JPS62206812A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS62206812A
JPS62206812A JP4846386A JP4846386A JPS62206812A JP S62206812 A JPS62206812 A JP S62206812A JP 4846386 A JP4846386 A JP 4846386A JP 4846386 A JP4846386 A JP 4846386A JP S62206812 A JPS62206812 A JP S62206812A
Authority
JP
Japan
Prior art keywords
single crystal
crystal
film
substrate
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4846386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0461491B2 (enExample
Inventor
Kazuyuki Sugahara
和之 須賀原
Tadashi Nishimura
正 西村
Shigeru Kusunoki
茂 楠
Yasuaki Inoue
靖朗 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4846386A priority Critical patent/JPS62206812A/ja
Publication of JPS62206812A publication Critical patent/JPS62206812A/ja
Publication of JPH0461491B2 publication Critical patent/JPH0461491B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
JP4846386A 1986-03-07 1986-03-07 半導体装置の製造方法 Granted JPS62206812A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4846386A JPS62206812A (ja) 1986-03-07 1986-03-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4846386A JPS62206812A (ja) 1986-03-07 1986-03-07 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62206812A true JPS62206812A (ja) 1987-09-11
JPH0461491B2 JPH0461491B2 (enExample) 1992-10-01

Family

ID=12804062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4846386A Granted JPS62206812A (ja) 1986-03-07 1986-03-07 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62206812A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100350617C (zh) * 2002-03-05 2007-11-21 株式会社半导体能源研究所 半导体元件和使用半导体元件的半导体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100350617C (zh) * 2002-03-05 2007-11-21 株式会社半导体能源研究所 半导体元件和使用半导体元件的半导体装置

Also Published As

Publication number Publication date
JPH0461491B2 (enExample) 1992-10-01

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term