JPS62224573A - 研摩定盤およびその製造方法 - Google Patents
研摩定盤およびその製造方法Info
- Publication number
- JPS62224573A JPS62224573A JP61065277A JP6527786A JPS62224573A JP S62224573 A JPS62224573 A JP S62224573A JP 61065277 A JP61065277 A JP 61065277A JP 6527786 A JP6527786 A JP 6527786A JP S62224573 A JPS62224573 A JP S62224573A
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- lapping
- casting
- cast iron
- flatness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 238000000034 method Methods 0.000 claims abstract description 30
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 21
- 238000005266 casting Methods 0.000 claims abstract description 21
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 20
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 18
- 239000010439 graphite Substances 0.000 claims abstract description 18
- 229910001018 Cast iron Inorganic materials 0.000 claims abstract description 12
- 238000001816 cooling Methods 0.000 claims abstract description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims description 24
- 238000005498 polishing Methods 0.000 claims description 21
- 238000010791 quenching Methods 0.000 claims description 11
- 230000000171 quenching effect Effects 0.000 claims description 10
- 150000001247 metal acetylides Chemical class 0.000 claims description 9
- 238000000354 decomposition reaction Methods 0.000 claims description 6
- 238000005496 tempering Methods 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 238000005279 austempering Methods 0.000 claims 1
- 229910052748 manganese Inorganic materials 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 238000007517 polishing process Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 18
- 239000010703 silicon Substances 0.000 abstract description 18
- 230000008569 process Effects 0.000 abstract description 6
- 239000004576 sand Substances 0.000 abstract description 5
- 208000032544 Cicatrix Diseases 0.000 abstract 2
- 231100000241 scar Toxicity 0.000 abstract 2
- 230000037387 scars Effects 0.000 abstract 2
- 238000009413 insulation Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 22
- 229910000734 martensite Inorganic materials 0.000 description 18
- 239000006061 abrasive grain Substances 0.000 description 14
- 239000000463 material Substances 0.000 description 12
- 229910001562 pearlite Inorganic materials 0.000 description 10
- 230000007547 defect Effects 0.000 description 9
- 239000003921 oil Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 239000011159 matrix material Substances 0.000 description 8
- 229910000859 α-Fe Inorganic materials 0.000 description 8
- 229910001563 bainite Inorganic materials 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 230000001737 promoting effect Effects 0.000 description 4
- 238000007711 solidification Methods 0.000 description 4
- 230000008023 solidification Effects 0.000 description 4
- 229910001141 Ductile iron Inorganic materials 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005087 graphitization Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 208000013201 Stress fracture Diseases 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- -1 inclusions Substances 0.000 description 1
- 238000011081 inoculation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 235000011835 quiches Nutrition 0.000 description 1
- 238000007712 rapid solidification Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61065277A JPS62224573A (ja) | 1986-03-24 | 1986-03-24 | 研摩定盤およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61065277A JPS62224573A (ja) | 1986-03-24 | 1986-03-24 | 研摩定盤およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62224573A true JPS62224573A (ja) | 1987-10-02 |
| JPH0480792B2 JPH0480792B2 (enrdf_load_stackoverflow) | 1992-12-21 |
Family
ID=13282269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61065277A Granted JPS62224573A (ja) | 1986-03-24 | 1986-03-24 | 研摩定盤およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62224573A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994013847A1 (en) * | 1992-12-15 | 1994-06-23 | Kabushiki Kaisha Toshiba | Method of manufacturing cast iron of high strength and low expansion |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5943816A (ja) * | 1982-09-06 | 1984-03-12 | Mazda Motor Corp | 球状黒鉛鋳鉄部品の製造法 |
-
1986
- 1986-03-24 JP JP61065277A patent/JPS62224573A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5943816A (ja) * | 1982-09-06 | 1984-03-12 | Mazda Motor Corp | 球状黒鉛鋳鉄部品の製造法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994013847A1 (en) * | 1992-12-15 | 1994-06-23 | Kabushiki Kaisha Toshiba | Method of manufacturing cast iron of high strength and low expansion |
| US6110305A (en) * | 1992-12-15 | 2000-08-29 | Kabushiki Kaisha Toshiba | Method for production of high-strength low-expansion cast iron |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0480792B2 (enrdf_load_stackoverflow) | 1992-12-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |