JPS62204825A - 気体を分離する膜 - Google Patents
気体を分離する膜Info
- Publication number
- JPS62204825A JPS62204825A JP4719886A JP4719886A JPS62204825A JP S62204825 A JPS62204825 A JP S62204825A JP 4719886 A JP4719886 A JP 4719886A JP 4719886 A JP4719886 A JP 4719886A JP S62204825 A JPS62204825 A JP S62204825A
- Authority
- JP
- Japan
- Prior art keywords
- membrane
- gas
- helium
- plasma
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 34
- 238000000926 separation method Methods 0.000 claims abstract description 13
- CUKJWRYRLCTJNJ-UHFFFAOYSA-N 1,1,1,4,4,4-hexafluoro-2,3-bis(trifluoromethyl)but-2-ene Chemical group FC(F)(F)C(C(F)(F)F)=C(C(F)(F)F)C(F)(F)F CUKJWRYRLCTJNJ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000010409 thin film Substances 0.000 claims abstract description 8
- -1 perfluoro compound Chemical class 0.000 claims abstract description 6
- 229920002492 poly(sulfone) Polymers 0.000 claims abstract description 4
- 239000011148 porous material Substances 0.000 claims abstract description 4
- 229920000573 polyethylene Polymers 0.000 claims description 4
- 239000004952 Polyamide Substances 0.000 claims description 2
- 239000004698 Polyethylene Substances 0.000 claims description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 2
- 229920002239 polyacrylonitrile Polymers 0.000 claims description 2
- 229920002647 polyamide Polymers 0.000 claims description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 2
- 239000007789 gas Substances 0.000 abstract description 20
- 239000001307 helium Substances 0.000 abstract description 17
- 229910052734 helium Inorganic materials 0.000 abstract description 17
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract description 17
- 230000035699 permeability Effects 0.000 abstract description 13
- 238000006116 polymerization reaction Methods 0.000 abstract description 10
- 230000005540 biological transmission Effects 0.000 abstract description 6
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 abstract description 3
- UBAZGMLMVVQSCD-UHFFFAOYSA-N carbon dioxide;molecular oxygen Chemical compound O=O.O=C=O UBAZGMLMVVQSCD-UHFFFAOYSA-N 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 8
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 239000003345 natural gas Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical compound FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000005923 long-lasting effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4719886A JPS62204825A (ja) | 1986-03-06 | 1986-03-06 | 気体を分離する膜 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4719886A JPS62204825A (ja) | 1986-03-06 | 1986-03-06 | 気体を分離する膜 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62204825A true JPS62204825A (ja) | 1987-09-09 |
JPH0423570B2 JPH0423570B2 (enrdf_load_stackoverflow) | 1992-04-22 |
Family
ID=12768429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4719886A Granted JPS62204825A (ja) | 1986-03-06 | 1986-03-06 | 気体を分離する膜 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62204825A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5246743A (en) * | 1991-11-26 | 1993-09-21 | Ube Industries, Ltd. | Method of enhancing gas separation performance of an aromatic polyimide membrane |
-
1986
- 1986-03-06 JP JP4719886A patent/JPS62204825A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5246743A (en) * | 1991-11-26 | 1993-09-21 | Ube Industries, Ltd. | Method of enhancing gas separation performance of an aromatic polyimide membrane |
Also Published As
Publication number | Publication date |
---|---|
JPH0423570B2 (enrdf_load_stackoverflow) | 1992-04-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |