Note that all the drawings show the electrodes and the adhesive layer in an exaggerated manner.

The manufacturing process according to the present invention will be explained based on FIG.
, width 30 mm x length 50 mm obtained by slicing from a PLZ sintered body with a Zr/Tj ratio of 65/35.
It was made into a rectangular plate shape of mm x thickness 0.1 mm, and was heat treated to remove distortion for 1 hour in the atmosphere at 500°C.

Next, electrodes (11) made of NL were deposited on both main surfaces of the substrate (10) to a thickness of about 1 m by vapor deposition. At this time, there is a non-adhered portion (12) of the electrode on the mutually opposing end surfaces of each main surface.
I can't stand it.

Using 500 sheets of this substrate (10), the non-adhered part of the electrode (
Place the substrates (10) facing each other so that the two substrates (12) are on the same end side, and the non-adhered portion (12) between each substrate (10) is sufficiently filled with an insulating adhesive (13) made of epoxy resin. and apply the insulating adhesive (13) between the electrodes (11) at 211
Each substrate (10) was laminated and fixed in the thickness direction with a thickness of m interposed therebetween. Note that no electrodes were attached to the top and bottom surfaces of the laminate.

That is, - the internal electrode layer (14) having an insulating part made of adhesive (13) is laminated between the substrates (10) so that the insulating part is exposed at the end face of the laminated layer every other layer. be.

After completing the lamination bonding described above, a power supply electrode (15
) (15) is deposited and formed.

Roughly, the stacked assembly was assembled into one layer of power supply electrodes (15) (15
) to the required thickness, and the exposed laminated surface is lapped, and the thickness after polishing is 0.3
It is finished to a thickness of mm to form an optical shutter element (20).

After the above steps, as shown in Figure 2F and Figure 1,
It has a stacked plate-like structure in which a plurality of strip-shaped substrates (10) are laminated in the thickness direction, the length is in the direction of lamination, and the thickness in the light transmission direction is the width of the substrate (10). The internal electrode layer (13) integrally laminated between the substrates (10)
14) and an insulating part (22) formed with an adhesive filled in the non-adhered part (12) of the internal electrode. The required 8-tooth electrodes were formed on the surface, and each laminated substrate (
It is possible to obtain an optical shutter element in which the thickness section 10) serves as a light transmitting surface (21).

Effects of the Invention By the way, by using the optical shutter element shown in Fig. 1 and arranging polarizers on both sides to form an optical shutter, the wavelength is 0.633.
When Am laser light was transmitted through the device, good operation was observed at a driving voltage of 70V.

Since the optical shutter element according to the present invention has a laminated structure in which a large number of substrates coated with electrode materials are bonded together, the adhesive strength during lamination is high and the manufacturability is extremely good. It can be provided through the
The electric field penetrates the entire thickness of the substrate, reducing the driving voltage. In addition, each of the substrates of the required thickness, which are laminated with ultra-thin internal electrode layers, serves as a light-transmitting surface, which reduces light transmission in the device. The area is larger than that of a conventional element having a groove-shaped electrode, and there is an advantage that transmission loss can be greatly reduced.

[Brief explanation of drawings]

FIG. 1 is an explanatory perspective view of an optical shutter element according to the present invention, and FIG. 2 is an explanatory perspective view showing the manufacturing process of the optical shutter element according to the invention. 3 and 4 are perspective explanatory views of conventional optical shutter elements. 1... Element substrate, 2.3.4.5... Molar-shaped electrode,
DESCRIPTION OF SYMBOLS 10... Substrate, 11... Electrode, 12... Non-adhering part, 13... Insulating adhesive, 14... Internal electrode layer, 1
5... Power feeding electrode, 20... Element, 21... Light transmitting surface, 22... Insulating part.

Claims (1)

[Claims] 1. On both main surfaces of a substrate having an electro-optic effect on which electrode material is adhered, a non-adhered part of the electrode is provided on the mutually opposing end face sides of each main face, and the non-adhered part of the electrode is provided on the same end face side. It consists of a structure in which a plurality of substrates are stacked in the thickness direction with each substrate facing each other, and an insulating adhesive is interposed between the non-adhered portion between the substrates and the internal electrode, and the non-adhered portion between the substrates is stacked. 1. An optical shutter element characterized in that a power supply electrode is adhered to an end face of a laminated layer having an insulating part formed of an adhesive filled with an adhesive, and a thickness end face of a substrate is made a light transmitting face.