EP1395105B1 - Component-placing apparatus - Google Patents
Component-placing apparatus Download PDFInfo
- Publication number
- EP1395105B1 EP1395105B1 EP03255397A EP03255397A EP1395105B1 EP 1395105 B1 EP1395105 B1 EP 1395105B1 EP 03255397 A EP03255397 A EP 03255397A EP 03255397 A EP03255397 A EP 03255397A EP 1395105 B1 EP1395105 B1 EP 1395105B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- connecting shaft
- nozzle
- shaft
- nozzle connecting
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P21/00—Machines for assembling a multiplicity of different parts to compose units, with or without preceding or subsequent working of such parts, e.g. with programme control
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
- H05K13/0408—Incorporating a pick-up tool
- H05K13/0409—Sucking devices
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
- H05K13/0413—Pick-and-place heads or apparatus, e.g. with jaws with orientation of the component while holding it; Drive mechanisms for gripping tools, e.g. lifting, lowering or turning of gripping tools
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/53174—Means to fasten electrical component to wiring board, base, or substrate
- Y10T29/53178—Chip component
Definitions
- the present invention relates to a component-placing apparatus having a suction head for mounting an electronic component on a board or the like, or for assembling electronic components.
- a component-placing apparatus having a suction head has been used for mounting an electronic component such as a semiconductor chip and/or a piezoelectric component on a board such as a printed circuit board.
- a semiconductor-mounting apparatus has been proposed in which a suction nozzle, a pressure shaft which is movable vertically and rotatable and has the suction nozzle at the bottom thereof, an ultrasonic motor for turning the pressure shaft, and a voice coil motor for moving the pressure shaft in the vertical direction are disposed such that the pressure shaft extends through the voice coil motor and the ultrasonic motor.
- the voice coil motor when the voice coil motor is used as the cylindrical linear motor, since the shaft extends through the center of the voice coil motor, the central part of the motor cannot be used as a core; hence, the voice coil motor does not effectively generate a thrust force. Accordingly, the size of the voice coil motor must unavoidably be large. Also, the rotary motor is rotated together with a yoke and a casing of the voice coil motor, thereby causing problems of large inertia and large size of the rotary motor. In addition, when a moving coil of the voice coil motor rotates together with the shaft, feeding the moving coil with current is difficult.
- a component-placing apparatus for driving a suction nozzle in the rotational ( ⁇ ) and vertical (Z) directions for applying suction to a component, comprising: a rotary actuator; a linear actuator comprising a stator connected to a stator of the rotary actuator such that these stators are immovable relative to each other; a spline shaft connected to a rotating shaft of the rotary actuator; a nozzle connecting shaft connected to the spline shaft for being allowed to move only rectilinearly in the longitudinal direction of the spline shaft relative to the spline shaft and having the suction nozzle disposed at the bottom thereof; a hollow holder encircling the nozzle connecting shaft with rotary bearings being interposed therebetween which allow the nozzle connecting shaft to rotate with respect to the spline shaft and connected for being driven by a mover of the linear actuator; and a linear guide for guiding the hollow holder relative to the stators of the actuators so as to be rectilinear
- the nozzle connecting shaft and the spline shaft are movable in the axial direction, the rotational movement of the spline shaft can be transmitted to the nozzle connecting shaft regardless of the position at which the nozzle connecting shaft lies. Accordingly, the nozzle connecting shaft, and resultantly the suction nozzle, can be vertically moved to a desired position and turned -to a desired orientation.
- the stators of the rotary actuator and the linear actuator are fixed to a moving head of a drive mechanism driven in the X- and Y- directions.
- the component-placing apparatus can be independently driven in the X- and Y-directions by the drive mechanism, about the ⁇ -axis by the rotary actuator, and in the Z-direction by the linear actuator, respectively.
- a component can be precisely placed.
- the mover and the stator of the linear actuator have a return spring disposed therebetween for urging the mover upwards with its spring force which is slightly greater than the sum of the weight load of a moving part of the apparatus including the mover, the suction nozzle, and the nozzle connecting shaft, and a sliding frictional force generated between the linear guide and the spline shaft.
- the hollow holder and the nozzle connecting shaft have an effectively sealed, or preferably a hermetically sealed, airtight chamber formed in a cylindrical space therebetween; the nozzle connecting shaft have an air passage formed therein for transmitting a pressure medium such as air in the airtight chamber to the suction nozzle; an air port in communication with the airtight chamber be formed in the outer surface of the hollow holder, and the air port be connected to a vacuum suction apparatus.
- a component-placing head A includes a supporting plate 1 fixed to a head of an X-Y robot or the like, a voice coil motor 2 as an example of a linear actuator having a stator (yoke) 3 fixed on the under surface of the supporting plate 1, and a servomotor 20 as an example of a rotary actuator having a stator 21 fixed on the upper surface of the supporting plate 1.
- the voice coil motor 2 is fixed on the lower surface of the supporting plate 1 and formed by the yoke 3 having an outer yoke 3a and a center yoke 3b, a magnet 4 fixed on the inner surface of the outer yoke 3a, a bobbin 5 inserted in the yoke 3 so as to be vertically movable, a coil 6 wound around the bobbin 5, and so forth.
- the coil 6 lies overlapping with the magnet 4 in the axial direction.
- the magnet 4 and the coil 6 are respectively disposed on the stationary and moving sides; on the other hand, the coil 6 and the magnet 4 may be respectively disposed on the stationary and moving sides.
- the yoke 3 In order to detect the vertical movement of the voice coil motor 2, the yoke 3 has a linear encoder 12 fixed thereon, and the connecting member 7 has a linear scale 13 fixed thereon. By feeding back a signal of the linear encoder 12, the suction nozzle 35 can be controlled so as to lie at a desired vertical position.
- the servomotor 20 has an encoder integrated therein and can control the component-placing head so as to lie at a desired rotational position by feeding back a signal of the encoder.
- the servomotor 20 has a rotating shaft 22 extending downwards with the supporting plate 1 being interposed therebetween, and the rotating shaft 22 has the ball spline shaft 24 connected thereto with a coupling 23 being interposed therebetween.
- the ball spline shaft 24 is combined with a ball spline nut 25, to which the top of the nozzle connecting shaft 26 is fixed.
- the nozzle connecting shaft 26 extends through the hollow holder 30, and the hollow holder 30 and the nozzle connecting shaft 26 are connected to each other at the upper and lower portions thereof by bearings (rotary bearings) 31 with flanges.
- bearings rotary bearings
- the nozzle connecting shaft 26 is rotatable relative to the holder 30 but is vertically immovable relative to the same.
- the voice coil motor 2 is activated, the holder 30 and the nozzle connecting shaft 26 move vertically in one united body. Since the lower bearing 31 is fixed by a nut 32 screwed together with a screw formed at the lower portion of the nozzle connecting shaft 26, the play in the vertical direction between the nozzle connecting shaft 26 and the holder 30 is minimized.
- seals 33 are disposed between the two bearings 31 so as to provide an airtight chamber 34 therebetween, thereby preventing air from flowing into and out from the chamber 34 in the vertical direction.
- the seals 33 in this embodiment are each a combination seal of a rubber ring 33a such as an O-ring and a resin ring 33b composed of a tetrafluoroethylene resin and disposed on the inner periphery of the rubber ring 33a.
- two seal stoppers 37 are provided.
- the nozzle connecting shaft 26 has a hollow structure so as to provide an air passage 27 therein having an open bottom. Also, the nozzle connecting shaft 26 has an air hole 28 formed therein for communication between the internal air passage 27 and the external airtight chamber 34.
- the nozzle connecting shaft 26 has the suction nozzle 35 fixed at the bottom thereof.
- the suction nozzle 35 has a shock-absorbing mechanism (not shown) with a spring built therein so as to absorb a shock against the electronic component P at the time of applying suction to it and mounting it on the board B.
- the hollow holder 30 has an air port 36 formed in the outer surface thereof for communication to the airtight chamber 34, to which an air hose (not shown) is connected. The air hose is connected to a vacuum suction apparatus (not shown). Thus, a suction pressure is transmitted to the suction nozzle 35 through the air port 36, the airtight chamber 34, the air hole 28, and the air passage 27.
- Fig. 3 illustrates a state in which the voice coil motor 2 is switched off and the moving part including the suction nozzle 35 is raised to its top position (original position) by the spring force of the return spring 11.
- the coil 6 receives a thrust force in the axial direction in proportion to the product of a magnetic density, an amount of current, and a conductor length of the coil; hence, as shown in Fig. 4 , the holder 30 connected to the coil 6 with the connecting member 7 being interposed therebetween also moves downwards (i.e., downwards in the Z-axis direction as indicated by the arrow shown in Fig. 4 ).
- the nozzle connecting shaft 26 Since the nozzle connecting shaft 26 is held to the holder 30 with the bearings 31 being interposed therebetween so as to be rotatable but immovable in the axial direction, the nozzle connecting shaft 26 can move downwards while maintaining the ball spline shaft 24 and the ball spline nut 25 in engagement with each other. As a result, the suction nozzle 35 fixed to the bottom of the nozzle connecting shaft 26 moves downwards so as to mount the electronic component P held by suction at the end thereof on the board B.
- the servomotor 20 For adjusting the orientation of the electronic component P around the ⁇ -axis (i.e., the rotating axis of the component-placing head A) in order to mount the electronic component P on the board B, the servomotor 20 is driven so as to turn the electronic component P to a proper orientation.
- the rotation of the servomotor 20 is transmitted to the nozzle connecting shaft 26 through the ball spline shaft 24 and the ball spline nut 25, and the bearings 31 prevent the rotating force of the servomotor 20 from being transmitted to the holder 30, the nozzle connecting shaft 26 can be rotated with a small torque. As a result, the orientation of the electronic component P can be precisely adjusted.
- the component-placing head A has the servomotor 20, the nozzle connecting shaft 26, and the suction nozzle 35, all disposed coaxially with each other, and directly transmits the torque of the servomotor 20 to the suction nozzle 35.
- the servomotor 20 can be made small in size and also the positioning of the electronic component P around the ⁇ -axis can be precisely performed.
- the voice coil motor 2 vertically drives only the nozzle connecting shaft 26 and the holder 30 and is not required to vertically drive the servomotor 20 and the ball spline shaft 24.
- the voice coil motor 2 is only required to produce a relatively small thrust force and hence can be made small in size.
- the axis of the voice coil motor 2 is radially shifted relative to the axis of the nozzle connecting shaft 26 and the suction nozzle 35, the suction nozzle 35 is not likely to be tilted, since the holder 30 holding the nozzle connecting shaft 26 is guided to move only in the vertical direction by the linear guide 8, thereby achieving a precise pick-and-place operation of the component-placing head A.
- This mounting apparatus has a multi-head 40 formed by four units of the component-placing heads A.
- the multi-head 40 is supported by a Y-axis beam 41, which includes a servomotor 42, a ball screw 43, and a linear guide 44, both ends of which are supported by two linear motors 45 and 46 driven in the X-axis direction.
- the Y-axis beam 41 and the linear motors 45 and 46 are subjected to a feedback control using a linear scale and a linear encoder (both not shown) so that the multi-head 40 is positioned at a desired position on an X-Y plane lying perpendicular to the Z-axis.
- the linear motors 45 and 46 are supported by a mounting table 47, on which a feeding board 48 and a placing board 49 are arranged.
- each nozzle of the component-placing heads A can be independently controlled in the direction of the Z-axis and about the ⁇ -axis in concert with the movements of the Y-axis beam 41 and the linear motors 45 and 46 along the X-and Y-axes.
- an electronic component can be precisely transferred from the feeding board 48 to the placing board 49.
- a voice coil motor 2 is used as the linear actuator by way of example in the above-described embodiment, a combination of a servomotor, a ball screw, and a linear guide, or an air cylinder, may be used in place of the voice coil motor, for example.
- the linear guide of the linear actuator can be also used as a linear guide for guiding the hollow holder so as to be rectilinearly movable parallel to the spline shaft.
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Manipulator (AREA)
- Automatic Assembly (AREA)
- Agricultural Chemicals And Associated Chemicals (AREA)
Abstract
Description
- The present invention relates to a component-placing apparatus having a suction head for mounting an electronic component on a board or the like, or for assembling electronic components.
- Hitherto, a component-placing apparatus having a suction head has been used for mounting an electronic component such as a semiconductor chip and/or a piezoelectric component on a board such as a printed circuit board.
- As an example of such a component-placing apparatus, as disclosed in
Japanese Unexamined Patent Application Publication No. 5-82998 - Also, as disclosed in
Japanese Unexamined Patent Application Publication No. 8-203966 - In the former proposal, when the voice coil motor is used as the cylindrical linear motor, since the shaft extends through the center of the voice coil motor, the central part of the motor cannot be used as a core; hence, the voice coil motor does not effectively generate a thrust force. Accordingly, the size of the voice coil motor must unavoidably be large. Also, the rotary motor is rotated together with a yoke and a casing of the voice coil motor, thereby causing problems of large inertia and large size of the rotary motor. In addition, when a moving coil of the voice coil motor rotates together with the shaft, feeding the moving coil with current is difficult.
- In the latter proposal, since the hollow pressure shaft extends through the center of the voice coil motor, the central part of the motor cannot be used as a core; hence the voice coil motor does not effectively generate a thrust force, thereby requiring the voice coil motor to be large. In addition, since a moving coil of the voice coil motor rotates together with the shaft, feeding the moving coil with current is difficult.
- According to the invention, there is provided a component-placing apparatus for driving a suction nozzle in the rotational (θ) and vertical (Z) directions for applying suction to a component, comprising: a rotary actuator; a linear actuator comprising a stator connected to a stator of the rotary actuator such that these stators are immovable relative to each other; a spline shaft connected to a rotating shaft of the rotary actuator; a nozzle connecting shaft connected to the spline shaft for being allowed to move only rectilinearly in the longitudinal direction of the spline shaft relative to the spline shaft and having the suction nozzle disposed at the bottom thereof; a hollow holder encircling the nozzle connecting shaft with rotary bearings being interposed therebetween which allow the nozzle connecting shaft to rotate with respect to the spline shaft and connected for being driven by a mover of the linear actuator; and a linear guide for guiding the hollow holder relative to the stators of the actuators so as to be rectilinearly movable parallel to the spline shaft.
- A functional equivalent may be substituted for the spline shaft.
- The invention also provides a component-placing apparatus for driving a suction nozzle in the rotational (θ) and vertical (Z) directions for applying suction to a component, comprising: a rotary actuator having a rotating shaft; a linear actuator comprising a stator connected to a stator of the rotary actuator such that these stators are immovable relative to each other; a nozzle connecting shaft having the suction nozzle disposed at the bottom thereof; the nozzle connecting shaft being connected to the rotating shaft by a coupling which allows the nozzle connecting shaft to move only rectilinearly in the longitudinal direction of the rotating shaft, relative to the rotating shaft; a hollow holder encircling the nozzle connecting shaft with rotary bearings being interposed therebetween which allow the nozzle connecting shaft to rotate and connected for being driven by a mover of the linear actuator; and a linear guide for guiding the hollow holder relative to the stators of the actuators so as to be rectilinearly movable parallel to the rotating shaft.
- Embodiments of the invention may provide a component-placing apparatus having a linear actuator and a rotary actuator which are small in size which precisely position a component at high speed in the direction of the Z-axis and about the θ-axis. The rotation of the rotary actuator is transmitted to the nozzle connecting shaft through the spline shaft. The nozzle connecting shaft having the suction nozzle disposed at its bottom is rectilinearly movable relative to the spline shaft. The hollow holder rotatably holding the nozzle connecting shaft is connected to the mover of the linear actuator. With this structure, when the holder is vertically moved by driving the linear actuator, the nozzle connecting shaft moves vertically together with the holder. In this state, since the nozzle connecting shaft and the spline shaft are movable in the axial direction, the rotational movement of the spline shaft can be transmitted to the nozzle connecting shaft regardless of the position at which the nozzle connecting shaft lies. Accordingly, the nozzle connecting shaft, and resultantly the suction nozzle, can be vertically moved to a desired position and turned -to a desired orientation.
- As described above, since the vertical movement generated by the linear actuator and the rotational movement generated by the rotary actuator are transmitted to the suction nozzle through the mechanism using the spline shaft, the rotary bearings, and the linear guide, the stators of the linear actuator and the rotary actuator can be mutually fixed and thus are not required to drive each other. Accordingly, the mass of the vertically driven part and the inertia of the rotating part of the component-placing apparatus can be reduced, and thus a required thrust force of each actuator can be reduced, whereby both the rotary actuator and the linear actuator can be downsized.
- Also, since the actuators directly drive the nozzle both in the Z-axis direction and about the θ-axis without an indirect transmission mechanism being interposed therebetween, a component can be precisely placed at high speed. Further, although the suction nozzle is radially shifted relative to the axis of the linear actuator, the nozzle is prevented from tilting due to its own weight, since the hollow holder is guided by the linear guide, thereby achieving a precise pick-and-place operation.
- In addition, since no shafts extend through the centers of the linear actuator and the rotary actuator, for example, a commercially available, compact servomotor can be used as the rotary actuator. Also, the central part of the linear actuator can be used as a core, whereby the linear actuator can effectively generate a thrust force. As a result, when a voice coil motor is used as the linear actuator, the size of a magnetic circuit of the voice coil motor can be reduced. In this case, since the moving coil of the voice coil motor moves only reciprocally and is not required to rotate, the moving coil can be easily fed with current.
- Preferably, the stators of the rotary actuator and the linear actuator are fixed to a moving head of a drive mechanism driven in the X- and Y- directions.
- When the stator of each actuator is fixed to the moving head, the component-placing apparatus can be independently driven in the X- and Y-directions by the drive mechanism, about the θ-axis by the rotary actuator, and in the Z-direction by the linear actuator, respectively. Thus, a component can be precisely placed.
- Also, it is preferable that the mover and the stator of the linear actuator have a return spring disposed therebetween for urging the mover upwards with its spring force which is slightly greater than the sum of the weight load of a moving part of the apparatus including the mover, the suction nozzle, and the nozzle connecting shaft, and a sliding frictional force generated between the linear guide and the spline shaft.
- When the suction nozzle is vertically moved by driving the linear actuator, the suction nozzle drops when current to the linear actuator is shut off, due to the weight of the moving part including the suction nozzle. The return spring prevents this dropping. However, when the return spring produces a large spring force, the linear actuator consumes a large amount of power in order to move the suction nozzle down. To solve the above problem, by setting the spring force of the return spring so as to be slightly greater than the sum of the weight load of the moving part and the sliding frictional force generated between the linear guide and the spline shaft, the suction nozzle can be moved down with a small amount of power consumption.
- Furthermore, it is preferable that the hollow holder and the nozzle connecting shaft have an effectively sealed, or preferably a hermetically sealed, airtight chamber formed in a cylindrical space therebetween; the nozzle connecting shaft have an air passage formed therein for transmitting a pressure medium such as air in the airtight chamber to the suction nozzle; an air port in communication with the airtight chamber be formed in the outer surface of the hollow holder, and the air port be connected to a vacuum suction apparatus.
- In order to produce a suction pressure at a suction opening of the suction nozzle, the vacuum suction apparatus and the suction nozzle are required to be connected. Although the vacuum suction apparatus can be directly connected to the suction nozzle with an air hose being interposed therebetween, since the suction nozzle moves vertically and rotationally, there is a possibility that the hose is twisted or causes an operational resistance against the suction nozzle.
- With this problem in mind, when the air hose for vacuum suction is connected to the air port formed in the outer surface of the hollow holder and the air port is connected to the suction nozzle with the airtight chamber and the air passage of the nozzle connecting shaft being interposed therebetween, the hose moves only vertically together with the hollow holder and does not rotate; accordingly, the hose is unlikely to be twisted and does not prevent the operation of the suction nozzle.
- Other features and advantages of the present invention will become apparent from the following description of embodiments of the invention which will now be described, by way of example, and with reference to the accompanying drawings, in which:
-
Fig. 1 is a perspective view of an example of a component-placing apparatus according to an embodiment of the present invention; -
Fig. 2 is a sectional view of the component-placing apparatus shown inFig. 1 ; -
Fig. 3 is a magnified view of a major part of the component-placing apparatus shown inFig. 2 ; -
Fig. 4 is a sectional view showing the major part of the apparatus ofFig. 2 in operation; and -
Fig. 5 is a perspective view of a mounting apparatus using the component-placing apparatus shown inFig. 1 . -
Figs. 1 to 4 show a component-placing head (i.e., a component-placing apparatus) according to an embodiment of the present invention. Here, an electronic component P and a board B are referred to as a component and a fixing surface, respectively. - A component-placing head A according to the embodiment includes a supporting
plate 1 fixed to a head of an X-Y robot or the like, avoice coil motor 2 as an example of a linear actuator having a stator (yoke) 3 fixed on the under surface of the supportingplate 1, and aservomotor 20 as an example of a rotary actuator having astator 21 fixed on the upper surface of the supportingplate 1. - As shown in
Fig. 2 , thevoice coil motor 2 is fixed on the lower surface of the supportingplate 1 and formed by theyoke 3 having anouter yoke 3a and acenter yoke 3b, amagnet 4 fixed on the inner surface of theouter yoke 3a, abobbin 5 inserted in theyoke 3 so as to be vertically movable, acoil 6 wound around thebobbin 5, and so forth. Thecoil 6 lies overlapping with themagnet 4 in the axial direction. In this embodiment, themagnet 4 and thecoil 6 are respectively disposed on the stationary and moving sides; on the other hand, thecoil 6 and themagnet 4 may be respectively disposed on the stationary and moving sides. - The
bobbin 5 has ahorizontal portion 7a of an approximately L-shaped connectingmember 7 fixed on the bottom surface thereof, and avertical portion 7b of the connectingmember 7 protrudes axially parallel to theyoke 3, having aguide block 10 fixed on one side surface thereof. Theguide block 10 is guided by aguide rail 9 fixed on the outer surface of theyoke 3 so as to be movable only in the vertical direction so that theguide rail 9 and theguide block 10 constitute alinear guide 8. The connectingmember 7 has ahollow holder 30, which will be described later, fixed on the other side surface of thevertical portion 7b. Thus, thehollow holder 30 performs a precise and smooth linear motion relative to theyoke 3. - As shown in
Fig. 1 , the connectingmember 7 and the supportingplate 1 have areturn spring 11 interposed therebetween which is designed so as to return thebobbin 5 acting as a mover of thevoice coil motor 2 to its top position when the power is off. The tensile force of thereturn spring 11 is set slightly greater than the sum of the weight load of a moving part including thebobbin 5, thecoil 6, asuction nozzle 35, and anozzle connecting shaft 26, which will be both described later, and a sliding frictional force generated between thelinear guide 8 and aball spline shaft 24, which will be described later. Thereturn spring 11 is not limited to a tensile spring and may be a compression spring. In order to detect the vertical movement of thevoice coil motor 2, theyoke 3 has alinear encoder 12 fixed thereon, and the connectingmember 7 has alinear scale 13 fixed thereon. By feeding back a signal of thelinear encoder 12, thesuction nozzle 35 can be controlled so as to lie at a desired vertical position. - The
servomotor 20 has an encoder integrated therein and can control the component-placing head so as to lie at a desired rotational position by feeding back a signal of the encoder. Theservomotor 20 has a rotatingshaft 22 extending downwards with the supportingplate 1 being interposed therebetween, and the rotatingshaft 22 has theball spline shaft 24 connected thereto with acoupling 23 being interposed therebetween. Theball spline shaft 24 is combined with aball spline nut 25, to which the top of thenozzle connecting shaft 26 is fixed. Thus, although thenozzle connecting shaft 26 rotates integrally with theball spline shaft 24, it can move freely in the axial direction relative to theball spline shaft 24 since its vertical movement is set free between theball spline shaft 24 and theball spline nut 25. In addition, theyoke 3 may have a stopper (not shown) on the surface thereof for limiting the moving range of theguide block 10 so as to prevent theball spline nut 25 from being pulled out from theball spline shaft 24. - The
nozzle connecting shaft 26 extends through thehollow holder 30, and thehollow holder 30 and thenozzle connecting shaft 26 are connected to each other at the upper and lower portions thereof by bearings (rotary bearings) 31 with flanges. Thus, thenozzle connecting shaft 26 is rotatable relative to theholder 30 but is vertically immovable relative to the same. When thevoice coil motor 2 is activated, theholder 30 and thenozzle connecting shaft 26 move vertically in one united body. Since thelower bearing 31 is fixed by anut 32 screwed together with a screw formed at the lower portion of thenozzle connecting shaft 26, the play in the vertical direction between thenozzle connecting shaft 26 and theholder 30 is minimized. - Referring now to
Fig. 3 , in an approximately cylindrical space formed by thenozzle connecting shaft 26 and thehollow holder 30, twoseals 33 are disposed between the twobearings 31 so as to provide anairtight chamber 34 therebetween, thereby preventing air from flowing into and out from thechamber 34 in the vertical direction. Theseals 33 in this embodiment are each a combination seal of a rubber ring 33a such as an O-ring and aresin ring 33b composed of a tetrafluoroethylene resin and disposed on the inner periphery of the rubber ring 33a. Also, twoseal stoppers 37 are provided. Although a known oil seal or an O-ring could be used as each of theseals 33, they have problems in that they are difficult to reduce in size and have a short life span because of a large sliding friction. As opposed to these components, with the above-combination seals, when thenozzle connecting shaft 26 rotates, since a slip occurs between the resin rings 33b and thenozzle connecting shaft 26 and does not occur between the rubber rings 33a and theholder 30, thenozzle connecting shaft 26 can rotate with a very small sliding resistance. - The
nozzle connecting shaft 26 has a hollow structure so as to provide anair passage 27 therein having an open bottom. Also, thenozzle connecting shaft 26 has anair hole 28 formed therein for communication between theinternal air passage 27 and the externalairtight chamber 34. Thenozzle connecting shaft 26 has thesuction nozzle 35 fixed at the bottom thereof. Thesuction nozzle 35 has a shock-absorbing mechanism (not shown) with a spring built therein so as to absorb a shock against the electronic component P at the time of applying suction to it and mounting it on the board B. Thehollow holder 30 has an air port 36 formed in the outer surface thereof for communication to theairtight chamber 34, to which an air hose (not shown) is connected. The air hose is connected to a vacuum suction apparatus (not shown). Thus, a suction pressure is transmitted to thesuction nozzle 35 through the air port 36, theairtight chamber 34, theair hole 28, and theair passage 27. - An operation of the component-placing head A having the above-mentioned structure will be described with reference to
Figs. 3 and4 . -
Fig. 3 illustrates a state in which thevoice coil motor 2 is switched off and the moving part including thesuction nozzle 35 is raised to its top position (original position) by the spring force of thereturn spring 11. - Then, by feeding current to the
coil 6 of thevoice coil motor 2 in a predetermined direction, thecoil 6 receives a thrust force in the axial direction in proportion to the product of a magnetic density, an amount of current, and a conductor length of the coil; hence, as shown inFig. 4 , theholder 30 connected to thecoil 6 with the connectingmember 7 being interposed therebetween also moves downwards (i.e., downwards in the Z-axis direction as indicated by the arrow shown inFig. 4 ). Since thenozzle connecting shaft 26 is held to theholder 30 with thebearings 31 being interposed therebetween so as to be rotatable but immovable in the axial direction, thenozzle connecting shaft 26 can move downwards while maintaining theball spline shaft 24 and theball spline nut 25 in engagement with each other. As a result, thesuction nozzle 35 fixed to the bottom of thenozzle connecting shaft 26 moves downwards so as to mount the electronic component P held by suction at the end thereof on the board B. - For adjusting the orientation of the electronic component P around the θ-axis (i.e., the rotating axis of the component-placing head A) in order to mount the electronic component P on the board B, the
servomotor 20 is driven so as to turn the electronic component P to a proper orientation. In this state, since the rotation of theservomotor 20 is transmitted to thenozzle connecting shaft 26 through theball spline shaft 24 and theball spline nut 25, and thebearings 31 prevent the rotating force of theservomotor 20 from being transmitted to theholder 30, thenozzle connecting shaft 26 can be rotated with a small torque. As a result, the orientation of the electronic component P can be precisely adjusted. - Even when the
nozzle connecting shaft 26 is moved in the vertical and rotating directions as described above, since the air port 36 is formed so as to lie in theholder 30, the position of the air port 36 varies only vertically, and hence the air hose is unlikely to be twisted or bent, thereby causing no load on thesuction nozzle 35 at all. In addition, since a passage extending from the air port 36 of theholder 30 to theair passage 27 formed in thenozzle connecting shaft 26 has an invariable channel area even when thenozzle connecting shaft 26 rotates, the air pressure in the passage does not drop, thereby allowing thesuction nozzle 35 to produce a stable suction force. - As described above, the component-placing head A has the
servomotor 20, thenozzle connecting shaft 26, and thesuction nozzle 35, all disposed coaxially with each other, and directly transmits the torque of theservomotor 20 to thesuction nozzle 35. Thus, theservomotor 20 can be made small in size and also the positioning of the electronic component P around the θ-axis can be precisely performed. - Also, the
voice coil motor 2 vertically drives only thenozzle connecting shaft 26 and theholder 30 and is not required to vertically drive theservomotor 20 and theball spline shaft 24. As a result, thevoice coil motor 2 is only required to produce a relatively small thrust force and hence can be made small in size. Although the axis of thevoice coil motor 2 is radially shifted relative to the axis of thenozzle connecting shaft 26 and thesuction nozzle 35, thesuction nozzle 35 is not likely to be tilted, since theholder 30 holding thenozzle connecting shaft 26 is guided to move only in the vertical direction by thelinear guide 8, thereby achieving a precise pick-and-place operation of the component-placing head A. -
Fig. 5 illustrates an example of a mounting apparatus using the above-described component-placing head A. - This mounting apparatus has a multi-head 40 formed by four units of the component-placing heads A. The multi-head 40 is supported by a Y-
axis beam 41, which includes aservomotor 42, aball screw 43, and alinear guide 44, both ends of which are supported by twolinear motors axis beam 41 and thelinear motors - The
linear motors board 48 and a placingboard 49 are arranged. With this structure, each nozzle of the component-placing heads A can be independently controlled in the direction of the Z-axis and about the θ-axis in concert with the movements of the Y-axis beam 41 and thelinear motors board 48 to the placingboard 49. - Although a
voice coil motor 2 is used as the linear actuator by way of example in the above-described embodiment, a combination of a servomotor, a ball screw, and a linear guide, or an air cylinder, may be used in place of the voice coil motor, for example. In the former case, the linear guide of the linear actuator can be also used as a linear guide for guiding the hollow holder so as to be rectilinearly movable parallel to the spline shaft. - Although the present invention has been described in relation to particular embodiments thereof, many other variations and modifications and other uses will become apparent to those skilled in the art. Therefore, the present invention is not limited by the specific disclosure herein.
Claims (5)
- A component-placing apparatus for driving a suction nozzle in the rotational (θ) and vertical (Z) directions for applying suction to a component, comprising:a rotary actuator;a linear actuator comprising a stator (3) connected to a stator (21) of the rotary actuator such that these stators are immovable relative to each other;a spline shaft (24) connected to a rotating shaft (22) of the rotary actuator (21);a nozzle connecting shaft (26) connected to the spline shaft (24) for being allowed to move only rectilinearly in the longitudinal direction of the spline shaft (24) relative to the spline shaft and having the suction nozzle disposed at the bottom thereof;a hollow holder (30) encircling the nozzle connecting shaft with rotary bearings being interposed therebetween which allow the nozzle connecting shaft (26) to rotate with respect to the spline shaft (24) and connected for being driven by a mover of the linear actuator; anda linear guide (9,10) for guiding the hollow holder (30) relative to the stators of the actuators so as to be rectilinearly movable parallel to the spline shaft.
- A component-placing apparatus for driving a suction nozzle in the rotational (θ) and vertical (Z) directions for applying suction to a component, comprising:a rotary actuator having a rotating shaft;a linear actuator comprising a stator (3) connected to a stator (21) of the rotary actuator such that these stators are immovable relative to each other;a nozzle connecting shaft (26) having the suction nozzle disposed at the bottom thereof;the nozzle connecting shaft (26) being connected to the rotating shaft by a coupling which allows the nozzle connecting shaft to move only rectilinearly in the longitudinal direction of the rotating shaft, relative to the rotating shaft;a hollow holder (30) encircling the nozzle connecting shaft with rotary bearings being interposed therebetween which allow the nozzle connecting shaft (26) to rotate and connected for being driven by a mover of the linear actuator; anda linear guide (9,10) for guiding the hollow holder (30) relative to the stators of the actuators so as to be rectilinearly movable parallel to the rotating shaft.
- The component-placing apparatus according to Claims 1 or 2, wherein the stators of the rotary actuator and the linear actuator are fixed to a moving head of a drive mechanism which is operable for driving the moving head in the X- and Y-directions.
- The component-placing apparatus according to Claims 1, 2 or 3, wherein the mover and the stator of the linear actuator have a return spring (11) disposed therebetween for urging the mover upwards, the return spring (11) having a spring force which is slightly greater than the sum of the weight load of a moving part of the apparatus including the mover, the suction nozzle, and the nozzle connecting shaft, and a sliding frictional force generated at the linear guide and at said coupling or between the linear guide and the spline shaft.
- The component-placing apparatus according to Claim 1, 2, 3 or 4, wherein the hollow holder (30) and the nozzle connecting shaft (26) have a sealed chamber formed in a space therebetween;
the nozzle connecting shaft has an air passage (28) formed therein for transmitting a pressure medium in the chamber to the suction nozzle;
an air port (36) in communication with the chamber is formed in the outer surface of the hollow holder (30), and
the air port (36) is connected to a vacuum suction apparatus.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002250110 | 2002-08-29 | ||
JP2002250110A JP3772808B2 (en) | 2002-08-29 | 2002-08-29 | Component mounting device |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1395105A2 EP1395105A2 (en) | 2004-03-03 |
EP1395105A3 EP1395105A3 (en) | 2010-04-28 |
EP1395105B1 true EP1395105B1 (en) | 2011-03-02 |
Family
ID=31492595
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03255397A Expired - Lifetime EP1395105B1 (en) | 2002-08-29 | 2003-08-29 | Component-placing apparatus |
Country Status (7)
Country | Link |
---|---|
US (1) | US6851914B2 (en) |
EP (1) | EP1395105B1 (en) |
JP (1) | JP3772808B2 (en) |
KR (1) | KR100560070B1 (en) |
CN (1) | CN1266993C (en) |
AT (1) | ATE500723T1 (en) |
DE (1) | DE60336195D1 (en) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10236626A1 (en) * | 2002-08-09 | 2004-02-19 | Siemens Ag | Selective movement device for component holders in circuit board assembly device, uses activation of electromagnet for coupling each holder for movement with stroke element |
US20050056215A1 (en) * | 2003-03-11 | 2005-03-17 | Shibaura Mechantronics Corporation | Apparatus for applying paste and method of applying paste |
CH696103A5 (en) * | 2003-06-06 | 2006-12-15 | Esec Trading Sa | Semiconductor assembly equipment. |
JP4270019B2 (en) * | 2004-04-23 | 2009-05-27 | パナソニック株式会社 | Linear motion mechanism of electronic component mounting equipment |
JP4643185B2 (en) * | 2004-07-05 | 2011-03-02 | リンテック株式会社 | Transfer equipment |
JP4813056B2 (en) * | 2004-07-29 | 2011-11-09 | パナソニック株式会社 | Mounting head for component mounting, and component mounting apparatus provided with the mounting head |
DE102005027901A1 (en) * | 2005-06-16 | 2006-12-28 | Siemens Ag | Placement head for a placement machine for equipping substrates with electrical components |
US7484782B2 (en) * | 2005-08-26 | 2009-02-03 | Intellepro, Inc. | Multi-axis pick and place assembly |
US20070089554A1 (en) * | 2005-10-21 | 2007-04-26 | Gieskes Koenraad A | Tetrahedron rack and pinion drive |
US7471019B2 (en) * | 2005-12-30 | 2008-12-30 | The Gillette Company | High speed assembly actuator |
WO2007111296A1 (en) * | 2006-03-27 | 2007-10-04 | Matsushita Electric Industrial Co., Ltd. | Nozzle mechanism, mounting head, and electronic component mounting equipment |
US20080003092A1 (en) * | 2006-06-30 | 2008-01-03 | Petar Baclija | Rotary union connection |
KR100909426B1 (en) * | 2006-10-17 | 2009-07-24 | 엘에스산전 주식회사 | Actuator |
US8550523B2 (en) * | 2007-06-22 | 2013-10-08 | Data I/O Corporation | Pick and place system |
JP5151306B2 (en) * | 2007-08-09 | 2013-02-27 | 富士通株式会社 | Component supply apparatus and method |
JP4705118B2 (en) * | 2008-01-11 | 2011-06-22 | ヤマハ発動機株式会社 | Multi-axis linear motor and component transfer device |
JP4997124B2 (en) * | 2008-01-21 | 2012-08-08 | 株式会社日立ハイテクインスツルメンツ | Electronic component mounting head and electronic component mounting apparatus |
JP5372423B2 (en) * | 2008-07-25 | 2013-12-18 | Juki株式会社 | Electronic component mounting head |
JP5359803B2 (en) * | 2008-12-25 | 2013-12-04 | 株式会社村田製作所 | Component mounting device and multi-component mounting device |
IT1393030B1 (en) * | 2009-03-11 | 2012-04-11 | Gimatic Spa | SUPPORT DEVICE FOR PRENSILE BODIES |
KR101610272B1 (en) * | 2009-04-15 | 2016-04-08 | 한화테크윈 주식회사 | Apparatus for controlling vacuum nozzle and head assembly for chip mounter having the same |
JP5287741B2 (en) * | 2010-01-21 | 2013-09-11 | 富士通株式会社 | Component mounter and component mounting method |
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JP5129371B1 (en) * | 2011-07-27 | 2013-01-30 | ファナック株式会社 | Suction robot hand with weight measurement function |
WO2013035793A1 (en) | 2011-09-07 | 2013-03-14 | Thk株式会社 | Linear motor device and control method |
JP5875376B2 (en) | 2012-01-12 | 2016-03-02 | ヤマハ発動機株式会社 | Suction nozzle lifting linear motor and electronic component mounting device |
JP5747168B2 (en) * | 2012-03-12 | 2015-07-08 | パナソニックIpマネジメント株式会社 | Mounting head and component mounting device |
US8920103B2 (en) * | 2012-05-10 | 2014-12-30 | Varian Semiconductor Equipment Associates, Inc. | Multi-cell rotary end effector mechanism with slip ring |
JP5952129B2 (en) * | 2012-08-10 | 2016-07-13 | ヤマハ発動機株式会社 | Component transport head, component suction nozzle and component mounting device |
PL222470B1 (en) | 2012-08-14 | 2016-07-29 | Włodarczyk Władysław Igloo | Head module for collection and placement of components dedicated in SMT technology |
JP6535172B2 (en) * | 2015-01-28 | 2019-06-26 | 日本トムソン株式会社 | Vertical shaft slide device incorporating a moving coil type linear motor |
JP6678171B2 (en) * | 2015-05-27 | 2020-04-08 | 株式会社Fuji | Component mounting head and suction nozzle assembly that can be used therefor |
WO2017029750A1 (en) * | 2015-08-20 | 2017-02-23 | 富士機械製造株式会社 | Component mounting device |
US10421197B2 (en) * | 2016-03-23 | 2019-09-24 | Glebar Acquisition, Llc | Quick-change gripper apparatus for a grinding system |
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JP7092471B2 (en) * | 2017-08-07 | 2022-06-28 | 山洋電気株式会社 | Axis rotation linear motor |
FR3073763B1 (en) | 2017-11-17 | 2021-05-14 | Besi Switzerland Ag | WELDING HEAD FOR MOUNTING COMPONENTS AND MICROWELDING CHIP WITH SUCH WELDING HEAD |
CN108500582A (en) * | 2018-04-09 | 2018-09-07 | 东莞触点智能装备有限公司 | One kind being used for precision machined fitting head |
JP7188735B2 (en) | 2018-08-01 | 2022-12-13 | Thk株式会社 | actuator |
JP7188850B2 (en) * | 2018-08-01 | 2022-12-13 | Thk株式会社 | actuator |
JP7193062B2 (en) * | 2018-08-01 | 2022-12-20 | Thk株式会社 | Actuator sensing device and actuator control system |
CN109494181B (en) * | 2018-11-12 | 2020-11-20 | 中国科学院长春光学精密机械与物理研究所 | Manufacturing process of microchip transfer suction nozzle |
TWI709454B (en) * | 2019-12-27 | 2020-11-11 | 致茂電子股份有限公司 | Rotatable cushioning pick-and-place device |
CN111857198B (en) * | 2020-07-31 | 2023-08-08 | 苏州猎奇智能设备有限公司 | Pressure control closed-loop system and pressure control method thereof |
CN112171267B (en) * | 2020-10-12 | 2021-08-10 | 乐清市海马电子有限公司 | Assembly line for producing piezoelectric electrons and production process thereof |
CN112171266B (en) * | 2020-10-12 | 2021-08-10 | 乐清市海马电子有限公司 | Piezoelectric electronic ignition device semi-finished product assembling equipment and production process thereof |
CN114370505A (en) * | 2022-01-17 | 2022-04-19 | 江苏邑文微电子科技有限公司 | Combined sealing mechanism suitable for moving part in vacuum and semiconductor equipment |
CN116054526B (en) * | 2023-02-25 | 2023-07-18 | 佛山市增广智能科技有限公司 | Actuator with linear and rotary motion |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0582998A (en) | 1991-05-17 | 1993-04-02 | Tokico Ltd | Parts fitting device |
US5446323A (en) * | 1991-09-25 | 1995-08-29 | Systems, Machines, Automation Components Corporation | Actuator with translational and rotational control |
JP3262683B2 (en) | 1995-01-20 | 2002-03-04 | 松下電器産業株式会社 | Semiconductor mounting equipment |
JP2993401B2 (en) * | 1995-07-10 | 1999-12-20 | 松下電器産業株式会社 | Work mounting device and mounting method |
WO1999010965A1 (en) * | 1997-08-27 | 1999-03-04 | Tri-Tech, Inc. | Linear/rotary electromagnetic device |
US6240628B1 (en) * | 1997-09-29 | 2001-06-05 | Matsushita Electric Industrial Co., Ltd. | Device for securing a nozzle of a parts installer |
EP1319327A2 (en) * | 2000-09-19 | 2003-06-18 | Matsushita Electric Industrial Co., Ltd. | Component suction device, component mounting apparatus and component mounting method |
-
2002
- 2002-08-29 JP JP2002250110A patent/JP3772808B2/en not_active Expired - Lifetime
-
2003
- 2003-07-28 US US10/628,523 patent/US6851914B2/en not_active Expired - Lifetime
- 2003-08-05 KR KR1020030054069A patent/KR100560070B1/en active IP Right Grant
- 2003-08-29 CN CNB031577792A patent/CN1266993C/en not_active Expired - Lifetime
- 2003-08-29 AT AT03255397T patent/ATE500723T1/en not_active IP Right Cessation
- 2003-08-29 EP EP03255397A patent/EP1395105B1/en not_active Expired - Lifetime
- 2003-08-29 DE DE60336195T patent/DE60336195D1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR100560070B1 (en) | 2006-03-13 |
DE60336195D1 (en) | 2011-04-14 |
KR20040019884A (en) | 2004-03-06 |
US20040042890A1 (en) | 2004-03-04 |
ATE500723T1 (en) | 2011-03-15 |
JP2004088024A (en) | 2004-03-18 |
CN1489434A (en) | 2004-04-14 |
EP1395105A2 (en) | 2004-03-03 |
CN1266993C (en) | 2006-07-26 |
EP1395105A3 (en) | 2010-04-28 |
JP3772808B2 (en) | 2006-05-10 |
US6851914B2 (en) | 2005-02-08 |
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