JPH0732578B2 - XY linear motor - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention is suitable for use in, for example, an XY table.
It relates to a Y linear motor.

[Outline of Invention]

The present invention is suitable for use in, for example, an XY table.
In the linear motor, four coils are arranged in 2 rows and 2 columns so as to face the magnet, and a supporting means for moving the magnet or the four coils is provided to make the structure simple and to provide four coils. The magnets or the four coils can be moved to a desired position on the plane by combining the directions of the currents flowing in the coils, and the miniaturization and the responsiveness can be improved.

[Conventional technology]

Conventionally, as shown in FIG. 5, an XY linear motor suitable for use in an XY table has been proposed.

The XY linear motor shown in FIG. 5 uses two linear motors (1) and (3), and the movable table (2) of one linear motor (1) has the other linear motor (3) in the longitudinal direction. The linear motor (1) is fixed so as to be orthogonal to the longitudinal direction. Incidentally, (4) is a movable table of the other linear motor (3).

In this case, one linear motor (1) is shown in FIGS.
As shown in the figure, a casing (5) having a cross-sectional shape and slidably attached to the upper opening (6) of the casing (5) in the longitudinal direction of the casing, that is, in the directions of arrows a and b shown in FIG. (10) having the movable table (2) described above, a center yoke (7) and side yokes (8) and (9) provided in the housing (5), and a side of the yoke (10). Magnets (11) and (1) are arranged on the yokes (8) and (9) so that the N poles face each other with the center yoke (7) interposed therebetween.
2) and a coil (13) fixed to the movable table (2) and movably wound around the center yoke (7). In the one linear motor (1) configured in this way, a force F according to the so-called Fleming's left-hand rule is generated by passing, for example, a clockwise current through the coil (13), and according to the coil (13). The movable table (2) can be driven by its force F in the direction of arrow a shown in FIG. Also coil (1
By changing the direction of the current flowing in 3) to the opposite direction,
It can be moved in the direction of the arrow b shown in the figure. The other linear motor (3) has the same structure as the one linear motor (1), and its movable table (4).
Can be moved in the directions of arrows e and f.

Such one and the other linear motors (1) and (3)
In the conventional XY linear motor configured by, when moving the center of the movable table (4) of the other linear motor (3) to the desired position (x, y) on the XY plane, first, As shown in the figure, the origin of the XY plane (0,
0) so that the center of one linear motor (1) is aligned with the center of the movable table (2) of one linear motor (1) is X.
It is possible to move on the axis in the directions of arrows a and b. In this case, the other linear motor (3) is fixed to the movable table (2) of the one linear motor (1) so as to be perpendicular to its longitudinal direction and the longitudinal direction of the one linear motor (1). The movable table (4) of the linear motor (3) is moved in a direction parallel to the Y axis, that is, arrows e and f.
Can be moved in the direction of. Therefore, move the movable table (2) of one linear motor (1) on the X axis (x, 0).
It is possible to move the movable table (4) of the other linear motor (3) in parallel with the Y-axis and move it to a desired position (x, y) while moving the movable table (4) to the position (4).

[Problems to be solved by the invention]

However, in such a conventional XY linear motor, since two linear motors (1) and (3) are used, the structure is complicated and the size cannot be reduced. Further, one linear motor (1) has to drive the other linear motor (3), and the load is large, so that there is a disadvantage that there is no responsiveness.

SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide an XY linear motor which has a simple structure, can be downsized, and can obtain a quick response.

[Means for solving problems]

As shown in FIGS. 1 and 2, the XY linear motor according to the present invention has four coils (21) (22) (23) (24) arranged in 2 rows and 2 columns facing the magnet (20). Magnet (20) or four coils (21) (22) (23)
Supporting means (25) (26a) (2
6b) (27a) (27b) (28) are provided.

[Action]

According to the present invention, the four coils (21), (22), (23) and (24) are arranged in 2 rows and 2 columns so as to face the magnet (20). The magnetic flux links the four coils (21) (22) (23) (24). Therefore, the magnet (20) and the four coils (21) (22) are generated by passing an electric current through the four coils (21) (22) (23) (24).
(23) (24) thrust in the plane direction is generated. In this case,
The direction of the thrust can be changed by changing the direction of the current flowing through the four coils (21) (22) (23) (24). And in the present invention, a magnet (20)
Alternatively, the supporting means (25) (26a) (26b) (27a) (27) which can move the four coils (21) (22) (23) (24)
b) (28) is provided, so coils (21) (22)
Magnets (20) or four coils (21) (22) by thrust generated by applying a predetermined current to (23) (24)
(23) (24) can be moved to a desired position on the plane.

〔Example〕

An embodiment of the XY linear motor of the present invention will be described below with reference to FIGS.

In FIG. 1, (25) shows an iron coil fixing member, and the first, second, third and fourth yokes (29) (30) of the same shape are formed on the coil fixing member (25). Arrange (31) and (32) in 2 rows and 2 columns. In this case, the first, second, third and fourth yokes (29) (30) (31)
The heads (29a) (30a) (31a) and (32a) of (32) and (32) are made square and the trunks (29b) (30b) (31b) and (3
Make 2b) cylindrical. Also in this case the yoke (29)
Head (29a) (30a) (31a) (32) of (30) (31) (32)
A space should be provided to prevent leakage flux between a).

The first, second, third and fourth yokes (29) (30)
First, second, third and fourth coils (21), (22) and (23) having the same winding direction and the same number of turns for (31) and (32), respectively.
And (24).

In addition, the guide roller support shaft (26
a) (26b) are provided, and the guide roller support shafts (26a) (2
6b) is provided with guide rollers (27a) and (27b) so that the guide rollers (27a) and (27b) can rotate in the directions of arrows g and h and slide in the directions of arrows j and k. .

A movable table (28) made of iron is arranged on the guide rollers (27a) (27b), and the N pole and the S pole are magnetized in the thickness direction at the center of the lower surface of the movable table (28) and the length of one side. l
Is a square plate magnet (20) having a larger center distance t than the yokes (29) (30) (31) (32).
Fix it so that the side facing (30), (31) and (32) becomes the N pole. In this case, the plate magnet (20) and the yoke (29)
Even if the plate magnet (20) moves by making the gap between (30), (31) and (32) as narrow as possible, it can be considered that the magnetic flux density B due to the plate magnet (20) in this gap does not change. Like

In the XY linear motor of this example configured as described above, as shown in FIG. 2, from the N pole of the plate magnet (20) to the yokes (29) (30) (31) (32), for fixing the coil. A loop of magnetic flux passing through the member (25) and the movable table (28) and returning to the S pole of the plate magnet (20) is formed.

Therefore, in this example, the XY plane displayed by the X axis and the Y axis is set as shown in FIG. 3, and the center point P of the plate-shaped magnet (20) is on this XY plane (x, y). The respective magnetic fluxes φ ₁ , φ ₂ , φ ₃ and φ ₄ passing through the respective yokes (29), (30), (31) and (32) when in the position are applied to the plate magnet (20) and the yoke (29). When the magnetic flux density in the gap between (30), (31) and (32) is calculated as B, Becomes

Therefore, each of the yokes (29) (30) (31) and (3
2) Amount of change of magnetic fluxes φ ₁ , φ ₂ , φ ₃ and φ ₄ passing through x, y And ask Becomes

Thus, the magnetic fluxes φ ₁ , φ ₂ , φ ₃ and φ ₄ passing through the respective yokes (29), (30), (31) and (32) have gradients in the x and y directions. Since there is a coil (21) (22) (23) and (2
When a current i ₁ , i ₂ , i ₃ , i ₄ is applied to 4), the plate magnet (20)
Is the thrust force F ₁ x, F ₁ y, F ₂ x, F ₂ from the respective coils (21) (22) (23) and (24) in the X-axis direction and the Y-axis direction as shown in the following equation.
Receive y, F ₃ x, F ₃ y, F ₄ x, F ₄ y. In the following equation, N is the number of turns of each coil (21) (22) (23) and (24).

Here, the plate-like magnet (25) has its respective coil (21) (2
2) Obtaining the total thrust Fx in the X-axis direction and the total thrust Fy in the Y-axis direction received from (23) and (24), Becomes

Therefore, the absolute values of the currents i ₁ , i ₂ , i ₃ , i ₄ flowing through the coils (21) (22) (23) (24) are equal, that is, | i ₁ | = | i ₂ | = | i ₃
| = | I ₄ | = i [A], in FIG. 3, the current is set to be positive in the clockwise direction and negative in the counterclockwise direction, i ₁ , i ₂ , i ₃ Then, the magnitude and direction of the thrust force F when the current directions of i ₄ and i ₄ are changed will be obtained.

First, when i ₁ = -i, i ₂ = i, i ₃ = -i, i ₄ = i, the equations (1) and (2) are Therefore, since the plate magnet (20) only receives a positive thrust force parallel to the X axis, the plate magnet (20) moves in the positive direction parallel to the X axis.

When i ₁ = i, i ₂ = −i, i ₃ = i, i ₄ = −i, equations (1) and (2) are Therefore, since the plate magnet (20) only receives a negative thrust force parallel to the X axis, the plate magnet (20) moves in the negative direction parallel to the X axis.

When i ₁ = i, i ₂ = i, i ₃ = −i, i ₄ = −i, the equations (1) and (2) are Therefore, since the plate magnet (20) only receives a positive thrust force parallel to the Y axis, the plate magnet (20) moves in the positive direction parallel to the Y axis.

When i ₁ = −i, i ₂ = −i, i ₃ = i, i ₄ = i,
Equations (1) and (2) are Therefore, since the plate magnet (20) only receives a negative thrust force parallel to the Y axis, the plate magnet (20) moves in the negative direction parallel to the Y axis.

Thus, in this example, four coils (21) (2
2) By combining the directions of the currents flowing through (23) and (24), the plate magnet (20) can be moved in the X-axis direction and the Y-axis regardless of the position of the plate magnet (20) on the XY plane. Since it can be moved in any direction, it can be applied to an XY table or the like.

The diagram shown in FIG. 4 shows the above-mentioned coils (21) (22).
(23) Direction of current i flowing in (24) and plate magnet (2
This is a summary of the relationship between the magnitude and direction of the thrust that 0) receives.

According to this embodiment, the coils (21) (2) are attached to the yokes (29) (30) (31) (32) arranged on the coil fixing member (25).
2) (23) (24) is installed, the plate-like magnet (20) is arranged on the movable table (28), and the coils (21) (22) (23)
Since the movable table (28) can be moved to a desired position by combining the directions of the currents flowing through (24), an XY linear motor with an extremely simple structure can be obtained and at the same time downsizing can be achieved. Have a profit

Further, one linear motor (1) as shown in FIG.
Since it is not necessary to move the other linear motor (3) with, the load on the movable table (2
8) There is a benefit of being able to move.

Incidentally, in the above-mentioned embodiment, the yokes (29) (30) (31)
Although the case where (32) is used has been described, the present invention is not limited to the above-mentioned embodiment, but can be applied to a case where the yokes (29) (30) (31) (32) are not used. It can be easily understood that the same effect can be obtained.

In this example, the plate magnet (20) is arranged on the movable table (28) and the coils (21) (22) (23) (24) are arranged on the coil fixing member (25). However, instead of this, the coil (21) is attached to the movable table (28).
(22), (23) and (24) may be arranged, and the plate-shaped magnet (20) may be arranged on the coil fixing member (25). In this case as well, it is easy to obtain the same effect as the above. You can understand.

Further, the present invention is not limited to the above-mentioned embodiments, and it goes without saying that various other configurations can be adopted without departing from the gist of the present invention.

〔The invention's effect〕

According to the present invention, the four coils are arranged in two rows and two columns facing the magnet, and the magnet or the supporting means for moving the four coils is provided, and the current flowing through the four coils is provided. The magnets or the four coils are moved to a desired position on the plane by combining the directions of, so that the structure can be simplified, the size can be reduced, and the responsiveness can be improved. Have a profit

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of an XY linear motor of the present invention, FIG. 2 is a sectional view taken along the line AA ′ of FIG. 1, and FIGS. 3 and 4 are lines used for explaining the present invention. Figures and 5 show conventional X
-A perspective view showing the Y linear motor, Fig. 6 is a B- of Fig. 5
FIG. 7 is a sectional view taken along the line B ', FIG. 7 is a sectional view taken along the line CC' of FIG. 6, and FIG. 8 is a diagram used for explaining the example of FIG. (20) is a plate magnet, (21) (22) (23) and (2
4) is a coil, (25) is a coil fixing member, (26a)
And (26b) are guide roller support shafts, (27a) and (27b) are guide rollers, and (28) is a movable table.
(29), (30), (31) and (32) are yokes, respectively.

Claims (1)

[Claims] 1. A magnetic closed circuit composed of four coils wound around a yoke so as to face one magnet and arranged in two columns and two rows along one plane; 1
X-Y linear motor having: a magnet, or a support means for supporting the four magnetic closed circuits so as to be movable in parallel to the one plane.