JP2016019315A - Linear motor, and drive system employing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problems that the physical constitution of a linear motor is enlarged and the number of components is increased.SOLUTION: In the linear motor, an armature 100 including a core 101 formed from a magnetic substance and a coil 102 and a magnet array 200 in which a plurality of permanent magnets 201 opposite to the armature 100 are arranged, are relatively moved. A length of relative movement of the armature 100 and the magnet array 200 is shorter than a length of a magnet opposing portion in the armature 100 in the direction of the relative movement of the armature 100 and the magnet array 200 and a length of the magnet array 200 in the direction of the relative movement of the armature 100 and the magnet array 200.SELECTED DRAWING: Figure 3

Description

The present invention relates to a linear motor and a driving system thereof, and more particularly to a linear motor suitable for generating a thrust force for moving horizontally between a permanent magnet array and an armature and a driving system thereof.

  As a background art in this technical field, there is (Patent Document 1). In this publication, “a hollow case 13 of a cylindrical body C having a plurality of armature coils 12 arranged so as to be relatively movable on the outer peripheral side of a shaft-shaped body S having an elongated rod-shaped field magnet 11 is described as a nonmagnetic material. By attaching a plurality of armature coils 12 to the hollow case 13 without interposing a magnetic yoke, the ripple of thrust is kept small while almost no cogging is generated during energization driving, and the shaft shape is reduced. Even when the magnetic holding member 14 that attracts the field magnet 11 of the body S and holds it in an appropriate position is provided in the cylindrical body C and the linear motor is set in a vertical state, the shaft-shaped body S and the cylindrical body are also provided. C is maintained in a stopped state to prevent detachment. "

Moreover, there exists (patent document 2). In this publication, “the linear motor 20 has the armature portion as the stator 1 and the field portion as the mover 2 that moves linearly. The linear motor 20 is a guide rail connected to the shaft 7 of the mover 2. 11, a guide block 12 that supports the guide rail 11 so as to be movable in the axial direction with respect to the stator 1, a linear scale 13 provided on the guide rail 11 of the mover 2, and the linear scale 13. The position sensor 14 is provided. "

JP 2004-364399 A JP 2013-198204 A

However, in the linear motor of (Patent Document 1), a magnetic holding member is provided to hold the relative positions of the shaft S (movable element) and the cylindrical body C (stator). Therefore, there are problems that the size of the linear motor is increased and the number of parts is increased. Furthermore, in the linear motor of (Patent Document 2), the linear scale provided on the guide rail of the mover is opposed to the linear scale in order to prevent position detection failure due to the straightness and warpage of the linear motor shaft. A position sensor arranged. Therefore, there are problems that the size of the linear motor is increased and the number of parts is increased.

  In order to solve the above-described problems, the present invention is directed to a magnet in which a plurality of permanent magnets arranged side by side with an armature composed of a core and a winding made of a magnetic material are arranged. In the linear motor in which the row moves relatively, the armature and the magnet row facing length Ls when the armature and the magnet row move relatively, and the armature and the magnet row are relative to each other. A value (Ls + La) obtained by adding the length La of the magnet facing portion of the armature in the direction of moving to the length of the magnet row in the direction in which the armature and the magnet row move relatively It is characterized by being larger than Lm (Ls + La> Lm).

  In order to solve the above problems, the present invention relates to an armature composed of a core made of a magnetic material and a winding, and a magnet array in which a plurality of permanent magnets opposed to the armature are arranged. In the linear motor, when the armature and the magnet row move relatively, the armature and the opposing length Ls of the magnet row, and the armature and the magnet row move in the relative direction. The length La of the magnet facing portion of the armature, the number N of the permanent magnets arranged in the direction in which the armature and the magnet row move relative to each other, and the pitch of the permanent magnets at Lp, Ls + La > N × Lp.

  In order to solve the above problems, the present invention relates to an armature composed of a core made of a magnetic material and a winding, and a magnet array in which a plurality of permanent magnets opposed to the armature are arranged. In the linear motor, when the armature and the magnet row move relatively, the armature and the opposing length Ls of the magnet row, and the armature and the magnet row move in the relative direction. The length La of the magnet facing portion of the armature and the length Lm of the magnet row in the direction in which the armature and the magnet row move relatively have a relationship of Ls = Lm + La. Is.

  In order to solve the above problems, the present invention relates to an armature composed of a core made of a magnetic material and a winding, and a magnet array in which a plurality of permanent magnets opposed to the armature are arranged. In the linear motor, when the armature and the magnet row move relatively, the armature and the opposing length Ls of the magnet row, and the armature and the magnet row move in the relative direction. The length La of the magnet facing portion of the armature, the number N of the permanent magnets arranged in the direction in which the armature and the magnet row move relatively, and the pitch of the permanent magnets at Lp, Ls = La + N It is characterized by being Lp.

  In order to solve the above problems, the present invention relates to an armature composed of a core made of a magnetic material and a winding, and a magnet array in which a plurality of permanent magnets opposed to the armature are arranged. In the linear motor, the characteristics of the magnets at the end of the magnet array are different from the characteristics of the magnet at the center of the magnet array.

  In order to solve the above problems, the present invention relates to an armature composed of a core made of a magnetic material and a winding, and a magnet array in which a plurality of permanent magnets opposed to the armature are arranged. In the linear motor, the magnetic pole directions of the magnets arranged in the direction in which the armature and the magnet row move relatively are different at the end of the magnet row.

  Furthermore, the present invention is characterized in that in the linear motor, at least two or more current phases are in the same direction in the direction in which the armature and the magnet row move relatively.

  Furthermore, the present invention is characterized in that the linear motor has at least two armatures in a direction in which the armature and the magnet row move relatively.

  Furthermore, the present invention is characterized in that in the linear motor, the armature is provided so as to sandwich the magnet row.

  Furthermore, the present invention is characterized in that in the linear motor, the armatures are connected by a core so as to sandwich the magnet row.

  Furthermore, the present invention is characterized in that in the linear motor, the position of the magnet row is maintained by using a magnetic force acting on the magnet row and the core of the armature.

  Furthermore, in the linear motor according to the present invention, a magnetic force acting on the core of the armature and the armature at an end portion of the relative length Ls of the armature and the armature is used. The magnet row position is maintained.

  Furthermore, in the linear motor according to the present invention, a magnetic force acting on the magnet array and the armature core is detected, and a relative positional relationship between the magnet array and the armature is estimated. Is.

  Furthermore, the present invention is characterized in that, in the linear motor, a relative driving force between the magnet array and the armature is attenuated by a magnetic force acting on the magnet array and the armature core. .

Furthermore, the present invention is to provide a drive system using the linear motor having the above-described configuration.

It is possible to provide a small linear motor and a drive system using the same without attaching a magnetic holding member and a position sensor.

It is a perspective view of a linear motor. It is the schematic diagram which cut off the linear motor of FIG. 1 in the YZ plane. It is a figure which shows the relative positional relationship example 1 of the armature and magnet row | line | column of a linear motor. It is a figure which shows the relative positional relationship example 2 of the armature and magnet row | line | column of a linear motor. It is a figure which shows the Example at the time of changing the residual magnetic flux density of a permanent magnet. It is a figure which shows the Example at the time of changing the magnetic flux direction of the edge part of a magnet row | line | column. It is a figure which shows the Example which has arrange | positioned the coil | winding which becomes in-phase in an armature. It is a figure which shows the Example which has arrange | positioned the coil | winding which becomes in-phase in an armature. It is a configuration example of a linear motor in which two armatures are arranged for one magnet row It is a figure which shows the structural example which pinched | interposed the magnet row | line | column with the armature. It is a figure which shows the structural example which pinched | interposed the magnet row | line | column with the armature. It is the Example which connected the armature which pinches | interposes a magnet row | line | column. It is a figure which shows the example of analysis of the force which arises by this invention.

  Embodiments of the present invention will be described below with reference to the drawings.

  An example of the linear motor of the present invention will be described. FIG. 1 is a perspective view of the linear motor of this embodiment. FIG. 2 shows a schematic view of the perspective view cut along the YZ plane. 1 and 2 show an example of a three-phase drive linear motor. The armature 100 includes a winding 102a, a winding 102b, a winding 102c, and a core 100. The magnet array 200 includes a permanent magnet 201 and a back plate 202. The core 100 and the back plate 202 are made of a magnetic material such as a silicon steel plate or SS400. The permanent magnet 201 may be a bonded magnet using rare earth, a sintered magnet, a ferrite magnet, or the like, but is not limited to these materials. The armature 100 and the magnet array 200 are relatively driven by the interaction between the magnetic flux generated by the winding of the armature 100 and the magnetic flux generated by the permanent magnet 201 of the magnet array 200. The armature 100 and the magnet array 200 are maintained at a distance in the Y-axis direction by a linear guide, a linear motion bearing, a cam follower, and a roller (not shown). In the magnet array 200, a plurality of permanent magnets 201 are arranged on a back plate 202 made of a magnetic material. A plurality of permanent magnets 201 are arranged in a direction in which the armature 100 and the magnet array 200 move relative to each other, and the magnetic pole directions 203 are alternately arranged between adjacent permanent magnets.

  Even when no current flows through the winding 102 of the armature 100, an attractive force is generated in the core 101 and the permanent magnet 201 made of a magnetic material in the core 101 of the armature 100 and the permanent magnet 201 of the magnet array 200. The attractive force acting on the core 101 of the armature 100 and the permanent magnet 201 of the magnet array 200 in the case of a three-phase linear motor will be described with reference to FIG. In the case of a three-phase motor, in general, when the pitch 504 of the permanent magnet 201 is set to an electrical angle of 180 °, the windings of each phase and the core facing the magnet are arranged to have a phase difference of 120 ° in electrical angle. The The cores 101a, 101b, and 101c around which the windings of the respective phases are wound are provided in the direction in which the armature 100 and the magnet array 200 move relative to each other. Here, when the armature length 502 is La, the moving length 503 in which the armature 100 and the magnet array 200 move relative to each other is Ls, and the length 501 of the portion of the magnet array 200 facing the armature 100 is Lm. When La + Ls> Lm, the armature 100 and the magnet array 200 have a core that does not face the permanent magnet 201a as shown in the lower part of FIG. That is, part or all of the armature 100 protrudes in the direction in which the armature 100 and the magnet array 200 move relative to the magnet array 200. The core 101a and the core 101b are at positions facing the permanent magnet 201a. On the other hand, the core 101c does not face the permanent magnet 201. When no current is passed through the winding 102, the Z-direction attractive force acting on the core 101 of the armature 100 is called a detent force and is designed to be small because it causes a pulsation of thrust generated when the current is passed. To do. In general, pulsating components generated in a three-phase core are offset by having a phase difference of 120 °. That is, if the pulsation component generated in the core of each phase varies, the detent increases. In the present invention, at the end of the relative movement between the armature 100 and the magnet array 200, the Z-direction attractive force generated in the core of each phase is unbalanced, and the force acting on the magnet array (detent force) is increased. . The relative position between the armature 100 and the magnet array 200 is held by this force. With this configuration, the armature 100 and the magnet array 200 can hold the positional relationship between the armature 100 and the magnet array 200 at the end of relative movement without providing additional parts such as a magnetic holding member.

  Further, when the number of permanent magnets 201 arranged in the direction in which the armature 100 and the magnet array 200 move relatively is N and the pitch 504 of the permanent magnets 201 is Lp, the length 502 of the armature is La, The movement length 503 in which the armature 100 and the magnet array 200 move relative to each other is set to a relationship of Ls + La> N × Lp with respect to Ls. As a result, the positional relationship between the armature 100 and the magnet array 200 is maintained at the end of the relative movement between the armature 100 and the magnet array 200 due to the unbalance of the force applied to the core 101 of each phase acting on the armature 100. It becomes possible.

  As a second embodiment, a configuration example of a small linear motor will be described. Of the linear motor of the present embodiment, the description of the components having the same functions as those of the configuration denoted by the same reference numerals as described in the first embodiment is omitted.

  The linear motor of the present embodiment will be described with reference to FIG. In the positional relationship between the electronic device 100 and the magnet array 200 shown in the upper part and the lower part of FIG. 4, as the distance between the electronic machine 100 and the magnet array 200 in the Z direction increases, the attractive force in the Z direction between the slave device 100 and the magnet array 200 decreases. Become. Further, as the distance between the electronic device 100 and the magnet array 200 in the Z direction increases, the thrust when returning the armature 100 to the position facing the magnet array 200 also decreases. Therefore, the opposing length Ls of the armature 100 and the magnet row 200 when the armature 100 and the magnet row 200 move relatively, and the armature 100 in the direction in which the armature 100 and the magnet row 200 move relatively. It is better that the length La of the magnet facing portion and the length Lm of the magnet row 200 in the direction in which the armature 100 and the magnet row 200 move relatively have a relationship of Ls = Lm + La.

  In addition, the armature 100 and the magnet array 200 are opposed to each other when the armature 100 and the magnet array 200 are opposed to each other. The armature 100 and the magnet array 200 are opposed to each other. When the length La of the magnet facing portion, the number N of permanent magnets 201 arranged in the direction in which the armature 100 and the magnet row 200 move relatively, and the pitch 504 of the permanent magnets 201 are Lp, Ls = It is preferable to satisfy La + N × Lp.

  As a third embodiment, a configuration example of a small linear motor will be described. Among the linear motors of the present embodiment, the description of the components having the same functions as those of the configurations denoted by the same reference numerals as those described in the first and second embodiments is omitted.

  The linear motor of the present embodiment will be described with reference to FIG. In this embodiment, by changing the residual magnetic flux density of the permanent magnet 201 at the end of the magnet row, the attractive force of each phase acting on the core of the armature is unbalanced, and the positional relationship between the armature 100 and the magnet row 200 is changed. It becomes possible to hold. The case where the residual magnetic flux density of the magnet 203a at the end in the Z direction of the magnet array 200 shown in FIG. 5 is increased will be described. Thereby, the attractive force (cogging force) in the Z direction is increased, and the positional relationship between the armature 100 and the magnet array 200 can be maintained. Although FIG. 5 shows the case where the magnetic flux density of the permanent magnets 203a at both ends of the magnet array 200 is increased, the present invention is not limited to this. By partially changing the residual magnetic flux density of the permanent magnet 201 in the magnet array 200, when the armature 100 is in a position facing the magnet array where the residual magnetic flux density changes, the attractive force of each phase becomes unbalanced, A force that maintains the positional relationship between the child 100 and the magnet array 200 works. Although FIG. 5 shows the case where the residual magnetic flux density of each of the permanent magnets at both ends of the magnet array 200 is increased, it is not limited to this number. Further, it is possible to reduce the residual magnetic flux density of the permanent magnet and cause imbalance.

  FIG. 6 shows a modification of this embodiment. An embodiment in which the direction of the magnetic pole of the permanent magnet on the left side of the magnet array 200 of FIG. 6 is changed will be described. 203a shows a configuration in which the residual magnetic flux density of the permanent magnet is increased and aligned with the magnetic pole direction 203b of the adjacent permanent magnet. As described above, in the permanent magnet at the end of the magnet row 200, an imbalance is also generated by changing the direction of the magnetic poles, and a force for maintaining the positional relationship between the armature 100 and the magnet row 200 acts. It is also possible to simultaneously change the residual magnetic flux density of the permanent magnet and change the direction of the magnetic pole.

  As Example 4, a configuration example of a small linear motor will be described. Among the linear motors of the present embodiment, the description of the components having the same functions as the configurations denoted by the same reference numerals as those described in the first to third embodiments is omitted.

  The linear motor according to the embodiment will be described with reference to FIGS. FIG. 7 shows a perspective view of the linear motor, and FIG. 8 shows a configuration example in which the linear motor is cut along the YZ plane. FIG. 7 shows the core arrangement of the linear motor of the present invention arranged in the same phase with adjacent cores. The armatures 100a, 100b, and 100c are connected by parts (not shown). The U phase, V phase, and W phase are each 120 ° out of phase. U + and U− indicate that the phase is shifted by 180 °. When the phase difference is 180 °, it can be driven with the current of the same phase by changing the direction of the winding. For example, if the winding 102a is wound clockwise, the phase difference can be 180 ° with the same current by winding the winding 102b counterclockwise. As described above, the permanent magnet 201 and the armatures 100a, 100b, 100c, and 100c are disposed side by side with the windings having the same phase in the direction in which the magnet array 200 relatively moves (Z direction). The facing range of 100c is widened, and the thrust when returning the armatures 100a, 100b, 100c to the position facing the magnet array 200 can be increased.

  As a fifth embodiment, a configuration example of a small linear motor will be described. Among the linear motors of the present embodiment, the description of the components having the same functions as those of the configurations denoted by the same reference numerals as those described in the first to fourth embodiments is omitted.

  The linear motor according to the embodiment will be described with reference to FIGS. 9 and 10. 9 and 10 show YZ sectional views of the linear motor. In this configuration, the armature 100a and the armature 100b are provided side by side in the direction in which the armatures 100a and 100b and the magnet array 200 relatively move (Z direction). The armatures 100a and 100b are connected by components (not shown), and the armatures 100a and 100b are integrally driven relative to the magnet array 200. For example, when the armature 100b is in the position shown in the lower part of FIG. 8, the armature of the armature 100b holds the positional relationship between the armature and the magnet array 200, and the thrust when the armature is driven is the armature 100a. Can be generated by. There are at least two armatures, and one armature may be driven independently. For example, as long as the armature 100a and the armature 100b shown in FIGS. 9 and 10 can operate as a linear motor alone, the armature 100a and the armature 100b may be integrated to form an armature. That is, it is only necessary that a part of the armature can operate as a linear motor.

  As a sixth embodiment, a configuration example of a small linear motor will be described. Among the linear motors of the present embodiment, the description of the components having the same functions as those of the configurations denoted by the same reference numerals as those described in the first to fifth embodiments is omitted.

  The linear motor of the embodiment will be described with reference to FIGS. 10 and 11. For example, as described with reference to FIGS. 3 and 5, when an attempt is made to maintain the positional relationship between the armature and the magnet array by causing an imbalance between the attractive force of the permanent magnet and the core, the Z direction in FIGS. And a force component in the Y direction are generated. Since the force component in the Y direction is generated by the attraction force between the permanent magnet and the core, when the core is present or absent, when the residual magnetic flux density of the permanent magnet is changed, that is, the axis penetrating the paper surface of FIGS. 3 and 5 ( A moment is generated around the X axis (not shown). In order to reduce this moment force to a low level, a structure in which a permanent magnet is sandwiched between armatures is still preferable.

  10 and 11 show a linear motor having a structure in which a permanent magnet is sandwiched between armatures. In the linear motor shown in FIGS. 10 and 11, the magnet array 200 includes a permanent magnet 201 and a permanent magnet holder 204. The permanent magnet holder 204 is preferably a non-magnetic material in order to reduce the magnetic flux leakage of the magnet. However, the magnetic material makes use of the magnetic flux produced by the armature and the attractive force of the permanent magnet holder made of the magnetic material. It is also possible. The magnet array 200 is sandwiched between the upper armature 100a and the lower armature 100b, thereby canceling the Y-direction force generated in the upper armature 100a and the Y-direction force generated in the lower armature 100b. become.

  FIG. 12 shows an application example. FIG. 12 shows a configuration in which an upper armature and a lower armature are connected by a core 101f. The core 101f not only holds the upper armature and the lower armature, but also plays a role of a magnetic path that connects the upper and lower armatures. Is also preferable.

  As Example 7, an analysis example of the force acting on the linear motor of the present invention will be described.

  FIG. 13 shows the forces acting on the armature and the magnet array confirmed by the analysis. The positional relationship between the armature 100 and the magnet row 200 at the relative position A and the positional relationship between the armature 100 and the magnet row 200 at the relative position B are shown in the upper part of FIG. The horizontal axis of the graph represents a value obtained by dividing the distance between the reference points of the armature 100 and the magnet array 200 by the magnet pitch Lp. Therefore, when the position of a certain reference point is set to 0 and the armature 100 and the magnet array 200 are relatively moved by the magnet pitch Lp, the horizontal axis is 1. In general, in a three-phase linear motor, if the pulsation components of the armatures and permanent magnets of each phase are sinusoidal, the combined force is almost zero, but in reality it does not become zero because it contains higher-order pulsation components. In the section from the relative position A to the relative position B, since the permanent magnets of the magnet array 200 are opposed to the armature 100, the pulsation component is small. However, in the portion from the relative position A to the left and from the relative position B to the right, there is a core where the permanent magnets of the magnet array 200 do not face the armature 100, and the pulsation component becomes large. By utilizing this pulsating component, the relative position of the magnet array 200 with respect to the armature 100 can be maintained. For example, when the magnet array 200 is moving relative to the armature 100 at a constant speed, the pulsation component increases when entering the portion from the relative position A to the left and from the relative position B to the right. Therefore, the current flowing through the windings necessary for the increase. By detecting this increasing current, it is possible to detect the relative position of the magnet array 200 with respect to the armature 100. Further, when entering the portion from the relative position A to the left and from the relative position B to the right, a force is generated to prevent the movement due to an increase in the pulsation component. Therefore, it is possible to act as a damping mechanism by designing this force large. It becomes possible.

The embodiments of the present invention have been described with reference to the drawings. The present invention can realize the maintenance of the positional relationship between the armature and the magnet row and the relative positional relationship between the armature and the magnet row only with the armature and the magnet row of the linear motor.

100, 100a, 100b, 100c Armature 101, 101a, 101b, 101c, 101d, 101e, 101f, 101g, 101f Core 102, 102a, 102b, 102c, 102d, 102e, 102f Winding 200 Magnet array 201, 201a Magnet 202 Back plate 203, 203a, 203b, 203c Direction of magnetic pole of permanent magnet 204 Permanent magnet holder 501 Length of magnet row facing armature 502 Length of armature 503 Relative moving length of armature and magnet row 504 Permanent magnet pitch

Claims (15)

An armature composed of a magnetic core and windings;
In a linear motor in which a magnet array in which a plurality of permanent magnets facing the armature are arranged relatively moves,
Opposing length Ls of the armature and the magnet row when the armature and the magnet row move relatively,
A value (Ls + La) obtained by adding the length La of the magnet facing portion of the armature in the direction in which the armature and the magnet row move relatively,
A linear motor characterized by being larger than a length Lm of the magnet row in a direction in which the armature and the magnet row move relatively (Ls + La> Lm). An armature composed of a magnetic core and windings;
In a linear motor in which a magnet array in which a plurality of permanent magnets facing the armature are arranged relatively moves,
Opposing length Ls of the armature and the magnet row when the armature and the magnet row move relatively,
A length La of a magnet facing portion of the armature in a direction in which the armature and the magnet row move relatively;
The number N of the permanent magnets arranged in the direction in which the armature and the magnet row move relatively,
A linear motor characterized in that Ls + La> N × Lp when the pitch of the permanent magnet is Lp. An armature composed of a magnetic core and windings;
In a linear motor in which a magnet array in which a plurality of permanent magnets facing the armature are arranged relatively moves,
Opposing length Ls of the armature and the magnet row when the armature and the magnet row move relatively,
A length La of a magnet facing portion of the armature in a direction in which the armature and the magnet row move relatively;
The length Lm of the magnet row in the direction in which the armature and the magnet row move relatively,
A linear motor having a relationship of Ls = Lm + La. An armature composed of a magnetic core and windings;
In a linear motor in which a magnet array in which a plurality of permanent magnets facing the armature are arranged relatively moves,
Opposing length Ls of the armature and the magnet row when the armature and the magnet row move relatively,
A length La of a magnet facing portion of the armature in a direction in which the armature and the magnet row move relatively;
The number N of the permanent magnets arranged in the direction in which the armature and the magnet row move relatively,
A linear motor wherein Ls = La + N × Lp when the pitch of the permanent magnet is Lp. An armature composed of a magnetic core and windings;
In a linear motor in which a magnet array in which a plurality of permanent magnets facing the armature are arranged relatively moves,
The linear motor characterized in that the characteristics of the magnets at the end of the magnet array are different from the characteristics of the magnet at the center of the magnet array. An armature composed of a magnetic core and windings;
In a linear motor in which a magnet array in which a plurality of permanent magnets facing the armature are arranged relatively moves,
A linear motor characterized in that the magnetic pole directions of the magnets arranged in a direction in which the armature and the magnet array move relatively differ at the end of the magnet array. In one linear motor in any one of Claims 1-6,
A linear motor having a winding in which at least two or more current phases are in phase in a direction in which the armature and the magnet array move relative to each other. In one linear motor in any one of Claims 1-7,
A linear motor comprising at least two armatures in a direction in which the armature and the magnet row move relative to each other. In one linear motor in any one of Claims 1-8,
A linear motor comprising the armature so as to sandwich the magnet row. The linear motor according to claim 9, wherein
A linear motor characterized in that the armature is connected by a core so as to sandwich the magnet row. 11. The linear motor according to claim 1, wherein a position of the magnet row is maintained by using a magnetic force acting on the magnet row and the core of the armature. motor. In one linear motor in any one of Claims 1-10,
The position of the magnet row is held using a magnetic force acting on the core of the armature and the armature at the end of the length Ls of the armature and the magnet row that move relatively. Features a linear motor. In one linear motor in any one of Claims 1-10,
A linear motor characterized by detecting a magnetic force acting on the magnet array and the core of the armature and estimating a relative positional relationship between the magnet array and the armature. In one linear motor in any one of Claims 1-10,
A linear motor characterized in that a relative driving force between the magnet array and the armature is attenuated by a magnetic force acting on the magnet array and the core of the armature. A drive system using one of the linear motors according to claim 1.