JPS622240U - - Google Patents
Info
- Publication number
- JPS622240U JPS622240U JP9387485U JP9387485U JPS622240U JP S622240 U JPS622240 U JP S622240U JP 9387485 U JP9387485 U JP 9387485U JP 9387485 U JP9387485 U JP 9387485U JP S622240 U JPS622240 U JP S622240U
- Authority
- JP
- Japan
- Prior art keywords
- electrode plates
- plasma cvd
- wafers
- fixing
- electrode plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000012212 insulator Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985093874U JPH0513004Y2 (enrdf_load_stackoverflow) | 1985-06-20 | 1985-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985093874U JPH0513004Y2 (enrdf_load_stackoverflow) | 1985-06-20 | 1985-06-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS622240U true JPS622240U (enrdf_load_stackoverflow) | 1987-01-08 |
| JPH0513004Y2 JPH0513004Y2 (enrdf_load_stackoverflow) | 1993-04-06 |
Family
ID=30651941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985093874U Expired - Lifetime JPH0513004Y2 (enrdf_load_stackoverflow) | 1985-06-20 | 1985-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0513004Y2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014103318A1 (ja) * | 2012-12-27 | 2014-07-03 | 株式会社神戸製鋼所 | プラズマｃｖｄ法による保護膜の形成方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS561526A (en) * | 1979-06-15 | 1981-01-09 | Matsushita Electric Ind Co Ltd | Substrate holding jig for substrate treatment |
| JPS5898920A (ja) * | 1981-12-08 | 1983-06-13 | Mitsubishi Electric Corp | プラズマ気相成長装置 |
-
1985
- 1985-06-20 JP JP1985093874U patent/JPH0513004Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS561526A (en) * | 1979-06-15 | 1981-01-09 | Matsushita Electric Ind Co Ltd | Substrate holding jig for substrate treatment |
| JPS5898920A (ja) * | 1981-12-08 | 1983-06-13 | Mitsubishi Electric Corp | プラズマ気相成長装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014103318A1 (ja) * | 2012-12-27 | 2014-07-03 | 株式会社神戸製鋼所 | プラズマｃｖｄ法による保護膜の形成方法 |
| JP2014125670A (ja) * | 2012-12-27 | 2014-07-07 | Kobe Steel Ltd | プラズマｃｖｄ法による保護膜の形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0513004Y2 (enrdf_load_stackoverflow) | 1993-04-06 |