JP4175135B2 - Table device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a table device for mounting an alignment device, an inspection device, and the like.
[0002]
[Prior art]
A table device on which an alignment device, an inspection device or the like is mounted is required to move the mounted device with a high degree of freedom. An XYθ table device configured as shown in FIG. 1 is known as a table device that meets such a requirement.
[0003]
As shown in the figure, the XYθ table device includes a substantially square shaped fixed support 1, and a Y table 2 and an X table 3 that are stacked on the fixed support 1. The Y table 2 is a plate-like member having substantially the same shape as the fixed support 1, and is supported so as to be movable in the Y-axis direction along a drive guide mechanism 1a provided on the fixed support 1 along the Y-axis direction. Has been. The X table 3 is also a plate-like member having substantially the same shape as the fixed support 1, and is movable in the X axis direction along the drive guide mechanism 2a provided on the Y table 2 along the X axis direction. It is supported by.
[0004]
On the surface of the X table 3, a rotary motor 5 having a rotor 4 that can rotate with the stacking direction (Z-axis direction) of the fixed support 1, Y table 2, and X table 3 as an axial direction is disposed. Here, as a drive unit for moving the Y table 2 in the Y-axis direction with respect to the fixed support 1 and a drive unit for moving the X table 3 in the X-axis direction with respect to the Y table 2, linear A system such as a motor or a ball screw is used, and the rotation motor 5 is also an ordinary general electric motor.
[0005]
Under this configuration, by controlling the position of the Y table 2 in the Y-axis direction with respect to the fixed support 1 and the position of the X table 3 in the X-axis direction with respect to the Y table 2, the Y table 2 can be arbitrarily set on the XY plane. Can be moved to a position. In this way, by controlling the rotation angle θ of the rotor 4 in the rotary motor 5 that can be positioned at an arbitrary position on the XY plane, the position of the alignment device or the like mounted on the rotor 4 is further controlled within the XY plane. It can be moved in the θ direction (rotation).
[0006]
[Problems to be solved by the invention]
The XYθ table apparatus in which the above-described fixed support 1, Y table 2, and X table 3 are stacked can reduce the installation area in the XY plane. However, the above-described XYθ table device has a structure in which the above three members are stacked and a rotary motor is disposed on the top surface of the X table 3 disposed on the uppermost layer, so that the size H in the height direction is large. turn into. That is, it is difficult to reduce the thickness of the conventional XYθ table device due to its structure. Furthermore, although it becomes the structure which attaches load (operation | movement part) on a rotary motor, since a gravity center position becomes high, controllability worsens and becomes a cause of a precision deterioration. In addition, because of the stacked structure, it is difficult to match the center of the XY table and the rotation center of the rotary motor.
[0007]
The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide a table device that can be moved in multiple directions and that can be easily reduced in size and thickness while having high controllability. And
[0008]
[Means for Solving the Problems]
In order to solve the above-described problems, a table device according to the present invention includes a support, a Y table that is slidably supported in the Y direction on the support, and an X that is orthogonal to the Y direction on the Y table. An X table that is slidably supported in the direction and has a through hole, a motor in which the mounting portion exists in the rotor, and a connection ring that has a hole in which the motor is accommodated and to which the motor is fixed, The motor is received and fixed in the hole of the connection ring, the connection ring to which the motor is fixed is received in the through hole and fixed to the X table, and at least a part of the motor is included in the X table. It is characterized by being in a lower space .
[0009]
In this configuration, the rotary motor can be stored in the space below the X table. Therefore, since the center of gravity is lowered, a high degree of controllability can be realized, and parts and the like that protrude upward from the X table can be reduced. Therefore, the table device can be easily reduced in size and thickness.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
A. Embodiment FIG. 2 is a perspective view showing an XYθ table apparatus 100 according to an embodiment of the present invention, and FIG. 3 is an exploded perspective view thereof. Further, FIG. 4 is a side view of the XYθ table device 100 viewed from the direction of the arrow 1Y in FIG. As shown in FIG. 3, the XYθ table 100 includes a substantially square plate-like fixed support 101, a Y table 102, an X table 103, a rotation motor 104, and a rotation motor connecting ring 105. The fixed support 101, the Y table 102, and the X table 103 are stacked in this order from the lower side.
[0011]
The fixed support body 101 is a substantially square plate material surrounded by four sides, and a substantially circular through hole 101a centering on the central portion is formed. On the upper surface of the fixed support 101, Y-axis direction guide driving mechanisms 110 are provided in the vicinity of two sides 101b and 101c along the Y-axis direction among the four sides. The Y-axis direction guide drive mechanism 110 has a plurality of rail members 110a extending along the Y-axis direction and a drive unit 110b. As shown in FIGS. 2 and 4, the same number of guide portions 120 a as the rail members 110 a are provided on the lower surface of the Y table 102. More specifically, the Y table 102 is a substantially square plate member surrounded by four sides 121a, 121b, 122a, and 122b, and the guide portion 120a has two sides 121a parallel to the Y axis on the lower surface of the Y table 102. , 121b. The rail member 110a and the guide part 120a are slidably engaged.
[0012]
In this embodiment, a linear motor is employed as a mechanism for driving the Y table 102 supported so as to be movable along the rail member 110a in the Y-axis direction as described above. The drive unit 110b of the Y-axis direction guide drive mechanism 110 is a coil of this linear motor, and is arranged along the Y-axis direction. In the present embodiment, a thrust that moves the Y table 102 in the Y-axis direction by generating a magnetic field between the coil and the core member 115b (see FIGS. 2 and 4) provided on the lower surface of the Y table 102. Is generated. As long as the thrust for moving the Y table 102 along the Y-axis direction can be generated, a drive system other than the linear motor system as described above may be employed. May drive the Y table 102 by a ball screw method.
[0013]
The Y table 102 is formed with a substantially circular through hole 102a centering on the center portion thereof. When the Y table 102 is in the home position, the center of the through hole 102a occupies substantially the same position on the XY plane as the center of the through hole 101a, and the two through holes 101a and the through hole 102a communicate with each other. Yes.
[0014]
In addition, the guide portion 120a and the core member 115b described above are provided in the vicinity of the sides 121a and 121b on the lower surface of the Y table 102, while the two sides 122a and 122b in the vicinity of the upper surface of the Y table 102 are parallel to the X-axis direction. Is provided with an X-axis direction guide drive mechanism 123. The X-axis direction guide drive mechanism 123 has a plurality of rail members 123a extending along the X-axis direction and a drive unit 123b. On the lower surface of the X table 103, the same number of guide portions 130a (see FIG. 3) as the rail members 123a are provided. More specifically, the X table 103 is a substantially square plate material surrounded by four sides 131 a, 131 b, 132 a and 132 b, and the guide portion 130 a is a 2 part parallel to the X axis direction on the lower surface of the X table 103. It is provided in the vicinity of the sides 131a and 131b. The rail member 123a and the guide part 130a are slidably engaged.
[0015]
In the present embodiment, a linear motor is employed as a mechanism for driving the X table 103 supported so as to be movable along the rail member 123a in the X-axis direction as described above. The drive part 123b of the X-axis direction guide drive mechanism 123 is a coil of this linear motor, and is disposed along the X-axis direction. In the present embodiment, a core member 125b (see FIG. 2) is provided in addition to the above-described guide portion 130a in the vicinity of the coil and the side portions 131a and 131b on the lower surface of the X table 103. By generating a magnetic field with the above-described coil, a thrust for moving the X table 103 in the X-axis direction is generated. As long as the thrust for moving the X table 103 along the X-axis direction can be generated, a driving method other than the linear motor method as described above may be employed. May drive the X table 103 by a ball screw method.
[0016]
The X table 103 is formed with a substantially circular through-hole 103a centering on the central portion thereof. In addition, a circular recess 103b that is concentric with the through hole 103a and has a larger diameter than the through hole 103a is provided on the upper surface of the X table 103.
[0017]
In the through hole 103 a of the X table 103, the rotary motor 104 fixed to the rotary motor coupling ring 105 is inserted and arranged. In the present embodiment, an outer rotor motor as shown in FIG. In the rotary motor 104, a housing 140 is provided with a rotor (not shown) that is a rotating portion, a stator coil (not shown) for rotationally driving the rotor, and a core member that generates a magnetic field between the stator coil. (Not shown) etc. are provided. The housing 140 has a disk-shaped base 141 made of a metal such as aluminum at the bottom.
[0018]
The base 141 is provided with a plurality of screw holes 141a. A plurality of screw holes 152 a corresponding to these screw holes 141 a are provided on the cylindrical bottom surface of the rotary motor connecting ring 105. The base 141 is fastened to the cylindrical bottom surface of the rotary motor connecting ring 105 by inserting the screw 142a through the screw hole 152a and the screw hole 141a.
[0019]
The outer periphery of the upper cylindrical bottom surface of the rotary motor coupling ring 105 has an outward fringe 151 projecting perpendicularly to the Z axis. The fringe 151 is provided with a plurality of screw holes 151a. When the lower part of the rotary motor coupling ring 105 is inserted into the through hole 103 a of the X table 103, the fringe 151 is supported from below by the recess 103 b of the X table 103. The rotary motor coupling ring 105 is fixed to the X table 103 by inserting and fixing the screw 153a into the recess 103b through the screw hole 151a of the fringe 151 in a state where the fringe 151 is placed in the recess 103b. The By adopting such a configuration, the upper surface of the motor 104 is substantially flush with the upper surface of the X table 103, and the number of parts protruding on the upper surface of the X table is reduced.
[0020]
The above is the attachment mode of the rotary motor 104 and the rotary motor connecting ring 105 in the X table 103. In the present embodiment, the height from the upper surface to the lower surface of the rotary motor 104 is equal to or less than the height from the upper surface of the X table 103 to the upper surface of the Y table 102, and the lower surface of the rotary motor 104 floats from the Y table 102. . Therefore, the rotary motor 104 does not hinder the movement of the X table 103 in the X-axis direction.
[0021]
The rotary motor 104 has a cylindrical hollow portion 104a (see FIG. 4). When both the Y table 102 and the X table 103 are at the home position, the center of each of the hollow portion 104a and the through holes 101a, 102a, 103a occupies substantially the same position on the XY plane. The upper surface of the rotor of the rotary motor 104 is exposed from the housing 140. A plate-like mounting portion 145a (see FIG. 2) is provided on the upper surface of the rotor, and an alignment device, an inspection device, and the like are installed on the mounting portion 145a. Cables for supplying power and control signals to alignment devices and inspection devices (not shown) mounted on the rotor of the rotary motor 104, piping for supplying and discharging gas and fluid, etc. are fixedly supported. Through holes 101a, 102a, 103a, and 104a are inserted from below the body 101 and connected to an alignment device or an inspection device.
[0022]
The above is the configuration of the XYθ table apparatus 100 according to the present embodiment. Under such a configuration, the Y-axis direction guide drive mechanism 110 and the X-axis direction guide drive mechanism 123 control the power supply to the coils to arbitrarily position the rotary motor 104 in the XY plane within a predetermined range. can do. Further, the amount of rotation of the rotor can be controlled by controlling the power supply to the rotor (not shown) inside the rotary motor. Therefore, the alignment device, the inspection device, and the like installed on the mounting member 151a can be moved to an arbitrary position on the XY plane and further rotated.
[0023]
As described above, in the XYθ table apparatus 100 according to the present embodiment, the alignment apparatus, the inspection apparatus, etc. are moved to arbitrary positions on the XY plane as in the conventional XYθ table apparatus (for example, see FIG. 1). Although it can be rotated, there is an effect that it is easy to reduce the thickness as compared with the conventional XYθ table device. Furthermore, since the position of the center of gravity of the entire table apparatus in a state where a load (operation unit) is mounted on the rotary motor is lowered, controllability is improved and accuracy deterioration can be prevented. That is, the conventional XYθ table apparatus (see FIG. 1) has a configuration in which all the components of the rotary motor 5 including the stator coil and the rotor 4 are arranged on the upper surface of the X table 3. However, the number of parts projecting upward increases, resulting in an increase in size in the height direction and an increase in the center of gravity, so that high controllability cannot be expected. On the other hand, in the XYθ table apparatus 100 according to this embodiment, as described above, the rotary motor 104 fastened to the rotary motor connecting ring 105 is coupled to the X table, so that the rotary motor 104 is placed in the space below the X table. This makes it possible to reduce the number of protrusions of the component above the upper surface of the X table, thereby suppressing an increase in size in the height direction. Furthermore, in the configuration according to the present embodiment, the rotation motor 104 fastened to the rotation motor coupling ring 105 has only to be inserted and fastened from above the XY table, so that assembly is easy.
[0024]
B. Modifications Note that the present invention is not limited to the above-described embodiments, and modifications as exemplified below are possible.
[0025]
In the above-described embodiment, the rotary motor connecting ring 105 is employed as a method for fixing the rotary motor 104 to the X table. However, the method is not limited to such a fixing method. In short, it is only necessary to incorporate the rotary motor 104 in the space below the X table so that the parts do not protrude as much as possible from the upper surface of the X table.
Moreover, although the outer rotor motor was employ | adopted for the rotation motor 104, it is not limited to this, The motor of another system may be sufficient.
[0026]
For example, the configuration of the XYθ table apparatus 100 shown in FIG. 5 has an inner rotor motor as the rotation motor 104. The rotary motor 104 has a housing 240, and a stator coil, a rotor, etc. (not shown) are accommodated in the housing 240. The housing 240 has a substantially cylindrical diameter, but a portion near the upper end of the housing 240 protrudes to the outside larger than the other portions to constitute a disk-shaped fixing portion 241. In addition, the bottom surface of the housing 240 has a circular protrusion 202 with a region near the center protruding downward. Inside the circular protrusion 202, a bearing (not shown) that supports the rotating shaft 201 of the rotor is provided. Moreover, the upper end part of the rotating shaft 201 protrudes from the upper surface of the housing 240, and the mounting member which is not shown in figure is attached to this. The X table 103 has a through hole 103a (see FIG. 3) and a recess 103b (see FIG. 3) surrounding the through hole 103a (see FIG. 3), as in the above-described embodiment. The rotation motor 104 is inserted into the through hole 103a from above the X table 103, and the fixing portion 241 of the rotation motor 104 is supported on the recess 103b. Here, the screw 253a is inserted from above the fixing portion 241 and fastened to the recess 103b, whereby the rotary motor 104 is coupled to the X table and fits in the X table space.
[0027]
As seen in FIG. 5, in the state of being fixed to the X table 103, the bottom surface of the housing 240 of the rotary motor 104 is positioned above the top surface of the Y table 102. The part is inserted into the through hole 102a (see FIG. 3) of the Y table 102. The X table 103 can move in the X-axis direction as long as the circular protrusion 202 does not hit the periphery of the through hole 102 a of the table 102. In order to increase the movement range of the X table 103 in the X-axis direction, the through hole 102a may be expanded to a position that does not interfere with the guide portion 115b disposed on the lower surface of the Y table 102.
[0028]
Similar to the above-described embodiment, even in this configuration, the upper surface of the rotary motor 104 is substantially flush with the upper surface of the X table 103, and fewer parts protrude from the upper surface of the X table. Therefore, the same effect as the above embodiment can be obtained.
[0029]
【The invention's effect】
As described above, according to the present invention, the apparatus can be easily reduced in size and thickness while being movable in multiple directions.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an external appearance of a conventional XYθ table apparatus.
FIG. 2 is a perspective view showing an XYθ table apparatus according to an embodiment of the present invention.
FIG. 3 is an exploded perspective view showing the XYθ table apparatus according to the embodiment.
FIG. 4 is a partially exploded side view showing a configuration for assembling the XYθ table apparatus according to the embodiment.
FIG. 5 is a side view showing a modification of the XYθ table device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 100 ... XY (theta) table apparatus, 101 ... Fixed support body, 102 ... Y table, 103 ... X table, 103a ... Through-hole, 103b ... Recessed part, 104 ... Rotary motor, 105 ... Rotary motor connection ring , 110... Y axis direction guide drive mechanism, 110 a... Rail member, 110 b... Drive unit, 123... X axis direction guide drive mechanism, 123 a. 141 …… Base, 145a …… Place, 151 …… Outward fringe.

Claims (2)

A support;
A Y table slidably supported in the Y direction on the support;
An X table that is slidably supported in the X direction perpendicular to the Y direction on the Y table, and has a through hole;
A motor whose mounting part is present in the rotor;
A coupling ring having a hole in which the motor is accommodated and to which the motor is fixed;
Have
The motor is fixed in a hole of the connecting ring;
The table device , wherein the coupling ring to which the motor is fixed is received in the through hole and fixed to the X table, and at least a part of the motor is in a space below the X table . The table apparatus according to claim 1 , wherein a placement surface on which an object is placed in the placement portion is substantially flush with an upper surface of the X table .

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