JPH046884A - Laminated unimorph type piezoelectric element - Google Patents
Laminated unimorph type piezoelectric elementInfo
- Publication number
- JPH046884A JPH046884A JP2108193A JP10819390A JPH046884A JP H046884 A JPH046884 A JP H046884A JP 2108193 A JP2108193 A JP 2108193A JP 10819390 A JP10819390 A JP 10819390A JP H046884 A JPH046884 A JP H046884A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shaped piezoelectric
- piezoelectric ceramic
- polarization
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 49
- 230000010287 polarization Effects 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 230000005684 electric field Effects 0.000 claims abstract description 21
- 238000006073 displacement reaction Methods 0.000 abstract description 14
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 2
- 238000003475 lamination Methods 0.000 abstract description 2
- 229910052709 silver Inorganic materials 0.000 abstract description 2
- 239000004332 silver Substances 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 7
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 235000015115 caffè latte Nutrition 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は積層ユニモルフ型圧電素子に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a laminated unimorph piezoelectric element.
電気的エネルギーを機械的エネルギーに変換するＰＺＴ
などの圧電体を利用した屈曲変位型圧電素子として、従
東 バイモルフを圧電素子や、ユニモルフ型圧電素子が
知られている。PZT converts electrical energy into mechanical energy
As a bending displacement type piezoelectric element using a piezoelectric material such as the Juto bimorph piezoelectric element and the unimorph type piezoelectric element, the unimorph type piezoelectric element is known.
バイモルフ型圧電素子鷹 例えは 第２図のようく ２
枚の矩形状の圧電体１０．１１を分極方向が同方向とな
るようをミ 金属板などによって形成された弾性基板１
２の両面に張り合わせ、基板１２を境に互いに反対方向
の電界を印加することで、一方の圧電体１０を分極方向
と垂直に収縮させ、他方の圧電体１１を分極方向と垂直
に伸張させ、その結果、屈曲変位するようになっている
。Bimorph type piezoelectric element hawk For example, as shown in Figure 2 2
Elastic substrate 1 formed of a metal plate or the like, so that the two rectangular piezoelectric bodies 10 and 11 are polarized in the same direction.
By applying electric fields in opposite directions with the substrate 12 as a boundary, one piezoelectric body 10 is contracted perpendicular to the polarization direction, and the other piezoelectric body 11 is expanded perpendicular to the polarization direction. As a result, it is bent and displaced.
一方、ユニモルフ型圧電素子頃 第３図のように基板１
５の片面にのべ 分極された圧電体１６を張り合わせた
構造で、分極方向と同一方向の電界を印加して圧電体１
６を分極方向と垂直に収縮させ、その結策 屈曲変位す
るようになっている。On the other hand, around the unimorph type piezoelectric element, as shown in Figure 3, the substrate 1
It has a structure in which a polarized piezoelectric material 16 is pasted on one side of the piezoelectric material 16, and an electric field in the same direction as the polarization direction is applied to the piezoelectric material 16.
6 is contracted perpendicular to the polarization direction, resulting in bending displacement.
しかし バイモルフ型でミ 一方の圧電体にはその分極
方向と同一方向に電界が印加されるが、他方の圧電体に
はその分極方向と逆方向の電界が印加されるため、この
逆向きの印加電界が圧電体の抗電界に近くなると分極反
転が起こり、変位量や発生力が著しく低下するという問
題があり、また、逆方向に電界をかけているので、長期
に使用していると分極が弱まってしまう。However, in the bimorph type, an electric field is applied to one piezoelectric body in the same direction as its polarization direction, but an electric field is applied to the other piezoelectric body in the opposite direction to its polarization direction. When the electric field approaches the coercive electric field of the piezoelectric material, polarization reversal occurs, resulting in a significant decrease in the amount of displacement and generated force.Also, since the electric field is applied in the opposite direction, the polarization may change over a long period of time. It weakens.
この点、分極方向と逆方向の電界を印加することがなく
、分極反転のないユニモルフ型が有利であるが、ユニモ
ルフ型は分極と同一方向のみに電界を印加し 圧電体を
収縮させるだけであるから、圧電体の収縮と伸張を組み
合わせたバイモルフ型に比較Ｌ−変位量が少ない。In this respect, the unimorph type is advantageous because it does not apply an electric field in the opposite direction to the polarization direction, and there is no polarization reversal, but the unimorph type only applies an electric field in the same direction as the polarization, causing the piezoelectric material to contract. Therefore, the amount of L-displacement is small compared to the bimorph type, which combines contraction and expansion of the piezoelectric material.
本発明はこのような背景の下になされたもので、ユニモ
ルフ型の利点を活かし、その欠点を改良して、変位量も
発生力も大きいユニモルフ型圧電素子を提供するもので
ある。The present invention has been made against this background, and aims to provide a unimorph piezoelectric element that takes advantage of the advantages of the unimorph type, improves its drawbacks, and has a large amount of displacement and large generated force.
すなわち、本発明は、基板の片面に、面方向と垂直に分
極された板状圧電セラミックスを複数枚積層し 電界を
分極方向と同一方向に印加するよつ構成したユニモルフ
型の圧電素子である。That is, the present invention is a unimorph type piezoelectric element constructed by stacking a plurality of plate-shaped piezoelectric ceramics polarized perpendicularly to the surface direction on one side of a substrate, and applying an electric field in the same direction as the polarization direction.
ここで、基板は可撓性、もしく頃 弾性を有することが
必要であり、また、電界が印加されたときの状態で、圧
電的に不活性、即ち、伸縮あるは伸張しないことが望ま
しい。基板自体を電極とする場合には基板は金属である
必要がある２５ζ、圧電セラミックスと基板との間に薄
膜状電極を形成する場合には金属でなく、セラミックス
合成樹脂などでもよい。基板の厚さは、好ましくは１
０μｍ〜１ｍｍ、 特に好ましくは３０μｍ〜２００
μｍがよい。Here, the substrate needs to be flexible or elastic, and is preferably piezoelectrically inactive, that is, does not expand or contract when an electric field is applied. When the substrate itself is used as an electrode, the substrate must be made of metal (25ζ); when a thin film electrode is formed between the piezoelectric ceramic and the substrate, it may be made of ceramics, synthetic resin, etc. instead of metal. The thickness of the substrate is preferably 1
0 μm to 1 mm, particularly preferably 30 μm to 200
μm is good.
次に、板状圧電セラミックスは、ＰＺＴに代表されるが
、これに限定されるものではない。この板状圧電セラミ
ックスは、その面方向に対して垂直すなわち厚さ方向に
分極されている。Next, plate-shaped piezoelectric ceramics are typified by PZT, but are not limited to this. This plate-shaped piezoelectric ceramic is polarized perpendicularly to its surface direction, that is, in its thickness direction.
圧電セラミックスの１枚あたりの厚さは、好ましくは１
０μｍ〜１ｍｍ、 特に好ましくは３０μｍ〜２００
μｍがよい。The thickness of each piezoelectric ceramic is preferably 1
0 μm to 1 mm, particularly preferably 30 μm to 200
μm is good.
板状圧電セラミックスの積層にあたっては、基板側から
奇数番目と偶数番目とでそれぞれ分極方向が逆となるよ
うに積層するのが、以下の理由で好適である。When stacking plate-shaped piezoelectric ceramics, it is preferable to stack the plates so that the odd-numbered and even-numbered plates from the substrate side have opposite polarization directions for the following reasons.
すなわち、積層にあたっては、各層間にｔ極を介挿して
、この電極を介して板状圧電セラミックスに電界を印加
する力τ、奇数番目と偶数番目とで分極方向が同一であ
ると、奇数番目に取り付けられる正極と、偶数番目に取
り付けられる負極とが板状圧電セラミックス間で、隣接
することとなり、両者間に絶縁層を設けなければならな
い。これに対し奇数番目と偶数番目とでそれぞれ分極方
向が逆となるように積層すると板状圧電セラミックス間
に一つの電極を設けるだけで、その電極を隣接する板状
圧電セラミックス双方用の負極あるいは正極として共用
できるというメリットがあり、回路が簡略化できる。In other words, when laminating, a t-pole is inserted between each layer, and the force τ that applies an electric field to the piezoelectric ceramic plate through this electrode is the same when the polarization direction is the same between the odd and even layers. The positive electrode attached to the even-numbered electrode and the negative electrode attached to the even-numbered plate are adjacent to each other between the plate-shaped piezoelectric ceramics, and an insulating layer must be provided between them. On the other hand, if the odd-numbered and even-numbered piezoelectric ceramics are stacked so that the polarization direction is opposite, only one electrode is provided between the piezoelectric ceramic plates, and that electrode can be used as a negative electrode or a positive electrode for both adjacent piezoelectric ceramic plates. It has the advantage that it can be shared as a single device, and the circuit can be simplified.
このような電極は、焼結した板状圧電セラミックスの両
面に金属ペーストを印刷塗布したのち焼付ける方法、る
いはスパッタリングなどのＰＶＤ法による圧電セラミッ
クス面への金属蒸着などによる方法で形成される。また
、焼結前の圧電セラミックスのグリーンシートの片面に
金属ペーストを印刷塗布したものを３枚以上槽層したの
ち、圧電セラミックスの焼結と同時に電極を焼付けて形
成させることもできる。この場合、外側の２枚の圧電セ
ラミックスのうちの１枚１戴 外表面に電極が形成され
ず、圧電的に不活性なため、基板として作用させること
ができる。Such electrodes are formed by printing and applying a metal paste on both sides of a sintered plate-shaped piezoelectric ceramic and then baking it, or by depositing metal on the piezoelectric ceramic surface using a PVD method such as sputtering. Alternatively, the electrodes can be formed by layering three or more green sheets of piezoelectric ceramics with a metal paste printed on one side before sintering, and then baking the electrodes at the same time as the piezoelectric ceramics are sintered. In this case, since no electrode is formed on the outer surface of one of the two outer piezoelectric ceramics and it is piezoelectrically inactive, it can act as a substrate.
なお、圧電セラミックスを積層した圧電素子としては、
特開昭６０−１７８６７７号、特開昭６１−１２７８号
、特開昭６１−１９１０８５号、特開昭６３−２３９０
などが知られているが、これらは、バイモルフ型であり
、ユニモルフ型で積層とした点に特徴を有する本発明と
は異なる。In addition, as a piezoelectric element laminated with piezoelectric ceramics,
JP 60-178677, JP 61-1278, JP 61-191085, JP 63-2390
These are bimorph type, and differ from the present invention in that they are unimorph type and laminated.
本発明では、板状圧電セラミックスを複数枚積層したこ
とで、ユニモルフ型であっても、大きな変位量と、発生
力を得ることが可能である。また、電界を分極方向と同
一方向に印加するので、分極反転という問題は起こり得
す、大きな電界を印加できる。In the present invention, by laminating a plurality of plate-shaped piezoelectric ceramics, it is possible to obtain a large amount of displacement and generated force even if it is a unimorph type. Furthermore, since the electric field is applied in the same direction as the polarization direction, a large electric field can be applied, which may cause the problem of polarization inversion.
本発明の素子は圧電アクチュエータ、振動子などとして
使用できる。The element of the present invention can be used as a piezoelectric actuator, a vibrator, and the like.
以下、本発明の一実施例を第１図に基づいて説明する。 An embodiment of the present invention will be described below with reference to FIG.
リン青銅からなる基板１の片面＆へ 第１の板状圧電セ
ラミックス２が積層さ札 さらに第１の板状圧電セラミ
ックス２に第２の板状圧電セラミックス３が積層されて
いる。A first plate-shaped piezoelectric ceramic 2 is laminated on one side of a substrate 1 made of phosphor bronze.Furthermore, a second plate-shaped piezoelectric ceramic 3 is laminated on the first plate-shaped piezoelectric ceramic 2.
第１及び第２の板状圧電セラミックス２．３はいずれも
、
Ｐｂ （Ｍｇ１−３Ｎｂ２−３） ａ３７ｓＴｉｓ、５
ｔ５Ｚｒｓ、ｚｓｏ３を主成分とする化合物の焼結体か
らなり、いずれも両面に銀ペーストを印刷塗布し焼付け
た後、面方向と垂直に分極を施しである。Both the first and second plate-shaped piezoelectric ceramics 2.3 are made of Pb (Mg1-3Nb2-3) a37sTis, 5
It is made of a sintered body of a compound mainly composed of t5Zrs and zso3, and after printing and applying silver paste on both sides and baking, it is polarized perpendicular to the surface direction.
そして、基板１、第１の板状圧電セラミックス２、第２
の板状圧電セラミックス３はそれぞれ接着剤で接着され
る。Then, the substrate 1, the first plate-shaped piezoelectric ceramic 2, the second
The plate-shaped piezoelectric ceramics 3 are each bonded with an adhesive.
積層にあたり、第１の板状圧電セラミックス２では、分
極の＋側が基板１側となるようにし 第２の板状圧電セ
ラミックス３で頃 分極の一側が第１の板状圧電セラミ
ックス２側となるようにした
そして、第１の板状圧電セラミックス２と第２の板状圧
電セラミックス３との間の電極Ｓ、を電源４の負極に、
基板１と、第２の板状圧電セラミックス３における第１
の板状圧電セラミックス２の反対側の電極Ｓ２にそれぞ
れ電源４の正極を接続し、各板状圧電セラミックス２．
３の分極方向と同一方向に電界を印加し九 これにより
、各板状圧電セラミックス２，３が収縮獣 基板１が収
縮しないため、素子全体が屈曲変位した
基板１の厚さｔ５、第１の板状圧電セラミックス２の厚
さはｔｌ、 第２の板状圧電セラミックス３の厚さｔ
２を適宜選択し 印加電圧を１００Ｖとし変位量δμ瓜
発生力Ｆ （ｇ）を測定しμ 結果を第１〜３表に示
す。なお、 ｔ、は、素子全体の厚さであり、素子の幅
は１０ｍｍ、 駆動長さは１８ｍｍと一定とした。During lamination, the first plate-shaped piezoelectric ceramic 2 is made so that the + side of polarization is on the substrate 1 side, and the second plate-shaped piezoelectric ceramic 3 is made so that one side of polarization is on the first plate-shaped piezoelectric ceramic 2 side. Then, the electrode S between the first plate-shaped piezoelectric ceramic 2 and the second plate-shaped piezoelectric ceramic 3 is connected to the negative electrode of the power source 4,
The first in the substrate 1 and the second plate-shaped piezoelectric ceramic 3
The positive electrode of a power source 4 is connected to the electrode S2 on the opposite side of each plate-shaped piezoelectric ceramic 2.
An electric field is applied in the same direction as the polarization direction of 3. As a result, each of the plate-shaped piezoelectric ceramics 2 and 3 shrinks.Since the substrate 1 does not shrink, the thickness t5 of the substrate 1 at which the entire element is bent is The thickness of the plate-shaped piezoelectric ceramic 2 is tl, and the thickness of the second plate-shaped piezoelectric ceramic 3 is t
2 was selected as appropriate, the applied voltage was set to 100 V, and the amount of displacement δμ and the generated force F (g) were measured, and the results are shown in Tables 1 to 3. Note that t is the thickness of the entire element, the width of the element was 10 mm, and the driving length was constant at 18 mm.
（本頁、以下余白）
第１表
比較例１および２から明らかなように、従来のユニモル
フ型圧電素子において、圧電セラミックスの厚さを一定
にし、基板の厚さを厚くする（素子全体の厚さも厚くな
る）と、変位量が低下し、発生力が増加する。これに対
し、本発明による積層ユニモルフ型圧電素子の実施例１
（戴 比較例２に比べて、大きな変位量と発生力を示す
ことが判る。また、実施例２は、比較例１に比べて、同
一電圧を印加した場合、大きな変位量と発生力を示し、
半分の印加で、はぼ同等の変位量と発生力を示すことが
判る。(This page, blank space below) As is clear from Comparative Examples 1 and 2 in Table 1, in conventional unimorph piezoelectric elements, the thickness of the piezoelectric ceramic is kept constant and the thickness of the substrate is increased (the thickness of the entire element is If the thickness increases), the amount of displacement will decrease and the generated force will increase. On the other hand, Example 1 of the laminated unimorph type piezoelectric element according to the present invention
(Dai) It can be seen that compared to Comparative Example 2, it shows a larger amount of displacement and generated force. Also, compared to Comparative Example 1, Example 2 shows a larger amount of displacement and generated force when the same voltage is applied. ,
It can be seen that with half the application, the displacement amount and generated force are almost the same.
また、バイモルフ型、従来のユニモルフ型、本発明の積
層ユニモルフ型の各種性能を比較すると、以下の第２表
のような結果となる。Further, when comparing various performances of the bimorph type, the conventional unimorph type, and the laminated unimorph type of the present invention, the results are shown in Table 2 below.
（本頁、以下余白）
第２表
〔発明の効果〕
本発明で憾 バイモルフ型圧電素子に比較して、電界を
分極方向と逆方向に印加する必要がないので、電界の印
加による分極反転が起こることがなく、安定した変位量
と発生力を得ることができる。(This page, the following margins) Table 2 [Effects of the invention] Disadvantages of the present invention Compared to bimorph piezoelectric elements, there is no need to apply an electric field in the opposite direction to the polarization direction, so polarization reversal due to the application of an electric field is not possible. This does not occur, and stable displacement and generated force can be obtained.
また、何等かの要因で分極が弱くなっても、駆動に際し
ては分極方向に電界を印加するので、分極を再度強化す
ることができるという復元作用をも有する。Furthermore, even if the polarization becomes weak due to some reason, since an electric field is applied in the polarization direction during driving, it also has a restoring effect in that the polarization can be strengthened again.
そして、従来のユニモルフ型圧電素子に比較して、板状
圧電セラミックスを複数枚積層したことで、大きな変位
量と発生力を得ることができる。Furthermore, compared to conventional unimorph type piezoelectric elements, by laminating a plurality of plate-shaped piezoelectric ceramics, it is possible to obtain a large amount of displacement and generated force.
第１図は本発明の積層ユニモルフ型圧電素子の一例を示
した断面は 第２図は従来のバイモルフ型圧電素子の一
例を示した断面鳳 第３図は従来のユニモルフ型圧電素
子の断面図である。
１ 基板
２ 第１の板状圧電セラミックス
３・・ 第２の板状圧電セラミックス
４・ 電源
５、 ５２・・電極
特許出願人 三井石油化学工業株式会社代理人
弁理士 佐 藤 宗 徳同 遠
山 勉
同 松倉秀実
変化方向
セラミ・ンクスのイ申び
第２図
第１図
変イ１ラテ【０
第３図Figure 1 is a cross-sectional view of an example of the laminated unimorph piezoelectric element of the present invention. Figure 2 is a cross-sectional view of an example of a conventional bimorph piezoelectric element. Figure 3 is a cross-sectional view of a conventional unimorph piezoelectric element. be. 1 Substrate 2 First plate-shaped piezoelectric ceramic 3... Second plate-shaped piezoelectric ceramic 4... Power source 5, 52... Electrode Patent applicant Mitsui Petrochemical Industries Co., Ltd. Agent Patent attorney Sou Sato Tohru Tokudo
Bendou Yama Hidemi Matsukura Change direction Cerami Nx's request Figure 2 Figure 1 Change A 1 Latte 0 Figure 3
Claims (1)
圧電セラミックスを複数枚積層し、電界を分極方向と同
一方向に印加するよう構成した積層ユニモルフ型圧電素
子。(1) A laminated unimorph type piezoelectric element in which a plurality of plate-shaped piezoelectric ceramics polarized perpendicularly to the surface direction are laminated on one side of a substrate, and an electric field is applied in the same direction as the polarization direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2108193A JPH046884A (en) | 1990-04-24 | 1990-04-24 | Laminated unimorph type piezoelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2108193A JPH046884A (en) | 1990-04-24 | 1990-04-24 | Laminated unimorph type piezoelectric element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH046884A true JPH046884A (en) | 1992-01-10 |
Family
ID=14478369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2108193A Pending JPH046884A (en) | 1990-04-24 | 1990-04-24 | Laminated unimorph type piezoelectric element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH046884A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1197755A (en) * | 1997-09-19 | 1999-04-09 | Seiko Epson Corp | Method for driving piezoelectric element |
| JP2020047724A (en) * | 2018-09-18 | 2020-03-26 | 日本特殊陶業株式会社 | Piezoelectric actuator and valve |
-
1990
- 1990-04-24 JP JP2108193A patent/JPH046884A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1197755A (en) * | 1997-09-19 | 1999-04-09 | Seiko Epson Corp | Method for driving piezoelectric element |
| JP2020047724A (en) * | 2018-09-18 | 2020-03-26 | 日本特殊陶業株式会社 | Piezoelectric actuator and valve |
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