KR19990066319A - Jet Shaft Drive Motor for Wire Bonder - Google Patents

Abstract

1. Technical field to which the invention described in the claims belongs

Z axis drive motor of wire bonder.

2. The technical gist of the invention

An object of the present invention is to provide a Z-axis drive motor of a wire bonder which can improve mechanical efficiency and high speed performance by inducing linear motion in the motor itself without the need for an apparatus for converting rotational motion into linear motion or an eccentric cam assembly. There is this.

3. Summary of Solution to Invention

The present invention is a Z-axis drive motor that is included in the wire bonding device to provide a vertical movement force to the Z-axis table for performing the wire bonding operation, the main body consisting of both side plates and upper and lower plates mounted upright with a predetermined interval ; At least one pair of stator magnets mounted on both inner side surfaces of the main body with opposite poles; And a non-contact state mounted in the through-hole of the main body so as to move up and down freely by induction electromotive force, and having a fixed piece mounted at one end thereof, the Z-axis driving motor of the wire bonder.

4. Important uses of the invention

This is to drive the capillary in Z-axis direction in wire bonder equipment.

Description

Jet shaft drive motor for wire bonder equipment.

The present invention relates to a drive motor for driving a capillary in the Z-axis direction in a wire bonding apparatus for performing a semiconductor package assembly process, in particular, to improve the precision of the Z-axis position control of the capillary, and achieve high speed performance. The Z-axis drive motor of the wire bonder equipment.

In general, the Z-axis driving device in the wire bonder is a device for finely moving the capillary to enable wire bonding for connecting the lead frame and the pad while driving the bonding head transferred to the bonding position by the X-Y table.

Conventional Z-axis drive device is a rotary servo motor that automatically outputs the actual speed value by automatically controlling the mechanical position, direction, angle, etc. to a target value, and rotates the vertical movement by receiving the power of the servo motor. A moving block is provided with a cam and a bearing for eccentric driving to convert to a rotational encoder, and a rotary encoder for detecting a rotation angle according to the driving of the moving block. The capillary finely drives the output value of the encoder to perform wire bonding. It is supposed to be.

Looking briefly at the operating state of the conventional Z-axis drive device having the configuration as described above.

When the bonding head is placed on the stage and the linear motor, which is the XY axis table driving device, is driven and the XY axis table is transferred and the bonding head is moved to the bonding position, the rotating servo motor is rotated by a desired value. The moving block is moved to Shanghai by the eccentric drive of. Accordingly, the capillary connects the lead frame and the pad by wire bonding.

In the above Z-axis drive, the linear motor which is the driving source is a cylindrical coil or a flat type magnet, and when the linear motor is an electron cylindrical coil, the volume and weight are increased for the same specification. Not only is it difficult to achieve high speed performance by a large number, but there is a limit to satisfy the requirements for increasing the Z-axis movement speed of the Z-axis table. In addition, in the case of the latter flat type magnets, hysterisis is generated in a section receiving little power, and thus there is a problem in that an additional device capable of maintaining constant power is required.

Accordingly, the present invention has been made in order to solve the above problems, to improve the mechanical efficiency and high speed performance by inducing a linear motion in the motor itself without the need of an apparatus or an eccentric cam assembly for converting rotational motion into a linear motion It is an object of the present invention to provide a Z-axis drive motor of a wire bonder.

In addition, the present invention is the Z-axis drive motor of the wire bonder equipment that can improve the high-speed performance and position control accuracy and simplify the mechanical components by reducing the moving mass by the motor itself converts the rotational movement to the vertical movement There is another purpose in providing it.

1 is an exploded perspective view showing an embodiment configuration of a Z-axis drive motor of the wire bonder equipment according to the present invention.

Figure 2 is an assembled perspective view of the Z-axis drive motor of the wire bonder equipment according to the present invention.

Figure 3 is a conceptual diagram for explaining the operation of the Z-axis drive motor according to the present invention.

* Explanation of symbols for main parts of the drawings

11: body 11a: both side plates

11b, 11c: upper and lower plates 12: stationary magnet

13 coil winding 14 fixed piece

15: buffer pad

In order to achieve the above object, the present invention, in the Z-axis drive motor that provides a vertical movement force to the Z-axis table included in the wire bonding device for performing the wire bonding operation, both side plates mounted upright with a predetermined interval A main body consisting of upper and lower plates; At least one pair of stator magnets mounted on both inner side surfaces of the main body with opposite poles; And a non-contact state mounted in the through-hole of the main body so as to move up and down freely by induction electromotive force, and having a fixed piece mounted at one end thereof, the Z-axis driving motor of the wire bonder.

Hereinafter, with reference to the accompanying drawings will be described an embodiment of the present invention;

Z-axis drive motor of the wire bonder according to the present invention is implemented to improve the accuracy of the Z-axis position control of the capillary, Z-axis drive motor of the present invention is applied from the outside as shown in FIG. It is formed of a linear motor that generates induced electromotive force by a power supply and drives up and down. The linear motor is a driving source for transmitting the rotational force to the capillary which performs the connection between the wire and the pad.

The linear motor in the present embodiment shows an example that is applied as a driving source included in the wire bonding device to drive the stage of the X, Y axis table to provide horizontal and longitudinal movement force to the bonding head, but is not limited thereto. It is well known that it can be applied to any equipment that provides a linear driving force.

In the present embodiment, the linear motor includes a main body 11 consisting of both side plates 11a and upper and lower plates 11b and 11c mounted upright with a predetermined interval as shown, and the amount of the main body 11. At least one pair of stationary magnets 12 mounted on the inner surface of the side plate 11a and the through-holes of the main body 11 are mounted in a non-contact state to move up and down freely by induced electromotive force. It consists of the coil winding 13 in which the fixed piece 14 was attached.

The stator magnet 12 in the present invention is composed of four stator magnets attached to each of the two side plates (11a), and the magnetic pole is arranged so that the opposite sides of the magnetic pole in the NS pole, SN pole direction arranged in the upper pole This structure is configured to act, and the upper and lower plates (11b, 11c) of the main body 11 is equipped with a buffer pad (15) that can absorb the impact of the coil winding in the event of a collision due to the straight movement do.

Here, the coil winding 13 has a flat-type shape that is wound flat into a rectangular shape molded outside, the outside is molded, and between the upper and lower stator magnet 12 and the coil winding 13 is 0.1 It has a clearance of ~ 0.2mm, which allows it to move straight up and down by the voltage applied from the outside.

The fixed piece 14 of the coil winding 13 is equipped with a moving block 2 which is rotated by the linear movement thereof, and is transferred to the capillary of the wire clamp assembly through the moving block to connect the wire on the pad. Will be.

A conceptual description of the motion of the linear motor configured as described above will be described with reference to FIG.

As shown in the figure, as the N pole and the S pole of the stator magnets 12 mounted on both side plates are applied with power to the coil winding 13 in a state opposite to each other with the opposite polarity, the coil Induction electromotive force is generated in the winding 13 to move up and down freely, and no magnetic field force is applied in a direction perpendicular to the straight direction of the coil winding 13.

Referring to the operation state in which the Z-axis drive motor of the present invention is driven as follows.

In the Z-axis driving motor of the present invention, the signal is amplified by an external power amplifier as the position command is output from the position controller while the bonding head of the wire bonding apparatus is moved to the bonding position. It is applied to the coil winding. Accordingly, induction electromotive force is generated in the coil winding 13 to operate in the direction of the arrow shown in FIG. And. The operation of the coil winding 13 is transmitted to the moving block (not shown) attached to the fixing piece 14 of the coil winding 13 in a vertical movement force, by the hinge assembly attached to the moving block. Up and down linear movement of the Z-axis motor is converted to the rotational movement of the moving block.

In this case, the angle at which the Z-axis driving motor moves is measured by an encoder mounted on the moving block and applied to the capillary through a transducer, thereby performing the current position control of the capillary.

The present invention described above is not limited to the above-described embodiment and the accompanying drawings, and various substitutions, modifications, and changes are possible within the scope without departing from the technical spirit of the present invention. It will be evident to those who have knowledge of.

As described above, according to the present invention, the installation is simple by moving the capillary straight by the induced electromotive force generated in the flat type moving coil, and there is no need for a device for converting a separate rotary motion into a straight motion. Efficiency can be improved, and since the coil winding is mounted in a non-contact state between the left and right stator magnets, there is no nonlinear friction.

In addition, since it is not limited by the volume, it is possible not only to use a large number of stator magnets, but also to precise position control and achieve high speed performance.

Claims (6)

A main body consisting of both side plates and upper and lower plates mounted upright with a predetermined interval; At least one pair of stator magnets mounted on both inner side surfaces of the main body with opposite poles; And Moving means mounted in the through hole of the main body to generate induced electromotive force by the power source to move up and down freely Z-axis drive motor of the wire bonder equipment comprising a. The method of claim 1, Z-axis drive motor of the wire bonder equipment is a coil winding the vehicle is wound flat in a rectangular shape. The method according to claim 1 or 2, The coil winding is a Z-axis driving motor of the wire bonder equipment molded outside. The method according to claim 1 or 2. Z-axis drive motor of the wire bonder equipment that the movement means is mounted in a non-contact state between the stator magnets. The method of claim 4, wherein Z-axis drive motor of the wire bonder equipment having a clearance of 0.1 ~ 0.2mm between the stator magnet and the moving means. The method of claim 1. The movement means is a driving force is generated in the axial direction, the Z-axis drive motor of the wire bonder equipment that the driving force is not transmitted in a direction perpendicular to the driving force generating direction.