JPS62207165A - Two-dimensional actuator - Google Patents
Two-dimensional actuatorInfo
- Publication number
- JPS62207165A JPS62207165A JP5008886A JP5008886A JPS62207165A JP S62207165 A JPS62207165 A JP S62207165A JP 5008886 A JP5008886 A JP 5008886A JP 5008886 A JP5008886 A JP 5008886A JP S62207165 A JPS62207165 A JP S62207165A
- Authority
- JP
- Japan
- Prior art keywords
- bodies
- coil
- magnetic circuit
- magnetic
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004907 flux Effects 0.000 claims abstract description 7
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1418—Disposition or mounting of heads or record carriers
- G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
- G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Control Of Position Or Direction (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
この発明は光学機器、半導体製造装置、精密測定器、精
密加工機、精密組立装置等に組込み、微動位置決め或い
は位置合わせ機構に適用する二次元アクチュエータに関
する。[Detailed Description of the Invention] <Industrial Application Field> The present invention is a two-dimensional device that is incorporated into optical equipment, semiconductor manufacturing equipment, precision measuring instruments, precision processing machines, precision assembly equipment, etc., and applied to fine movement positioning or alignment mechanisms. Regarding actuators.
〈従来の技術〉
従来、この種二次元アクチュエータとしては第３図およ
び第４図に示すものが知られている。<Prior Art> Conventionally, as this type of two-dimensional actuator, those shown in FIGS. 3 and 4 are known.
上記二次元アクチュエータは、ベース８の上面にＹ軸用
、Ｙ軸用それぞれ対をなす磁気回路体８１を対向して固
定し、各磁気回路体８１にムービング型コイル体８２を
配備して、コイル体８２をバネ部材８３によりベース８
に支持している。The above-mentioned two-dimensional actuator has two magnetic circuit bodies 81 for the Y-axis and one for the Y-axis facing each other fixed on the top surface of the base 8, and a moving type coil body 82 is arranged in each magnetic circuit body 81, and the coil The body 82 is attached to the base 8 by the spring member 83.
I support it.
〈発明が解決しようとする問題点〉 この従来の二次元アクチュエータは、Ｘ軸。<Problem that the invention seeks to solve> This conventional two-dimensional actuator has an X-axis.
Ｙ軸上の対をなすムービング型コイル体８２の中央部に
被移動体９を配備し、コイル体８２を駆動制御して被移
動体９の移動がなされる６しかし、前記各コイル体８２
が円筒形成いは角筒形であるためにコイル自体の体積が
大きく且つこれを取り巻く磁気回路体８１が大型化する
。The object to be moved 9 is arranged at the center of a pair of moving coil bodies 82 on the Y axis, and the object to be moved 9 is moved by driving and controlling the coil bodies 82.6However, each of the coil bodies 82
Since the coil has a cylindrical or prismatic shape, the volume of the coil itself is large, and the magnetic circuit body 81 surrounding it becomes large.
しかも、４個のコイル体８２に分離しているため構造が
複雑化するという問題点がある。Furthermore, since the coil body 82 is separated into four coil bodies 82, there is a problem that the structure becomes complicated.
この発明は上記諸問題に鑑みて創案されたものである。This invention was created in view of the above problems.
く問題点を解決するための手段〉
上記問題点を解決するための手段を、実施例に対応する
第１図、第２図を用いて以下に説明する。Means for Solving the Problems> Means for solving the above problems will be described below with reference to FIGS. 1 and 2, which correspond to embodiments.
この発明は、ベース１に対しＸ軸およびＹ軸線上に対向
して配設固定され、互いに上下逆向きの磁束を生じる二
対の磁気回路体２．２ａ。The present invention provides two pairs of magnetic circuit bodies 2.2a that are arranged and fixed to a base 1 so as to face each other on the X-axis and Y-axis, and generate magnetic fluxes in opposite directions.
３．３ａと、ベース１上に直交して配備され、両端部を
対応する磁気回路体２，２ａ、３゜３ａの磁気ギヤツブ
に位置させた一対の平板型コイル体４．５とから構成し
たものである。3.3a, and a pair of flat coil bodies 4.5 disposed perpendicularly on the base 1, with both ends positioned in the magnetic gears of the corresponding magnetic circuit bodies 2, 2a, 3.3a. It is something.
〈作用〉
この発明の二次元アクチュエータは、微動位置決め或い
は位置合わせの被移動体６を平板型コイル体４．５の交
叉部に保合する。然して、一方の平板型コイル体４に電
流を流すと、コイル両端部の峨′７（ギャップに対応し
た部分でのコイルを流れる電流方向は互いに逆方向であ
り、一方、再磁気ギャップの磁束の流れ方向が逆方向で
あるから、フレミングの左手の法則に基づき、再磁気回
路体２，２ａはコイル体４に対し同一方向の力を生じ、
交叉部の被移動体６を移動するのである。<Operation> The two-dimensional actuator of the present invention holds the moved object 6 for fine positioning or positioning at the intersection of the flat coil body 4.5. However, when a current is passed through one of the flat coil bodies 4, the directions of the current flowing through the coil at both ends of the coil (corresponding to the gaps) are opposite to each other, and on the other hand, the magnetic flux of the re-magnetic gap is Since the flow directions are opposite, based on Fleming's left hand rule, the remagnetizing circuit bodies 2 and 2a generate forces in the same direction on the coil body 4,
The object to be moved 6 at the intersection is moved.
〈実施例〉 以下、この発明の実施例を図面に基づいて説明する。<Example> Embodiments of the present invention will be described below based on the drawings.
図面において、二次元アクチュエータは、ベース１の上
面にＸ軸周、Ｙ軸用それぞれ対をなす磁気回路体２．２
ａ、３．３ａを対向配備している。In the drawing, the two-dimensional actuator includes magnetic circuit bodies 2.2 which form pairs for the X-axis and Y-axis on the upper surface of the base 1, respectively.
a, 3.3a are placed opposite each other.
各磁気回路体２．２ａは、互いに対向してベース１に固
定されたコ字状ヨーク２１．２１ａと、各コ字状ヨーク
の内面に取付は固定した永久磁石２２．２２ａとからな
り、両永久磁石２２゜２２ａの磁気ギャップに対応する
磁極をＮ、 Ｓ極違えて、各々磁気ギャップに対する
磁束の流れ方向を上下逆向きとなしている。Each magnetic circuit body 2.2a consists of a U-shaped yoke 21.21a fixed to the base 1 facing each other, and a permanent magnet 22.22a fixedly attached to the inner surface of each U-shaped yoke. The magnetic poles corresponding to the magnetic gaps of the permanent magnets 22 and 22a are different N and S poles, so that the direction of flow of magnetic flux with respect to the magnetic gaps is upside down.
一対の平板型コイル体４．５は、対を磁気回路体２．２
３の磁気ギャップを周回する一定幅、長さの平板状コイ
ル体に形成され、前記ベース１上に直交配備してその交
叉部に被移動体６を保合配置すると共に、各コイル体４
．５の両端部を対応する磁気回路体２゜２ａの磁気ギャ
ップに位置させて、バネ部材７に支持している。A pair of flat coil bodies 4.5 are connected to a pair of magnetic circuit bodies 2.2.
Each coil body 4 is formed into a flat plate-shaped coil body having a constant width and length that goes around the magnetic gap of 3, and is disposed orthogonally on the base 1, and the moving body 6 is held and arranged at the intersection thereof, and each coil body 4
．． Both ends of the magnetic circuit body 5 are positioned in the magnetic gap of the corresponding magnetic circuit body 2.degree. 2a, and are supported by the spring member 7.
バネ部材７は、ベース１上に縦設した４本の支柱７１間
に互いに対向する板バネ７２を有し、各板バネ７２をそ
れぞれ磁気回路体２，２ａの磁気ギャップ中に位置させ
て対応するコイル体４．５の側辺を取付は固定してなる
ものである。The spring member 7 has leaf springs 72 facing each other between four pillars 71 vertically installed on the base 1, and each leaf spring 72 is positioned in the magnetic gap of the magnetic circuit bodies 2, 2a. The sides of the coil body 4.5 are fixedly attached.
尚、上記バネ部材７の構造、コイル体４．５との連Ｖ！
構造は図面に限定されることはない。In addition, the structure of the spring member 7 and the connection with the coil body 4.5 are V!
The structure is not limited to the drawings.
また、磁気回路体２．３を構成するヨークの形状、永久
磁石の個数および配置は、実施に際し、本発明の技術的
範囲内において任意に設計変更する。Furthermore, the shape of the yoke and the number and arrangement of permanent magnets constituting the magnetic circuit body 2.3 may be arbitrarily changed within the technical scope of the present invention.
更に、平板型コイル体４．５の巻線構造およびコイルス
プールの有無は任意であり、従って、コイル体４．５と
被移動体６との連繋構造は図示例に限らず、例えば、被
移動体６をＸ、Ｙ軸方向に案内する別途ガイド部材（図
示せず）を設ける等、選択実施する。Furthermore, the winding structure of the flat coil body 4.5 and the presence or absence of a coil spool are optional. Therefore, the connection structure between the coil body 4.5 and the moving object 6 is not limited to the illustrated example. A separate guide member (not shown) may be provided to guide the body 6 in the X and Y axis directions, for example.
次に、上記実施例による二次元アクチュエータの動作を
説明する。Next, the operation of the two-dimensional actuator according to the above embodiment will be explained.
今、平板型コイル４に電流を流すと、対向磁気回路体２
，２ａのギャップ対応部のコイルの電流方向は互いに逆
方向をなしている。一方、対向する磁気回路体２，２ａ
の磁気ギャップに対する磁束の流れは互いに逆向きに設
定しているため、対をなす磁気回路体２，２ａのコイル
体４に作用する力の方向は同一方向となり、コイル体４
は板バネ７２の弾力に抗して微動し、被移動体６をＸ軸
、Ｙ軸方向に′Ｒ１，＠するものである。板バネ７２は
コイル体４，５の支持案内とその復元に機能する。Now, when a current is applied to the flat plate coil 4, the opposing magnetic circuit body 2
, 2a, the current directions of the coils in the gap corresponding portions are opposite to each other. On the other hand, the opposing magnetic circuit bodies 2, 2a
Since the magnetic flux flows with respect to the magnetic gaps are set in opposite directions, the directions of the forces acting on the coil bodies 4 of the paired magnetic circuit bodies 2 and 2a are the same direction, and the coil bodies 4
moves slightly against the elasticity of the plate spring 72, causing the moved object 6 to move in the X-axis and Y-axis directions. The leaf spring 72 functions to support and guide the coil bodies 4 and 5 and restore them.
〈発明の効果〉
本発明は上記の如く、ベース１の上面にＸ軸周、Ｙ軸用
それぞれ対をなす磁気回路体２．２ａ＋３．３ａを対向
配備し、各々対をなす磁気回路体２．２ａ、３．３ａの
磁束を互いに逆向きに設定し、且つベース１上に直交し
て配備した平仮型コイル体４．５の両端部を各々対応す
る磁気回路体２．２ａ、３．３ａの磁気ギャップに位置
させて、交叉する平板型コイル体４，５をＸ軸、Ｙ軸方
向に駆動し、交叉部の被移動体６を微動するようにした
から、本発明は特に、一対の平板型コイル体４．５によ
って磁気回路体２．３を含む、アクチュエータ全体の薄
型化、小型化、軽量化および装置の高速動作を実現でき
る。また、コイル体４，５がＸ軸周とＸ軸周の一対にて
構成したため、従来例に比べて構造の簡易化、組立作業
の省力化を実現できる。<Effects of the Invention> As described above, the present invention includes opposing magnetic circuit bodies 2.2a+3.3a for the X-axis and Y-axis on the upper surface of the base 1, respectively. The magnetic fluxes of 2a and 3.3a are set in opposite directions to each other, and both ends of the flat coil body 4.5 arranged orthogonally on the base 1 are connected to the corresponding magnetic circuit bodies 2.2a and 3.3a, respectively. The present invention is particularly advantageous because the intersecting flat plate coil bodies 4 and 5 are driven in the X-axis and Y-axis directions to slightly move the moved body 6 at the intersection. The flat coil body 4.5 allows the entire actuator, including the magnetic circuit body 2.3, to be made thinner, smaller, and lighter, and the device to operate at higher speed. Furthermore, since the coil bodies 4 and 5 are constructed of a pair of X-axis circumferences and X-axis circumferences, it is possible to simplify the structure and save labor in assembly work compared to the conventional example.
更に、軽量な被移動体６の場合、対をなす平板型コイル
体４．５をＸ、Ｙガイドに兼用することもでき、直ちに
小型ＸＹステージを構成し得る等の優れた効果を有す。Furthermore, in the case of a lightweight moving object 6, the pair of flat plate coil bodies 4.5 can also be used as X and Y guides, and has excellent effects such as being able to immediately configure a small XY stage.
第１図は本発明にかかる二次元アクチュエータの一実施
例を示す平面図、第２図は第１図■−■線断面図、第３
図は従来例の平面図、第４図は第３図ＩＶ−ｒＶ線断面
図である。
１・・・・ベース ２．２ａ・・・・磁気回路体２
１・・・・コア ２２・・・・永久磁石３．３８
・・・・磁気回路体
４．５・・・・平板型コイル体
６・・・・被移動体
特許 出願人 立石電機株式会社
−，，，−ｊ／７−、、
づ＋２１’：Ａｈ ＊を図中且−１問−昨山二
゛卦３）図 理知１め卑面名
４８．槁五凪絡体
＞ｔ−ｖ７ つ十μ図 −＋３図中
ＩＶ−ＩＶ鼻新山ロ？２．：
り、。FIG. 1 is a plan view showing one embodiment of a two-dimensional actuator according to the present invention, FIG. 2 is a sectional view taken along the line ■-■ in FIG.
The figure is a plan view of the conventional example, and FIG. 4 is a sectional view taken along the line IV-rV in FIG. 1...Base 2.2a...Magnetic circuit body 2
1... Core 22... Permanent magnet 3.38
... Magnetic circuit body 4.5 ... Flat coil body 6 ... Moving object patent Applicant Tateishi Electric Co., Ltd. -,,, -j/7-, zu+21':Ah * In the diagram and -1 question -Yasama 2
゛Triangle 3) Diagram Richi 1st name 48. Kaigo-nagi entanglement > t-v7 10 μ figure -+ IV-IV nose Shinzanro in figure 3? 2. : the law of nature,.
Claims (2)
固定され、互いに上下逆向きの磁束を生じる二対の磁気
回路体と、ベース上に直交配備され、両端部を対向する
磁気回路体の磁気ギャップに位置させた一対の平板型コ
イル体とを具備して成るを特徴とする二次元アクチュエ
ータ。(1) Two pairs of magnetic circuit bodies that are arranged and fixed opposite to the base on the X- and Y-axes and generate magnetic flux in opposite directions, and a magnetic circuit that is orthogonally arranged on the base and has opposite ends. A two-dimensional actuator comprising a pair of flat coil bodies positioned in a magnetic gap of a circuit body.
材に支持されている特許請求の範囲第１項記載の二次元
アクチュエータ。(2) The two-dimensional actuator according to claim 1, wherein each flat coil body is supported by a spring member that acts in the coaxial direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5008886A JPS62207165A (en) | 1986-03-06 | 1986-03-06 | Two-dimensional actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5008886A JPS62207165A (en) | 1986-03-06 | 1986-03-06 | Two-dimensional actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62207165A true JPS62207165A (en) | 1987-09-11 |
Family
ID=12849283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5008886A Pending JPS62207165A (en) | 1986-03-06 | 1986-03-06 | Two-dimensional actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62207165A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01291194A (en) * | 1988-05-18 | 1989-11-22 | Tokyo Electron Ltd | X-y table |
| JPH03221336A (en) * | 1990-01-24 | 1991-09-30 | Sumitomo Heavy Ind Ltd | Movable stage device |
| EP0483530A2 (en) * | 1990-10-30 | 1992-05-06 | ELTRO GmbH Gesellschaft für Strahlungstechnik | Method and device for offset and response harmonization in an electrooptical linear or mosaic sensor |
| JPH0664193U (en) * | 1993-02-10 | 1994-09-09 | 鹿島建設株式会社 | 3-axis 6-DOF vibration table using electromagnetic actuator |
| US6127749A (en) * | 1999-02-10 | 2000-10-03 | Nikon Corporation Of Japan | Two-dimensional electric motor |
| WO2000065645A1 (en) * | 1999-04-27 | 2000-11-02 | Nikon Corporation | Stage device and exposure device |
| EP1168334A2 (en) * | 2000-06-26 | 2002-01-02 | Samsung Electronics Co. Ltd. | Electromagnetic X-Y stage driver for nano data storage system and method for fabricating coils of the same |
| JP2002525858A (en) * | 1998-09-18 | 2002-08-13 | ゼネラル・スキャニング・インコーポレーテッド | High-speed precision positioning device |
| JP2012514336A (en) * | 2008-12-31 | 2012-06-21 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | Integrated stage positioning system and method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5552795U (en) * | 1978-10-04 | 1980-04-08 | ||
| JPS5780258A (en) * | 1980-10-27 | 1982-05-19 | Zeiss Jena Veb Carl | 2-coordinate step motor |
| JPS58182471A (en) * | 1982-04-19 | 1983-10-25 | Nippon Telegr & Teleph Corp <Ntt> | Actuator |
-
1986
- 1986-03-06 JP JP5008886A patent/JPS62207165A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5552795U (en) * | 1978-10-04 | 1980-04-08 | ||
| JPS5780258A (en) * | 1980-10-27 | 1982-05-19 | Zeiss Jena Veb Carl | 2-coordinate step motor |
| JPS58182471A (en) * | 1982-04-19 | 1983-10-25 | Nippon Telegr & Teleph Corp <Ntt> | Actuator |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01291194A (en) * | 1988-05-18 | 1989-11-22 | Tokyo Electron Ltd | X-y table |
| JPH03221336A (en) * | 1990-01-24 | 1991-09-30 | Sumitomo Heavy Ind Ltd | Movable stage device |
| EP0483530A2 (en) * | 1990-10-30 | 1992-05-06 | ELTRO GmbH Gesellschaft für Strahlungstechnik | Method and device for offset and response harmonization in an electrooptical linear or mosaic sensor |
| JPH0664193U (en) * | 1993-02-10 | 1994-09-09 | 鹿島建設株式会社 | 3-axis 6-DOF vibration table using electromagnetic actuator |
| JP2002525858A (en) * | 1998-09-18 | 2002-08-13 | ゼネラル・スキャニング・インコーポレーテッド | High-speed precision positioning device |
| US6127749A (en) * | 1999-02-10 | 2000-10-03 | Nikon Corporation Of Japan | Two-dimensional electric motor |
| US6455956B1 (en) | 1999-02-10 | 2002-09-24 | Nikon Corporation | Two-dimensional electric motor |
| WO2000065645A1 (en) * | 1999-04-27 | 2000-11-02 | Nikon Corporation | Stage device and exposure device |
| EP1168334A2 (en) * | 2000-06-26 | 2002-01-02 | Samsung Electronics Co. Ltd. | Electromagnetic X-Y stage driver for nano data storage system and method for fabricating coils of the same |
| EP1168334A3 (en) * | 2000-06-26 | 2003-12-17 | Samsung Electronics Co. Ltd. | Electromagnetic X-Y stage driver for nano data storage system and method for fabricating coils of the same |
| JP2012514336A (en) * | 2008-12-31 | 2012-06-21 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | Integrated stage positioning system and method |
| TWI498187B (en) * | 2008-12-31 | 2015-09-01 | Electro Scient Ind Inc | Monolithic stage positioning system and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4485339A (en) | Electro-magnetic alignment device | |
| JP3062881B2 (en) | Light switch | |
| EP0130357B1 (en) | Electro-magnetic alignment assemblies | |
| JPS60123006A (en) | Electromagnet having armature including permanent magnet | |
| US5434936A (en) | Mechanical optical switch | |
| JPS62207165A (en) | Two-dimensional actuator | |
| JPH07131966A (en) | Two-dimensional linear motor | |
| WO2017126577A1 (en) | Actuator | |
| JPH0522924A (en) | Plane motor apparatus | |
| JPS635984B2 (en) | ||
| JP3106230B2 (en) | Mechanical optical switch | |
| JP3184021B2 (en) | 2 to 2 optical fiber switch | |
| US5887334A (en) | Method for splicing a linear stepper motor platen | |
| WO2019167913A1 (en) | Transducer, and actuator and energy harvester using same | |
| JP7290515B2 (en) | Method for manufacturing coil assembly and method for manufacturing actuator | |
| JP3457217B2 (en) | Light switch | |
| JPH0732578B2 (en) | XY linear motor | |
| JPH0287961A (en) | Linear actuator | |
| JPH03276314A (en) | Attitude controller | |
| JP2997273B2 (en) | Stage movable support device | |
| JP3268101B2 (en) | Positioning device | |
| JP3030553B1 (en) | Optical switch optical path switching unit assembling method and optical switch | |
| JPS62222215A (en) | Optical path switching device | |
| JPS61269660A (en) | Linear motor | |
| JPH04102235A (en) | Objective lens driving device |