JPS5780258A - 2-coordinate step motor - Google Patents

2-coordinate step motor

Info

Publication number
JPS5780258A
JPS5780258A JP11305881A JP11305881A JPS5780258A JP S5780258 A JPS5780258 A JP S5780258A JP 11305881 A JP11305881 A JP 11305881A JP 11305881 A JP11305881 A JP 11305881A JP S5780258 A JPS5780258 A JP S5780258A
Authority
JP
Japan
Prior art keywords
step motor
coordinate step
coordinate
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11305881A
Other languages
Japanese (ja)
Inventor
Yurugen Furuhieru Hansu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of JPS5780258A publication Critical patent/JPS5780258A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/035—DC motors; Unipolar motors
    • H02K41/0352—Unipolar motors
    • H02K41/0354—Lorentz force motors, e.g. voice coil motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D2007/0012—Details, accessories or auxiliary or special operations not otherwise provided for
    • B26D2007/0043—Details, accessories or auxiliary or special operations not otherwise provided for the cutting machine comprising a linear motor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Linear Motors (AREA)
JP11305881A 1980-10-27 1981-07-21 2-coordinate step motor Pending JPS5780258A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD22474980 1980-10-27

Publications (1)

Publication Number Publication Date
JPS5780258A true JPS5780258A (en) 1982-05-19

Family

ID=5526889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11305881A Pending JPS5780258A (en) 1980-10-27 1981-07-21 2-coordinate step motor

Country Status (2)

Country Link
JP (1) JPS5780258A (en)
DE (1) DE3123759A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62207165A (en) * 1986-03-06 1987-09-11 Omron Tateisi Electronics Co Two-dimensional actuator
JPH01291194A (en) * 1988-05-18 1989-11-22 Tokyo Electron Ltd X-y table

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1281432B1 (en) * 1995-10-12 1998-02-18 Gisulfo Baccini PUNCHING MACHINE
DE10019002B4 (en) * 2000-04-17 2004-07-08 Siemens Ag Device for adjusting a component by means of at least two drives which operate in different directions
EP1357434A1 (en) * 2002-04-23 2003-10-29 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
EP1357429A1 (en) * 2002-04-23 2003-10-29 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62207165A (en) * 1986-03-06 1987-09-11 Omron Tateisi Electronics Co Two-dimensional actuator
JPH01291194A (en) * 1988-05-18 1989-11-22 Tokyo Electron Ltd X-y table

Also Published As

Publication number Publication date
DE3123759A1 (en) 1982-07-15

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