CN114370505A - Combined sealing mechanism suitable for moving part in vacuum and semiconductor equipment - Google Patents

Combined sealing mechanism suitable for moving part in vacuum and semiconductor equipment Download PDF

Info

Publication number
CN114370505A
CN114370505A CN202210050605.6A CN202210050605A CN114370505A CN 114370505 A CN114370505 A CN 114370505A CN 202210050605 A CN202210050605 A CN 202210050605A CN 114370505 A CN114370505 A CN 114370505A
Authority
CN
China
Prior art keywords
sealing ring
ring
moving
elastic
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210050605.6A
Other languages
Chinese (zh)
Inventor
陆北源
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Yiwen Microelectronics Technology Co Ltd
Advanced Materials Technology and Engineering Inc
Original Assignee
Jiangsu Yiwen Microelectronics Technology Co Ltd
Advanced Materials Technology and Engineering Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Yiwen Microelectronics Technology Co Ltd, Advanced Materials Technology and Engineering Inc filed Critical Jiangsu Yiwen Microelectronics Technology Co Ltd
Priority to CN202210050605.6A priority Critical patent/CN114370505A/en
Publication of CN114370505A publication Critical patent/CN114370505A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
    • F16J15/3232—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip having two or more lips
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3268—Mounting of sealing rings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3284—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings characterised by their structure; Selection of materials

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sealing Devices (AREA)

Abstract

The embodiment of the invention provides a combined sealing mechanism suitable for a moving part in vacuum and semiconductor equipment, and relates to the technical field of sealing equipment. The combined sealing mechanism suitable for the vacuum moving part comprises a moving sealing ring, a first elastic sealing ring, a second elastic sealing ring and a fixing assembly. The fixing component is used for fixing the moving sealing ring, the first elastic sealing ring and the second elastic sealing ring. The motion sealing ring is close to the atmosphere end, and the motion sealing ring, the first elastic sealing ring and the second elastic sealing ring are sequentially sleeved outside the motion shaft along the axial direction of the motion shaft to be commonly used for isolating the vacuum end and the atmosphere end when the motion shaft moves vertically, reciprocates or rotates, so that better sealing performance is realized, and the leakage rate is controlled to be 10‑11～10‑12Pa·m3And s. Therefore, the shaft sealing device has the advantages of simple structure, convenience in disassembly and maintenance, long service life and capability of being widely applied to high-vacuum sealing operation of shafts.

Description

Combined sealing mechanism suitable for moving part in vacuum and semiconductor equipment
Technical Field
The invention relates to the field of semiconductors, in particular to a combined sealing mechanism suitable for a moving part in vacuum and a semiconductor device.
Background
Vacuum work for sealing is generally required in the semiconductor industry, and sealing can be classified into static sealing and dynamic sealing, and dynamic sealing is more difficult than static sealing.
At present, the industry generally adopts a vacuum sealing mechanism for sealing, however, in a dynamically sealed high vacuum or ultrahigh vacuum, the existing vacuum sealing mechanism is difficult to maintain the high vacuum degree, the leakage rate is high, and the consistency is difficult to maintain.
Disclosure of Invention
The invention aims to provide a combined sealing mechanism suitable for a moving part in vacuum and semiconductor equipment, which have good sealing effect, can provide a working environment with higher vacuum degree and effectively reduce the leakage rate.
Embodiments of the invention may be implemented as follows:
in a first aspect, the present invention provides a combined sealing mechanism for a vacuum moving component, which is applied to a moving shaft, wherein two ends of the moving shaft are respectively connected to a vacuum end and an atmosphere end, and the combined sealing mechanism for the vacuum moving component comprises a moving sealing ring, a first elastic sealing ring, a second elastic sealing ring and a fixing assembly;
the motion sealing ring, the first elastic sealing ring and the second elastic sealing ring are sequentially sleeved outside the motion shaft along the axial direction of the motion shaft, and the motion sealing ring is close to the atmosphere end;
the fixing assembly is used for fixing the moving sealing ring, the first elastic sealing ring and the second elastic sealing ring;
the motion sealing ring, the first elastic sealing ring and the second elastic sealing ring are commonly used for isolating the vacuum end and the atmosphere end when the motion shaft moves vertically, reciprocates or rotates.
In an alternative embodiment, the moving seal ring comprises a plurality of concave arc surfaces and a plurality of convex arc surfaces, and the convex arc surfaces connect two adjacent concave arc surfaces to make the cross section of the moving seal ring in an X shape;
the convex cambered surface of the inner ring of the moving sealing ring is used for being in sliding connection with the moving shaft, and the convex cambered surface of the outer ring of the moving sealing ring is abutted against the fixed component.
In an optional embodiment, the first elastic sealing ring is provided with an annular and communicated first groove, and an opening of the first groove faces the atmosphere end.
In an optional embodiment, the first elastic sealing ring further comprises a plurality of elastic pieces, the shape of the elastic pieces is matched with that of the first groove, and the elastic pieces are attached to the first groove at equal intervals.
In an optional embodiment, the second elastic sealing ring is provided with a second annular groove, and the second annular groove is communicated with the second annular groove, and an opening of the second annular groove faces the atmosphere end.
In an alternative embodiment, the second elastic sealing ring further comprises an elastic ring, and the elastic ring is sleeved on the side wall of the second groove close to the moving shaft;
the inner ring wall of the second elastic sealing ring is convexly provided with a bulge, the bulge and the elastic ring are arranged in a back-to-back mode, and the bulge is used for being in sliding connection with the moving shaft.
In an alternative embodiment, the combined sealing mechanism for the vacuum moving part further comprises a grease sealing ring and vacuum grease, wherein the grease sealing ring is sleeved outside the moving shaft and is positioned between the moving sealing ring and the first elastic sealing ring;
the inner ring wall of the grease sealing ring is provided with an annular and communicated third groove, an opening of the third groove faces the moving shaft, and the vacuum grease is injected into the third groove.
In an optional embodiment, a plurality of through grooves are formed in a staggered manner on two side walls of the third groove, and the through grooves are communicated with the third groove and used for flowing out of the third groove and filling the third groove when a gap occurs in the movement shaft.
In an optional embodiment, the fixing assembly includes a fixing sleeve and a fixing ring, the fixing sleeve is used for being sleeved outside the moving shaft, and the moving sealing ring, the first elastic sealing ring and the second elastic sealing ring are located between an inner wall of the fixing sleeve and an outer wall of the moving shaft;
the number of the fixed rings comprises two fixed rings which are respectively arranged at two ends of the fixed sleeve, wherein one fixed ring abuts against the moving sealing ring, and the other fixed ring abuts against the second elastic sealing ring, so that the moving sealing ring, the first elastic sealing ring and the second elastic sealing ring are fixed in the fixed assembly.
In a second aspect, the present invention provides a semiconductor device comprising a moving shaft and a combined sealing mechanism according to any one of the previous embodiments sleeved outside the moving shaft.
The combined sealing mechanism suitable for the moving part in vacuum and the semiconductor equipment provided by the embodiment of the invention have the beneficial effects that: the motion sealing ring, the first elastic sealing ring and the second elastic sealing ring are sequentially sleeved outside the motion shaft and act on the motion shaft together, so that better sealing performance can be realized, the leakage rate can be reduced and controlled to be 10 under a high-vacuum operation environment-11～10-12Pa·m3And s. The invention has simple structure, convenient disassembly and maintenance and long service life, and can be widely applied to high-vacuum sealing operation of shafts.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a semiconductor device according to an embodiment of the present invention;
fig. 2 is a cross-sectional view of a semiconductor device provided in an embodiment of the present invention;
FIG. 3 is a cross-sectional view of a composite sealing mechanism provided in accordance with an embodiment of the present invention;
FIG. 4 is a cross-sectional view of a moving seal ring provided in accordance with an embodiment of the present invention;
FIG. 5 is a cross-sectional view of a grease sealing ring provided in accordance with an embodiment of the present invention;
FIG. 6 is a cross-sectional view of a first elastomeric seal ring according to an embodiment of the present invention;
FIG. 7 is a cross-sectional view of a second elastomeric seal ring according to an embodiment of the present invention;
fig. 8 is a cross-sectional view of a securing assembly according to an embodiment of the present invention.
Icon: 10-a semiconductor device; 100-axis of motion; 110-a drive section; 200-a combined sealing mechanism; 210-a kinematic seal ring; 211-concave arc surface; 212-convex arc surface; 220-sealing a grease ring; 221-a third groove; 222-a through slot; 230-a first elastic sealing ring; 231 — a first groove; 232-an elastic sheet; 240-a second elastic sealing ring; 241-a second groove; 242-an elastic ring; 243-projection; 250-a stationary component; 251-a fixing sleeve; 2511-a fixed part; 252-a retaining ring; 2521-a stopper; 300-a securing mechanism; 310-upper gland; 320-plastic tabletting; 330-O-shaped sealing rings; 340-a first fixture; 350-a first spacer sleeve; 360-a bearing; 370-a second spacer sleeve; 380-second fixing element.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. indicate an orientation or a positional relationship based on that shown in the drawings or that the product of the present invention is used as it is, this is only for convenience of description and simplification of the description, and it does not indicate or imply that the device or the element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.
Furthermore, the appearances of the terms "first," "second," and the like, if any, are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.
In the existing vacuum operation process, when the pressure difference between the vacuum part and the atmosphere part is too large, leakage usually occurs, and it is difficult to maintain the high vacuum degree of the vacuum part in dynamic sealing. In order to maintain the degree of vacuum required for the vacuum process to ensure the normal operation of the process, the inventors have provided a combined sealing mechanism and semiconductor device suitable for a moving part in a vacuum to solve the above problems.
First embodiment
Referring to fig. 1 and 2, a semiconductor apparatus 10 is provided in an embodiment of the present invention, which is applicable to a vacuum operation environment, especially a working environment with a large pressure difference between a vacuum end and an atmospheric end. For example, the semiconductor device 10 may be a vacuum work robot arm, which can perform precise picking and transferring work on the vacuum side, and ensure good sealing performance of the vacuum side and work quality and efficiency. Of course, the semiconductor device 10 may further include a photoresist stripping device, an etching device, a CVD device, a film coating device, etc., which are not limited herein.
The semiconductor apparatus 10 provided in this embodiment includes a moving shaft 100, a combined sealing mechanism (hereinafter simply referred to as a combined sealing mechanism 200) adapted to a vacuum moving part, a fixing mechanism 300, and a driving mechanism (not shown).
In this embodiment, the combined sealing mechanism 200 is sleeved outside the moving shaft 100, the fixing mechanism 300 is sleeved outside the combined sealing mechanism 200 and the moving shaft 100, and the fixing mechanism 300 is used for fixing the combined sealing mechanism 200. The driving mechanism is connected to the moving shaft 100 to drive the moving shaft 100 to move. It can be understood that the combined sealing mechanism 200 and the fixing mechanism 300 are always kept in a fixed and static state, and the moving shaft 100 is driven by the driving mechanism to move relative to the combined sealing mechanism 200 and the fixing mechanism 300.
Specifically, both ends of the moving shaft 100 are connected to a vacuum end and an atmosphere end, respectively, and sealed by a composite sealing mechanism 200, wherein the vacuum end is generally formed by a case cage. The circumferential wall of the moving shaft 100 is provided with a driving portion 110, and the driving portion 110 is connected to a driving mechanism so as to drive the moving shaft 100 to perform a vertical movement, a reciprocating movement or a rotating movement.
Specifically, the combined sealing mechanism 200 is cylindrical and is sleeved at the boundary between the vacuum end and the atmosphere end of the moving shaft 100 to isolate the vacuum end and the atmosphere end.
Specifically, the fixing structure includes an upper gland 310, a plastic pressing plate 320, an O-ring 330, a first fixing member 340, a first spacer 350, a bearing 360, a second spacer 370, and a second fixing member 380, which are sequentially installed along the axial direction of the moving shaft 100.
The first fixing member 340 is sleeved outside the combined sealing mechanism 200 and is fixedly connected to the vacuum-side box, and the O-ring 330 is disposed on the surface of the first fixing member 340 close to the vacuum side. The upper pressing cover 310 is sleeved on the moving shaft 100 and covers the first fixing member 340 and the combined sealing mechanism 200. The plastic sheeting 320 is positioned between the composite seal mechanism 200 and the upper gland 310 and rests against the top of the composite seal mechanism 200. The first spacer 350 and the bearing 360 are disposed at the bottom of the first fixing member 340, the bearing 360 is sleeved outside the first spacer 350, and the first spacer 350 is sleeved outside the combined sealing mechanism 200. The second spacer 370 is disposed at the bottom of the first spacer 350, the bearing 360 and the composite sealing mechanism 200. The second fixing member 380 is a bracket, and a motor, a guide rail, and the like can be loaded in the bracket. The second fixing member 380 is disposed at the bottom of the second spacer 370, so that the first fixing member 340 and the second fixing member 380 jointly fix the combined sealing mechanism 200.
The space above the plane of the top of the first fixing member 340 is a vacuum end, and the space below the plane of the bottom of the first fixing member 340 is an atmospheric end.
Therefore, the combined sealing mechanism 200 and the fixing mechanism 300 arranged on the moving shaft 100 have simple structure, good sealing performance, suitability for various vacuum operation scenes, difficult damage, convenient disassembly and maintenance, long service life and leakage rate controlled at 10-11～10-12Pa·m3/s。
Second embodiment
Referring to fig. 3, the combined sealing mechanism 200 of the present invention is applied to the moving shaft 100 operating in high vacuum. The composite sealing mechanism 200 includes a moving seal ring 210, a grease seal ring 220, vacuum grease (not shown), a first resilient seal ring 230, a second resilient seal ring 240, and a stationary assembly 250.
The moving seal ring 210, the grease seal ring 220, the first elastic seal ring 230 and the second elastic seal ring 240 are sequentially sleeved outside the moving shaft 100 along the axial direction of the moving shaft 100, and the moving seal ring 210 is close to the atmosphere end to be commonly used for isolating the vacuum end and the atmosphere end when the moving shaft 100 moves vertically, reciprocates or rotates. The fixing assembly 250 is used for fixing the moving seal ring 210, the grease seal ring 220, the first elastic seal ring 230 and the second elastic seal ring 240.
In this embodiment, the fixing assembly 250 serves as a mounting carrier for the moving seal ring 210, the first elastic seal ring 230 and the second elastic seal ring 240, so that the moving seal ring 210, the first elastic seal ring 230 and the second elastic seal ring 240 can be ensured to be always fixed in the fixing assembly 250, and sealing failure caused by movement of the moving seal ring 210, the first elastic seal ring 230 or the second elastic seal ring 240 along with the moving shaft 100 is avoided.
Specifically, the movable sealing ring 210 is close to the atmosphere end, and the movable sealing ring 210 first performs a sealing function when the movable shaft 100 moves, and then performs a sealing function sequentially by the first elastic sealing ring 230 and the second elastic sealing ring 240.
In addition, in the case that the moving shaft 100 moves in the vertical direction, the first elastic sealing ring 230 may play a better sealing performance; under the condition that the moving shaft 100 reciprocates, the moving seal ring 210 can play a better role in sealing; under the condition that the moving shaft 100 rotates, the second elastic sealing ring 240 can have better sealing performance, so that the sealing performance can be improved and the leakage rate can be reduced under the high-vacuum working environment and the moving shaft 100 moves by jointly acting the plurality of sealing parts on the moving shaft 100.
Referring to fig. 3 and 4, the moving seal ring 210 includes a plurality of concave arc surfaces 211 and a plurality of convex arc surfaces 212, and the convex arc surfaces 212 connect two adjacent concave arc surfaces 211, so that the cross section of the moving seal ring 210 is X-shaped. The convex arc surface 212 of the inner ring of the moving seal ring 210 is used for sliding connection with the moving shaft 100, and the convex arc surface 212 of the outer ring of the moving seal ring 210 is abutted against the fixed component 250.
In the present embodiment, the moving seal ring 210 includes four concave arc surfaces 211 and four convex arc surfaces 212, and the cross section thereof is similar to an X shape. The moving seal ring 210 is made of a compressible material, and the four side walls of the moving seal ring 210 are all concave arc surfaces 211, so that the compression deformation of the moving seal ring 210 can be further improved.
In practical applications, two adjacent convex arc surfaces 212 abut against the moving shaft 100, and the other two convex arc surfaces 212 abut against the fixing element 250. Under the condition that the motion direction of the motion shaft 100 is changed, the two convex arc surfaces 212 can still be always abutted against the motion shaft 100 under the condition that the motion sealing ring 210 is deformed, and the concave arc surface 211 connected between the two convex arc surfaces 212 can further enable the convex arc surfaces 212 to be tightly attached to the motion shaft 100 due to the deformation, so that the motion sealing ring 210 can be suitable for the motion shaft 100 which reciprocates, and high-efficiency dynamic sealing performance is provided under the condition.
Referring to fig. 3 and 5, the grease sealing ring 220 is sleeved outside the moving shaft 100 and located between the moving sealing ring 210 and the first elastic sealing ring 230. The inner ring wall of the grease sealing ring 220 is provided with an annular and communicated third groove 221, the opening of the third groove 221 faces the moving shaft 100, and vacuum grease is injected into the third groove 221.
In this embodiment, the grease ring 220 is made of a high performance plastic, and the grease ring 220 provides a qualitative space for the injected vacuum grease. The vacuum grease is a relatively viscous liquid and has low fluidity. Therefore, the vacuum grease is completely filled in the third groove 221 formed in the grease sealing ring 220.
In practical applications, vacuum grease may be used as a lubricating material, and when the moving shaft 100 moves in the vertical direction, the vacuum grease filled in the third groove 221 may be applied to the surface of the moving shaft 100 by rubbing against the moving shaft 100, thereby lubricating the movement of the moving shaft 100. In addition, when the surface of the moving shaft 100 is scratched or the combined sealing mechanism 200 leaks, the leakage can be quickly stopped by the vacuum grease, and the sealing performance of the combined sealing mechanism 200 can be ensured.
Further, a plurality of through grooves 222 are formed in the two side walls of the third groove 221 in a staggered manner, and the through grooves 222 are all communicated with the third groove 221 and used for flowing out of the third groove 221 and filling when a gap occurs in the moving shaft 100.
In the present embodiment, a plurality of through slots 222 are opened on two side walls of the third groove 221, wherein any one through slot 222 on one side wall is directly opposite to two closest through slots 222 on the other side wall. The plurality of through slots 222 may be filled with more vacuum grease and may also facilitate application of vacuum grease to the surface of the moving shaft 100 or scoring.
In addition, the through grooves 222 formed on the two side walls of the third groove 221 are respectively communicated with the moving seal ring 210 and the first elastic seal ring 230, so that vacuum grease is filled when the moving seal ring 210 or the first elastic seal ring 230 leaks.
Referring to fig. 3 and fig. 6, the first elastic sealing ring 230 is formed with a first annular groove 231, and the opening of the first annular groove 231 faces the atmosphere.
In this embodiment, the two side walls of the first elastic sealing ring 230 respectively abut against the moving shaft 100 and the fixing component 250, and the opening of the first groove 231 faces the atmosphere, so that the two side walls of the first elastic sealing ring 230 respectively abut against the moving shaft 100 and the fixing component 250 more tightly under the action of the pressure difference, thereby ensuring the sealing performance of the first elastic sealing ring 230.
Alternatively, the first resilient sealing ring 230 may be a spring-loaded sealing ring.
Further, the first elastic sealing ring 230 further includes a plurality of elastic pieces 232, the shape of the elastic pieces 232 matches with the first groove 231, and the plurality of elastic pieces 232 are attached to the first groove 231 at equal intervals.
In this embodiment, the elastic sheet 232 is shaped like a groove, so that the elastic sheet 232 can be just attached to the first groove 231, thereby providing a pre-tightening force for the first elastic sealing ring 230. The first elastic sealing ring 230 is made of an elastic material, and then the plurality of elastic pieces 232 are attached to the first groove 231, so that the two side walls of the first elastic sealing ring 230 are respectively attached to the surfaces of the moving shaft 100 and the fixing component 250 more closely, and the sealing performance of the first elastic sealing ring 230 is further improved.
It can be understood that the first elastic sealing ring 230 can be tightly attached to the surface of the moving shaft 100 under the elastic force of itself and the elastic pieces 232, which can bear high pressure, and in combination with vacuum grease, can achieve excellent sealing effect when the moving shaft 100 moves in the vertical direction.
Referring to fig. 3 and fig. 7, the second elastic sealing ring 240 is provided with a second annular groove 241, and the opening of the second groove 241 faces the atmosphere.
In this embodiment, two sidewalls of the second elastic sealing ring 240 respectively abut against the moving shaft 100 and the fixing component 250, and the opening of the second groove 241 faces the atmosphere, so that the two sidewalls of the second elastic sealing ring 240 respectively abut against the moving shaft 100 and the fixing component 250 more tightly under the action of the pressure difference, thereby ensuring the sealing performance of the second elastic sealing ring 240.
Alternatively, the second elastic sealing ring 240 may be a Y-shaped elastic sealing ring.
Further, the second elastic sealing ring 240 further includes an elastic ring 242, and the elastic ring 242 is sleeved in the second groove 241 and is close to the sidewall of the moving shaft 100. The inner ring wall of the second elastic sealing ring 240 is convexly provided with a protrusion 243, the protrusion 243 is arranged opposite to the elastic ring 242, and the protrusion 243 is used for being connected with the moving shaft 100 in a sliding manner.
In this embodiment, the second elastic sealing ring 240 is made of an elastic material, and the elastic ring 242 is sleeved on the sidewall of the second groove 241, so that the inner ring wall of the second elastic sealing ring 240 is more tightly attached to the moving shaft 100.
Specifically, a limiting groove (not shown) is disposed on a side wall of the second groove 241 close to the moving shaft 100, and the limiting groove is used for accommodating the elastic ring 242. The cross section of the protrusion 243 is an isosceles triangle, and the central line of the isosceles triangle and the limiting groove are located on the same straight line, so that the elastic force of the elastic ring 242 is just applied to the protrusion 243, thereby further attaching the protrusion 243 to the moving shaft 100, and ensuring the sealing performance of the second elastic sealing ring 240.
It can be understood that, since the elastic force of the elastic ring 242 acts on the protrusion 243, the protrusion 243 can always tightly abut against the moving shaft 100 in the case of the rotating motion of the moving shaft 100 and maintain excellent sealing effect.
Referring to fig. 3 and 8, the fixing assembly 250 includes a fixing sleeve 251 and a fixing ring 252, the fixing sleeve 251 is used for being sleeved outside the moving shaft 100, and the moving seal ring 210, the first elastic seal ring 230, and the second elastic seal ring 240 are all located between an inner wall of the fixing sleeve 251 and an outer wall of the moving shaft 100.
The number of the fixing rings 252 includes two, two fixing rings 252 are respectively disposed at two ends of the fixing sleeve 251, one of the fixing rings 252 abuts against the moving seal ring 210, and the other one abuts against the second elastic seal ring 240, so as to fix the moving seal ring 210, the first elastic seal ring 230, and the second elastic seal ring 240 in the fixing assembly 250.
In this embodiment, the fixing sleeve 251 is cylindrical, and the fixing sleeve 251 is sleeved outside the fixing ring 252, the moving seal ring 210, the grease seal ring 220, the first elastic seal ring 230, and the second elastic seal ring 240. Retainer plate 252 adopts the high performance working of plastics of wear-resisting self-lubricating, and two retainer plates 252 all pass through interference fit with fixed cover 251 and motion axle 100 and are fixed in the both ends of fixed cover 251 to play preliminary sealed and pressure-bearing effect, still play the effect of fixed motion sealing washer 210 simultaneously, seal fat circle 220, first elastic sealing washer 230 and second elastic sealing washer 240, in order to restrict it all the time between two retainer plates 252, thereby ensure effectual sealing performance.
Specifically, the fixing ring 252 is provided with a limiting portion 2521, and the limiting portion 2521 is used for abutting against the top or bottom of the fixing sleeve 251, so that the fixing ring 252 is always limited at two ends of the fixing sleeve 251 by the limiting portion 2521 under the condition that the fixing ring 252 has a tendency to move relative to the fixing sleeve 251. The fixing sleeve 251 is provided with a fixing portion 2511, and the fixing portion 2511 is connected to one end of the fixing sleeve 251 so that the cross section of the fixing sleeve 251 is L-shaped. One side surface of the fixing portion 2511 and the surface of the fixing ring 252 are used for abutting against and connecting with the plastic pressing sheet 320, and the other side surface is used for abutting against and connecting with the first fixing member 340, so that the fixing sleeve 251 is fixed in the vertical direction. In addition, an upper pressing cover 310, a first fixing member 340 and a first spacing sleeve 350 are sequentially sleeved outside the fixing sleeve 251 to fix the fixing sleeve 251 in a horizontal direction.
Therefore, in the combined sealing mechanism 200 provided in this embodiment, the fixing sleeve 251 is used as a fixing carrier, and the fixing ring 252, the moving seal ring 210, the grease sealing ring 220, the first elastic seal ring 230, the second elastic seal ring 240 and the seal rings are sequentially fixed outside the moving shaft 100, so that the combined sealing mechanism can move relative to the moving shaft 100 and has a better sealing performance.
Specifically, the fixing rings 252 are disposed at two ends of the fixing sleeve 251 to perform primary sealing and fixing functions. The movable sealing ring 210 is connected to a fixed ring 252 near the atmosphere end, and the movable sealing ring 210 serves as a first main sealing member, which can be largely deformed without affecting the sealing effect, thereby playing a main role in sealing when the movable shaft 100 reciprocates. Grease seal 220 is attached to the moving seal 210. grease seal 220 acts as an aid to the overall composite seal 200 and provides lubricationVacuum grease and can be filled in time by the vacuum grease when leakage occurs in the composite sealing mechanism 200. The first elastic sealing ring 230 and the second elastic sealing ring 240 are disposed between the grease packing ring 220 and the fixing ring 252 near the vacuum end, and serve as a second main sealing member and a third main sealing member, respectively. The first elastic sealing ring 230 can perform a main sealing function when the moving shaft 100 moves vertically, and the second elastic sealing ring 240 can perform a main sealing function when the moving shaft 100 moves rotationally. Therefore, when the plurality of elastic members act on the movable shaft 100 together, an excellent sealing effect can be obtained even in a high vacuum working environment, and the leakage rate can be controlled to 10-11～10-12Pa·m3/s。
In summary, the embodiment of the present invention provides a semiconductor device 10, in which the combined sealing mechanism 200 and the fixing mechanism 300 are disposed on the moving shaft 100, and the combined sealing mechanism has a simple structure, good sealing performance, is suitable for various vacuum operation scenes, is not easy to damage, is convenient to disassemble and maintain, has a long service life, and can control the leakage rate to be 10-11～10-12Pa·m3/s。
The embodiment of the present invention further provides a combined sealing mechanism 200 suitable for vacuum moving components, and under the condition that the moving shaft 100 moves in the vertical direction, the first elastic sealing ring 230 can have a better sealing performance; under the condition that the moving shaft 100 reciprocates, the moving seal ring 210 can play a better role in sealing; under the condition that the moving shaft 100 rotates, the second elastic sealing ring 240 can have better sealing performance, so that the sealing performance can be improved and the leakage rate can be reduced under the high-vacuum working environment and the moving shaft 100 moves by jointly acting the plurality of sealing parts on the moving shaft 100. The grease sealing ring 220 can provide vacuum grease with lubricating performance, and can be timely filled with the vacuum grease when the combined sealing mechanism 200 leaks, so that the sealing effect is guaranteed. The fixing assembly 250 plays a role of preliminary sealing and pressure bearing, and also plays a role of fixing the moving seal ring 210, the grease seal ring 220, the first elastic seal ring 230 and the second elastic seal ring 240, so as to be always limited between the two fixing rings 252, thereby ensuring effective sealing performance.
The above description is only for the specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims (10)

1. A combined sealing mechanism suitable for a vacuum moving part is applied to a moving shaft, and two ends of the moving shaft are respectively connected with a vacuum end and an atmosphere end;
the motion sealing ring, the first elastic sealing ring and the second elastic sealing ring are sequentially sleeved outside the motion shaft along the axial direction of the motion shaft, and the motion sealing ring is close to the atmosphere end;
the fixing assembly is used for fixing the moving sealing ring, the first elastic sealing ring and the second elastic sealing ring;
the motion sealing ring, the first elastic sealing ring and the second elastic sealing ring are commonly used for isolating the vacuum end and the atmosphere end when the motion shaft moves vertically, reciprocates or rotates.
2. The combination seal mechanism for vacuum moving parts as claimed in claim 1, wherein said moving seal ring comprises a plurality of concave arc surfaces and a plurality of convex arc surfaces, said convex arc surfaces connecting two adjacent concave arc surfaces to make the cross section of said moving seal ring X-shaped;
the convex cambered surface of the inner ring of the moving sealing ring is used for being in sliding connection with the moving shaft, and the convex cambered surface of the outer ring of the moving sealing ring is abutted against the fixed component.
3. The combination seal mechanism for the vacuum moving part as claimed in claim 1, wherein the first elastic sealing ring is provided with a first groove which is annular and communicated, and the opening of the first groove faces the atmosphere end.
4. The combination seal mechanism for a vacuum moving part as claimed in claim 3, wherein said first elastic sealing ring further comprises a plurality of elastic pieces, said elastic pieces are shaped to match said first groove, and said plurality of elastic pieces are attached to said first groove at equal intervals.
5. The combination seal mechanism for the vacuum moving part as claimed in claim 1, wherein the second elastic sealing ring is provided with a second groove which is annular and communicated, and the opening of the second groove faces the atmosphere end.
6. The combination seal mechanism for the vacuum moving part as claimed in claim 5, wherein the second elastic sealing ring further comprises an elastic ring, the elastic ring is sleeved on the second groove close to the side wall of the moving shaft;
the inner ring wall of the second elastic sealing ring is convexly provided with a bulge, the bulge and the elastic ring are arranged in a back-to-back mode, and the bulge is used for being in sliding connection with the moving shaft.
7. The combination seal mechanism for vacuum moving parts as claimed in claim 5, further comprising a grease sealing ring and vacuum grease, wherein the grease sealing ring is sleeved outside the moving shaft and located between the moving seal ring and the first elastic seal ring;
the inner ring wall of the grease sealing ring is provided with an annular and communicated third groove, an opening of the third groove faces the moving shaft, and the vacuum grease is injected into the third groove.
8. The combination seal mechanism for the vacuum moving part as claimed in claim 7, wherein the two side walls of the third groove are alternatively opened with a plurality of through grooves, and the through grooves are communicated with the third groove for flowing out and filling the third groove in case of the gap of the moving shaft.
9. The combination seal mechanism for vacuum moving parts as claimed in claim 1, wherein said fixed component comprises a fixed sleeve and a fixed ring, said fixed sleeve is used for being sleeved outside said moving shaft, and said moving seal ring, said first elastic seal ring and said second elastic seal ring are all located between the inner wall of said fixed sleeve and the outer wall of said moving shaft;
the number of the fixed rings comprises two fixed rings which are respectively arranged at two ends of the fixed sleeve, wherein one fixed ring abuts against the moving sealing ring, and the other fixed ring abuts against the second elastic sealing ring, so that the moving sealing ring, the first elastic sealing ring and the second elastic sealing ring are fixed in the fixed assembly.
10. A semiconductor device comprising a movable shaft and a composite sealing mechanism according to any one of claims 1 to 9 fitted around the movable shaft.
CN202210050605.6A 2022-01-17 2022-01-17 Combined sealing mechanism suitable for moving part in vacuum and semiconductor equipment Pending CN114370505A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210050605.6A CN114370505A (en) 2022-01-17 2022-01-17 Combined sealing mechanism suitable for moving part in vacuum and semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210050605.6A CN114370505A (en) 2022-01-17 2022-01-17 Combined sealing mechanism suitable for moving part in vacuum and semiconductor equipment

Publications (1)

Publication Number Publication Date
CN114370505A true CN114370505A (en) 2022-04-19

Family

ID=81143704

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210050605.6A Pending CN114370505A (en) 2022-01-17 2022-01-17 Combined sealing mechanism suitable for moving part in vacuum and semiconductor equipment

Country Status (1)

Country Link
CN (1) CN114370505A (en)

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1489434A (en) * 2002-08-29 2004-04-14 ������������ʽ���� Element mounting device
US20040245728A1 (en) * 2003-03-26 2004-12-09 Armour James Edward Gordon Lip seal
CN201448228U (en) * 2009-06-26 2010-05-05 南京科赫科技有限公司 Pump-used combined seal capable of rotating 360 degrees
CN104500746A (en) * 2014-11-07 2015-04-08 南通密炼捏合机械有限公司 Rotating shaft sealing structure
CN205943911U (en) * 2016-06-20 2017-02-08 山东泰开高压开关有限公司 Circuit breaker straighten seal structure
CN206609581U (en) * 2017-01-17 2017-11-03 宁波灿炜机械制造有限公司 A kind of inhalator jar vacuum detecting cartridge module
CN208041145U (en) * 2018-02-28 2018-11-02 安德里茨（中国）有限公司 Sealing structure of shaft end and modulator
CN109812581A (en) * 2019-02-26 2019-05-28 浙江兰天机械密封件有限公司 A kind of dry-grinding type combination sealing arrangement
CN214248294U (en) * 2021-01-20 2021-09-21 青岛锐嘉环保设备有限公司 External internal guide wheel of fretwork packing
WO2021256772A1 (en) * 2020-06-19 2021-12-23 씰링크 주식회사 Rotation shaft sealing device and semiconductor substrate processing device using same
CN215334461U (en) * 2021-04-13 2021-12-28 健康元海滨药业有限公司 Sealing ring and equipment

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1489434A (en) * 2002-08-29 2004-04-14 ������������ʽ���� Element mounting device
US20040245728A1 (en) * 2003-03-26 2004-12-09 Armour James Edward Gordon Lip seal
CN201448228U (en) * 2009-06-26 2010-05-05 南京科赫科技有限公司 Pump-used combined seal capable of rotating 360 degrees
CN104500746A (en) * 2014-11-07 2015-04-08 南通密炼捏合机械有限公司 Rotating shaft sealing structure
CN205943911U (en) * 2016-06-20 2017-02-08 山东泰开高压开关有限公司 Circuit breaker straighten seal structure
CN206609581U (en) * 2017-01-17 2017-11-03 宁波灿炜机械制造有限公司 A kind of inhalator jar vacuum detecting cartridge module
CN208041145U (en) * 2018-02-28 2018-11-02 安德里茨（中国）有限公司 Sealing structure of shaft end and modulator
CN109812581A (en) * 2019-02-26 2019-05-28 浙江兰天机械密封件有限公司 A kind of dry-grinding type combination sealing arrangement
WO2021256772A1 (en) * 2020-06-19 2021-12-23 씰링크 주식회사 Rotation shaft sealing device and semiconductor substrate processing device using same
CN214248294U (en) * 2021-01-20 2021-09-21 青岛锐嘉环保设备有限公司 External internal guide wheel of fretwork packing
CN215334461U (en) * 2021-04-13 2021-12-28 健康元海滨药业有限公司 Sealing ring and equipment

Similar Documents

Publication Publication Date Title
US2760794A (en) Vibration rings for mechanical seals
CA2593102A1 (en) Split bearing isolator and a method for assembling seal
CN221145300U (en) Centrifugal sealing ring
CN114370505A (en) Combined sealing mechanism suitable for moving part in vacuum and semiconductor equipment
US3306681A (en) Damped bearing for centrifuges
KR100994067B1 (en) Mechanical seal for high pressure and high speed
US20240141955A1 (en) Bearing and sealing device
JP2001165328A (en) Oil seal
CN111828642B (en) Mechanical seal and thrust bearing combined bearing device
CN106030168A (en) Dynamic seal
CN221374465U (en) Dynamic sealing device of vacuum equipment
CN108869553B (en) Integrated mechanical seal bearing
US20030015843A1 (en) High speed high pressure rotary
CN220622733U (en) Sealing assembly for rotating shaft
CN219413528U (en) Pump shaft machine and sealing device thereof
CN212839402U (en) Multi-spring integrated mechanical seal for pump
CN219827713U (en) Integral compensation type mechanical seal
CN220227265U (en) Mechanical sealing device for cryopump
CN115654143B (en) Self-balancing micro-contact sealing structure
CN213655731U (en) Sealing device and vacuum equipment with same
CN215487636U (en) Magnetic pump mechanical seal with multiple sealing structures
WO2022193061A1 (en) Sealing component, gearbox and robot
CN221097456U (en) Mechanical seal assembly capable of being used in high-viscosity medium
CN219932951U (en) Rotary shaft sealing element
CN216975781U (en) Rubber oil seal with dismounting hole

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information

Address after: 226400 No.1 Jinshan Road, zuegang street, Rudong County, Nantong City, Jiangsu Province

Applicant after: Jiangsu Yiwen Microelectronics Technology Co.,Ltd.

Applicant after: Wuxi Yiwen Microelectronics Technology Co.,Ltd.

Address before: 226400 No.1 Jinshan Road, zuegang street, Rudong County, Nantong City, Jiangsu Province

Applicant before: Jiangsu Yiwen Microelectronics Technology Co.,Ltd.

Applicant before: WUXI YIWEN ELECTRONIC TECHNOLOGY Co.,Ltd.

CB02 Change of applicant information