JPS63185223U - - Google Patents

Info

Publication number
JPS63185223U
JPS63185223U JP7553487U JP7553487U JPS63185223U JP S63185223 U JPS63185223 U JP S63185223U JP 7553487 U JP7553487 U JP 7553487U JP 7553487 U JP7553487 U JP 7553487U JP S63185223 U JPS63185223 U JP S63185223U
Authority
JP
Japan
Prior art keywords
support plates
wafer boat
heat treatment
treatment equipment
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7553487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7553487U priority Critical patent/JPS63185223U/ja
Publication of JPS63185223U publication Critical patent/JPS63185223U/ja
Pending legal-status Critical Current

Links

JP7553487U 1987-05-20 1987-05-20 Pending JPS63185223U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7553487U JPS63185223U (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7553487U JPS63185223U (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Publications (1)

Publication Number Publication Date
JPS63185223U true JPS63185223U (enrdf_load_stackoverflow) 1988-11-29

Family

ID=30921766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7553487U Pending JPS63185223U (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Country Status (1)

Country Link
JP (1) JPS63185223U (enrdf_load_stackoverflow)

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