JPS62223574A - 極低温冷凍機のバルブ装置 - Google Patents
極低温冷凍機のバルブ装置Info
- Publication number
- JPS62223574A JPS62223574A JP6373386A JP6373386A JPS62223574A JP S62223574 A JPS62223574 A JP S62223574A JP 6373386 A JP6373386 A JP 6373386A JP 6373386 A JP6373386 A JP 6373386A JP S62223574 A JPS62223574 A JP S62223574A
- Authority
- JP
- Japan
- Prior art keywords
- valve device
- eccentric cam
- valve
- fluid
- cryogenic refrigerator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Separation By Low-Temperature Treatments (AREA)
- Mechanically-Actuated Valves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6373386A JPS62223574A (ja) | 1986-03-20 | 1986-03-20 | 極低温冷凍機のバルブ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6373386A JPS62223574A (ja) | 1986-03-20 | 1986-03-20 | 極低温冷凍機のバルブ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62223574A true JPS62223574A (ja) | 1987-10-01 |
JPH0480311B2 JPH0480311B2 (enrdf_load_stackoverflow) | 1992-12-18 |
Family
ID=13237899
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6373386A Granted JPS62223574A (ja) | 1986-03-20 | 1986-03-20 | 極低温冷凍機のバルブ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62223574A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5761562B2 (ja) * | 2011-05-24 | 2015-08-12 | アイシン精機株式会社 | 低温冷凍装置 |
-
1986
- 1986-03-20 JP JP6373386A patent/JPS62223574A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0480311B2 (enrdf_load_stackoverflow) | 1992-12-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |