WO2019167913A1 - Transducer, and actuator and energy harvester using same - Google Patents

Transducer, and actuator and energy harvester using same Download PDF

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Publication number
WO2019167913A1
WO2019167913A1 PCT/JP2019/007193 JP2019007193W WO2019167913A1 WO 2019167913 A1 WO2019167913 A1 WO 2019167913A1 JP 2019007193 W JP2019007193 W JP 2019007193W WO 2019167913 A1 WO2019167913 A1 WO 2019167913A1
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WO
WIPO (PCT)
Prior art keywords
circuit board
magnet structure
wiring
plane
transducer
Prior art date
Application number
PCT/JP2019/007193
Other languages
French (fr)
Japanese (ja)
Inventor
鈴木　健一
祥悟 門田
進士　忠彦
範栄 吾妻
Original Assignee
Tdk株式会社
国立大学法人東京工業大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Tdk株式会社, 国立大学法人東京工業大学 filed Critical Tdk株式会社
Priority to JP2020503507A priority Critical patent/JP7176701B2/en
Publication of WO2019167913A1 publication Critical patent/WO2019167913A1/en

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/035—DC motors; Unipolar motors

Definitions

  • the present invention relates to a transducer that is an electromagnetic induction device, and more particularly to a transducer that can be used as an actuator or energy harvester capable of two-dimensional operation.
  • Patent Document 1 discloses an actuator that enables two-dimensional operation by arranging magnets in a matrix. Is described. The actuator described in Patent Document 1 realizes a two-dimensional operation by assigning four coils to one magnet and controlling the direction of current flowing through these coils.
  • the actuator described in Patent Document 1 has a problem that it is difficult to reduce the size because four coils are assigned to one magnet. In particular, it is difficult to reduce the size in the thickness direction perpendicular to the drive plane, and it is not suitable for applications that require a low profile, such as a portable device.
  • a linear motor described in Non-Patent Document 1 is known as an actuator that can be reduced in height.
  • the linear motor described in Non-Patent Document 1 only reciprocates in one axis direction and cannot perform a two-dimensional operation.
  • the actuator described in Patent Document 2 has an excellent feature that it can operate two-dimensionally and has a low profile.
  • Non-Patent Document 2 proposes a method of supporting a magnet structure with an elastic hinge obtained by processing silicon into a meander shape.
  • the actuator functions as an energy harvester that generates weak power by applying external force.
  • the actuator is a transducer that converts electricity and force to each other.
  • the actuator described in Patent Document 2 is used as an energy harvester, there is still a problem as to how the circuit board and the magnet structure are relatively slid by an external force.
  • an object of the present invention is to provide a transducer capable of sufficiently securing the amount of displacement in the xy plane direction while keeping the distance between the magnet structure and the circuit board constant, and an actuator and an energy harvester using the transducer. Is to provide.
  • the transducer includes a plurality of first magnets having a north pole as a magnetic pole face located in a first plane extending in a first direction and a second direction orthogonal to the first direction, A circuit board on which a magnet structure including a plurality of second magnets whose magnetic pole faces located on one plane are S poles, and first and second wirings overlapping the first plane of the magnet structure are formed A first sliding mechanism that slides the magnet structure and the circuit board relatively in a first direction, and a second sliding mechanism that slides the magnet structure and the circuit board relatively in a second direction.
  • the magnet structure includes a first arrangement portion in which the first magnet and the second magnet are alternately arranged in the first direction, and the first magnet and the second magnet are alternately arranged in the second direction.
  • first wiring is at least one of the first and second magnets included in the first array portion.
  • second wiring crosses at least a part of the first and second magnets included in the second arrangement portion in the first direction, and the magnet structure and the circuit board. Are magnetically attracted to each other across the first and second sliding mechanisms.
  • the relative two-dimensional operation of the circuit board and the magnet structure can be smoothly performed, and a sufficient amount of displacement is ensured. It becomes possible. Further, since no elastic hinge or the like is used, deformation in the z direction does not occur. Moreover, since the magnet structure and the circuit board are magnetically attracted to each other, it is possible to maintain an integrated state without separating each member during actual use.
  • the first sliding mechanism includes a first microball that can roll in a first direction
  • the second sliding mechanism includes a second microball that can roll in a second direction. It does not matter. According to this, a low profile can be achieved, and the microball does not fall off due to pressurization by magnetic attraction.
  • the transducer according to the present invention further includes a support body on which a first guide groove extending in a first direction and a second guide groove extending in a second direction are formed, and the first microball is It may roll along the first guide groove, and the second microball may roll along the second guide groove. According to this, a smooth two-dimensional operation can be realized by interposing the support body between the magnet structure and the circuit board.
  • a third guide groove extending in the first direction is formed in the magnet structure or the support fixed to the magnet structure, and the second guide is formed in the circuit board or the support fixed to the circuit board.
  • a fourth guide groove extending in the direction is formed, the first microball rolls along the first and third guide grooves, and the second microball is the second and fourth guide grooves. It may be one that rolls along. According to this, a one-dimensional operation in the first direction can be performed between the magnet structure and the support, and a one-dimensional operation in the second direction can be performed between the circuit board and the support.
  • the transducer according to the present invention further includes a soft magnetic body fixed to the circuit board, and the magnet structure and the circuit board are attracted to each other by a magnetic attractive force acting between the magnet structure and the soft magnetic body. It does not matter. According to this, the magnet structure and the circuit board can be magnetically attracted to each other without separately using a permanent magnet in addition to the magnet structure.
  • the circuit board has second and third planes parallel to the first plane, the first wiring is formed on the second plane, and the second wiring is formed on the third plane.
  • the distance between the first plane and the third plane may be larger than the distance between the first plane and the second plane. According to this, since the first wiring is closer to the magnet structure than the second wiring, the driving force in the first direction is increased.
  • the second and third planes may be the front and back of the circuit board. According to this, the first and second wirings can be formed on the circuit board without using the multilayer wiring board.
  • the first sliding mechanism causes the magnet structure and the second sliding mechanism to slide relative to the circuit board in the first direction
  • the second sliding mechanism includes the first sliding mechanism.
  • the magnet structure may be slid relative to the circuit board in the second direction without sliding relative to the circuit board. According to this, since a large driving force is required for driving in the first direction, it is possible to obtain a large driving force by bringing the first wiring closer to the magnet structure.
  • the transducer according to the present invention may further include a drive circuit for supplying a drive current to the first and second wirings.
  • the transducer according to the present invention can be used as an actuator.
  • the driving current per unit sliding amount supplied to the second wiring by the driving circuit may be larger than the driving current per unit sliding amount supplied to the first wiring by the driving circuit. According to this, even if the distance from the magnet structure is farther in the second wiring than in the first wiring, and thus the driving force in the second direction is relatively weak, Driving force can be increased by giving more driving current to the two wirings.
  • the second wiring may have a larger conductor thickness than the first wiring. According to this, when the transducer according to the present invention is used as an actuator, the wiring resistance of the second wiring through which a larger driving current flows can be reduced, and the conductor thickness of the first wiring is thin. The distance between the structure and the second wiring can be further reduced.
  • the transducer according to the present invention may further include a rectification transformer circuit that generates an output voltage based on the induced current flowing in the first and second wirings. According to this, the transducer according to the present invention can be used as an energy harvester.
  • the transducer according to the present invention includes the two sliding mechanisms for guiding the two-dimensional operation, the distance between the magnet structure and the circuit board is kept constant while maintaining the distance in the xy plane direction. A sufficient amount of displacement can be secured.
  • FIG. 1 is a schematic cross-sectional view for explaining the configuration of a transducer 100 according to a preferred embodiment of the present invention.
  • FIG. 2 is a schematic exploded perspective view of the transducer 100.
  • FIG. 3 is a schematic plan view of the magnet structure 10 as viewed from the first plane S1 side.
  • FIG. 4 is a cross-sectional view of the circuit board 20 as viewed from the y direction.
  • FIG. 5 is a cross-sectional view of the circuit board 20 according to the modification viewed from the y direction.
  • FIG. 6 is a plan view showing the first wiring 21 extracted.
  • FIG. 7 is a plan view showing the second wiring 22 extracted.
  • FIG. 8 is a diagram for explaining the influence of the current flowing through the first wiring 21 on the magnet structure 10.
  • FIG. 9 is a diagram for explaining the influence of the current flowing through the second wiring 22 on the magnet structure 10.
  • FIG. 10 is a diagram for explaining the direction of the induced current flowing in the first wiring 21 due to the external force applied to the magnet structure 10.
  • FIG. 11 is a diagram for explaining the direction of the induced current flowing in the second wiring 22 due to the external force applied to the magnet structure 10.
  • FIG. 12 is a schematic perspective view for explaining the configuration of the support 40.
  • FIG. 13 is an enlarged view of the support 40.
  • FIG. 14 is a schematic perspective view for explaining the configuration of the support 50.
  • FIG. 15 is an enlarged view of the support 50.
  • FIG. 16 is a schematic perspective view for explaining the configuration of the support body 60.
  • FIG. 17 is an enlarged view of the support body 60.
  • FIG. 18 is a circuit diagram of the drive circuit 70 when the transducer 100 is used as an actuator.
  • FIG. 19 is a cross-sectional view of the circuit board 20 according to the modification viewed from the y direction.
  • FIG. 20 is a block diagram showing a circuit necessary when the transducer 100 is used as an energy harvester.
  • FIG. 1 is a schematic cross-sectional view for explaining the configuration of a transducer 100 according to a preferred embodiment of the present invention.
  • FIG. 2 is a schematic exploded perspective view of the transducer 100 according to the present embodiment.
  • the transducer 100 is a device that can be used as an actuator or an energy harvester, and faces the magnet structure 10 and the first plane S1 of the magnet structure 10 as shown in FIGS.
  • the circuit board 20, the steel plate 30 fixed to the circuit board 20, the support bodies 40, 50, 60, and the microballs B1, B2 are provided.
  • the magnet structure 10 is fixed to the support body 40, and the circuit board 20 and the steel plate 30 are fixed to the support body 60.
  • the support body 50 is positioned so as to be sandwiched between the support body 40 and the support body 60, and thereby the distance between the magnet structure 10 and the circuit board 20 in the z direction is kept constant.
  • a microball B1 that guides movement in the x direction is interposed between the support body 50 and the support body 60
  • a microball B2 that guides movement in the y direction is interposed between the support body 50 and the support body 40. Is intervening.
  • the magnet structure 10 and the circuit board 20 are attracted to each other by the magnetic attraction force AF acting between the magnet structure 10 and the steel plate 30, and thereby the respective members are integrated without being separated. Is retained.
  • another soft magnetic material may be used instead of the steel plate 30.
  • FIG. 3 is a schematic plan view of the magnet structure 10 as viewed from the first plane S1 side.
  • the magnet structure 10 includes a plurality of first and second magnets 11 and 12 arranged in a matrix in the x direction and the y direction.
  • the magnets 11 and 12 are provided on a support substrate 13 made of glass, soft magnetic material, or the like, and the magnetic pole surface is located on the first plane S1 extending in the xy direction. Note that the support substrate 13 is not shown in FIG. 3 in consideration of the visibility of the drawing.
  • the first magnet 11 has an N pole on the first plane S1
  • the second magnet 12 has the first plane S1.
  • the magnetic pole surface located at is the S pole.
  • the first magnet 11 and the second magnet 12 are arranged in a matrix in a checkered pattern.
  • each row extending in the x direction constitutes a first array portion Lx in which the first magnets 11 and the second magnets 12 are alternately arranged in the x direction
  • each column extending in the y direction is The first magnet 11 and the second magnet 12 constitute a second array portion Ly in which the first magnet 11 and the second magnet 12 are alternately arrayed in the y direction.
  • the adjacent first magnet 11 and second magnet 12 are separated via the slit SL, and the slit SL reaches the surface layer of the support substrate 13. .
  • the support substrate 13 is not necessarily required when the slit SL is not formed.
  • FIG. 4 is a cross-sectional view of the circuit board 20 as viewed from the y direction.
  • the circuit board 20 includes a substrate 23, a first wiring 21 formed on one surface 24 of the substrate 23, and a second wiring 22 formed on the other surface 25 of the substrate 23. And.
  • the surface 24 constitutes the second plane S2, and the surface 25 constitutes the third plane S3.
  • the second and third planes S2 and S3 are xy planes that overlap the first plane S1 of the magnet structure 10, and the second plane S2 is closer to the first plane S1 than the third plane S3. close. That is, the magnet structure 10 and the surface 24 of the substrate 23 are disposed so as to face each other. In this way, if the first wiring 21 and the second wiring 22 are formed on the front and back of the substrate 23, it is not necessary to use a multilayer wiring board or the like.
  • the first wiring 21 and the second wiring 22 may be stacked via the via.
  • the distance between the second plane S2 and the third plane S3 is reduced, the distance between the magnet structure 10 and the first wiring 21 in the z direction and the distance between the magnet structure 10 and the second wiring 22 are reduced. It is possible to reduce the difference in distance in the z direction.
  • FIG. 6 is a plan view showing the first wiring 21 extracted.
  • the positions of the first and second magnets 11 and 12 are also displayed in order to clarify the planar positional relationship with the magnet structure 10.
  • the first wiring 21 is one wiring that can be drawn with a single stroke, and has a planar shape meandering in a meander shape.
  • FIG. 7 is a plan view showing the second wiring 22 extracted.
  • the positions of the first and second magnets 11 and 12 are also displayed in order to clarify the planar positional relationship with the magnet structure 10.
  • the second wiring 22 is one wiring that can be drawn with a single stroke, and has a planar shape meandering in a meander shape.
  • the second wiring 22 the fourth portion of the wiring crossing the third wiring portion 22x 1 across the first magnet 11 in the x-direction, the second magnet 12 in the x-direction and 22x 2, and a connecting portion 22y extending in the y direction so as to connect them.
  • FIG. 8 is a diagram for explaining the influence of the current flowing through the first wiring 21 on the magnet structure 10.
  • the direction of the current with respect to the first magnet 11 is the downward direction ( ⁇ y direction).
  • a Lorentz force F L 1 in the right direction (+ x direction) acts.
  • the Lorentz force F L1 in the right direction (+ x direction) acts on the first wiring 21. That is, the Lorentz force F L 1 in the right direction (+ x direction) acts on the first wiring 21 for both the first and second magnets 11 and 12.
  • the transducer 100 according to the present embodiment when used as an actuator, the relative positional relationship between the magnet structure 10 and the circuit board 20 in the x direction can be changed by flowing the current I1 or I2.
  • the magnitude and speed of the change can be controlled by the current I1 or I2.
  • FIG. 9 is a diagram for explaining the influence of the current flowing through the second wiring 22 on the magnet structure 10.
  • the transducer 100 according to the present embodiment when used as an actuator, the relative positional relationship between the magnet structure 10 and the circuit board 20 in the y direction can be changed by flowing the current I3 or I4.
  • the magnitude and speed of the change can be controlled by the current I3 or I4.
  • the relative positional relationship between the magnet structure 10 and the circuit board 20 in the x direction is changed by passing the current I1 or I2 through the first wiring 21. Since the relative positional relationship between the magnet structure 10 and the circuit board 20 in the y direction can be changed by passing the current I3 or I4 through the second wiring 22, the magnets can be changed by the currents I1 to I4.
  • the planar positional relationship between the structure 10 and the circuit board 20 can be changed. That is, the magnet structure 10 and the circuit board 20 can be relatively two-dimensionally operated.
  • the transducer 100 when the relative position of the magnet structure 10 and the circuit board 20 changes due to the action of an external force, an induced current is generated in the first and second wirings 21 and 22. Therefore, the transducer 100 according to the present embodiment can be used as an energy harvester. Specifically, as shown in FIG. 10, when an external force F E 1 is applied, a current I1 flows through the first wiring 21, and when an external force F E2 is applied, a current I2 flows through the first wiring 21. Further, as shown in FIG. 11, when the external force F E 3 is applied, a current I3 flows through the second wiring 22, and when the external force F E 4 is applied, a current I4 flows through the wiring 21. In this way, an induced current can be generated by a relative two-dimensional operation of the magnet structure 10 and the circuit board 20 by an external force.
  • the relative movement of the magnet structure 10 and the circuit board 20 in the x direction is guided by the rolling of the microball B1 shown in FIG. 1, and the relative movement of the magnet structure 10 and the circuit board 20 in the y direction.
  • the movement is guided by the rolling of the microball B2 shown in FIG.
  • FIG. 12 is a schematic perspective view for explaining the configuration of the support 40.
  • the support body 40 is a frame-like body having an opening 40a, and the magnet structure 10 is fixed to the opening 40a.
  • the support 40 has a surface 41 on one side and a surface 42 on the other side in the z direction, and four guide grooves G4 are formed on the surface 42 on the other side.
  • the guide groove G4 is a V-shaped groove disposed in the vicinity of the corner of the support body 40, and its extending direction is the y direction.
  • FIG. 14 is a schematic perspective view for explaining the configuration of the support 50.
  • the support 50 is a frame-like body having an opening 50a.
  • the support 50 has a surface 51 on one side and a surface 52 on the other side in the z direction, and four guide grooves G2 are formed on the surface 51 on one side, and four guide grooves are formed on the surface 52 on the other side.
  • G1 is formed.
  • each of the guide grooves G1 and G2 is a V-shaped groove disposed in the vicinity of the corner portion of the support 50, and the guide groove G1 extends in the x direction and is guided.
  • the groove G2 extends in the y direction.
  • the guide groove G4 and the guide groove G2 overlap each other when viewed from the z direction, and the microball B2 is sandwiched between the guide grooves G4 and G2.
  • the microball B2 can roll in the y direction along the guide grooves G4 and G2, and a sliding mechanism is configured to slide the support body 40 and the support body 50 in the y direction relatively.
  • FIG. 16 is a schematic perspective view for explaining the configuration of the support 60.
  • the support 60 is a plate-like body, and the circuit board 20 is fixed to the surface 61 on one side, and the steel plate 30 is fixed to the surface 62 on the other side. Further, four guide grooves G ⁇ b> 3 are formed on the surface 61 on one side of the support body 60.
  • the guide groove G3 is a V-shaped groove disposed in the vicinity of the corner of the support body 60, and its extending direction is the x direction.
  • the guide groove G1 and the guide groove G3 overlap each other when viewed from the z direction, and the microball B1 is sandwiched between the guide grooves G1 and G3.
  • the microball B1 can roll in the x direction along the guide grooves G1 and G3, and a sliding mechanism is configured to slide the support 50 and the support 60 in the x direction relatively.
  • the magnet structure 10 and the circuit board 20 are relatively slidable in the xy directions.
  • the relative movement in the x direction is guided by the rolling of the microball B1 along the guide grooves G1 and G3 while keeping the gap in the z direction between the magnet structure 10 and the circuit board 20 constant, and the y direction
  • the relative movement is guided by the rolling of the microball B2 along the guide grooves G2 and G4 a smooth two-dimensional operation is possible.
  • the amount of displacement is determined by the length of the guide grooves G1 to G4, it is possible to ensure a sufficient amount of displacement.
  • the transducer 100 can be used with the support 40 or the support 60 fixed to the casing of the device.
  • the magnet structure 10 can be driven two-dimensionally with respect to the housing by passing a current through the wires 21 and 22.
  • the imaging element is fixed to the casing and the optical lens is fixed to the magnet structure 10
  • the support 60 when the magnet structure 10 is slid in the x direction, not only the magnet structure 10 but also the support 50 needs to be slid in the x direction.
  • the magnet structure 10 When the magnet structure 10 is slid in the y direction, it is sufficient to slide the magnet structure 10 in the y direction without sliding the support 50. This means that the driving force required for sliding in the x direction is greater than the driving force required for sliding in the y direction.
  • the first wiring 21 that generates the driving force in the x direction is located on the second plane S2 that is closer to the magnet structure 10, and the second wiring that generates the driving force in the y direction.
  • the driving force per unit current amount is larger in the x direction than in the y direction. That is, the first wiring 21 that contributes to sliding in the x direction with a large required driving force is arranged on the second plane S2 close to the magnet structure 10, and contributes to sliding in the y direction with a small necessary driving force.
  • the second wiring 22 By arranging the second wiring 22 to be arranged on the third plane S3 far from the magnet structure 10, it is possible to ensure a balance between the generated driving force and the driving force necessary for sliding.
  • FIG. 18 is a circuit diagram of the drive circuit 70 when the transducer 100 according to the present embodiment is used as an actuator.
  • the drive circuit 70 shown in FIG. 18 includes a control circuit 71 that generates drive signals Dx and Dy based on the control signal CNT, an amplifier 72 that converts the drive signal Dx into a drive current Ix, and the drive signal Dy into the drive current Iy. And an amplifier 73 for conversion.
  • the control signal CNT is a signal for instructing an operation direction and an operation amount of the transducer 100 that is an actuator. For example, when the transducer 100 that is an actuator is used as a camera shake correction mechanism, a camera shake supplied from an acceleration sensor or the like is used. This corresponds to the detection signal.
  • the control circuit 71 Based on the control signal CNT, the control circuit 71 generates a drive signal Dx indicating the drive amount in the x direction and a drive signal Dy indicating the drive amount in the y direction, and supplies these to the amplifiers 72 and 73, respectively.
  • the drive signals Dx and Dy are converted into drive currents Ix 1 and Iy 1 by the amplifiers 72 and 73 and supplied to the first and second wirings 21 and 22, respectively.
  • the drive currents Ix 1 and Iy 1 per unit sliding amount may be the same, but the second wiring 22 that contributes to the sliding in the y direction is arranged on the third plane S 3 far from the magnet structure 10. Therefore, depending on the thickness of the substrate 23, the driving force in the y direction may be insufficient. In such a case, a difference is provided between the gains of the drive signal Dx and the drive signal Dy so that the indicated value of the drive signal Dy per unit sliding amount is larger than the indicated value of the drive signal Dx per unit sliding amount.
  • the driving force in the y direction may be increased by designing the control circuit 71.
  • the gain of the drive signal Dx and the drive signal Dy by the control circuit 71 is constant, and the drive current Iy 1 per unit instruction value of the drive signal Dy is more than the drive current Ix 1 per unit instruction value of the drive signal Dx.
  • the amplifiers 72 and 73 may be designed so as to increase.
  • the driving current Iy 1 per unit sliding amount becomes larger than the driving current Ix 1 per unit sliding amount, so that the reduction in driving force due to the far distance from the magnet structure 10 is compensated. Is possible.
  • a larger current flows in the second wiring 22 contributing to the sliding in the y direction than in the first wiring 21 contributing to the sliding in the x direction. Therefore, as shown in FIG.
  • the conductor thickness T1 of the wiring 21 may be designed to be thinner and the conductor thickness T2 of the second wiring 22 may be designed to be thicker (T1 ⁇ T2). According to this, since the resistance value of the second wiring 22 through which a larger current flows can be lowered and the conductor thickness T1 of the first wiring 21 is thin, the magnet structure 10 and the second wiring 22 can be reduced. It becomes possible to make the distance closer.
  • FIG. 20 is a block diagram showing a circuit required when the transducer 100 according to the present embodiment is used as an energy harvester.
  • induced currents Ix 2 and Iy 2 are input to the rectifying transformer circuit 80.
  • the rectifying transformer circuit 80 rectifies the induced currents Ix 2 and Iy 2 and generates an output voltage OUT. As a result, when an external force acts on the transducer 100, the output voltage OUT can be obtained.
  • the first and second wires 21 and 22 are assigned to all of the first and second magnets 11 and 12, but such a configuration is not essential in the present invention. . Therefore, for the first wiring 21, it is sufficient to cross at least a part of the first magnet 11 and the second magnet 12 constituting the first array portion Lx in the y direction, and for the second wiring 22. It is sufficient to cross at least a part of the first magnet 11 and the second magnet 12 constituting the second array portion Ly in the x direction.
  • the support bodies 40 and 60 are used.
  • the support body 40 may be omitted by providing the magnet structure 10 itself with the guide groove G4, or the guide groove G3 may be provided in the circuit board 20 itself.
  • the support 60 may be omitted.
  • microballs B1 and guide grooves G1 and G3 constituting a sliding mechanism in the x direction are used, and four microballs B2 and guide grooves G2 and G4 constituting a sliding mechanism in the y direction are used.
  • the set is used, these numbers are not particularly limited.

Abstract

[Problem] To provide a transducer capable of ensuring a sufficient amount of displacement in xy-plane directions while maintaining a constant distance between a magnet structure and a circuit board. [Solution] This transducer is provided with: a magnet structure 10 including a magnet 11 having a north-pole magnetic pole face and a magnet 12 having a south-pole magnetic pole face; a circuit board 20 having wires 21, 22 formed thereon; a first sliding mechanism for causing the magnet structure 10 and the circuit board 20 to slide in the x-direction; and a second sliding mechanism for causing the magnet structure 10 and the circuit board 20 to slide in the y-direction. In the magnet structure 10, the magnets 11, 12 are arranged in a matrix form. The wire 21 crosses the magnets 11, 12 in the y-direction, and the wire 22 crosses the magnets 11, 12 in the x-direction. According to the present invention, two-dimensional operations of the circuit board 20 and the magnet structure 10 can be performed smoothly, and a sufficient amount of displacement can also be ensured. In addition, since an elastic hinge and the like are not used, deformation in the z-direction does not occur.

Description

トランデューサ並びにこれを用いたアクチュエータ及びエネルギハーベスタTransducer, and actuator and energy harvester using the same
　本発明は電磁誘導デバイスであるトランデューサに関し、特に、２次元的な動作が可能なアクチュエータ又はエネルギハーベスタとして利用できるトランデューサに関する。 The present invention relates to a transducer that is an electromagnetic induction device, and more particularly to a transducer that can be used as an actuator or energy harvester capable of two-dimensional operation.
　電磁力を用いたアクチュエータとしては、１軸方向に往復運動可能なものが一般的であるが、特許文献１には、磁石をマトリクス状に配列することによって２次元的な動作を可能としたアクチュエータが記載されている。特許文献１に記載されたアクチュエータは、１個の磁石に対して４個のコイルを割り当て、これらのコイルに流す電流の向きを制御することによって２次元的な動作を実現している。 As an actuator using electromagnetic force, one that can reciprocate in one axial direction is generally used. However, Patent Document 1 discloses an actuator that enables two-dimensional operation by arranging magnets in a matrix. Is described. The actuator described in Patent Document 1 realizes a two-dimensional operation by assigning four coils to one magnet and controlling the direction of current flowing through these coils.
　しかしながら、特許文献１に記載されたアクチュエータは、１個の磁石に対して４個のコイルを割り当てていることから、小型化することが困難であるという問題がある。特に、駆動平面に対して垂直な厚さ方向におけるサイズを縮小することは困難であり、携帯型デバイスのように低背化が求められる用途には不向きである。 However, the actuator described in Patent Document 1 has a problem that it is difficult to reduce the size because four coils are assigned to one magnet. In particular, it is difficult to reduce the size in the thickness direction perpendicular to the drive plane, and it is not suitable for applications that require a low profile, such as a portable device.
　低背化が可能なアクチュエータとしては、非特許文献１に記載されたリニアモータが知られている。しかしながら、非特許文献１に記載されたリニアモータは、１軸方向に往復運動するだけであり、２次元的な動作はできない。 A linear motor described in Non-Patent Document 1 is known as an actuator that can be reduced in height. However, the linear motor described in Non-Patent Document 1 only reciprocates in one axis direction and cannot perform a two-dimensional operation.
　これに対し、特許文献２に記載されたアクチュエータは、２次元的な動作が可能であり、且つ、低背であるという優れた特徴を有している。 On the other hand, the actuator described in Patent Document 2 has an excellent feature that it can operate two-dimensionally and has a low profile.
特開平１１－１９６５６０号公報Japanese Patent Laid-Open No. 11-196560 国際公開第２０１７／１２６５７７号International Publication No. 2017/1226577
　特許文献２に記載されたアクチュエータは、回路基板と磁石構造体が互いに向かい合うように配置され、この状態で両者が相対的に２次元動作することが可能である。このような２次元動作をスムーズに行うためには、回路基板と磁石構造体を相対的にどのように滑動させるかが問題となる。この点に関し、非特許文献２には、シリコンをミアンダ状に加工した弾性ヒンジによって磁石構造体を支持する方法が提案されている。 The actuator described in Patent Document 2 is arranged so that the circuit board and the magnet structure face each other, and in this state, both can relatively move two-dimensionally. In order to perform such a two-dimensional operation smoothly, it becomes a problem how to relatively slide the circuit board and the magnet structure. In this regard, Non-Patent Document 2 proposes a method of supporting a magnet structure with an elastic hinge obtained by processing silicon into a meander shape.
　しかしながら、非特許文献２に記載された支持方法では、ｘｙ平面方向への変位量が不十分であるとともに、弾性ヒンジがｚ方向へ変形することから磁石構造体と回路基板との距離を一定に保つことができないという問題があった。 However, with the support method described in Non-Patent Document 2, the amount of displacement in the xy plane direction is insufficient, and the elastic hinge is deformed in the z direction, so the distance between the magnet structure and the circuit board is constant. There was a problem that could not be kept.
　また、アクチュエータは、外力を加えることにより微弱な発電を行うエネルギーハーベスタとして機能する。つまり、アクチュエータは、電気と力を相互に変換するトランデューサであると言える。しかしながら、特許文献２に記載されたアクチュエータをエネルギーハーベスタとして用いる場合においても、やはり、外力によって回路基板と磁石構造体を相対的にどのように滑動させるかが問題となる。 Also, the actuator functions as an energy harvester that generates weak power by applying external force. In other words, it can be said that the actuator is a transducer that converts electricity and force to each other. However, even when the actuator described in Patent Document 2 is used as an energy harvester, there is still a problem as to how the circuit board and the magnet structure are relatively slid by an external force.
　したがって、本発明の目的は、磁石構造体と回路基板との距離を一定に保ちつつ、ｘｙ平面方向への変位量を十分に確保することが可能なトランデューサ並びにこれを用いたアクチュエータ及びエネルギハーベスタを提供することである。 Accordingly, an object of the present invention is to provide a transducer capable of sufficiently securing the amount of displacement in the xy plane direction while keeping the distance between the magnet structure and the circuit board constant, and an actuator and an energy harvester using the transducer. Is to provide.
　本発明によるトランデューサは、第１の方向及び第１の方向と直交する第２の方向に延在する第１の平面に位置する磁極面がＮ極である複数の第１の磁石と、第１の平面に位置する磁極面がＳ極である複数の第２の磁石とを含む磁石構造体と、磁石構造体の第１の平面と重なる第１及び第２の配線が形成された回路基板と、磁石構造体と回路基板を相対的に第１の方向に滑動させる第１の滑動機構と、磁石構造体と回路基板を相対的に第２の方向に滑動させる第２の滑動機構とを備え、磁石構造体は、第１の磁石と第２の磁石が第１の方向に交互に配列された第１の配列部分と、第１の磁石と第２の磁石が第２の方向に交互に配列された第２の配列部分とを含み、第１の配線は、第１の配列部分に含まれる第１及び第２の磁石の少なくとも一部を第２の方向に横断し、第２の配線は、第２の配列部分に含まれる第１及び第２の磁石の少なくとも一部を第１の方向に横断し、磁石構造体と回路基板は、第１及び第２の滑動機構を挟んで、互いに磁気吸引されていることを特徴とする。 The transducer according to the present invention includes a plurality of first magnets having a north pole as a magnetic pole face located in a first plane extending in a first direction and a second direction orthogonal to the first direction, A circuit board on which a magnet structure including a plurality of second magnets whose magnetic pole faces located on one plane are S poles, and first and second wirings overlapping the first plane of the magnet structure are formed A first sliding mechanism that slides the magnet structure and the circuit board relatively in a first direction, and a second sliding mechanism that slides the magnet structure and the circuit board relatively in a second direction. The magnet structure includes a first arrangement portion in which the first magnet and the second magnet are alternately arranged in the first direction, and the first magnet and the second magnet are alternately arranged in the second direction. And the first wiring is at least one of the first and second magnets included in the first array portion. And the second wiring crosses at least a part of the first and second magnets included in the second arrangement portion in the first direction, and the magnet structure and the circuit board. Are magnetically attracted to each other across the first and second sliding mechanisms.
　本発明によれば、第１及び第２の滑動機構を備えていることから、回路基板と磁石構造体の相対的な二次元動作をスムーズに行うことができるとともに、十分な変位量を確保することが可能となる。また、弾性ヒンジなどを用いないことから、ｚ方向への変形も生じない。しかも、磁石構造体と回路基板が互いに磁気吸引されていることから、実使用時において各部材が分離することなく、一体化された状態を保持することが可能となる。 According to the present invention, since the first and second sliding mechanisms are provided, the relative two-dimensional operation of the circuit board and the magnet structure can be smoothly performed, and a sufficient amount of displacement is ensured. It becomes possible. Further, since no elastic hinge or the like is used, deformation in the z direction does not occur. Moreover, since the magnet structure and the circuit board are magnetically attracted to each other, it is possible to maintain an integrated state without separating each member during actual use.
　本発明において、第１の滑動機構は第１の方向に転動自在な第１のマイクロボールを含み、第２の滑動機構は第２の方向に転動自在な第２のマイクロボールを含むものであっても構わない。これによれば、低背化を達成することができるとともに、磁気吸引による与圧によってマイクロボールが脱落することもない。 In the present invention, the first sliding mechanism includes a first microball that can roll in a first direction, and the second sliding mechanism includes a second microball that can roll in a second direction. It does not matter. According to this, a low profile can be achieved, and the microball does not fall off due to pressurization by magnetic attraction.
　本発明によるトランデューサは、第１の方向に延在する第１の案内溝と第２の方向に延在する第２の案内溝が形成された支持体をさらに備え、第１のマイクロボールは第１の案内溝に沿って転動し、第２のマイクロボールは第２の案内溝に沿って転動するものであっても構わない。これによれば、磁石構造体と回路基板の間に支持体を介在させることによって、スムーズな２次元的な動作を実現することが可能となる。 The transducer according to the present invention further includes a support body on which a first guide groove extending in a first direction and a second guide groove extending in a second direction are formed, and the first microball is It may roll along the first guide groove, and the second microball may roll along the second guide groove. According to this, a smooth two-dimensional operation can be realized by interposing the support body between the magnet structure and the circuit board.
　本発明において、磁石構造体又はこれに固定された支持体には、第１の方向に延在する第３の案内溝が形成され、回路基板又はこれに固定された支持体には、第２の方向に延在する第４の案内溝が形成され、第１のマイクロボールは第１及び第３の案内溝に沿って転動し、第２のマイクロボールは第２及び第４の案内溝に沿って転動するものであっても構わない。これによれば、磁石構造体と支持体との間で第１の方向における一次元動作を行い、回路基板と支持体との間で第２の方向における一次元動作を行うことができる。 In the present invention, a third guide groove extending in the first direction is formed in the magnet structure or the support fixed to the magnet structure, and the second guide is formed in the circuit board or the support fixed to the circuit board. A fourth guide groove extending in the direction is formed, the first microball rolls along the first and third guide grooves, and the second microball is the second and fourth guide grooves. It may be one that rolls along. According to this, a one-dimensional operation in the first direction can be performed between the magnet structure and the support, and a one-dimensional operation in the second direction can be performed between the circuit board and the support.
　本発明によるトランデューサは、回路基板に固定された軟磁性体をさらに備え、磁石構造体と回路基板は、磁石構造体と軟磁性体との間に作用する磁気吸引力によって互いに吸引されるものであっても構わない。これによれば、磁石構造体の他に永久磁石などを別途用いることなく、磁石構造体と回路基板を互いに磁気吸引させることが可能となる。 The transducer according to the present invention further includes a soft magnetic body fixed to the circuit board, and the magnet structure and the circuit board are attracted to each other by a magnetic attractive force acting between the magnet structure and the soft magnetic body. It does not matter. According to this, the magnet structure and the circuit board can be magnetically attracted to each other without separately using a permanent magnet in addition to the magnet structure.
　本発明において、回路基板は、第１の平面と平行な第２及び第３の平面を有し、第１の配線は第２の平面に形成され、第２の配線は第３の平面に形成され、第１の平面と第３の平面の距離は、第１の平面と第２の平面の距離よりも大きくても構わない。これによれば、第１の配線の方が第２の配線よりも磁石構造体に近くなることから、第１の方向における駆動力が高められる。 In the present invention, the circuit board has second and third planes parallel to the first plane, the first wiring is formed on the second plane, and the second wiring is formed on the third plane. In addition, the distance between the first plane and the third plane may be larger than the distance between the first plane and the second plane. According to this, since the first wiring is closer to the magnet structure than the second wiring, the driving force in the first direction is increased.
　本発明において、第２及び第３の平面は、回路基板の表裏であっても構わない。これによれば、多層配線基板を用いることなく、第１及び第２の配線を回路基板上に形成することが可能となる。 In the present invention, the second and third planes may be the front and back of the circuit board. According to this, the first and second wirings can be formed on the circuit board without using the multilayer wiring board.
　本発明において、第１の滑動機構は、磁石構造体及び第２の滑動機構を回路基板に対して相対的に第１の方向に滑動させ、第２の滑動機構は、第１の滑動機構を回路基板に対して相対的に第２の方向に滑動させることなく、磁石構造体を回路基板に対して相対的に第２の方向に滑動させるものであっても構わない。これによれば、第１の方向への駆動により大きな駆動力が必要となることから、第１の配線をより磁石構造体に近づけることにより、大きな駆動力を得ることが可能となる。 In the present invention, the first sliding mechanism causes the magnet structure and the second sliding mechanism to slide relative to the circuit board in the first direction, and the second sliding mechanism includes the first sliding mechanism. The magnet structure may be slid relative to the circuit board in the second direction without sliding relative to the circuit board. According to this, since a large driving force is required for driving in the first direction, it is possible to obtain a large driving force by bringing the first wiring closer to the magnet structure.
　本発明によるトランデューサは、第１及び第２の配線に駆動電流を供給する駆動回路をさらに備えるものであっても構わない。これによれば、本発明によるトランデューサをアクチュエータとして用いることが可能となる。この場合、駆動回路が第１の配線に供給する単位滑動量当たりの駆動電流よりも、駆動回路が第２の配線に供給する単位滑動量当たりの駆動電流の方が大きくても構わない。これによれば、磁石構造体からの距離が第１の配線に比べて第２の配線の方が遠く、このため第２の方向への駆動力が相対的に弱い場合であっても、第２の配線により多くの駆動電流を与えることによって、駆動力を増加させることが可能となる。 The transducer according to the present invention may further include a drive circuit for supplying a drive current to the first and second wirings. According to this, the transducer according to the present invention can be used as an actuator. In this case, the driving current per unit sliding amount supplied to the second wiring by the driving circuit may be larger than the driving current per unit sliding amount supplied to the first wiring by the driving circuit. According to this, even if the distance from the magnet structure is farther in the second wiring than in the first wiring, and thus the driving force in the second direction is relatively weak, Driving force can be increased by giving more driving current to the two wirings.
　本発明において、第１の配線よりも第２の配線の方が、導体厚が大きくても構わない。これによれば、本発明によるトランデューサをアクチュエータとして用いる場合、より大きな駆動電流の流れる第２の配線の配線抵抗を低下させることができるとともに、第１の配線の導体厚が薄いことから、磁石構造体と第２の配線との距離をより近づけることが可能となる。 In the present invention, the second wiring may have a larger conductor thickness than the first wiring. According to this, when the transducer according to the present invention is used as an actuator, the wiring resistance of the second wiring through which a larger driving current flows can be reduced, and the conductor thickness of the first wiring is thin. The distance between the structure and the second wiring can be further reduced.
　本発明によるトランデューサは、第１及び第２の配線に流れる誘導電流に基づいて出力電圧を生成する整流変圧回路をさらに備えるるものであっても構わない。これによれば、本発明によるトランデューサをエネルギーハーベスタとして用いることが可能となる。 The transducer according to the present invention may further include a rectification transformer circuit that generates an output voltage based on the induced current flowing in the first and second wirings. According to this, the transducer according to the present invention can be used as an energy harvester.
　このように、本発明によるトランデューサは、２次元的な動作を案内する２つの滑動機構を備えていることから、磁石構造体と回路基板との距離を一定に保ちつつ、ｘｙ平面方向への変位量を十分に確保することが可能となる。 As described above, since the transducer according to the present invention includes the two sliding mechanisms for guiding the two-dimensional operation, the distance between the magnet structure and the circuit board is kept constant while maintaining the distance in the xy plane direction. A sufficient amount of displacement can be secured.
図１は、本発明の好ましい実施形態によるトランデューサ１００の構成を説明するための略断面図である。FIG. 1 is a schematic cross-sectional view for explaining the configuration of a transducer 100 according to a preferred embodiment of the present invention. 図２は、トランデューサ１００の略分解斜視図である。FIG. 2 is a schematic exploded perspective view of the transducer 100. 図３は、磁石構造体１０を第１の平面Ｓ１側から見た略平面図である。FIG. 3 is a schematic plan view of the magnet structure 10 as viewed from the first plane S1 side. 図４は、回路基板２０をｙ方向から見た断面図である。FIG. 4 is a cross-sectional view of the circuit board 20 as viewed from the y direction. 図５は、変形例による回路基板２０をｙ方向から見た断面図である。FIG. 5 is a cross-sectional view of the circuit board 20 according to the modification viewed from the y direction. 図６は、第１の配線２１を抜き出して示す平面図である。FIG. 6 is a plan view showing the first wiring 21 extracted. 図７は、第２の配線２２を抜き出して示す平面図である。FIG. 7 is a plan view showing the second wiring 22 extracted. 図８は、第１の配線２１に流れる電流が磁石構造体１０に与える影響を説明するための図である。FIG. 8 is a diagram for explaining the influence of the current flowing through the first wiring 21 on the magnet structure 10. 図９は、第２の配線２２に流れる電流が磁石構造体１０に与える影響を説明するための図である。FIG. 9 is a diagram for explaining the influence of the current flowing through the second wiring 22 on the magnet structure 10. 図１０は、磁石構造体１０に与えられる外力によって第１の配線２１に流れる誘導電流の方向を説明するための図である。FIG. 10 is a diagram for explaining the direction of the induced current flowing in the first wiring 21 due to the external force applied to the magnet structure 10. 図１１は、磁石構造体１０に与えられる外力によって第２の配線２２に流れる誘導電流の方向を説明するための図である。FIG. 11 is a diagram for explaining the direction of the induced current flowing in the second wiring 22 due to the external force applied to the magnet structure 10. 図１２は、支持体４０の構成を説明するための略透視斜視図である。FIG. 12 is a schematic perspective view for explaining the configuration of the support 40. 図１３は、支持体４０の拡大図である。FIG. 13 is an enlarged view of the support 40. 図１４は、支持体５０の構成を説明するための略透視斜視図である。FIG. 14 is a schematic perspective view for explaining the configuration of the support 50. 図１５は、支持体５０の拡大図である。FIG. 15 is an enlarged view of the support 50. 図１６は、支持体６０の構成を説明するための略透視斜視図である。FIG. 16 is a schematic perspective view for explaining the configuration of the support body 60. 図１７は、支持体６０の拡大図である。FIG. 17 is an enlarged view of the support body 60. 図１８は、トランデューサ１００をアクチュエータとして用いる場合の駆動回路７０の回路図である。FIG. 18 is a circuit diagram of the drive circuit 70 when the transducer 100 is used as an actuator. 図１９は、変形例による回路基板２０をｙ方向から見た断面図である。FIG. 19 is a cross-sectional view of the circuit board 20 according to the modification viewed from the y direction. 図２０は、トランデューサ１００をエネルギーハーベスタとして用いる場合に必要な回路を示すブロック図である。FIG. 20 is a block diagram showing a circuit necessary when the transducer 100 is used as an energy harvester.
　以下、添付図面を参照しながら、本発明の好ましい実施形態について詳細に説明する。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
　図１は、本発明の好ましい実施形態によるトランデューサ１００の構成を説明するための略断面図である。また、図２は、本実施形態によるトランデューサ１００の略分解斜視図である。 FIG. 1 is a schematic cross-sectional view for explaining the configuration of a transducer 100 according to a preferred embodiment of the present invention. FIG. 2 is a schematic exploded perspective view of the transducer 100 according to the present embodiment.
　本実施形態によるトランデューサ１００は、アクチュエータ又はエネルギーハーベスタとして用いることができる装置であり、図１及び図２に示すように、磁石構造体１０と、磁石構造体１０の第１の平面Ｓ１と向かい合う回路基板２０と、回路基板２０に固定された鋼板３０と、支持体４０，５０，６０と、マイクロボールＢ１，Ｂ２とを備えている。磁石構造体１０は支持体４０に固定され、回路基板２０及び鋼板３０は支持体６０に固定されている。また、支持体５０は、支持体４０と支持体６０の間に挟まれるように位置し、これにより、磁石構造体１０と回路基板２０のｚ方向における間隔が一定に保たれている。支持体５０と支持体６０の間には、ｘ方向への移動を案内するマイクロボールＢ１が介在し、支持体５０と支持体４０の間には、ｙ方向への移動を案内するマイクロボールＢ２が介在している。磁石構造体１０と回路基板２０は、磁石構造体１０と鋼板３０との間に作用する磁気吸引力ＡＦによって互いに吸引されており、これにより、各部材が分離することなく、一体化された状態が保持される。尚、鋼板３０の代わりに他の軟磁性体を用いても構わない。 The transducer 100 according to the present embodiment is a device that can be used as an actuator or an energy harvester, and faces the magnet structure 10 and the first plane S1 of the magnet structure 10 as shown in FIGS. The circuit board 20, the steel plate 30 fixed to the circuit board 20, the support bodies 40, 50, 60, and the microballs B1, B2 are provided. The magnet structure 10 is fixed to the support body 40, and the circuit board 20 and the steel plate 30 are fixed to the support body 60. Further, the support body 50 is positioned so as to be sandwiched between the support body 40 and the support body 60, and thereby the distance between the magnet structure 10 and the circuit board 20 in the z direction is kept constant. A microball B1 that guides movement in the x direction is interposed between the support body 50 and the support body 60, and a microball B2 that guides movement in the y direction is interposed between the support body 50 and the support body 40. Is intervening. The magnet structure 10 and the circuit board 20 are attracted to each other by the magnetic attraction force AF acting between the magnet structure 10 and the steel plate 30, and thereby the respective members are integrated without being separated. Is retained. Note that another soft magnetic material may be used instead of the steel plate 30.
　図３は、磁石構造体１０を第１の平面Ｓ１側から見た略平面図である。 FIG. 3 is a schematic plan view of the magnet structure 10 as viewed from the first plane S1 side.
　図３に示すように、磁石構造体１０は、ｘ方向及びｙ方向にマトリクス状に配列された複数の第１及び第２の磁石１１，１２を備えている。磁石１１，１２は、ガラスや軟磁性体などからなる支持基板１３上に設けられており、ｘｙ方向に延在する第１の平面Ｓ１に磁極面が位置している。尚、図面の見やすさを考慮して、図３においては支持基板１３が図示されていない。磁石構造体１０を構成する磁石１１，１２のうち、第１の磁石１１は第１の平面Ｓ１に位置する磁極面がＮ極であり、逆に、第２の磁石１２は第１の平面Ｓ１に位置する磁極面がＳ極である。そして、これら第１の磁石１１と第２の磁石１２が市松模様にマトリクス配列されている。つまり、ｘ方向に延在する各行は、第１の磁石１１と第２の磁石１２がｘ方向に交互に配列された第１の配列部分Ｌｘを構成し、ｙ方向に延在する各列は、第１の磁石１１と第２の磁石１２がｙ方向に交互に配列された第２の配列部分Ｌｙを構成する。 As shown in FIG. 3, the magnet structure 10 includes a plurality of first and second magnets 11 and 12 arranged in a matrix in the x direction and the y direction. The magnets 11 and 12 are provided on a support substrate 13 made of glass, soft magnetic material, or the like, and the magnetic pole surface is located on the first plane S1 extending in the xy direction. Note that the support substrate 13 is not shown in FIG. 3 in consideration of the visibility of the drawing. Of the magnets 11 and 12 constituting the magnet structure 10, the first magnet 11 has an N pole on the first plane S1, and conversely, the second magnet 12 has the first plane S1. The magnetic pole surface located at is the S pole. The first magnet 11 and the second magnet 12 are arranged in a matrix in a checkered pattern. That is, each row extending in the x direction constitutes a first array portion Lx in which the first magnets 11 and the second magnets 12 are alternately arranged in the x direction, and each column extending in the y direction is The first magnet 11 and the second magnet 12 constitute a second array portion Ly in which the first magnet 11 and the second magnet 12 are alternately arrayed in the y direction.
　図３に示すように、本実施形態においては、隣接する第１の磁石１１と第２の磁石１２がスリットＳＬを介して分離しており、かかるスリットＳＬは支持基板１３の表層に達している。但し、本発明においてこのようなスリットＳＬを設けることは必須でない。尚、スリットＳＬを形成しない場合、支持基板１３は必ずしも必要ではない。 As shown in FIG. 3, in the present embodiment, the adjacent first magnet 11 and second magnet 12 are separated via the slit SL, and the slit SL reaches the surface layer of the support substrate 13. . However, it is not essential to provide such a slit SL in the present invention. Note that the support substrate 13 is not necessarily required when the slit SL is not formed.
　図４は、回路基板２０をｙ方向から見た断面図である。 FIG. 4 is a cross-sectional view of the circuit board 20 as viewed from the y direction.
　図４に示すように、回路基板２０は、基板２３と、基板２３の一方の表面２４に形成された第１の配線２１と、基板２３の他方の表面２５に形成された第２の配線２２とを備えている。表面２４は第２の平面Ｓ２を構成し、表面２５は第３の平面Ｓ３を構成している。第２及び第３の平面Ｓ２，Ｓ３は、磁石構造体１０の第１の平面Ｓ１と重なるｘｙ面であり、第２の平面Ｓ２の方が第３の平面Ｓ３よりも第１の平面Ｓ１に近い。つまり、磁石構造体１０と基板２３の表面２４が互いに向かい合うように配置される。このように、第１の配線２１と第２の配線２２を基板２３の表裏に形成すれば、多層配線基板などを使用する必要がない。 As shown in FIG. 4, the circuit board 20 includes a substrate 23, a first wiring 21 formed on one surface 24 of the substrate 23, and a second wiring 22 formed on the other surface 25 of the substrate 23. And. The surface 24 constitutes the second plane S2, and the surface 25 constitutes the third plane S3. The second and third planes S2 and S3 are xy planes that overlap the first plane S1 of the magnet structure 10, and the second plane S2 is closer to the first plane S1 than the third plane S3. close. That is, the magnet structure 10 and the surface 24 of the substrate 23 are disposed so as to face each other. In this way, if the first wiring 21 and the second wiring 22 are formed on the front and back of the substrate 23, it is not necessary to use a multilayer wiring board or the like.
　但し、第１の配線２１と第２の配線２２を基板２３の表裏に形成することは必須でなく、図５に示す変形例による回路基板２０のように、基板２３の表面２４に絶縁膜２６を介して第１の配線２１と第２の配線２２を積層しても構わない。この場合、第２の平面Ｓ２と第３の平面Ｓ３の距離が近くなることから、磁石構造体１０と第１の配線２１のｚ方向における距離と、磁石構造体１０と第２の配線２２のｚ方向における距離の差を縮小することが可能となる。 However, it is not essential to form the first wiring 21 and the second wiring 22 on the front and back of the substrate 23, and the insulating film 26 is formed on the surface 24 of the substrate 23 as in the circuit substrate 20 according to the modification shown in FIG. The first wiring 21 and the second wiring 22 may be stacked via the via. In this case, since the distance between the second plane S2 and the third plane S3 is reduced, the distance between the magnet structure 10 and the first wiring 21 in the z direction and the distance between the magnet structure 10 and the second wiring 22 are reduced. It is possible to reduce the difference in distance in the z direction.
　図６は、第１の配線２１を抜き出して示す平面図である。図６においては、磁石構造体１０との平面的な位置関係を明確にすべく、第１及び第２の磁石１１，１２の位置についても表示されている。 FIG. 6 is a plan view showing the first wiring 21 extracted. In FIG. 6, the positions of the first and second magnets 11 and 12 are also displayed in order to clarify the planar positional relationship with the magnet structure 10.
　図６に示すように、第１の配線２１は、一筆書き可能な１本の配線であり、ミアンダ状に蛇行する平面形状を有している。より具体的に説明すると、第１の配線２１は、第１の磁石１１をｙ方向に横断する第１の配線部分２１ｙ１と、第２の磁石１２をｙ方向に横断する第２の配線部分２１ｙ２と、両者を接続するようｘ方向に延在する接続部分２１ｘとを含んでいる。 As shown in FIG. 6, the first wiring 21 is one wiring that can be drawn with a single stroke, and has a planar shape meandering in a meander shape. To be more specific, the first wire 21, the second wire portion crossing the first wiring portion 21y 1 across the first magnet 11 in the y-direction, the second magnet 12 in the y-direction and 21y 2, and a connecting portion 21x extending in the x direction so as to connect the two.
　かかる構成により、第１の配線２１に電流を流すと、第１の配線部分２１ｙ１と第２の配線部分２１ｙ２には、互いに逆方向の電流が流れる。図６に示す例では、第１の配線２１の一端Ａから他端Ｂに向かって電流を流すと、第１の配線部分２１ｙ１には下方向（－ｙ方向）に電流が流れ、第２の配線部分２１ｙ２には上方向（＋ｙ方向）に電流が流れることになる。 With this configuration, when an electric current is applied to the first wiring 21, the first wiring portion 21y 1 and the second wiring portion 21y 2, current flows in the reverse direction to each other. In the example shown in FIG. 6, when a current flows from one end A to the other end B of the first wiring 21, a current flows downward (−y direction) through the first wiring portion 21 y 1 . of so that the current flows in the upward direction (+ y direction) on the wiring portion 21y 2.
　図７は、第２の配線２２を抜き出して示す平面図である。図７においては、磁石構造体１０との平面的な位置関係を明確にすべく、第１及び第２の磁石１１，１２の位置についても表示されている。 FIG. 7 is a plan view showing the second wiring 22 extracted. In FIG. 7, the positions of the first and second magnets 11 and 12 are also displayed in order to clarify the planar positional relationship with the magnet structure 10.
　図７に示すように、第２の配線２２は、一筆書き可能な１本の配線であり、ミアンダ状に蛇行する平面形状を有している。より具体的に説明すると、第２の配線２２は、第１の磁石１１をｘ方向に横断する第３の配線部分２２ｘ１と、第２の磁石１２をｘ方向に横断する第４の配線部分２２ｘ２と、両者を接続するようｙ方向に延在する接続部分２２ｙとを含んでいる。 As shown in FIG. 7, the second wiring 22 is one wiring that can be drawn with a single stroke, and has a planar shape meandering in a meander shape. To be more specific, the second wiring 22, the fourth portion of the wiring crossing the third wiring portion 22x 1 across the first magnet 11 in the x-direction, the second magnet 12 in the x-direction and 22x 2, and a connecting portion 22y extending in the y direction so as to connect them.
　かかる構成により、第２の配線２２に電流を流すと、第３の配線部分２２ｘ１と第４の配線部分２２ｘ２には、互いに逆方向の電流が流れる。図７に示す例では、第２の配線２２の一端Ｃから他端Ｄに向かって電流を流すと、第３の配線部分２２ｘ１には右方向（＋ｘ方向）に電流が流れ、第４の配線部分２２ｘ２には左方向（－ｘ方向）に電流が流れることになる。 With this configuration, when an electric current is applied to the second wiring 22, the third wiring portion 22x 1 and the fourth wiring portion 22x 2, current flows in the reverse direction to each other. In the example shown in FIG. 7, when a current flows from one end C to the other end D of the second wiring 22, a current flows in the right direction (+ x direction) through the third wiring portion 22 x 1 , so that the current flows in the left direction (-x direction) on the wiring portion 22x 2.
　図８は、第１の配線２１に流れる電流が磁石構造体１０に与える影響を説明するための図である。 FIG. 8 is a diagram for explaining the influence of the current flowing through the first wiring 21 on the magnet structure 10.
　図８に示すように、第１の配線２１に電流Ｉ１又はＩ２が流れると、磁石構造体１０と第１の配線２１との間にはｘ方向のローレンツ力ＦＬ１又はＦＬ２が働く。 As shown in FIG. 8, when a current I 1 or I 2 flows through the first wiring 21, an x-direction Lorentz force F L 1 or F L 2 acts between the magnet structure 10 and the first wiring 21. .
　具体的には、第１の配線２１に電流Ｉ１が流れた場合、第１の磁石１１に対しては電流の方向が下方向（－ｙ方向）であることから、第１の配線２１には右方向（＋ｘ方向）のローレンツ力ＦＬ１が作用する。一方、第２の磁石１２に対しては電流の方向が上方向（＋ｙ方向）であることから、第１の配線２１には右方向（＋ｘ方向）のローレンツ力ＦＬ１が作用する。つまり、第１及び第２の磁石１１，１２のいずれに対しても、第１の配線２１には右方向（＋ｘ方向）のローレンツ力ＦＬ１が作用することになる。 Specifically, when the current I1 flows through the first wiring 21, the direction of the current with respect to the first magnet 11 is the downward direction (−y direction). A Lorentz force F L 1 in the right direction (+ x direction) acts. On the other hand, since the current direction is the upward direction (+ y direction) with respect to the second magnet 12, the Lorentz force F L1 in the right direction (+ x direction) acts on the first wiring 21. That is, the Lorentz force F L 1 in the right direction (+ x direction) acts on the first wiring 21 for both the first and second magnets 11 and 12.
　逆に、第１の配線２１に電流Ｉ２が流れた場合、第１の磁石１１に対しては電流の方向が上方向（＋ｙ方向）であることから、第１の配線２１には左方向（－ｘ方向）のローレンツ力ＦＬ２が作用する。一方、第２の磁石１２に対しては電流の方向が下方向（－ｙ方向）であることから、第１の配線２１には左方向（－ｘ方向）のローレンツ力ＦＬ２が作用する。つまり、第１及び第２の磁石１１，１２のいずれに対しても、第１の配線２１には左方向（－ｘ方向）のローレンツ力ＦＬ２が作用することになる。 On the contrary, when the current I2 flows through the first wiring 21, the direction of the current is upward (+ y direction) with respect to the first magnet 11, and therefore the left direction ( The Lorentz force F L2 in the −x direction) acts. On the other hand, since the direction of the current is downward (−y direction) with respect to the second magnet 12, the left direction (−x direction) Lorentz force F L2 acts on the first wiring 21. . That is, the Lorentz force F L 2 in the left direction (−x direction) acts on the first wiring 21 with respect to both the first and second magnets 11 and 12.
　したがって、本実施形態によるトランデューサ１００をアクチュエータとして用いる場合、電流Ｉ１又はＩ２を流すことにより、磁石構造体１０と回路基板２０のｘ方向における相対的な位置関係を変化させることができる。変化の大きさ及び速度は、電流Ｉ１又はＩ２によって制御することができる。 Therefore, when the transducer 100 according to the present embodiment is used as an actuator, the relative positional relationship between the magnet structure 10 and the circuit board 20 in the x direction can be changed by flowing the current I1 or I2. The magnitude and speed of the change can be controlled by the current I1 or I2.
　図９は、第２の配線２２に流れる電流が磁石構造体１０に与える影響を説明するための図である。 FIG. 9 is a diagram for explaining the influence of the current flowing through the second wiring 22 on the magnet structure 10.
　図９に示すように、第２の配線２２に電流Ｉ３又はＩ４が流れると、磁石構造体１０と第２の配線２２との間にはｙ方向のローレンツ力ＦＬ３又はＦＬ４が働く。 As shown in FIG. 9, when a current I3 or I4 flows through the second wiring 22, a Lorentz force F L3 or F L4 in the y direction acts between the magnet structure 10 and the second wiring 22. .
　具体的には、第２の配線２２に電流Ｉ３が流れた場合、第１の磁石１１に対しては電流の方向が右方向（＋ｘ方向）であることから、第２の配線２２には上方向（＋ｙ方向）のローレンツ力ＦＬ３が作用する。一方、第２の磁石１２に対しては電流の方向が左方向（－ｘ方向）であることから、第２の配線２２には上方向（＋ｙ方向）のローレンツ力ＦＬ３が作用する。つまり、第１及び第２の磁石１１，１２のいずれに対しても、第２の配線２２には上方向（＋ｙ方向）のローレンツ力ＦＬ３が作用することになる。 Specifically, when the current I3 flows through the second wiring 22, the current direction is the right direction (+ x direction) with respect to the first magnet 11, so A Lorentz force F L 3 in the direction (+ y direction) acts. On the other hand, since the current direction is the left direction (−x direction) with respect to the second magnet 12, an upward (+ y direction) Lorentz force F L 3 acts on the second wiring 22. That is, the Lorentz force F L 3 in the upward direction (+ y direction) acts on the second wiring 22 with respect to both the first and second magnets 11 and 12.
　逆に、第２の配線２２に電流Ｉ４が流れた場合、第１の磁石１１に対しては電流の方向が左方向（－ｘ方向）であることから、第２の配線２２には下方向（－ｙ方向）のローレンツ力ＦＬ４が作用する。一方、第２の磁石１２に対しては電流の方向が右方向（＋ｘ方向）であることから、第２の配線２２には下方向（－ｙ方向）のローレンツ力ＦＬ４が作用する。つまり、第１及び第２の磁石１１，１２のいずれに対しても、第２の配線２２には下方向（－ｙ方向）のローレンツ力ＦＬ４が作用することになる。 On the contrary, when the current I4 flows through the second wiring 22, the direction of the current is the left direction (−x direction) with respect to the first magnet 11, and therefore the second wiring 22 has a downward direction. A Lorentz force F L 4 in the (−y direction) acts. On the other hand, since the current direction is rightward (+ x direction) with respect to the second magnet 12, a downward (−y direction) Lorentz force F L 4 acts on the second wiring 22. That is, the Lorentz force F L 4 in the downward direction (−y direction) acts on the second wiring 22 for both the first and second magnets 11 and 12.
　したがって、本実施形態によるトランデューサ１００をアクチュエータとして用いる場合、電流Ｉ３又はＩ４を流すことにより、磁石構造体１０と回路基板２０のｙ方向における相対的な位置関係を変化させることができる。変化の大きさ及び速度は、電流Ｉ３又はＩ４によって制御することができる。 Therefore, when the transducer 100 according to the present embodiment is used as an actuator, the relative positional relationship between the magnet structure 10 and the circuit board 20 in the y direction can be changed by flowing the current I3 or I4. The magnitude and speed of the change can be controlled by the current I3 or I4.
　このように、本実施形態によるトランデューサ１００をアクチュエータとして用いる場合、第１の配線２１に電流Ｉ１又はＩ２を流すことによって磁石構造体１０と回路基板２０のｘ方向における相対的な位置関係を変化させることができ、第２の配線２２に電流Ｉ３又はＩ４を流すことによって磁石構造体１０と回路基板２０のｙ方向における相対的な位置関係を変化させることができることから、電流Ｉ１～Ｉ４によって磁石構造体１０と回路基板２０の平面的な位置関係を変化させることができる。つまり、磁石構造体１０と回路基板２０を相対的に２次元動作させることが可能となる。 As described above, when the transducer 100 according to the present embodiment is used as an actuator, the relative positional relationship between the magnet structure 10 and the circuit board 20 in the x direction is changed by passing the current I1 or I2 through the first wiring 21. Since the relative positional relationship between the magnet structure 10 and the circuit board 20 in the y direction can be changed by passing the current I3 or I4 through the second wiring 22, the magnets can be changed by the currents I1 to I4. The planar positional relationship between the structure 10 and the circuit board 20 can be changed. That is, the magnet structure 10 and the circuit board 20 can be relatively two-dimensionally operated.
　一方、外力が作用することによって、磁石構造体１０と回路基板２０の相対的な位置が変化すると、第１及び第２の配線２１，２２には誘導電流が発生する。したがって、本実施形態によるトランデューサ１００は、エネルギーハーベスタとして用いることができる。具体的には、図１０に示すように、外力ＦＥ１が作用すると第１の配線２１に電流Ｉ１が流れ、外力ＦＥ２が作用すると第１の配線２１に電流Ｉ２が流れる。また、図１１に示すように、外力ＦＥ３が作用すると第２の配線２２に電流Ｉ３が流れ、外力ＦＥ４が作用すると２１の配線２２に電流Ｉ４が流れる。このように、外力による磁石構造体１０と回路基板２０の相対的な２次元動作によって、誘導電流を発生させることが可能となる。 On the other hand, when the relative position of the magnet structure 10 and the circuit board 20 changes due to the action of an external force, an induced current is generated in the first and second wirings 21 and 22. Therefore, the transducer 100 according to the present embodiment can be used as an energy harvester. Specifically, as shown in FIG. 10, when an external force F E 1 is applied, a current I1 flows through the first wiring 21, and when an external force F E2 is applied, a current I2 flows through the first wiring 21. Further, as shown in FIG. 11, when the external force F E 3 is applied, a current I3 flows through the second wiring 22, and when the external force F E 4 is applied, a current I4 flows through the wiring 21. In this way, an induced current can be generated by a relative two-dimensional operation of the magnet structure 10 and the circuit board 20 by an external force.
　ここで、磁石構造体１０と回路基板２０のｘ方向における相対的な移動は、図１に示すマイクロボールＢ１の転動によって案内され、磁石構造体１０と回路基板２０のｙ方向における相対的な移動は、図１に示すマイクロボールＢ２の転動によって案内される。 Here, the relative movement of the magnet structure 10 and the circuit board 20 in the x direction is guided by the rolling of the microball B1 shown in FIG. 1, and the relative movement of the magnet structure 10 and the circuit board 20 in the y direction. The movement is guided by the rolling of the microball B2 shown in FIG.
　図１２は、支持体４０の構成を説明するための略透視斜視図である。 FIG. 12 is a schematic perspective view for explaining the configuration of the support 40.
　図１２に示すように、支持体４０は開口部４０ａを有する枠状体であり、開口部４０ａに磁石構造体１０が固定される。支持体４０は、ｚ方向における一方側の表面４１と他方側の表面４２を有し、他方側の表面４２には４つの案内溝Ｇ４が形成されている。拡大図である図１３に示すように、案内溝Ｇ４は、支持体４０の角部近傍に配置されたＶ字型の溝であり、その延在方向はｙ方向である。 As shown in FIG. 12, the support body 40 is a frame-like body having an opening 40a, and the magnet structure 10 is fixed to the opening 40a. The support 40 has a surface 41 on one side and a surface 42 on the other side in the z direction, and four guide grooves G4 are formed on the surface 42 on the other side. As shown in FIG. 13 which is an enlarged view, the guide groove G4 is a V-shaped groove disposed in the vicinity of the corner of the support body 40, and its extending direction is the y direction.
　図１４は、支持体５０の構成を説明するための略透視斜視図である。 FIG. 14 is a schematic perspective view for explaining the configuration of the support 50.
　図１４に示すように、支持体５０は開口部５０ａを有する枠状体であり、トランデューサ１００を組み立てると、開口部５０ａに磁石構造体１０及び回路基板２０が露出し、両者が互いに向かい合う。支持体５０は、ｚ方向における一方側の表面５１と他方側の表面５２を有し、一方側の表面５１には４つの案内溝Ｇ２が形成され、他方側の表面５２には４つの案内溝Ｇ１が形成されている。拡大図である図１５に示すように、案内溝Ｇ１，Ｇ２はいずれも支持体５０の角部近傍に配置されたＶ字型の溝であり、案内溝Ｇ１はｘ方向に延在し、案内溝Ｇ２はｙ方向に延在している。そして、支持体４０と支持体５０を重ねると、ｚ方向から見て案内溝Ｇ４と案内溝Ｇ２が互いに重なり、これら案内溝Ｇ４，Ｇ２にマイクロボールＢ２が挟み込まれる。これにより、マイクロボールＢ２は案内溝Ｇ４，Ｇ２に沿ってｙ方向に転動自在となり、支持体４０と支持体５０を相対的にｙ方向に滑動させる滑動機構が構成される。 As shown in FIG. 14, the support 50 is a frame-like body having an opening 50a. When the transducer 100 is assembled, the magnet structure 10 and the circuit board 20 are exposed in the opening 50a, and both face each other. The support 50 has a surface 51 on one side and a surface 52 on the other side in the z direction, and four guide grooves G2 are formed on the surface 51 on one side, and four guide grooves are formed on the surface 52 on the other side. G1 is formed. As shown in FIG. 15 which is an enlarged view, each of the guide grooves G1 and G2 is a V-shaped groove disposed in the vicinity of the corner portion of the support 50, and the guide groove G1 extends in the x direction and is guided. The groove G2 extends in the y direction. When the support body 40 and the support body 50 are overlapped, the guide groove G4 and the guide groove G2 overlap each other when viewed from the z direction, and the microball B2 is sandwiched between the guide grooves G4 and G2. As a result, the microball B2 can roll in the y direction along the guide grooves G4 and G2, and a sliding mechanism is configured to slide the support body 40 and the support body 50 in the y direction relatively.
　図１６は、支持体６０の構成を説明するための略透視斜視図である。 FIG. 16 is a schematic perspective view for explaining the configuration of the support 60.
　図１６に示すように、支持体６０は板状体であり、その一方側の表面６１に回路基板２０が固定され、他方側の表面６２に鋼板３０が固定される。さらに、支持体６０の一方側の表面６１には４つの案内溝Ｇ３が形成されている。拡大図である図１７に示すように、案内溝Ｇ３は支持体６０の角部近傍に配置されたＶ字型の溝であり、その延在方向はｘ方向である。そして、支持体５０と支持体６０を重ねると、ｚ方向から見て案内溝Ｇ１と案内溝Ｇ３が互いに重なり、これら案内溝Ｇ１，Ｇ３にはマイクロボールＢ１が挟み込まれる。これにより、マイクロボールＢ１は案内溝Ｇ１，Ｇ３に沿ってｘ方向に転動自在となり、支持体５０と支持体６０を相対的にｘ方向に滑動させる滑動機構が構成される。 As shown in FIG. 16, the support 60 is a plate-like body, and the circuit board 20 is fixed to the surface 61 on one side, and the steel plate 30 is fixed to the surface 62 on the other side. Further, four guide grooves G <b> 3 are formed on the surface 61 on one side of the support body 60. As shown in FIG. 17 which is an enlarged view, the guide groove G3 is a V-shaped groove disposed in the vicinity of the corner of the support body 60, and its extending direction is the x direction. When the support 50 and the support 60 are overlapped, the guide groove G1 and the guide groove G3 overlap each other when viewed from the z direction, and the microball B1 is sandwiched between the guide grooves G1 and G3. As a result, the microball B1 can roll in the x direction along the guide grooves G1 and G3, and a sliding mechanism is configured to slide the support 50 and the support 60 in the x direction relatively.
　したがって、マイクロボールＢ１，Ｂ２を介して支持体４０，５０，６０を重ねることによりトランデューサ１００を組み立てると、磁石構造体１０と回路基板２０は、相対的にｘｙ方向に滑動自在となる。つまり、磁石構造体１０と回路基板２０のｚ方向における間隔を一定に保ったまま、ｘ方向における相対的な動きは案内溝Ｇ１，Ｇ３に沿ったマイクロボールＢ１の転動によって案内され、ｙ方向における相対的な動きは案内溝Ｇ２，Ｇ４に沿ったマイクロボールＢ２の転動によって案内されるため、スムーズな２次元動作が可能となる。また、変位量は、案内溝Ｇ１～Ｇ４の長さによって決まることから、十分な変位量を確保することも可能となる。 Therefore, when the transducer 100 is assembled by stacking the supports 40, 50, 60 via the microballs B1, B2, the magnet structure 10 and the circuit board 20 are relatively slidable in the xy directions. In other words, the relative movement in the x direction is guided by the rolling of the microball B1 along the guide grooves G1 and G3 while keeping the gap in the z direction between the magnet structure 10 and the circuit board 20 constant, and the y direction Since the relative movement is guided by the rolling of the microball B2 along the guide grooves G2 and G4, a smooth two-dimensional operation is possible. Further, since the amount of displacement is determined by the length of the guide grooves G1 to G4, it is possible to ensure a sufficient amount of displacement.
　本実施形態によるトランデューサ１００は、支持体４０又は支持体６０を機器の筐体に固定して使用することができる。例えば、支持体６０を機器の筐体に固定すれば、配線２１，２２に電流を流すことにより、筐体に対して磁石構造体１０を２次元的に駆動することが可能となる。この場合、例えば筐体に撮像素子を固定し、磁石構造体１０に光学レンズを固定すれば、光学レンズを２次元的に駆動することによって手ぶれ補正を行うことも可能である。 The transducer 100 according to the present embodiment can be used with the support 40 or the support 60 fixed to the casing of the device. For example, if the support body 60 is fixed to the housing of the device, the magnet structure 10 can be driven two-dimensionally with respect to the housing by passing a current through the wires 21 and 22. In this case, for example, when the imaging element is fixed to the casing and the optical lens is fixed to the magnet structure 10, it is possible to perform camera shake correction by driving the optical lens two-dimensionally.
　また、支持体６０を筐体に固定する場合、磁石構造体１０をｘ方向に滑動させる際には、磁石構造体１０だけでなく支持体５０についてもｘ方向に滑動させる必要があるのに対し、磁石構造体１０をｙ方向に滑動させる際には、支持体５０を滑動させることなく、磁石構造体１０をｙ方向に滑動させれば足りる。このことは、ｘ方向の滑動に必要な駆動力がｙ方向の滑動に必要な駆動力よりも大きいことを意味する。しかしながら、本実施形態においては、ｘ方向への駆動力を生じさせる第１の配線２１がより磁石構造体１０に近い第２の平面Ｓ２に位置し、ｙ方向への駆動力を生じさせる第２の配線２２がより磁石構造体１０から遠い第３の平面Ｓ３に位置していることから、単位電流量当たりの駆動力は、ｙ方向よりもｘ方向の方が大きくなる。つまり、必要な駆動力が大きいｘ方向への滑動に寄与する第１の配線２１を磁石構造体１０に近い第２の平面Ｓ２に配置し、必要な駆動力が小さいｙ方向への滑動に寄与する第２の配線２２を磁石構造体１０から遠い第３の平面Ｓ３に配置することで、発生する駆動力と滑動に必要な駆動力のバランスを確保することが可能となる。 Further, when the support 60 is fixed to the housing, when the magnet structure 10 is slid in the x direction, not only the magnet structure 10 but also the support 50 needs to be slid in the x direction. When the magnet structure 10 is slid in the y direction, it is sufficient to slide the magnet structure 10 in the y direction without sliding the support 50. This means that the driving force required for sliding in the x direction is greater than the driving force required for sliding in the y direction. However, in the present embodiment, the first wiring 21 that generates the driving force in the x direction is located on the second plane S2 that is closer to the magnet structure 10, and the second wiring that generates the driving force in the y direction. Since the wiring 22 is located on the third plane S3 farther from the magnet structure 10, the driving force per unit current amount is larger in the x direction than in the y direction. That is, the first wiring 21 that contributes to sliding in the x direction with a large required driving force is arranged on the second plane S2 close to the magnet structure 10, and contributes to sliding in the y direction with a small necessary driving force. By arranging the second wiring 22 to be arranged on the third plane S3 far from the magnet structure 10, it is possible to ensure a balance between the generated driving force and the driving force necessary for sliding.
　図１８は、本実施形態によるトランデューサ１００をアクチュエータとして用いる場合の駆動回路７０の回路図である。 FIG. 18 is a circuit diagram of the drive circuit 70 when the transducer 100 according to the present embodiment is used as an actuator.
　図１８に示す駆動回路７０は、制御信号ＣＮＴに基づいて駆動信号Ｄｘ，Ｄｙを生成する制御回路７１と、駆動信号Ｄｘを駆動電流Ｉｘに変換するアンプ７２と、駆動信号Ｄｙを駆動電流Ｉｙに変換するアンプ７３とを有している。制御信号ＣＮＴは、アクチュエータであるトランデューサ１００の動作方向及び動作量を指示する信号であり、例えばアクチュエータであるトランデューサ１００を手ぶれ補正機構として使用する場合には、加速度センサなどから供給される手ぶれ検出信号が該当する。制御回路７１は、制御信号ＣＮＴに基づき、ｘ方向への駆動量を示す駆動信号Ｄｘと、ｙ方向への駆動量を示す駆動信号Ｄｙを生成し、これらをアンプ７２，７３にそれぞれ供給する。そして、アンプ７２，７３によって駆動信号Ｄｘ，Ｄｙが駆動電流Ｉｘ１，Ｉｙ１に変換され、それぞれ第１及び第２の配線２１，２２に供給される。これにより、制御信号ＣＮＴに基づいて、磁石構造体１０と回路基板２０を相対的に２次元滑動させることが可能となる。 The drive circuit 70 shown in FIG. 18 includes a control circuit 71 that generates drive signals Dx and Dy based on the control signal CNT, an amplifier 72 that converts the drive signal Dx into a drive current Ix, and the drive signal Dy into the drive current Iy. And an amplifier 73 for conversion. The control signal CNT is a signal for instructing an operation direction and an operation amount of the transducer 100 that is an actuator. For example, when the transducer 100 that is an actuator is used as a camera shake correction mechanism, a camera shake supplied from an acceleration sensor or the like is used. This corresponds to the detection signal. Based on the control signal CNT, the control circuit 71 generates a drive signal Dx indicating the drive amount in the x direction and a drive signal Dy indicating the drive amount in the y direction, and supplies these to the amplifiers 72 and 73, respectively. The drive signals Dx and Dy are converted into drive currents Ix 1 and Iy 1 by the amplifiers 72 and 73 and supplied to the first and second wirings 21 and 22, respectively. Thereby, based on the control signal CNT, the magnet structure 10 and the circuit board 20 can be relatively slid two-dimensionally.
　単位滑動量当たりの駆動電流Ｉｘ１，Ｉｙ１は互いに同じであっても構わないが、ｙ方向への滑動に寄与する第２の配線２２が磁石構造体１０から遠い第３の平面Ｓ３に配置されているため、基板２３の厚さによっては、ｙ方向への駆動力が不足する可能性がある。このような場合には、駆動信号Ｄｘと駆動信号Ｄｙのゲインに差を設け、単位滑動量当たりの駆動信号Ｄｘの指示値よりも、単位滑動量当たりの駆動信号Ｄｙの指示値が大きくなるよう、制御回路７１を設計することによって、ｙ方向への駆動力を増大させても構わない。或いは、制御回路７１による駆動信号Ｄｘと駆動信号Ｄｙのゲインは一定とし、駆動信号Ｄｘの単位指示値当たりの駆動電流Ｉｘ１よりも、駆動信号Ｄｙの単位指示値当たりの駆動電流Ｉｙ１の方が大きくなるよう、アンプ７２，７３を設計しても構わない。 The drive currents Ix 1 and Iy 1 per unit sliding amount may be the same, but the second wiring 22 that contributes to the sliding in the y direction is arranged on the third plane S 3 far from the magnet structure 10. Therefore, depending on the thickness of the substrate 23, the driving force in the y direction may be insufficient. In such a case, a difference is provided between the gains of the drive signal Dx and the drive signal Dy so that the indicated value of the drive signal Dy per unit sliding amount is larger than the indicated value of the drive signal Dx per unit sliding amount. The driving force in the y direction may be increased by designing the control circuit 71. Alternatively, the gain of the drive signal Dx and the drive signal Dy by the control circuit 71 is constant, and the drive current Iy 1 per unit instruction value of the drive signal Dy is more than the drive current Ix 1 per unit instruction value of the drive signal Dx. The amplifiers 72 and 73 may be designed so as to increase.
　これによれば、単位滑動量当たりの駆動電流Ｉｘ１よりも単位滑動量当たりの駆動電流Ｉｙ１の方が大きくなるため、磁石構造体１０からの距離が遠いことによる駆動力の低下を補うことが可能となる。この場合、ｘ方向の滑動に寄与する第１の配線２１よりも、ｙ方向の滑動に寄与する第２の配線２２の方がより大きな電流が流れることから、図１９に示すように、第１の配線２１の導体厚Ｔ１をより薄く設計し、第２の配線２２の導体厚Ｔ２をより厚く設計しても構わない（Ｔ１＜Ｔ２）。これによれば、より大きな電流が流れる第２の配線２２の抵抗値を下げることができるとともに、第１の配線２１の導体厚Ｔ１が薄いことから、磁石構造体１０と第２の配線２２の距離をより近づけることが可能となる。 According to this, the driving current Iy 1 per unit sliding amount becomes larger than the driving current Ix 1 per unit sliding amount, so that the reduction in driving force due to the far distance from the magnet structure 10 is compensated. Is possible. In this case, a larger current flows in the second wiring 22 contributing to the sliding in the y direction than in the first wiring 21 contributing to the sliding in the x direction. Therefore, as shown in FIG. The conductor thickness T1 of the wiring 21 may be designed to be thinner and the conductor thickness T2 of the second wiring 22 may be designed to be thicker (T1 <T2). According to this, since the resistance value of the second wiring 22 through which a larger current flows can be lowered and the conductor thickness T1 of the first wiring 21 is thin, the magnet structure 10 and the second wiring 22 can be reduced. It becomes possible to make the distance closer.
　図２０は、本実施形態によるトランデューサ１００をエネルギーハーベスタとして用いる場合に必要な回路を示すブロック図である。 FIG. 20 is a block diagram showing a circuit required when the transducer 100 according to the present embodiment is used as an energy harvester.
　本実施形態によるトランデューサ１００をエネルギーハーベスタとして用いる場合、整流変圧回路８０に誘導電流Ｉｘ２及びＩｙ２を入力する。整流変圧回路８０は、誘導電流Ｉｘ２及びＩｙ２を整流し、出力電圧ＯＵＴを生成する。これにより、トランデューサ１００に外力が作用すると、出力電圧ＯＵＴを得ることが可能となる。 When the transducer 100 according to the present embodiment is used as an energy harvester, induced currents Ix 2 and Iy 2 are input to the rectifying transformer circuit 80. The rectifying transformer circuit 80 rectifies the induced currents Ix 2 and Iy 2 and generates an output voltage OUT. As a result, when an external force acts on the transducer 100, the output voltage OUT can be obtained.
　以上、本発明の好ましい実施形態について説明したが、本発明は、上記の実施形態に限定されることなく、本発明の主旨を逸脱しない範囲で種々の変更が可能であり、それらも本発明の範囲内に包含されるものであることはいうまでもない。 The preferred embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention. Needless to say, it is included in the range.
　例えば、上記実施形態では、第１及び第２の磁石１１，１２の全てに第１及び第２の配線２１，２２が割り当てられているが、本発明においてこのような構成とすることは必須でない。したがって、第１の配線２１については、第１の配列部分Ｌｘを構成する第１の磁石１１及び第２の磁石１２の少なくとも一部をｙ方向に横断すれば足り、第２の配線２２については、第２の配列部分Ｌｙを構成する第１の磁石１１及び第２の磁石１２の少なくとも一部をｘ方向に横断すれば足りる。 For example, in the above embodiment, the first and second wires 21 and 22 are assigned to all of the first and second magnets 11 and 12, but such a configuration is not essential in the present invention. . Therefore, for the first wiring 21, it is sufficient to cross at least a part of the first magnet 11 and the second magnet 12 constituting the first array portion Lx in the y direction, and for the second wiring 22. It is sufficient to cross at least a part of the first magnet 11 and the second magnet 12 constituting the second array portion Ly in the x direction.
　また、上記実施形態では、支持体４０，６０を用いているが、磁石構造体１０自体に案内溝Ｇ４を設けることにより支持体４０を省略しても構わないし、回路基板２０自体に案内溝Ｇ３を設けることにより支持体６０を省略しても構わない。 In the above embodiment, the support bodies 40 and 60 are used. However, the support body 40 may be omitted by providing the magnet structure 10 itself with the guide groove G4, or the guide groove G3 may be provided in the circuit board 20 itself. By providing the support 60, the support 60 may be omitted.
　また、上記実施形態では、ｘ方向への滑動機構を構成するマイクロボールＢ１及び案内溝Ｇ１，Ｇ３を４セット用い、ｙ方向への滑動機構を構成するマイクロボールＢ２及び案内溝Ｇ２，Ｇ４を４セット用いているが、これらの数については特に限定されない。 In the above embodiment, four sets of microballs B1 and guide grooves G1 and G3 constituting a sliding mechanism in the x direction are used, and four microballs B2 and guide grooves G2 and G4 constituting a sliding mechanism in the y direction are used. Although the set is used, these numbers are not particularly limited.
１０　　磁石構造体
１１　　第１の磁石
１２　　第２の磁石
１３　　支持基板
２０　　回路基板
２１　　第１の配線
２１ｘ　　接続部分
２１ｙ１　　第１の配線部分
２１ｙ２　　第２の配線部分
２２　　第２の配線
２２ｘ１　　第３の配線部分
２２ｘ２　　第４の配線部分
２２ｙ　　接続部分
２３　　基板
２４　　基板の一方の表面
２５　　基板の他方の表面
２６　　絶縁膜
３０　　鋼板
４０　　支持体
４０ａ　　開口部
４１　　支持体の一方の表面
４２　　支持体の他方の表面
５０　　支持体
５０ａ　　開口部
５１　　支持体の一方の表面
５２　　支持体の他方の表面
６０　　支持体
６１　　支持体の一方の表面
６２　　支持体の一方の表面
７０　　駆動回路
７１　　制御回路
７２，７３　　アンプ
８０　　整流変圧回路
１００　　トランデューサ
ＡＦ　　磁気吸引力
Ｂ１，Ｂ２　　マイクロボール
ＣＮＴ　　制御信号
Ｄｘ，Ｄｙ　　駆動信号
ＦＬ１～ＦＬ４　　ローレンツ力
ＦＥ１～ＦＥ４　　外力
Ｇ１～Ｇ４　　案内溝
Ｉ１～Ｉ４　　電流
Ｉｘ１，Ｉｙ１　　駆動電流
Ｉｘ２，Ｉｙ２　　誘導電流
ＯＵＴ　　出力信号
Ｓ１　　第１の平面
Ｓ２　　第２の平面
Ｓ３　　第３の平面
ＳＬ　　スリット DESCRIPTION OF SYMBOLS 10 Magnet structure 11 1st magnet 12 2nd magnet 13 Support substrate 20 Circuit board 21 1st wiring 21x Connection part 21y 1 1st wiring part 21y 2 2nd wiring part 22 2nd wiring 22x 1st 3 wiring portion 22x 2 4th wiring portion 22y connection portion 23 substrate 24 one surface 25 of substrate 25 other surface 26 of substrate 26 insulating film 30 steel plate 40 support 40a opening 41 support one surface 42 of support The other surface 50 Support 50a Opening 51 One surface 52 of the support 52 The other surface 60 of the support 60 The support 61 The one surface 62 of the support The one surface 70 of the support 70 The drive circuit 71 The control circuits 72 and 73 Amplifier 80 rectifier transformer circuit 100 transducer AF magnetic attraction force B1, B2 microballs CNT control signals Dx, Dy drive signal F L 1 ~ L 4 Lorentz force F E 1 ~ F E 4 external force G1 ~ G4 guide grooves I1 ~ I4 current Ix 1, Iy 1 driving current Ix 2, Iy 2 induced current OUT output signal S1 first plane S2 second plane S3 first 3 plane SL slit

Claims (12)

  1. 　第１の方向及び前記第１の方向と直交する第２の方向に延在する第１の平面に位置する磁極面がＮ極である複数の第１の磁石と、前記第１の平面に位置する磁極面がＳ極である複数の第２の磁石とを含む磁石構造体と、
    　前記磁石構造体の前記第１の平面と重なる第１及び第２の配線が形成された回路基板と、
    　前記磁石構造体と前記回路基板を相対的に前記第１の方向に滑動させる第１の滑動機構と、
    　前記磁石構造体と前記回路基板を相対的に前記第２の方向に滑動させる第２の滑動機構と、を備え、
    　前記磁石構造体は、前記第１の磁石と前記第２の磁石が前記第１の方向に交互に配列された第１の配列部分と、前記第１の磁石と前記第２の磁石が前記第２の方向に交互に配列された第２の配列部分とを含み、
    　前記第１の配線は、前記第１の配列部分に含まれる前記第１及び第２の磁石の少なくとも一部を前記第２の方向に横断し、
    　前記第２の配線は、前記第２の配列部分に含まれる前記第１及び第２の磁石の少なくとも一部を前記第１の方向に横断し、
    　前記磁石構造体と前記回路基板は、前記第１及び第２の滑動機構を挟んで、互いに磁気吸引されていることを特徴とするトランデューサ。     A plurality of first magnets whose N poles are magnetic pole faces located in a first plane extending in a first direction and a second direction orthogonal to the first direction, and located in the first plane A magnet structure including a plurality of second magnets whose magnetic pole surfaces are S poles;
    A circuit board on which first and second wirings that overlap the first plane of the magnet structure are formed;
    A first sliding mechanism for sliding the magnet structure and the circuit board relatively in the first direction;
    A second sliding mechanism for sliding the magnet structure and the circuit board relatively in the second direction;
    The magnet structure includes a first arrangement portion in which the first magnets and the second magnets are alternately arranged in the first direction, and the first magnets and the second magnets in the first direction. Second arrangement portions arranged alternately in two directions,
    The first wiring crosses at least a part of the first and second magnets included in the first arrangement portion in the second direction,
    The second wiring crosses at least a part of the first and second magnets included in the second arrangement portion in the first direction,
    The transducer, wherein the magnet structure and the circuit board are magnetically attracted to each other with the first and second sliding mechanisms interposed therebetween.
  2. 　前記第１の滑動機構は、前記第１の方向に転動自在な第１のマイクロボールを含み、
    　前記第２の滑動機構は、前記第２の方向に転動自在な第２のマイクロボールを含むことを特徴とする請求項１に記載のトランデューサ。     The first sliding mechanism includes a first microball that can freely roll in the first direction;
    The transducer according to claim 1, wherein the second sliding mechanism includes a second microball that can roll in the second direction.
  3. 　前記第１の方向に延在する第１の案内溝と前記第２の方向に延在する第２の案内溝が形成された支持体をさらに備え、
    　前記第１のマイクロボールは前記第１の案内溝に沿って転動し、前記第２のマイクロボールは前記第２の案内溝に沿って転動することを特徴とする請求項２に記載のトランデューサ。     A support body formed with a first guide groove extending in the first direction and a second guide groove extending in the second direction;
    The first microball rolls along the first guide groove, and the second microball rolls along the second guide groove. Transducer.
  4. 　前記磁石構造体又はこれに固定された支持体には、前記第１の方向に延在する第３の案内溝が形成され、
    　前記回路基板又はこれに固定された支持体には、前記第２の方向に延在する第４の案内溝が形成され、
    　前記第１のマイクロボールは前記第１及び第３の案内溝に沿って転動し、前記第２のマイクロボールは前記第２及び第４の案内溝に沿って転動することを特徴とする請求項３に記載のトランデューサ。     A third guide groove extending in the first direction is formed in the magnet structure or the support fixed to the magnet structure,
    A fourth guide groove extending in the second direction is formed in the circuit board or the support fixed to the circuit board,
    The first microball rolls along the first and third guide grooves, and the second microball rolls along the second and fourth guide grooves. The transducer according to claim 3.
  5. 　前記回路基板に固定された軟磁性体をさらに備え、
    　前記磁石構造体と前記回路基板は、前記磁石構造体と前記軟磁性体との間に作用する磁気吸引力によって互いに吸引されていることを特徴とする請求項１乃至４のいずれか一項に記載のトランデューサ。     A soft magnetic material fixed to the circuit board;
    5. The magnetic structure according to claim 1, wherein the magnet structure and the circuit board are attracted to each other by a magnetic attraction force acting between the magnet structure and the soft magnetic body. The listed transducer.
  6. 　前記回路基板は、前記第１の平面と平行な第２及び第３の平面を有し、
    　前記第１の配線は前記第２の平面に形成され、前記第２の配線は前記第３の平面に形成され、
    　前記第１の平面と前記第３の平面の距離は、前記第１の平面と前記第２の平面の距離よりも大きいことを特徴とする請求項１乃至５のいずれか一項に記載のトランデューサ。     The circuit board has second and third planes parallel to the first plane,
    The first wiring is formed on the second plane, the second wiring is formed on the third plane,
    6. The transformer according to claim 1, wherein a distance between the first plane and the third plane is larger than a distance between the first plane and the second plane. Deusa.
  7. 　前記第２及び第３の平面は、前記回路基板の表裏であることを特徴とする請求項６に記載のトランデューサ。 The transducer according to claim 6, wherein the second and third planes are front and back of the circuit board.
  8. 　前記第１の滑動機構は、前記磁石構造体及び前記第２の滑動機構を前記回路基板に対して相対的に前記第１の方向に滑動させ、
    　前記第２の滑動機構は、前記第１の滑動機構を前記回路基板に対して相対的に前記第２の方向に滑動させることなく、前記磁石構造体を前記回路基板に対して相対的に前記第２の方向に滑動させることを特徴とする請求項６又は７に記載のトランデューサ。     The first sliding mechanism slides the magnet structure and the second sliding mechanism relative to the circuit board in the first direction,
    The second sliding mechanism moves the magnet structure relative to the circuit board without sliding the first sliding mechanism in the second direction relative to the circuit board. The transducer according to claim 6 or 7, wherein the transducer is slid in a second direction.
  9. 　前記第１の配線よりも前記第２の配線の方が、導体厚が大きいことを特徴とする請求項１乃至８のいずれか一項に記載のトランデューサ。 The transducer according to any one of claims 1 to 8, wherein a conductor thickness of the second wiring is larger than that of the first wiring.
  10. 　請求項１乃至９のいずれか一項に記載のトランデューサと、前記第１及び第２の配線に駆動電流を供給する駆動回路とを備えることを特徴とするアクチュエータ。 An actuator comprising: the transducer according to any one of claims 1 to 9; and a drive circuit that supplies a drive current to the first and second wirings.
  11. 　前記駆動回路が前記第１の配線に供給する単位滑動量当たりの駆動電流よりも、前記駆動回路が前記第２の配線に供給する単位滑動量当たりの駆動電流の方が大きいことを特徴とする請求項１０に記載のアクチュエータ。 The driving current per unit sliding amount supplied to the second wiring by the driving circuit is larger than the driving current per unit sliding amount supplied to the first wiring by the driving circuit. The actuator according to claim 10.
  12. 　請求項１乃至９のいずれか一項に記載のトランデューサと、前記第１及び第２の配線に流れる誘導電流に基づいて出力電圧を生成する整流変圧回路とを備えることを特徴とするエネルギーハーベスタ。 An energy harvester comprising: the transducer according to any one of claims 1 to 9; and a rectifier transformer circuit that generates an output voltage based on an induced current flowing through the first and second wirings. .
PCT/JP2019/007193 2018-02-28 2019-02-26 Transducer, and actuator and energy harvester using same WO2019167913A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
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JP2002112526A (en) * 2000-06-26 2002-04-12 Nikon Corp Flat motor, stage-positioning system, and aligner
JP2006136154A (en) * 2004-11-08 2006-05-25 Canon Inc Positioning device and exposure apparatus using the same, and method of manufacturing device
JP2015163004A (en) * 2014-02-28 2015-09-07 国立大学法人横浜国立大学 electromagnetic actuator
WO2015165335A1 (en) * 2014-04-28 2015-11-05 清华大学 Integrated magnetic suspension coarse and fine moving mask table driven by planar motor
WO2017126577A1 (en) * 2016-01-22 2017-07-27 Tdk株式会社 Actuator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002112526A (en) * 2000-06-26 2002-04-12 Nikon Corp Flat motor, stage-positioning system, and aligner
JP2006136154A (en) * 2004-11-08 2006-05-25 Canon Inc Positioning device and exposure apparatus using the same, and method of manufacturing device
JP2015163004A (en) * 2014-02-28 2015-09-07 国立大学法人横浜国立大学 electromagnetic actuator
WO2015165335A1 (en) * 2014-04-28 2015-11-05 清华大学 Integrated magnetic suspension coarse and fine moving mask table driven by planar motor
WO2017126577A1 (en) * 2016-01-22 2017-07-27 Tdk株式会社 Actuator

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