JPS62204825A - 気体を分離する膜 - Google Patents

気体を分離する膜

Info

Publication number
JPS62204825A
JPS62204825A JP4719886A JP4719886A JPS62204825A JP S62204825 A JPS62204825 A JP S62204825A JP 4719886 A JP4719886 A JP 4719886A JP 4719886 A JP4719886 A JP 4719886A JP S62204825 A JPS62204825 A JP S62204825A
Authority
JP
Japan
Prior art keywords
membrane
gas
helium
plasma
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4719886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0423570B2 (enExample
Inventor
Shunichi Samejima
鮫島　俊一
Hide Nakamura
秀 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4719886A priority Critical patent/JPS62204825A/ja
Publication of JPS62204825A publication Critical patent/JPS62204825A/ja
Publication of JPH0423570B2 publication Critical patent/JPH0423570B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Using Semi-Permeable Membranes (AREA)
JP4719886A 1986-03-06 1986-03-06 気体を分離する膜 Granted JPS62204825A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4719886A JPS62204825A (ja) 1986-03-06 1986-03-06 気体を分離する膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4719886A JPS62204825A (ja) 1986-03-06 1986-03-06 気体を分離する膜

Publications (2)

Publication Number Publication Date
JPS62204825A true JPS62204825A (ja) 1987-09-09
JPH0423570B2 JPH0423570B2 (enExample) 1992-04-22

Family

ID=12768429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4719886A Granted JPS62204825A (ja) 1986-03-06 1986-03-06 気体を分離する膜

Country Status (1)

Country Link
JP (1) JPS62204825A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5246743A (en) * 1991-11-26 1993-09-21 Ube Industries, Ltd. Method of enhancing gas separation performance of an aromatic polyimide membrane

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5246743A (en) * 1991-11-26 1993-09-21 Ube Industries, Ltd. Method of enhancing gas separation performance of an aromatic polyimide membrane

Also Published As

Publication number Publication date
JPH0423570B2 (enExample) 1992-04-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term