JP6299392B2 - Table device - Google Patents

Description

  The present invention relates to a table apparatus that moves and aligns a table on which a workpiece is mounted.

  For table devices that are used in alignment devices, inspection devices, etc., and that move and align the table on which the workpiece is mounted, the table is placed in the X direction or in the XY direction orthogonal to the X table device or XY table device. There are some which move the table linearly and others which rotate the table in the θ direction like a θ table device. There are Xθ table devices and XYθ table devices that combine these linear movements and rotational movements. Usually, in the Xθ table device and the XYθ table device, the rotational movement mechanism is arranged above the linear movement mechanism.

  The θ table device (including the Xθ table device and the XYθ table device) that rotationally moves the table described above employs a rotary motor as a rotational movement mechanism, a rotor is provided on the moving side, and a stator is provided on the fixed side ( For example, refer to Patent Document 1) or at a position that is symmetric along the rotation direction, and at least one pair of primary-side magnetic flux generators is provided on either one of the fixed-side and moving-side facing surfaces, and each one is on the other side. A secondary side magnetic flux generation unit opposite to the secondary side magnetic flux generation unit is provided, and the moving side is rotated and moved by the magnetic force generated by the magnetic flux passing between the pair of primary side magnetic flux generation units and the secondary side magnetic flux generation unit (for example, Patent Document 2).

  The table devices described in Patent Documents 1 and 2 are all XYθ table devices. Patent Document 1 describes a mounting unit that sequentially stacks a Y table and an X table on a base, fixes a rotary motor in the center hole of the uppermost X table, and rotates and moves the rotor of the rotary motor. It is said.

  The one described in Patent Document 2 is a pair of primary or two pairs of primary coils in which a coil is wound around a magnet unit in which a permanent magnet is provided on a lower base at a position that is symmetric along the rotation direction. A side magnetic flux generation unit is provided, and a secondary side magnetic flux generation unit as a salient pole made of an iron core facing each primary side magnetic flux generation unit is provided on the upper table so that the table is rotated relative to the base. I have to. The linear movement of the table in the X and Y directions is also performed by the primary side magnetic flux generator and the secondary side magnetic flux generator provided opposite to the base and the table.

  Many table devices used in alignment devices and the like require only a few degrees of rotation angle for rotational movement.

Japanese Patent No. 4175135 JP 2013-4898 A

  Although the rotational movement mechanism of the table apparatus described in Patent Document 1 can obtain a large rotation angle, there is a problem that the height dimension of the table apparatus cannot be designed compactly because the axial dimension of the rotary motor becomes long. .

  The rotational movement mechanism of the table apparatus described in Patent Document 2 can design the height dimension of the table apparatus in a compact manner. Further, since the rotation cannot be performed when the primary side magnetic flux generation unit and the secondary side magnetic flux generation unit are not opposed to each other, the rotation angle that can be rotationally moved is small, but the above-described alignment device that does not require a large rotation angle. It can be applied to a table device such as.

  However, in the rotational movement mechanism described in Patent Document 2, one primary-side magnetic flux generator is formed by winding a coil around one magnet unit, and the secondary-side magnetic flux generator is opposed to this. Is formed by one salient pole, so that the magnetic flux generated between the primary magnetic flux generator and the secondary magnetic flux generator so as to rotate the table when the coil of the primary magnetic flux generator is energized. It is necessary to form a closed loop of the magnetic flux by detouring to a place different from these opposed places. For this reason, in order to divert magnetic flux to another place, it is necessary to form a table and a base with heavy magnetic materials, such as iron which lets magnetic flux pass. Therefore, the weight of the table on the rotational movement side is particularly heavy, and there is a problem that a large magnetic force is required for rotational driving. Moreover, the weight of the whole table apparatus also becomes heavy. Furthermore, in the case of a table configuration in which X tables and Y tables that move linearly downward are stacked like the table device described in Patent Document 1 and the like, the driving force for linearly moving these lower tables also has a driving force. It needs to be bigger.

  Accordingly, an object of the present invention is to provide a rotational movement mechanism that makes the primary side magnetic flux generation unit and the secondary side magnetic flux generation unit face each other. The table and base provided with the primary side and secondary side magnetic flux generation units are light non-magnetic. It is to be made of material.

  In order to solve the above-described problems, the present invention provides a base, a table opposed to the base and supported so as to be rotatable in a plane parallel to the base, and an opposed surface of the base and the table. At least one pair of primary-side magnetic flux generators provided at a position symmetrical to the rotation center of the table, and at least one pair of primary-side magnetic fluxes on the other of the opposing surfaces. A secondary-side magnetic flux generator provided so as to face the part, and rotating the table around the rotation center, wherein the primary-side magnetic flux generator is arranged along the rotational movement direction. A coil is wound around each of at least two magnet units in which at least one set of permanent magnets having different magnetic pole orientations is arranged, and the at least two magnet units are connected to the permanent magnets. Each of the salient poles formed by at least two iron cores facing each of the magnet units is assumed to be connected to each other by a magnetic material so that the arrangement of the poles is opposite to each other. The structure which connected with the magnetic body was adopted.

  That is, a coil is wound around at least two magnet units provided with at least one set of permanent magnets in which the primary magnetic flux generation unit has different magnetic pole directions along the rotational movement direction, and at least two magnets The units are connected to each other with a magnetic material so that the arrangement of the magnetic poles of the permanent magnets are opposite to each other, and the secondary magnetic flux generator is formed of at least two iron cores facing each magnet unit. When each salient pole is connected with a magnetic material, it is generated between the salient poles and at least two magnet units facing each other so as to rotate the table when energizing each coil of the primary side magnetic flux generator. The magnetic flux passes through the magnetic bodies that connect the magnet units and the salient poles to form a closed loop, and the table and the base provided with the primary and secondary magnetic flux generators are provided. The scan was to be formed in a lightweight nonmagnetic material.

  Examples of the non-magnetic material include light metals such as aluminum and titanium, alloys thereof, various plastics and reinforcing materials thereof, and the like. In addition, although not lightweight, austenitic stainless steel etc. are mentioned.

  By connecting the at least two magnet units and the salient poles in the arc direction along the rotation direction of the table, the overlapping margin of the facing surfaces of the magnet units and salient poles does not decrease even if they are rotated. In addition, the driving torque for rotating the table can be increased by directing the magnetic force generated by the magnetic flux passing between the magnet unit and the salient pole in the arc direction along the rotation direction.

  By providing a linear movement mechanism that linearly moves the base in a plane parallel to the table, the base and the table can be reduced in weight, and the driving force of the linear movement mechanism can be reduced.

  In the table device according to the present invention, a coil is wound around at least two magnet units each provided with at least one set of permanent magnets in which the primary magnetic flux generation unit has different magnetic pole directions along the rotational movement direction. And at least two magnet units are connected by a magnetic material next to each other so that the arrangement of the magnetic pole directions of the permanent magnets is opposite to each other, and the secondary-side magnetic flux generator is at least opposed to each magnet unit. Since each salient pole formed by two iron cores is connected by a magnetic body, when energized to each coil of the primary side magnetic flux generator, the salient pole and at least two magnet units opposed to rotate the table are projected. Magnetic flux generated between the poles passes through the magnetic bodies connecting these magnet units and salient poles to form a closed loop, so that primary and secondary magnetic flux generators are provided. Tables and base can be formed in a lightweight nonmagnetic material such as aluminum. Therefore, the driving force of the rotary movement mechanism of the table can be reduced. In addition, the entire table device can be reduced in weight.

FIG. 3 is an external perspective view showing the table device of the first embodiment. 1 is a perspective view showing a pair of primary-side magnetic flux generator and secondary-side magnetic flux generator in FIG. (A), (b), (c) is a side view for explaining the magnetic flux generated when the coil of FIG. 2 is not energized and when energized, respectively. (A), (b), (c) is a top view which shows the rotational movement form of the secondary side magnetic flux generation part at the time of the non-energization to the coil of FIG. The top view which shows the modification of the planar shape of the primary side magnetic flux generation part of FIG. 4, and a secondary side magnetic flux generation part FIG. 5 is a perspective view showing a pair of opposed primary side magnetic flux generation units and secondary side magnetic flux generation units in FIG. 5. (A), (b), (c) is a side view which shows the modification of the primary side magnetic flux generation part of FIG. 3, and a secondary side magnetic flux generation part, respectively. External appearance perspective view which shows the table apparatus of 2nd Embodiment. External appearance perspective view which shows the table apparatus of 3rd Embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 to 4 show a first embodiment. As shown in FIG. 1, this table device has a rectangular plate-like base 1 on a fixed side and a moving side supported so as to be rotatable in a plane parallel to the base 1 so as to face the upper side of the base 1. A rectangular plate-like table 2, a pair of primary-side magnetic flux generators 10 provided on the base 1 at positions symmetrical with respect to the rotation center of the table 2, and each primary-side magnetic flux generator 10 on the table 2. And a secondary-side magnetic flux generator 20 provided so as to oppose to each other. The base 1 and the table 2 are made of aluminum as a lightweight nonmagnetic material. Only the table 2 may be formed of a nonmagnetic material.

  The table 2 is supported at the center of the base 1 by a bearing 3 so as to be rotatable. The table 2 may be supported by another means such as an air bearing. In addition, the pair of primary-side magnetic flux generation units 10 and secondary-side magnetic flux generation units 20 are provided in the vicinity of a pair of side portions on which the base 1 and the table 2 face each other.

  As shown in FIG. 2, the primary-side magnetic flux generator 10 provided on the fixed-side base 1 has a set of permanent magnets with the magnetic poles vertically opposite to each other on the upper surface of a rectangular columnar iron core 11. 12 are arranged in the rotational movement direction of the table 2, two magnet units 13a and 13b, coils 14a and 14b wound around the iron core 11 of each magnet unit 13a and 13b, and each magnet unit 13a and 13b. And a magnetic body 15 for connecting the iron core portion 11 on the base side. The magnetic body 15 is formed in a rectangular plate shape, and two magnet units 13 a and 13 b are connected in a direction along the side of the base 1 and are fitted into holes provided in the vicinity of the side of the base 1.

  Further, the secondary magnetic flux generator 20 provided on the moving table 2 includes salient poles 21a and 21b formed by two iron cores facing the two magnet units 13a and 13b, and the salient poles 21a, It consists of the magnetic body 22 which connects 21b by the base side. Each salient pole 21a, 21b has a rectangular parallelepiped shape extending in a direction along the boundary of a pair of permanent magnets 12 of each magnet unit 13a, 13b. The magnetic body 22 is also formed in a rectangular plate shape, and the two salient poles 21 a and 21 b are connected in a direction along the side of the table 2 and are fitted into holes provided in the vicinity of the side of the table 2. Each of the magnetic bodies 15 and 22 may be formed integrally with the iron core that forms the salient poles 21a and 21b of the primary magnetic flux generator 10 and the secondary magnetic flux generator 20 respectively.

  Below, based on FIG. 3 (a), (b), (c), the form of the magnetic flux which generate | occur | produces at the time of the deenergization to each coil 14a, 14b of the said primary side magnetic flux generation part 10 and energization is demonstrated. . As shown in these drawings, in the adjacent left magnet unit 13a and right magnet unit 13b, the orientations of the N-pole and S-pole arrangements of one set of permanent magnets 12 are opposite to each other. That is, in the left magnet unit 13a, the N pole upward is on the right side, and the S pole is on the left side, and in the right magnet unit 13b, the N pole is on the left side and the S pole is on the left side. Things are on the right.

  FIG. 3A shows a state in which the coils 14a and 14b of the magnet units 13a and 13b are not energized. In this state, the magnetic flux m generated by the pair of permanent magnets 12 of the magnet units 13 a and 13 b enters the salient poles 21 a and 21 b from the N pole of one permanent magnet 12 and returns to the S pole of the other permanent magnet 12. . Therefore, each salient pole 21a, 21b stops at a neutral position that becomes a boundary portion of one set of permanent magnets 12 of each magnet unit 13a, 13b.

  FIGS. 3B and 3C show a state in which currents in opposite directions are applied to the coils 14a and 14b of the magnet units 13a and 13b, respectively. In the case of the current direction shown in FIG. 3B, an upward magnetic flux M is generated in the left magnet unit 13a and a downward magnetic flux M is generated in the right magnet unit 13b according to the right-handed screw law. For this reason, on the left side, the magnetic flux returning from the salient pole 21a to the S pole of the permanent magnet 12 is canceled, the magnetic flux entering the salient pole 21a from the N pole is strengthened, and the magnetic flux path L1 entering the salient pole 21a from the N pole is formed. Is done. On the other hand, on the right side, the magnetic flux entering the salient pole 21b from the N pole of the permanent magnet 12 is canceled, the magnetic flux returning from the salient pole 21b to the S pole is strengthened, and the magnetic flux path L2 returning from the salient pole 21b to the S pole is formed. The Therefore, the left salient pole 21a is attracted to the right permanent magnet 12 with the N pole of the magnet unit 13a facing upward, and the right salient pole 21b is the right permanent magnet with the S pole of the magnet unit 13b facing upward. The magnetic force F directed to the right acts on the secondary-side magnetic flux generator 20 on the moving side.

  In the case of the current direction of FIG. 3C, a downward magnetic flux M is generated in the left magnet unit 13a, and an upward magnetic flux M is generated in the right magnet unit 13b. Therefore, on the left side, a magnetic flux path L2 from the salient pole 21a to the S pole of the permanent magnet 12 of the magnet unit 13a is formed on the left side, and on the right side, the permanent magnet 12 of the magnet unit 13b has the same principle as in FIG. A magnetic flux path L1 that enters the salient pole 21b from the N pole is formed. Therefore, the left salient pole 21a is attracted to the left permanent magnet 12 with the S pole of the magnet unit 13a facing upward, and the right salient pole 21b is the left permanent magnet with the N pole of the magnet unit 13b facing upward. The left-side magnetic force F acts on the secondary side magnetic flux generator 20 on the moving side.

  The magnetic flux paths L1 and L2 form a closed loop L through the magnetic bodies 15 and 22, respectively. Therefore, since the closed loop L is formed without passing through the base 1 and the table 2, the base 1 and the table 2 can be formed of a nonmagnetic material as described above.

  Below, based on Fig.4 (a), (b), (c), it is a pair of 2 at the time of de-energization and energization to each coil 14a, 14b of the pair of primary side magnetic flux generation part 10 The rotational movement form of the secondary magnetic flux generator 20 will be described. In each of these figures, the directions of the N pole and S pole of the permanent magnet 12 in each magnet unit 13a, 13b of the pair of primary side magnetic flux generation units 10 are the same. In these drawings, the base 1, the table 2, and the magnetic body 22 of each secondary-side magnetic flux generator 20 are not shown for easy understanding.

  FIG. 4A shows a state in which the coils 14 a and 14 b of the pair of primary-side magnetic flux generators 10 are not energized. In this state, as described with reference to FIG. 3A, the salient poles 21a and 21b of the pair of secondary-side magnetic flux generators 20 are the boundary portions of the pair of permanent magnets 12 of the magnet units 13a and 13b. Stop at the neutral position. Therefore, the table 2 (not shown) does not rotate.

  In FIG. 4B, the coils 14a and 14b of the primary-side magnetic flux generator 10 on the right side are energized with the current I in the direction shown in FIG. 3B to generate the primary-side magnetic flux on the left side. The coils 14a and 14b of the unit 10 are shown in a state where the current I having the direction shown in FIG. Therefore, the upward magnetic force F in the figure (rightward in FIG. 3B) acts on the salient poles 21a and 21b of the secondary side magnetic flux generation unit 20 on the right side, and the secondary side magnetic flux generation unit on the left side. A magnetic force F is applied to each of the 20 salient poles 21a and 21b downward (leftward in FIG. 3C). Accordingly, the table 2 (not shown) rotates in the θ direction counterclockwise.

  In FIG. 4C, the coils 14a and 14b of the primary-side magnetic flux generation unit 10 on the right side are supplied with the current I in the direction shown in FIG. 3C to generate the primary-side magnetic flux on the left side. The coils 14a and 14b of the unit 10 are shown in a state where the current I having the direction shown in FIG. Accordingly, a magnetic force F downward (leftward in FIG. 3C) acts on the salient poles 21a and 21b of the secondary-side magnetic flux generator 20 on the right side, and the secondary-side magnetic flux generator on the left side. A magnetic force F upward (rightward in FIG. 3B) acts on the 20 salient poles 21a and 21b. Therefore, the table 2 (not shown) rotates in the clockwise direction in the θ direction.

  4A, 4 </ b> B, and 4 </ b> C, the magnetic poles of the N pole and the S pole of the pair of permanent magnets 12 in each of the magnet units 13 a and 13 b of the pair of primary magnetic flux generation units 10. Although the directions are the same as each other, these directions may be opposite to each other. In this case, the current supplied to the coils 14a and 14b of the primary-side magnetic flux generator 10 on the right and left sides shown in FIGS. 4B and 4C is the same as that shown in FIG. The orientations may be the same as shown in 3 (c).

  5 and 6 show a modification of the planar shape of the primary-side magnetic flux generator 10 and the secondary-side magnetic flux generator 20. In this modification, the magnetic body 15 of the primary-side magnetic flux generation unit 10 and the magnetic body 22 of the secondary-side magnetic flux generation unit 20 have a planar shape that is slightly bent in the plane. The magnet units 13a and 13b and the two salient poles 21a and 21b of the secondary-side magnetic flux generator 20 are connected by the magnetic bodies 15 and 22 in the arc direction along the rotation direction of the table 2, respectively. Therefore, even if the table 2 rotates, the overlap between the opposing surfaces of the magnet units 13a and 13b and the salient poles 21a and 21b does not decrease, and passes between the magnet units 13a and 13b and the salient poles 21a and 21b. Since the magnetic force generated by the magnetic flux is directed in the arc direction along the rotation direction, the driving torque for rotating the table 2 can be increased.

  7A, 7B, and 7C show modified examples of the primary-side magnetic flux generator 10 and the secondary-side magnetic flux generator 20 shown in FIG. 3, respectively. In the modification of FIG. 7A, three magnet units 13 a, 13 b, and 13 c are provided in the primary side magnetic flux generation unit 10, and three salient poles 21 a, 21 b that are opposed to these are provided in the secondary side magnetic flux generation unit 20. 21c is provided, and these three magnet units 13a, 13b, and 13c and salient poles 21a, 21b, and 21c are connected by magnetic bodies 15 and 22, respectively. Each magnet unit 13a, 13b, 13c is provided with a pair of permanent magnets 12 with the magnetic poles in opposite directions, and the adjacent magnet unit 13a and magnet unit 13b, and the magnet unit 13b and magnet unit 13c are one set. The arrangement of the magnetic pole directions of the permanent magnets 12 is opposite to each other.

  In the modification of FIG. 7A, for example, when a current is passed through each of the coils 14a, 14b, and 14c in the direction shown in the figure, the salient pole 21a enters the salient pole 21a from the N pole of the permanent magnet 12 of the magnet unit 13a. 22 enters the salient pole 21c from the closed loop L of the magnetic flux returning from the salient pole 21b to the S pole of the magnet unit 13b through the magnetic body 15, and returning to the magnet unit 13a through the magnetic body 15, and from the N pole of the magnet unit 13c. A closed loop L of magnetic flux is formed which returns from the salient pole 21b to the S pole of the magnet unit 13b through the magnetic body 15 and returns to the magnet unit 13c through the magnetic body 15. By these two closed loops L, a leftward magnetic force F acts on the secondary-side magnetic flux generator 20. Although illustration is omitted, a rightward magnetic force F acts if the direction of the current flowing through the coils 14a, 14b, 14c is reversed.

  7B, the primary side magnetic flux generator 10 and the secondary magnetic flux generator 20 are respectively provided with four opposing magnet units 13a, 13b, 13c, 13d and salient poles 21a, 21b, 21c and 21d are provided and these are connected by magnetic bodies 15 and 22, respectively. Also in this modified example, each magnet unit 13a, 13b, 13c, 13d is provided with a pair of permanent magnets 12 with the magnetic poles reversed, and adjacent magnet units 13a and 13b, magnet units 13b and magnets. In the unit 13c, and the magnet unit 13c and the magnet unit 13d, the magnetic poles of the pair of permanent magnets 12 are arranged in opposite directions.

  In the modification of FIG. 7B, for example, when a current is applied to each of the coils 14a, 14b, 14c, and 14d in the direction shown in the figure, the salient pole 21a is entered from the N pole of the permanent magnet 12 of the magnet unit 13a. The magnetic flux returns from the salient pole 21b to the S pole of the magnet unit 13b through the magnetic body 22, enters the salient pole 21c from the closed loop L of the magnetic flux that returns to the magnet unit 13a through the magnetic body 15, and the N pole of the magnet unit 13c. The magnetic flux returns to the S pole of the magnet unit 13b from the salient pole 21b through the body 22, enters the salient pole 21c from the closed loop L of the magnetic flux that returns to the magnet unit 13c through the magnetic body 15, and the N pole of the magnet unit 13c. 22, a closed loop L of magnetic flux returning from the salient pole 21d to the S pole of the magnet unit 13d through the magnetic pole 15 and returning to the magnet unit 13c through the magnetic body 15 is formed. By these three closed loops L, a leftward magnetic force F acts on the secondary-side magnetic flux generator 20. Although illustration is omitted, if the direction of the current applied to each of the coils 14a, 14b, 14c, and 14d is reversed, a rightward magnetic force F acts.

  7C, the two magnet units 13a and 13b of the primary-side magnetic flux generator 10 are provided with two sets of permanent magnets 12 with magnetic poles alternately reversed in the vertical direction. The magnetic flux generator 20 is provided with two sets of permanent magnets 12 of the two magnet units 13a and 13b, that is, four salient poles 21a, 21b, 21c, and 21d that face the four sets of permanent magnets 12, and two magnet units 13a. , 13b are connected by a magnetic body 15, and four salient poles 21a, 21b, 21c, 21d are connected by a magnetic body 22. In this modification, the adjacent magnet unit 13a and magnet unit 13b are arranged so that the orientations of the magnetic poles of the two sets of permanent magnets 12 are opposite to each other.

  In the modification of FIG. 7C, for example, when current is applied to the coils 14a and 14b in the direction shown in the figure, the two salient poles 21a and 21b enter the two salient poles 21a and 21b from the magnet unit 13a, respectively. A closed loop L of magnetic flux that returns to the two S poles of the magnet unit 13b from the two salient poles 21c and 21d through the body 22 and returns to the magnet unit 13a through the magnetic body 15 is formed. Therefore, the leftward magnetic force F acts on the secondary magnetic flux generator 20. Although illustration is omitted, if the direction of the current applied to each of the coils 14a and 14b is reversed, a rightward magnetic force F acts.

  FIG. 8 shows a second embodiment. In this table apparatus, two pairs of primary-side magnetic flux generators 10 and secondary-side magnetic flux generators 20 are arranged in the vicinity of two opposing sides of the rectangular plate-like base 1 and table 2, respectively. The point provided in the position symmetrical with respect to the rotation center is different from that of the first embodiment. The other parts are the same as those of the first embodiment, and the two magnet units 13a and 13b of each primary-side magnetic flux generator 10 are connected by the magnetic body 15 in the same manner as shown in FIG. The two salient poles 21 a and 21 b of each secondary-side magnetic flux generator 20 are connected by a magnetic body 22. The magnetic bodies 15 and 22 are fixed by being fitted into holes provided in the vicinity of the sides of the base 1 and the table 2, respectively.

  In the first and second embodiments described above, the base and the table are arranged horizontally, and the table is opposed to the upper side of the base, but the table device according to the present invention arranges the base and the table vertically, A table may be opposed to the side of the base. In this case, it is preferable to support the table so that it can be rotated and moved by a horizontal axis.

  FIG. 9 shows a third embodiment. In this table apparatus, a Y table 102 that linearly moves in the Y direction and an X table 103 that linearly moves in the X direction are stacked in this order on the upper side of the base 101, and a θ table 104 that rotates and moves in the θ direction above the X table 103. Is an XYθ table device. A pair of primary side magnetic flux generators 10 is provided at a position symmetrical with respect to the rotation center of the θ table 104 in the X table 103 which is a base on the fixed side of the rotational movement. In addition, a pair of secondary-side magnetic flux generators 20 are provided in the vicinity of a pair of sides of the θ table 104 so as to face each primary-side magnetic flux generator 10. The plate 103a and the θ table 104 are made of aluminum as a nonmagnetic material.

  Similar to the first embodiment, the θ table 104 is supported at the center of the plate 103 a of the X table 103 by a bearing 3 so as to be rotatable. Similarly to the one shown in FIG. 2, the primary-side magnetic flux generator 10 has two magnet units 13 a and 13 b connected by a magnetic body 15, and the secondary-side magnetic flux generator 20 has two salient poles. 21 a and 21 b are connected by a magnetic body 22. The magnetic body 15 is fixed by being fitted into a notch provided in the side portion of the X table 103, and the magnetic body 22 is in the vicinity of the side portion of the θ table 104 as in the first embodiment. It is fixed by being fitted into a hole provided in the.

  The X table 103 and the Y table 102 are linearly driven by linear motors 105a and 105b, respectively, and are linearly moved by being guided by rails 106a and 106b. In this embodiment, since the upper plate 103a and the θ table 104 are made of lightweight aluminum, the output of these linear motors 105a and 105b can be reduced.

  In the third embodiment described above, the table device is an XYθ table device, and the X table and the Y table are linearly moved by a linear motor. However, the table device according to the present invention is, for example, in the X direction and the Y direction. An XYθ table device having a different table configuration including a table movable in two directions, or an Xθ table device including only a table moving in the X direction may be used. Further, the linear moving mechanism is not limited to the linear motor, and may be a magnetic moving mechanism of another type, or a mechanical moving mechanism using a ball screw or the like. Furthermore, also in this embodiment, the base, Y table, X table, and θ table can be arranged vertically.

  In each of the embodiments described above, the primary side magnetic flux generator is provided on the fixed base and the secondary side magnetic flux generator is provided on the moving table. However, the primary side magnetic flux generator is provided on the moving side and fixed. A secondary-side magnetic flux generator can also be provided on the side.

  In each of the embodiments described above, the nonmagnetic material forming the base and the table is aluminum. However, this nonmagnetic material is preferably lightweight, and may be another light metal or an alloy thereof, plastic, reinforced plastic, or the like. . Further, depending on the use of the table device, nonmagnetic austenitic stainless steel can be used.

  In each of the embodiments described above, the base and the table are rectangular, and the primary-side magnetic flux generator and the secondary-side magnetic flux generator are provided along the vicinity of these sides, but at least one pair of primarys is provided. The side magnetic flux generator and the secondary magnetic flux generator need only be located symmetrically with respect to the center of rotation of the table, and can be provided at the corner of the base or the table. Further, the shape of the base and the table is not limited to a rectangular shape, and may be a polygonal shape or a circular shape.

DESCRIPTION OF SYMBOLS 1 Base 2 Table 3 Bearing 10 Primary side magnetic flux generation part 11 Iron core part 12 Permanent magnet 13a, 13b, 13c, 13d Magnet unit 14a, 14b, 14c, 14d Coil 15 Magnetic body 20 Secondary side magnetic flux generation part 21a, 21b, 21c, 21d Salient pole 22 Magnetic body 101 Base 102 Y table 103 X table 104 θ tables 105a, 105b Linear motors 106a, 106b Rail

Claims (3)

Base and
A table that is opposed to the base and is rotatably supported in a plane parallel to the base;
At least one pair of primary-side magnetic flux generators provided at positions symmetrical with respect to the rotation center of the table on either one of the opposing surfaces of the base and the table;
A secondary side magnetic flux generation part provided on the other of the opposing surfaces so as to face the at least one pair of primary side magnetic flux generation parts;
In the table device for rotating the table around the rotation center,
A coil is wound around each of at least two magnet units in which at least one set of permanent magnets in which the primary-side magnetic flux generation unit has different magnetic pole orientations along the rotational movement direction, Each magnet unit shall be connected with a magnetic material next to each other so that the arrangement of the magnetic poles of the permanent magnets is opposite to each other,
The table device, wherein the secondary side magnetic flux generation section is configured by connecting each salient pole formed of at least two iron cores facing each magnet unit with a magnetic material.   The table apparatus according to claim 1, wherein the at least two magnet units and the salient poles are connected in an arc direction along a rotation direction of the table.   The table apparatus according to claim 1, further comprising a linear movement mechanism that linearly moves the base in a plane parallel to the table.

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