JPS62203981A - 凝縮させるべき気体をクライオポンプのクライオパネルにのみ凝縮させる方法 - Google Patents

凝縮させるべき気体をクライオポンプのクライオパネルにのみ凝縮させる方法

Info

Publication number
JPS62203981A
JPS62203981A JP4382386A JP4382386A JPS62203981A JP S62203981 A JPS62203981 A JP S62203981A JP 4382386 A JP4382386 A JP 4382386A JP 4382386 A JP4382386 A JP 4382386A JP S62203981 A JPS62203981 A JP S62203981A
Authority
JP
Japan
Prior art keywords
condensed
temperature
gas
shield plate
cryopanel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4382386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0474555B2 (enExample
Inventor
Takeyori Shibata
柴田　猛順
Shigeru Tanaka
茂 田中
Kiyoshi Shibanuma
柴沼　清
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Atomic Energy Agency
Original Assignee
Japan Atomic Energy Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Atomic Energy Research Institute filed Critical Japan Atomic Energy Research Institute
Priority to JP4382386A priority Critical patent/JPS62203981A/ja
Publication of JPS62203981A publication Critical patent/JPS62203981A/ja
Publication of JPH0474555B2 publication Critical patent/JPH0474555B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP4382386A 1986-02-28 1986-02-28 凝縮させるべき気体をクライオポンプのクライオパネルにのみ凝縮させる方法 Granted JPS62203981A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4382386A JPS62203981A (ja) 1986-02-28 1986-02-28 凝縮させるべき気体をクライオポンプのクライオパネルにのみ凝縮させる方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4382386A JPS62203981A (ja) 1986-02-28 1986-02-28 凝縮させるべき気体をクライオポンプのクライオパネルにのみ凝縮させる方法

Publications (2)

Publication Number Publication Date
JPS62203981A true JPS62203981A (ja) 1987-09-08
JPH0474555B2 JPH0474555B2 (enExample) 1992-11-26

Family

ID=12674467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4382386A Granted JPS62203981A (ja) 1986-02-28 1986-02-28 凝縮させるべき気体をクライオポンプのクライオパネルにのみ凝縮させる方法

Country Status (1)

Country Link
JP (1) JPS62203981A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10273949B2 (en) 2013-02-18 2019-04-30 Sumitomo Heavy Industries, Ltd. Cryopump and method of operating the cryopump

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4546613A (en) * 1983-04-04 1985-10-15 Helix Technology Corporation Cryopump with rapid cooldown and increased pressure

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4546613A (en) * 1983-04-04 1985-10-15 Helix Technology Corporation Cryopump with rapid cooldown and increased pressure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10273949B2 (en) 2013-02-18 2019-04-30 Sumitomo Heavy Industries, Ltd. Cryopump and method of operating the cryopump

Also Published As

Publication number Publication date
JPH0474555B2 (enExample) 1992-11-26

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