JPH10234174A - Actuator for x-y motions and semiconductor-connecting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an actuator for x-y motions and a semiconductor- connecting device which are small-sized and light-weight, and enable enhancement in speed and accuracy. SOLUTION: A bonding head assembly 13 is installed on an actuator 12 for X-Y motions. The actuator 12 for X-Y motion has a stator 14 and a mover 15. A first coil 17 and a second coil 18 are wound around the stator yoke 16 of the stator 14 orthogonal to each other, and these are covered with a resin- molded enclosure 19. A single-pole-magnetized magnet 21 is fit in the mover yoke 20 of the mover 15. A large number of air-jetting nozzles 22 as supporting means are formed in a frame 11 and the stator 14, so that air can be jetted upwards.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an XY movement actuator and a semiconductor connection device suitable for controlling the movement of a bonding head such as a bonding apparatus in the X-axis direction and the Y-axis direction.

[0002]

FIG. 11 shows a conventional bonding apparatus. Bonding head 1
Are moved in the X and Y directions by the XY table device 2. The arm unit 3 of the bonding head 1 is reciprocated up and down by a swing motor 4 as shown by an arrow C in the figure. By the operation of the arm 3, the bonding wire 5 connects the bonding pad 6a of the semiconductor pellet 6 and the lead terminal 7a of the lead frame 7.

The XY table device 2 includes a lower table 8 provided with a motor 8a composed of an AC servomotor or a DC servomotor, and an upper table 9 provided with the motor 9a. Numeral 8 denotes an X-direction which is moved by rotating a ball screw (not shown) by a motor 8a, and an upper table 9 which is moved in a Y-direction by rotating a ball screw (not shown) by a motor 9a. ing.

However, the above-mentioned conventional XY table device is large and heavy, so that the load on the motors 8a and 9a for the XY table increases, and it is difficult to increase the speed and improve the positioning accuracy. .

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an XY movement actuator and a semiconductor connection device which are small and lightweight, and which can achieve high speed and high accuracy. .

[0006]

According to a first aspect of the present invention, there is provided an XY movement actuator, wherein a flat stator yoke, a first coil wound around the stator yoke, and the stator yoke are provided on the stator yoke. A stator composed of a first coil and a second coil wound in a direction substantially orthogonal to the first coil, and a flat yoke and a single-polarized flat yoke arranged to face the stator. A movable element comprising a magnet and supporting means for movably supporting the movable element are provided, and the movable element is moved by controlling the energization of the first coil and the second coil.

In this configuration, when the first coil of the stator is energized in one direction, a magnetic field is generated in a predetermined direction and an electromagnetic force is generated between the first coil of the stator and the magnet of the movable element.
Among the directions (there are a forward direction and a backward direction), it moves in, for example, the forward direction (this is referred to as the X (+) direction).
When power is supplied in the reverse direction, the mover moves in the backward direction of the X direction (this is called the X (-) direction). Similarly, when the second coil of the stator is energized in one direction, the mover is moved in the Y direction (there is a forward direction and a backward direction), for example, in the forward direction (this is referred to as the Y (+) direction). Go to When power is supplied in the reverse direction, the moving element moves in the backward direction of the Y direction (this is referred to as the Y (-) direction). Therefore, the first
The moving element can be moved in the X and Y directions by controlling the energization of the second coil and the energization of the second coil. In the case of this configuration, separate servo motors are not required in the X direction and the Y direction, and separate tables are not required, so that downsizing and weight reduction can be achieved, and high speed and high accuracy can be achieved. Will be able to do it.

According to a second aspect of the present invention, there is provided an XY moving actuator comprising: a stator comprising a stator yoke and a plate-like magnet magnetized to a single pole; and a plate-like magnet arranged to face the stator. Mover yoke, a first coil wound around the mover yoke, and a first coil
A movable element comprising a second coil wound in a direction orthogonal to the first coil, and support means for movably supporting the movable element, and energizing the first coil and the second coil. The moving element is moved by control.

In this configuration, when a current is applied to the first coil of the movable element in one direction, a magnetic field is generated in a predetermined direction and an electromagnetic force is generated between the movable element and the magnet of the stator.
Move in the (+) direction. When energized in the opposite direction, the mover becomes X
Move in the (-) direction. Similarly, when the second coil of the movable element is energized in one direction, the movable element moves in the Y (+) direction. When power is supplied in the opposite direction, the moving element moves in the Y (-) direction. Therefore, by controlling the energization of the first coil and the energization of the second coil, the movable element can be moved in the X and Y directions. In the case of this configuration, separate servo motors are not required in the X direction and the Y direction, and separate tables are not required, so that downsizing and weight reduction can be achieved, and high speed and high accuracy can be achieved. Will be able to do it.

The moving actuator according to the third aspect of the present invention is characterized in that the supporting means is configured to movably support the moving element by an air flow. In this configuration, the moving element can be moved with almost no frictional resistance, which can contribute to a high speed and a long life. An XY movement actuator according to a fourth aspect of the present invention is characterized in that the support means has a structure in which a plurality of balls are rotatably supported, and the balls are movably supported by the balls. In this configuration, a relatively heavy load can be supported, and the frictional resistance is small.

An XY movement actuator according to a fifth aspect of the invention is characterized in that the support means is made of a magnetic fluid provided between the stator and the mover. In this configuration, the moving element can be moved with almost no frictional resistance, which can contribute to a higher speed and a longer life,
Furthermore, the configuration is relatively simple.

According to a sixth aspect of the present invention, there is provided a semiconductor connecting device using the XY movement actuator according to any one of the first to fifth aspects. In this case, the size and weight can be reduced, and the speed and accuracy of the semiconductor connection can be improved.

According to a seventh aspect of the present invention, there is provided a semiconductor connection device, wherein the XY table device using a motor as a driving source is provided with any one of the above-described X-ray tables.
It is characterized in that a Y movement actuator is provided, a relatively coarse movement operation is performed by an XY table device, and a fine movement operation is performed by the XY movement actuator. In this configuration, relatively coarse positioning is performed by the XY table device, and fine positioning is performed by the XY movement actuator.
The time required for positioning can be shortened, and the XY table device does not require very high accuracy, so that the cost can be reduced.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. In FIG.
1 shows a semiconductor connection device. The frame 11 has XY
A moving actuator 12 is provided, and a bonding head 13 is provided on the actuator 12. The XY movement actuator 12 is configured as follows. That is, the actuator 12 includes the stator 14 and the moving element 15. In the stator 14, a first coil 17 is wound around a substantially square stator yoke 16,
Further, a second coil 18 is wound so that the winding direction is orthogonal to the first coil 17. These are covered with a resin-molded outer body 19. The upper surface of the outer body 19 is formed to be a flat surface.

On the other hand, in the mover 15, a concave portion 20a is formed in the lower surface of the mover yoke 20 which is substantially square, and a magnet 21 is fitted in the concave portion 20a. It is magnetized. The lower surface of the moving element 15 is also formed as a flat surface. An air ejection nozzle portion 22 is provided as a support means, and a large number of air ejection nozzle portions 22 are formed on the frame 11 and the stator 14 so that air can be ejected from below to above.
The moving element 15 and the bonding head 13 are supported by the compressed air flow.

The bonding head section 13 is configured by disposing a swing arm 24 and a swing actuator 25 on a bonding head frame 23, and the bonding head frame 23 is attached to the moving element 15. The swing actuator 25 has its mover 25a.
Is controlled to move up and down, so that the tip of the swing arm 24 reciprocates up and down. Wire bonding is performed by this operation.

In the above configuration, when the first coil 17 of the stator 14 is energized in the direction of arrow A in FIG. 2, a magnetic field is generated in the stator 14 in the direction of arrow A ', and , An electromagnetic force is generated, and the movable element 15 is X (+).
Move in the direction. Further, when a current is supplied in the direction opposite to the arrow A, the movable element 15 moves in the X (-) direction. Similarly, stator 1
4 when the second coil 18 is energized in the direction of arrow B, a magnetic field is generated in the stator 14 in the direction of arrow B ′, and an electromagnetic force is generated between the magnet 21 of the mover 15 and the mover 15. Move in Y (+) direction. When the current is supplied in the direction opposite to the arrow B, the moving element 15 moves in the Y (-) direction. Therefore, by controlling the energization of the first coil 17 and the energization of the second coil 18, the movable element 15 can be freely moved in the XY directions.

According to the above-described XY movement actuator 12 of the present embodiment, separate servo motors are not required in the X direction and the Y direction, and a separate table is not required. And high speed and high accuracy can be achieved.

In the semiconductor connection device using the XY movement actuator 12, the overall size and weight can be reduced, and the speed and accuracy of the semiconductor connection can be improved. . In particular, according to the present embodiment, the air ejection nozzle portion 2 is used as the support means.
2, the movable member 15 is movably supported by the air flow, so that the movable member 15 can be moved with almost no frictional resistance, which can contribute to a further higher speed and a longer life.

Next, FIGS. 3 and 4 show a second embodiment of the present invention. In this embodiment, support means is different. The support mechanism 31 as a support means includes the support plate 3
2 has a configuration in which a holding hole 32a is formed, and a ball 33 is rotatably disposed in the holding hole 32a. The support mechanism 31 is mounted on the stator 14, and the support mechanism 31
The moving element 15 is provided on the upper side. According to this embodiment, a relatively heavy load can be supported, and the frictional resistance is small.

FIG. 5 shows a third embodiment of the present invention. In this embodiment, the structure of the moving element 41 is the second embodiment.
Is different from the embodiment. That is, the moving element 41 is configured such that the magnet 43 is mounted on the lower surface of the moving element yoke 42 and the auxiliary yoke 44 is mounted on the lower surface of the magnet 43. This auxiliary yoke 44 comes into contact with the ball 33. According to the third embodiment, the wear of the magnet 43 can be prevented and the service life is extended.

FIGS. 6 and 7 show a fourth embodiment of the present invention. In this embodiment, the structure of a support mechanism 51 as a support means is different. That is, a large number of balls 53 are rotatably provided on a hollow rectangular support plate 52, and a synthetic resin mounting portion 54 is attached to the hollow portion of the support plate 52 by, for example, insert molding or bonding. I'm wearing On the lower surface of the mounting portion 54, a positioning and fixing projection 54a is formed.

On the other hand, on the upper surface of the outer body 19 of the stator 14,
A fixing plate 55 having a large number of mounting holes 55a is attached. A fixing projection 54a of the mounting portion 54 is fitted and adhered to the mounting hole 55a, so that the support plate 52 is fixed to the fixing plate 55 and the stator 14 Attached to. The stator 14
A projection 19a is formed on the outer peripheral portion of the outer body 19 to prevent it from falling. According to this embodiment, since the support mechanism 51 is made small and unitized, it is possible to cope with the case where the moving range of the movable element 15 is different by changing the number and location of the installed elements, and furthermore, the fixing projection. 54
By providing a, positioning is also facilitated.

FIG. 8 shows a fifth embodiment of the present invention. In this embodiment, the support means is different from that of the first embodiment. The magnetic fluid 61 is used as a support means. In this case, the lower edge 20a of the mover yoke 20 of the mover 15
Is further lowered from the lower surface of the magnet 21 to form a housing portion 62, in which the magnetic fluid 61 is housed. In this embodiment, since the movable element 15 is movably supported by the magnetic fluid 61, the movable element 15 can be moved with almost no frictional resistance, which can contribute to an increase in the speed and an increase in the service life, and furthermore, The configuration is also relatively simple.

FIG. 9 shows a sixth embodiment of the present invention. This embodiment is different from the second embodiment in that a stator is provided with a magnet and a mover is provided with a coil. That is, the stator 71 is composed of the stator yoke 72 and the magnet 73, and the movable element 74 is formed of the stator yoke 7
5, a first coil 76, a second coil 77, and a resin-molded outer body 78. In this embodiment, the same effect as in the second embodiment can be obtained.

FIG. 10 shows a seventh embodiment of the present invention. In this embodiment, an XY table 81
The XY movement actuator 12 and the bonding head 13 are provided. XY table device 8
1 includes a lower table 82 having a motor 82a composed of an AC servomotor or a DC servomotor, and an upper table 83 having the motor 83a. The lower table 82 has a ball screw (not shown). Motor 8
The upper table 83 is moved in the X direction by being rotated by 2a, and the upper table 83 is moved in the Y direction by rotating a ball screw (not shown) by the motor 83a. In this case, the XY table device 81 performs a relatively coarse movement operation,
The fine movement operation is performed by the Y movement actuator 12.

In this configuration, the XY table device 8
1 allows relatively coarse positioning and fine positioning by the XY movement actuator 12, so that the time required for positioning can be reduced as compared with the case where positioning is performed only by fine movement. Since the XY table device 81 does not require extremely high precision, it is possible to suppress the cost.

[0028]

As apparent from the above description, the present invention has the following effects. X of the invention of claim 1
According to the Y movement actuator, the stator is provided with the first coil and the second coil wound in a direction substantially orthogonal to the first coil, the movable element is provided with a unipolar magnetized magnet, Since the moving element can be moved in the X and Y directions by controlling the energization of the second coil, separate servo motors are not required in the X and Y directions, and separate tables are not required. And high speed and high accuracy can be achieved.

According to the XY movement actuator of the second aspect of the present invention, the stator is provided with a single-pole magnetized magnet, and the movable element is provided with the first coil and the second coil wound in a direction substantially orthogonal to the first coil. And the movable element can be moved in the X and Y directions by controlling the energization of the first and second coils, so that separate servo motors are not required in the X and Y directions, and separate tables are not required. In addition to downsizing and weight reduction, high speed and high accuracy can be achieved.

According to the moving actuator of the third aspect of the present invention, since the supporting means is configured to movably support the moving element by the air flow, the moving element can be moved with almost no frictional resistance, and the speed can be increased. It can contribute to a longer life. According to the XY movement actuator of the fourth aspect of the present invention, since the supporting means is provided so as to be capable of rolling a plurality of balls and the movable element is movably supported by the balls, it is relatively heavy. It can support loads and has low frictional resistance. According to the XY movement actuator of the fifth aspect of the present invention, since the support means is made of the magnetic fluid provided between the stator and the mover, the mover can be moved with almost no frictional resistance, and the speed is increased. Can contribute,
This can contribute to prolonging the service life, and the structure is relatively simple.

According to the semiconductor connection device of the sixth aspect of the present invention, the size and weight can be reduced, and the speed and accuracy of the semiconductor connection can be improved. According to the semiconductor connecting device of the present invention, the XY moving actuator is provided on the XY table device driven by the motor, and the XY table device performs relatively coarse moving operation. , The time required for positioning can be reduced, and the XY table device does not require very high accuracy, so that the cost can be reduced. .

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional side view of a semiconductor connection device according to a first embodiment of the present invention.

FIG. 2 is a plan view of a stator.

FIG. 3 is a vertical sectional side view of an XY movement actuator showing a second embodiment of the present invention.

FIG. 4 is a diagram showing a part of a support mechanism.

FIG. 5 is a vertical sectional side view of an XY movement actuator showing a third embodiment of the present invention.

FIG. 6 is a vertical sectional side view of an XY movement actuator showing a fourth embodiment of the present invention.

FIG. 7 is a perspective view of the support plate viewed from below.

FIG. 8 is a vertical sectional side view of an XY movement actuator showing a fifth embodiment of the present invention.

FIG. 9 is a vertical sectional side view of an XY movement actuator showing a sixth embodiment of the present invention.

FIG. 10 is a vertical sectional side view of a semiconductor connection device according to a seventh embodiment of the present invention.

FIG. 11 is a perspective view of a semiconductor connection device showing a conventional example.

[Explanation of symbols]

12 is an XY movement actuator, 13 is a bonding head, 14 is a stator, 15 is a mover, 16 is a stator yoke, 17 is a first coil, 18 is a second coil,
9 is an outer body, 20 is a mover yoke, 21 is a magnet, 2
2 is an air ejection nozzle (support means), 24 is a swing arm, 31 is a support mechanism, 32 is a support plate, 33 is a ball,
1 is a moving element, 44 is an auxiliary yoke, 51 is a supporting mechanism (supporting means), 54 is a mounting portion, 54a is a fixing projection, 55 is a fixing plate, 61 is a magnetic fluid (supporting means), 71 is a stator, 7
3 is a magnet, 74 is a mover, 76 is a first coil,
77 is a second coil, 81 is an XY table device.

Claims (7)

[Claims] 1. A flat stator yoke, a first coil wound around the stator yoke, and a second coil wound around the stator yoke in a direction substantially orthogonal to the first coil. A movable member comprising a flat yoke and a flat-plate magnet magnetized to a single pole, which is disposed to face the stator, and movably supports the movable member. An XY movement actuator, comprising: a support unit; wherein the XY movement actuator is configured to move the moving element by controlling energization of the first coil and the second coil. 2. A stator comprising a stator yoke and a single-pole magnetized plate-shaped magnet, and a plate-shaped movable yoke arranged to face the stator, and A mover comprising a wound first coil and a second coil wound around the mover yoke in a direction orthogonal to the first coil; and support means for movably supporting the mover. And an XY movement actuator configured to move the movable element by controlling energization of the first coil and the second coil. 3. The XY movement actuator according to claim 1, wherein the support means is configured to movably support the moving element by an air flow. 4. The X according to claim 1, wherein the support means is provided with a plurality of balls so as to be able to roll, and the balls are movably supported by the balls.
Actuator for Y movement. 5. The XY movement actuator according to claim 1, wherein the support means is made of a magnetic fluid provided between the stator and the mover. 6. The X according to claim 1, wherein
A semiconductor connecting device using an actuator for Y movement. 7. An XY table device using a motor as a drive source is provided with the XY movement actuator according to any one of claims 1 to 5, and the XY table device performs a relatively coarse movement operation. 7. The semiconductor connection device according to claim 6, wherein a fine movement operation is performed by the movement actuator.